JP2827680B2 - Metal vapor laser device - Google Patents

Metal vapor laser device

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Publication number
JP2827680B2
JP2827680B2 JP8363192A JP8363192A JP2827680B2 JP 2827680 B2 JP2827680 B2 JP 2827680B2 JP 8363192 A JP8363192 A JP 8363192A JP 8363192 A JP8363192 A JP 8363192A JP 2827680 B2 JP2827680 B2 JP 2827680B2
Authority
JP
Japan
Prior art keywords
metal vapor
inner tube
cross
heat insulating
laser device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8363192A
Other languages
Japanese (ja)
Other versions
JPH05283769A (en
Inventor
博之 益田
勤 井上
茂明 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8363192A priority Critical patent/JP2827680B2/en
Publication of JPH05283769A publication Critical patent/JPH05283769A/en
Application granted granted Critical
Publication of JP2827680B2 publication Critical patent/JP2827680B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、金属蒸気レーザ装置
に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal vapor laser device.

【0002】[0002]

【従来の技術】図3及び図4は昭和63年度レーザ技術総
合研究所研究成果報告会「銅蒸気レーザの励起過程」に
示された従来の金属蒸気レーザ装置を示す断面図であ
る。図において、(1) は陰極端子、(2) は陽極端子、
(3) は陰極、(4) は陽極、(5) は内部に放電が形成され
る内管で、断面が円形状である。(6) は内管(5) を支持
し、かつ径方向への熱損失を抑制するための断熱材、
(7) は内管(5) と断熱材(6) を内包し気密するための外
管、(8) は容器(9) の両端に設けられたレーザ光を取り
出す窓、(9) は容器で、内部が真空に保持されている。
なお、容器(9) の一部はセラミックスリーブ(9a)で両極
(3)(4)間を絶縁している。(10)は金属蒸気を生成する銅
ペレットなどの固形状の金属媒体、(11)は不活性ガスを
封入するための気密シール用の封止部材である。
2. Description of the Related Art FIGS. 3 and 4 are cross-sectional views showing a conventional metal vapor laser device shown in "Excitation Process of Copper Vapor Laser" in the Research Results Report Meeting of the Laser Technology Research Institute, 1988. In the figure, (1) is the cathode terminal, (2) is the anode terminal,
(3) is a cathode, (4) is an anode, and (5) is an inner tube in which a discharge is formed, and has a circular cross section. (6) is a heat insulator that supports the inner pipe (5) and suppresses heat loss in the radial direction.
(7) is an outer tube that encloses the inner tube (5) and the heat insulating material (6) for hermetic sealing, (8) is a window provided at both ends of the container (9) for extracting laser light, and (9) is a container And the inside is kept in a vacuum.
A part of the container (9) is a ceramic sleeve (9a),
(3) (4) is insulated. (10) is a solid metal medium such as a copper pellet that generates metal vapor, and (11) is a sealing member for hermetic sealing for filling an inert gas.

【0003】次に動作について説明する。図3におい
て、陰極端子(1) と陽極端子(2) の間にパルス電圧が印
加されると、陰極(3) と陽極(4) との間にパルス放電が
発生し、内管(5) の内部に放電が形成される。次いで、
放電により発生した熱は、内管(5) に伝導し、内管(5)
を取り囲む断熱材(6) 、容器(9) 内の真空断熱の作用に
より、内管(5) の温度が上昇する。これに伴なって内管
(5) 内部に載置した金属媒体(10)が溶融し、レーザ発振
を起こすに必要な銅蒸気などの金属蒸気が得られる。こ
の状態において、パルス電圧の印加により、金属蒸気が
励起されて反転分布を起こし、光共振器(図3、4に
示されていない)を両端の窓(8) の外側に設置すれば、
窓(8) を通してレーザ光が得られる。
Next, the operation will be described. 3 Te placed <br/>, when a pulse voltage between the cathode terminal (1) and the anode terminal (2) is applied, a pulse discharge is generated between the cathode (3) and an anode (4) Then, a discharge is formed inside the inner tube (5). Then
The heat generated by the discharge is conducted to the inner tube (5),
The temperature of the inner pipe (5) rises due to the action of vacuum insulation in the heat insulating material (6) surrounding the container and the container (9). Along with this, the inner tube
(5) The metal medium (10) placed inside is melted, and metal vapor such as copper vapor necessary for causing laser oscillation is obtained. In this state, the application of the pulse voltage excites the metal vapor to cause a population inversion, and if an optical resonator (not shown in FIGS. 3 and 4 ) is installed outside the windows 8 at both ends,
Laser light is obtained through the window (8).

【0004】上記構成の金属蒸気レーザ装置において、
レーザ出力を増大させるには、スケール則に従ってレー
ザ媒質容量を増大させる必要がある。容量増大のために
は、放電管の長尺化あるいは径拡大による断面積の増大
が手段として用いられる。しかし、長尺化においては、
電界を強めて励起に必要な電子エネルギーを高めるため
に、印加電圧を高くする必要がある。このため電源の高
電圧化および機器の耐電圧技術が必要となる。一方、径
拡大による手段では、電圧を高める必要はないが、管径
が太くなることにより、管断面中央付近でのレーザ発振
が抑制される。
[0004] In the metal vapor laser device having the above structure,
In order to increase the laser output, it is necessary to increase the capacity of the laser medium according to the scaling law. In order to increase the capacity, an increase in the cross-sectional area by lengthening or expanding the diameter of the discharge tube is used as a means. However, in the case of lengthening,
In order to increase the electric energy required for excitation by increasing the electric field, it is necessary to increase the applied voltage. For this reason, it is necessary to increase the voltage of the power supply and withstand voltage technology of the equipment. On the other hand, it is not necessary to increase the voltage in the means by enlarging the diameter.

【0005】[0005]

【発明が解決しようとする課題】従来の金属蒸気レーザ
装置は以上のように構成されているので、管断面中央で
は壁との距離が遠くなり、ガス温度が高くなりやすくな
る。このため、レーザ発振を阻害する下準位の粒子数が
増大するとともに、下準位から基底準位へ緩和されるた
めの粒子の壁との衝突回数が少なくなり、発振しにくく
なるという問題点があった。
Since the conventional metal vapor laser apparatus is constructed as described above, the distance from the wall becomes long at the center of the cross section of the tube, and the gas temperature tends to increase. As a result, the number of particles in the lower level that hinders laser oscillation increases, and the number of collisions with the particle walls for relaxation from the lower level to the ground level decreases, making oscillation difficult. was there.

【0006】この発明は上記のような問題点を解消する
ためになされたもので、管断面の中央部におけるガス温
度を低く抑え、発振を容易にした金属蒸気レーザ装置を
提供する。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a metal vapor laser device in which the gas temperature at the center of the cross section of the tube is kept low and oscillation is facilitated.

【0007】[0007]

【課題を解決するための手段】この発明に係る金属蒸気
レーザ装置は、不活性ガスと金属蒸気を生じる金属媒体
とがが封入された内管を、内面に断熱材を有する外管内
に配置して、上記内管の両側に一対の電極を配置し、上
記両電極間にパルス電圧を印加して上記不活性ガスを電
離し、電離した電子のエネルギーで金属蒸気の原子を励
起してレーザ光を発生させる金属蒸気レーザ装置におい
て、前記内管はその断面形状が扁平形状であり、この内
管の両端に設けた上記電極はその断面形状が前記内管の
前記断面形状と同一であり、更に上記内管と上記外管と
の間の距離が短い部分の断熱材は上記距離が長い部分の
断熱材よりも断熱効果が高い素材のものとしたものであ
る。
SUMMARY OF THE INVENTION A metal vapor laser device according to the present invention is a metal medium for generating an inert gas and a metal vapor.
The inner tube in which is sealed is placed inside the outer tube with heat insulating material on the inner surface.
Be placed, placing a pair of electrodes on both sides of the upper Symbol inner tube, a pulse voltage is applied between the two electrodes to ionize the inert gas, excites the metal vapor atoms ionized electron energy In the metal vapor laser device for generating a laser beam, the inner tube has a flat cross-sectional shape.
The cross-sectional shape of the electrodes provided at both ends of the tube is the same as that of the inner tube.
The same as the cross-sectional shape, and furthermore, the inner tube and the outer tube
The part of the insulation that has a short distance between
It is made of a material that has a higher heat insulating effect than the heat insulating material.
You.

【0008】[0008]

【作用】この発明の金属蒸気レーザ装置は、内管の断面
形状を扁平状にしたことにより、内管の中央部から内管
の壁面までの距離が短かくなるので、中央部のガス温度
を低く抑える。また、中央部と壁面との距離が短かいの
で、下準位粒子数が減少して、レーザ発振が容易にな
る。
According to the metal vapor laser device of the present invention, the cross section of the inner tube is made flat, so that the distance from the center of the inner tube to the wall surface of the inner tube becomes shorter. Keep it low. Further, since the distance between the central portion and the wall surface is short, the number of lower-level particles is reduced, and laser oscillation is facilitated.

【0009】[0009]

【実施例】実施例1.以下、この発明の一実施例を図に
ついて説明する。図1及び図2おいて、12は断面をレー
ストラック状に形成した内管で、図2に示すように一方
の内壁面間の距離が他方の内壁面間の距離より小さくな
っている。この場合、断面形状は楕円又は矩形状の扁平
形状であればよい。13は陰極、14は陽極である。陰極13
及び陽極14の断面は内管12と同一形状で突合せ部で接続
してある。
[Embodiment 1] An embodiment of the present invention will be described below with reference to the drawings. In FIGS. 1 and 2, reference numeral 12 denotes an inner pipe having a cross section formed in a race track shape. As shown in FIG. 2, the distance between one inner wall surface is smaller than the distance between the other inner wall surfaces. In this case, the cross-sectional shape may be an elliptical or rectangular flat shape. 13 is a cathode and 14 is an anode. Cathode 13
The cross section of the anode 14 has the same shape as that of the inner tube 12 and is connected by a butt portion.

【0010】以下、作用について説明する。図1及び図
2において、管断面積の拡大に際して、管断面形状をレ
ーストラック状などの平偏なものとし、断面中心軸上の
点より壁面までの最短距離を、円形断面時よりも短かく
する。これにより、中央部のガス温度は低くおさえられ
る。そして、壁面までの距離が短かいため緩和が促進さ
れることで下準位粒子数が減ぜられて、中央部でのレー
ザ発振がしやすくなる。従って、レーザ出力の増大が得
られる。さらに、緩和がされ易いことから、周波数を高
め各パルス間のインターバルを短かく出来るので、より
高周波化が可能となる。異形管になることによる断熱の
不均一性は、円周方向で断熱距離の短かい部分に断熱効
果の高い断熱材を挿入するか、放電管の形状に合せた断
熱材構造とすることで改善可能である。
Hereinafter, the operation will be described. 1 and 2, when the cross-sectional area of the pipe is enlarged, the cross-sectional shape of the pipe is made flat such as a race track, and the shortest distance from a point on the center axis of the cross section to the wall surface is set shorter than that of the circular cross section. I do. Thereby, the gas temperature in the central portion is kept low. Since the distance to the wall surface is short, relaxation is promoted, so that the number of lower-level particles is reduced, and laser oscillation at the center becomes easy. Therefore, an increase in laser output is obtained. Further, since the frequency is easily relaxed, the frequency can be increased and the interval between each pulse can be shortened, so that a higher frequency can be achieved. The non-uniformity of heat insulation due to the deformed tube can be improved by inserting a heat-insulating material with high heat-insulating effect in the area where the heat-insulating distance is short in the circumferential direction, or by using a heat-insulating material structure that matches the shape of the discharge tube It is possible.

【0011】[0011]

【発明の効果】以上のように、この発明によれば、内管
の断面形状を扁平形状にしたので、中央部から壁面まで
の距離が短かくなり下準位粒子数が減少するため、中央
部でレーザ発振がしやすくなる。また、電極の断面形状
を内管の断面形状と同一にし、更に、上記内管と上記外
管との間の距離が短い部分の上記断熱材は上記距離が長
い部分の断熱材よりも断熱効果が高い素材のものを使用
したので、内管の偏平な断面の全面で有効にレーザービ
ームを導きだす事ができ、また、内管が異形管であるに
もかかわらず断熱性が均一である、という効果が得られ
る。
As described above, according to the present invention, since the cross-sectional shape of the inner tube is made flat, the distance from the central portion to the wall surface is shortened, and the number of lower level particles is reduced. The laser oscillation becomes easy in the portion. Further, the same as the inner tube cross-section a cross-sectional shape of the electrode, the further, the inner tube and the outer
The above insulation at the part where the distance to the pipe is short is longer
Use a material with a higher thermal insulation effect than the thermal insulation material
Laser beam effectively over the entire flat section of the inner tube.
The inner tube is a deformed tube
Nevertheless, the effect of uniform heat insulation is obtained.
You.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施例を示す金属蒸気レーザ装置
の断面図
FIG. 1 is a sectional view of a metal vapor laser device showing an embodiment of the present invention.

【図2】第1図のII−II線の断面図FIG. 2 is a sectional view taken along line II-II of FIG.

【図3】従来の金属蒸気レーザ装置の断面図FIG. 3 is a cross-sectional view of a conventional metal vapor laser device.

【図4】第3図のIV−IV線の断面図FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3;

【符号の説明】[Explanation of symbols]

7 外管 12 内管 13 陰極 14 陽極 7 Outer tube 12 Inner tube 13 Cathode 14 Anode

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭47−13180(JP,A) 特開 昭55−80382(JP,A) (58)調査した分野(Int.Cl.6,DB名) H01S 3/032 H01S 3/227────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-47-13180 (JP, A) JP-A-55-80382 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) H01S 3/032 H01S 3/227

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 不活性ガスと金属蒸気を生じる金属媒体
とが封入された内管を、内面に断熱材を有する外管内に
置して、上記内管の両側に一対の電極を配置し、上
両電極間にパルス電圧を印加して上記不活性ガスを電離
し、電離した電子のエネルギーで上記金属蒸気の原子を
励起してレーザ光を発生させる金属蒸気レーザ装置にお
いて、前記内管はその断面形状が扁平形状であり、この内管の
両端に設けた上記電極はその断面形状が前記内管の前記
断面形状と同一であり、更に上記内管と上記外管との間
の距離が短い部分の上記断熱材は上記距離が長い部分の
上記断熱材よりも断熱効果が高い素材としたものである
こと を特徴とする金属蒸気レーザ装置。
1. A metal medium for producing an inert gas and a metal vapor.
The inner tube bets is sealed, the outer tube having a heat insulating material on the inner surface
And placed, placing a pair of electrodes on both sides of the inner tube, a pulse voltage is applied between the upper Symbol the electrodes to ionize the inert gas, the ionized electron energy in the metal vapor atoms In the metal vapor laser device that generates a laser beam by being excited, the inner tube has a flat cross section,
The cross-sectional shape of the electrodes provided at both ends is the same as that of the inner tube.
The cross-sectional shape is the same, and between the inner pipe and the outer pipe
The heat insulating material in the part where the distance is short is
It is made of a material that has a higher heat insulating effect than the above heat insulating material
Metal vapor laser apparatus characterized by.
JP8363192A 1992-04-06 1992-04-06 Metal vapor laser device Expired - Lifetime JP2827680B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8363192A JP2827680B2 (en) 1992-04-06 1992-04-06 Metal vapor laser device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8363192A JP2827680B2 (en) 1992-04-06 1992-04-06 Metal vapor laser device

Publications (2)

Publication Number Publication Date
JPH05283769A JPH05283769A (en) 1993-10-29
JP2827680B2 true JP2827680B2 (en) 1998-11-25

Family

ID=13807819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8363192A Expired - Lifetime JP2827680B2 (en) 1992-04-06 1992-04-06 Metal vapor laser device

Country Status (1)

Country Link
JP (1) JP2827680B2 (en)

Also Published As

Publication number Publication date
JPH05283769A (en) 1993-10-29

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