JPH0621653Y2 - Ultrasonic oscillator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Use) The present invention relates to an ultrasonic oscillator, and more particularly to an ultrasonic oscillator suitable for dressing a grindstone.

(Prior Art) An ultrasonic oscillating device is used for dressing a grindstone for ultra-precision polishing having a very small grindstone grain size.

This ultrasonic oscillating device is composed of an oscillator that oscillates ultrasonic vibrations and a horn part that is vibrated by the ultrasonic vibrations from the oscillator. When the tip of the horn part is brought close to the surface of the workpiece to be vibrated. Ultrasonic vibrations are transmitted to the workpiece through the dresser liquid, and the surface of the workpiece is dressed by the ultrasonic waves.

(Problems to be solved by the invention) Since dressing by an ultrasonic oscillator is performed by an oscillating wave in a direction orthogonal to the dressing surface, it is relatively easy when the dressing surface is a flat surface. If so, a special device is required to dress the inner surface of the recess. That is, it is necessary to insert the tip of the horn portion into the recess and vibrate in the direction orthogonal to the insertion direction of the horn portion.

FIG. 4 is a sectional view showing an example of a horn portion of an ultrasonic oscillator for processing such a recess. Ultrasonic oscillator 40
Is a substantially rectangular parallelepiped horn body 41, an L-shaped horn tip portion 41 a connected to the tip of the horn body 41 with a set screw 43, and ultrasonic vibrations connected to the lower end surface of the horn body 41. And an oscillator 42 for oscillating.

The horn tip portion 41a is inserted into the recess g of the grindstone G and vibrated to perform ultrasonic dressing.

However, according to this method, the horn tip 41a
The surface parallel to the insertion direction can be processed, but the surface orthogonal to the insertion direction cannot be processed.

For this reason, the conventional ultrasonic oscillating device cannot satisfactorily dress the shaped grindstone having the uneven surface.

The present invention is made in consideration of such points,
An object of the present invention is to provide an ultrasonic oscillating device capable of satisfactorily dressing even a shaped grindstone having a complicated concave surface.

[Constitution of device]

(Means for Solving the Problems) In order to achieve the above object, the present invention provides an ultrasonic oscillating device including a substantially rectangular parallelepiped horn portion and an oscillator connected to one end surface of the horn for oscillating ultrasonic vibration. The tip part of the horn part is provided on the end face opposite to the one end face to which the oscillator is connected, and the first vibrating face vibrated by the first longitudinal vibration wave from the oscillator and the first vibrating face. A first reflecting surface that is formed to be inclined with respect to the first longitudinal vibration wave from the oscillator and converts the first longitudinal vibration wave into a lateral vibration wave; and is formed to be inclined with respect to two adjacent surfaces that are orthogonal to the first vibration surface. , A second reflecting surface that further reflects the transverse vibration wave reflected by the first reflecting surface and converts it into a second longitudinal vibration wave, and a second vibrating surface that is orthogonal to the first vibrating surface and is formed on the first vibrating surface and the first reflecting surface, respectively. It is vibrated by the second longitudinal vibration wave reflected by the second reflecting surface provided on the adjacent surface. The second
It is characterized in that it has a vibrating surface and a third vibrating surface provided on a surface parallel to the second vibrating surface and vibrated by the second longitudinal vibration wave.

(Operation) According to the present invention, the ultrasonic vibration from the oscillator is propagated as the first longitudinal vibration wave to the first vibrating surface to vibrate the first vibrating surface, and is also reflected by the first reflecting surface to become the lateral vibrating wave. Further, it is propagated to the second reflecting surface, reflected by the second reflecting surface, and becomes the second longitudinal vibration wave again. The second longitudinal vibration wave is further propagated to the second vibrating surface and the third vibrating surface and vibrates the second vibrating surface and the third vibrating surface.

Since the first vibrating surface and the second and third vibrating surfaces are orthogonal to each other, the vibrating wave of the first vibrating surface and the vibrating waves of the second and third vibrating surfaces are vectors when transmitted to the workpiece. It is composed and makes an elliptic motion as a whole. This makes it possible to satisfactorily dress any concave shape.

(Embodiment) An embodiment of an ultrasonic oscillator according to the present invention will be described below with reference to the drawings.

FIG. 1 is an external perspective view showing the tip of a horn portion of an ultrasonic oscillator, and FIG. 2 is an explanatory view showing a state in which a concave portion of a grindstone is dressed using the ultrasonic oscillator according to the present invention. .

As shown in FIG. 2, the ultrasonic wave oscillating device 10 includes a horn body 11 having a substantially rectangular parallelepiped shape, and a horn tip portion 11a provided at the tip of the horn body 11 by adhesion or integral formation.
And a oscillator 12 connected to the lower end surface of the horn body 11 for oscillating ultrasonic vibration.

The horn tip portion 11a has a first vibrating surface 13 provided on an end surface facing the one end surface of the horn body 11 to which the oscillator 12 is connected. An inclined surface is connected to and adjacent to the first vibrating surface 13, and the inclined surface reflects the first longitudinal vibration wave propagated from the oscillator 12 and converts it into a transverse vibration wave. It is said that.

In addition, two adjacent surfaces 15 and 1 orthogonal to the first vibrating surface 13
6, a surface inclined with respect to 6 is formed.
The transverse vibration wave reflected by the reflecting surface 14 is further reflected to the second
It is the second reflecting surface 17 that is converted into a longitudinal vibration wave.

Then, the second vibration in which the surfaces orthogonal to the first vibrating surface 13 and adjacent to the first vibrating surface 13 and the first reflecting surface 14 are vibrated by the second longitudinal vibration wave reflected by the second reflecting surface 17. It is defined as surface 19. A surface parallel to the second vibrating surface 19 and adjacent to the second reflecting surface 17 is a third vibrating surface 18 that is vibrated by the second longitudinal vibration wave.

That is, as shown in FIG. 1, the first reflecting surface 14 is formed with an inclination angle of θ1 with respect to the first vibrating surface 13, and the second reflecting surface with an inclination angle of θ2 with respect to the surface 15. 17 are formed. These inclination angles θ1 and θ2 are 45 °
Is desirable.

Next, the operation of this embodiment having such a configuration will be described.

The ultrasonic vibration oscillated from the oscillator 12 travels straight in the horn body 11 as a first longitudinal vibration wave, propagates to the first vibrating surface 13, and moves on the first vibrating surface 13 in the Z direction (see FIG. 1). Vibrate. Further, this first longitudinal vibration wave is generated by the first reflection surface 1
It is reflected at 4 and converted into a transverse vibration wave in the Y direction. This Y
The transverse vibration wave in the direction further propagates to the second reflecting surface 17, and is reflected by the second longitudinal vibration wave in the X direction.

The second longitudinal vibration wave in the X direction is generated by the second and third vibrating surfaces 1
9 and 18, propagated to the second and third vibrating surfaces 19, 18
Vibrate.

The first vibrating surface 13, the second and third vibrating surfaces 19, 18
When the vibration of is observed in the Y direction at the vibration point P (see FIG. 1), the point P becomes a vector composite vibration of the vibrations in the Z direction and the X direction. That is, the first vibrating surface 13 makes an elliptic motion as a whole.

Therefore, if the horn tip portion 11a is inserted into the concave portion g of the grindstone G and vibrated, ultrasonic dressing can be performed in both the Z direction and the X direction.

Further, by appropriately combining the vibration waves in the Z direction and the X direction, the dressing can be favorably performed even if the curved concave portion g as shown in FIG. 3 is provided.

As shown in FIG. 3, the first vibrating surface 23 is formed into a curved surface and the interval between the second and third vibrating surfaces 28 and 29 is reduced so that the concave portion g having a small width or a small radius of curvature can be satisfactorily processed. It can be dressed.

[Effect of device]

As described above, according to the present invention, it is possible to satisfactorily perform dressing of a shaped grindstone having a complicated uneven shape.

In addition to dressing of a grindstone, the present invention can perform processing using ultrasonic vibration of a workpiece having a complicated shape.

[Brief description of drawings]

FIG. 1 is an external perspective view showing a tip portion of a horn of an ultrasonic oscillator according to the present invention, FIG. 2 is an explanatory view showing a usage state of the ultrasonic oscillator according to the present invention, and FIG. 3 is a second view of the present invention. 2 is a side view showing a conventional example of an ultrasonic oscillator. 11a ... Horn tip, 12 ... Oscillator, 13 ... First vibrating surface, 14 ... First reflecting surface, 15, 16 ... Two adjacent surfaces orthogonal to the first vibrating surface, 17 ... Second reflecting surface, 18 ... Second vibration surface 19 ... Third vibration surface.

Claims (1)

[Scope of utility model registration request] 1. A substantially rectangular parallelepiped horn portion and an oscillator connected to one end surface of the horn portion for oscillating ultrasonic vibrations, and a tip portion of the horn portion faces one end surface to which the oscillator is connected. A first vibrating surface provided on an end surface that vibrates by a first longitudinal vibrating wave from the oscillator and a first longitudinal vibrating wave from the oscillator that is formed to be inclined with respect to the first vibrating surface. And a first reflection surface that is converted into a lateral vibration wave and is formed to be inclined with respect to two adjacent surfaces that are orthogonal to the first vibration surface and that further reflects the lateral vibration wave reflected by the first reflection surface. And a second reflecting surface for converting into a second longitudinal vibration wave,
A second vibrating surface which is orthogonal to the first vibrating surface and which is vibrated by a second longitudinal vibration wave reflected by the second reflecting surface provided on a surface adjacent to the first vibrating surface and the first reflecting surface, respectively. And an ultrasonic oscillating device having a third vibrating surface which is provided on a surface parallel to the second vibrating surface and which is vibrated by the second longitudinal vibration wave.