JPH0621520A - Cryostat - Google Patents
CryostatInfo
- Publication number
- JPH0621520A JPH0621520A JP4197484A JP19748492A JPH0621520A JP H0621520 A JPH0621520 A JP H0621520A JP 4197484 A JP4197484 A JP 4197484A JP 19748492 A JP19748492 A JP 19748492A JP H0621520 A JPH0621520 A JP H0621520A
- Authority
- JP
- Japan
- Prior art keywords
- radiation shield
- container
- cryostat
- state
- inner container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 claims abstract description 56
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000002826 coolant Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 26
- 229910052802 copper Inorganic materials 0.000 abstract description 19
- 239000010949 copper Substances 0.000 abstract description 19
- 239000007788 liquid Substances 0.000 abstract description 9
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 abstract description 6
- 238000011017 operating method Methods 0.000 abstract 1
- 241000238366 Cephalopoda Species 0.000 description 7
- 239000011889 copper foil Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、その内部を外部環境か
ら隔離して超低温環境に維持し超伝導素子等の超伝導装
置をその内部に格納等するための格納容器の一種である
クライオスタットに係り、特に、超伝導量子干渉素子
（以下「ＳＱＵＩＤ」という）を用いて微弱な磁場を計
測することに適したクライオスタットに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cryostat which is a kind of storage container for isolating the inside from the external environment and maintaining it in an ultra-low temperature environment to store a superconducting device such as a superconducting element therein. In particular, the present invention relates to a cryostat suitable for measuring a weak magnetic field using a superconducting quantum interference device (hereinafter referred to as “SQUID”).
【０００２】[0002]
【従来の技術】従来、この種のＳＱＵＩＤ計測用クライ
オスタットは、磁気ノイズを低減するために非金属材料
で製作されていたが、クライオスタット内部に設けられ
る輻射シールドには高い熱伝導性が要求されるため銅な
どの金属材料を用いざるを得なかった。しかし、輻射シ
ールドが金属製であると、観測をすべき微弱な磁場変動
によっても輻射シールド内部に微弱な誘導電流が発生
し、これが計測値に少なからぬ誤差を与え、ＳＱＵＩＤ
による磁場計測の大きな障害となっていた。この障害に
対する対策としては、絶縁した金属製網線を用いた輻射
シールドや、特開平２−３０３０７７号公報に記載の発
明のようなスリットを入れた輻射シールドなどが知られ
ている。2. Description of the Related Art Conventionally, this type of SQUID measuring cryostat has been made of a non-metallic material in order to reduce magnetic noise. However, the radiation shield provided inside the cryostat is required to have high thermal conductivity. For this reason, metal materials such as copper have to be used. However, if the radiation shield is made of metal, a weak induced current will be generated inside the radiation shield due to the weak magnetic field fluctuations to be observed, which will cause a considerable error in the measured value, and the SQUID
Was a major obstacle to magnetic field measurement. As measures against this obstacle, there are known a radiation shield using an insulated metal net wire, a radiation shield having a slit as in the invention described in JP-A-2-303077, and the like.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記従来の輻
射シールドでは、例えば、絶縁金網の場合には、金網の
周縁部において熱接触を図るための方法に難点があり、
また、スリット入りの輻射シールドの場合には、その支
持固定方法に問題があるなど、いずれもその施工方法に
未解決の課題を残していた。本発明は、これらの問題点
を解決するためになされたものであり、施工方法が容易
で、かつ、高性能な輻射シールドを備えたクライオスタ
ットを提供することを目的とする。However, in the above-mentioned conventional radiation shield, for example, in the case of an insulating wire mesh, there is a problem in the method for making thermal contact at the peripheral portion of the wire mesh.
Further, in the case of a radiation shield having slits, there is a problem in the method of supporting and fixing the radiation shield, and all of them have left unsolved problems in the construction method. The present invention has been made to solve these problems, and an object of the present invention is to provide a cryostat equipped with a high-performance radiation shield that is easy to construct.
【０００４】[0004]
【課題を解決するための手段】上記の課題を解決するた
め、本発明に係るクライオスタットは、超伝導装置およ
び冷却媒体を収納可能な内部容器と、当該内部容器を包
囲する輻射遮蔽手段と、前記内部容器および輻射遮蔽手
段とを真空状態に保持しつつ包囲する外部容器と、を備
えたクライオスタットにおいて、前記輻射遮蔽手段は、
熱伝導率の高い複数の細長部材が、相互に電気的絶縁状
態に保持されるとともに相互に密な状態で並設され、か
つ、電気絶縁性を有する基板上に接着されて構成される
部分を含むようにして構成される。In order to solve the above problems, a cryostat according to the present invention comprises an internal container capable of accommodating a superconducting device and a cooling medium, radiation shielding means surrounding the internal container, and In a cryostat including an inner container and an outer container that surrounds the radiation shielding means while maintaining the vacuum state, the radiation shielding means includes:
A plurality of elongated members having a high thermal conductivity are held in an electrically insulating state with each other and are arranged in a dense state in parallel with each other, and are bonded on a substrate having an electrically insulating property. It is configured to include.
【０００５】[0005]
【作用】上記構成を有する本発明によれば、電気絶縁性
を有する基板が熱伝導率の高い複数の細長部材を接着に
より支持固定している。したがって、支持固定の施工を
容易に行うことができる。また、熱伝導率の高い複数の
細長部材は、その長手方向には熱を伝えるが、相互に電
気的に絶縁されているので、磁場変化による誘導電流は
もし発生しても他の細長部材へ流れることはなくＳＱＵ
ＩＤによる磁場計測に与える影響は小さい。そして、基
板の長手方向の一端を冷却すれば他端まで容易に冷却さ
れこれにより基板全体も容易に冷却されるので輻射シー
ルド周縁部における熱接触の問題も難なく解決できる。
したがって、施工方法が容易で、かつ、電磁波に対して
障害の少ない熱遮蔽板を提供することができる。According to the present invention having the above structure, the electrically insulating substrate supports and fixes a plurality of elongated members having high thermal conductivity by adhesion. Therefore, the construction for supporting and fixing can be easily performed. Also, a plurality of elongated members with high thermal conductivity conduct heat in the longitudinal direction, but since they are electrically insulated from each other, even if an induced current due to a magnetic field change is generated, they will be transmitted to other elongated members. SQU without flowing
The influence of the ID on the magnetic field measurement is small. Then, if one end of the substrate in the longitudinal direction is cooled, the other end is easily cooled, and thus the entire substrate is easily cooled, so that the problem of thermal contact at the peripheral portion of the radiation shield can be solved without difficulty.
Therefore, it is possible to provide a heat shield plate that is easy to apply and has little interference with electromagnetic waves.
【０００６】[0006]
【実施例】以下、本発明の一実施例を図面にもとづいて
説明する。このクライオスタット１は、図１に示すよう
に、超伝導装置である超伝導量子干渉素子（以下「ＳＱ
ＵＩＤ」という）２およびその冷却媒体である液体ヘリ
ウム３を収納可能な内部容器４と、内部容器４を包囲す
るように配置された輻射遮蔽手段である第１輻射シール
ド５および第２輻射シールド６と、内部容器４、第１輻
射シールド５および第２輻射シールド６とを包囲すると
ともに内部容器４との間に真空層７を形成する外部容器
８と、真空層７内に挿入される断熱材９と、内部容器４
の首に相当する部分に挿入された断熱体１０と、液体ヘ
リウム３とその蒸発ガスを外部空気と遮断する蓋１１
と、蓋１１および断熱体１０とを貫通して外部から液体
ヘリウム３の給排を行うための液体ヘリウム給排口１２
と、ＳＱＵＩＤ２を液体ヘリウム３中に支持するととも
にＳＱＵＩＤ２からの計測電流をクライオスタット１の
外部に導く計測用導線（図示せず）を止着または内蔵可
能な支持機構１４と、を備えて構成される。１３は計測
用導線の引出口である。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the cryostat 1 includes a superconducting quantum interference device (hereinafter referred to as “SQ”) that is a superconducting device.
2) and a liquid helium 3 which is a cooling medium thereof, and a first radiation shield 5 and a second radiation shield 6 which are radiation shielding means arranged so as to surround the inner container 4. An outer container 8 surrounding the inner container 4, the first radiation shield 5 and the second radiation shield 6 and forming a vacuum layer 7 between the inner container 4 and the inner container 4, and a heat insulating material inserted into the vacuum layer 7. 9 and the inner container 4
A heat insulator 10 inserted in a portion corresponding to the neck of the user, and a lid 11 for blocking liquid helium 3 and its vaporized gas from the outside air.
And a liquid helium supply / discharge port 12 for penetrating the lid 11 and the heat insulator 10 to supply / discharge the liquid helium 3 from the outside.
And a support mechanism 14 capable of supporting SQUID 2 in liquid helium 3 and fixing or incorporating a measurement lead wire (not shown) for guiding the measurement current from SQUID 2 to the outside of the cryostat 1. . Reference numeral 13 is an outlet for the measuring lead wire.
【０００７】また、断熱材９としては、例えば、アルミ
ニウムを蒸着させたポリエステル樹脂箔を多層に重ねた
ものなどを使用する。この場合、第１輻射シールド５お
よび第２輻射シールド６は断熱材９の層間に配置され、
第１輻射シールド５および第２輻射シールド６の一端
（図１における上端）は内部容器４の首に相当する部分
に熱的に接触している。Further, as the heat insulating material 9, for example, a polyester resin foil in which aluminum is vapor-deposited is laminated in multiple layers. In this case, the first radiation shield 5 and the second radiation shield 6 are arranged between the layers of the heat insulating material 9,
One ends (upper ends in FIG. 1) of the first radiation shield 5 and the second radiation shield 6 are in thermal contact with a portion corresponding to the neck of the inner container 4.
【０００８】このように構成することにより、液体ヘリ
ウム３の蒸発ガスにより第１輻射シールド５および第２
輻射シールド６を冷却し、外部容器８からの輻射熱を奪
うことができる。第１輻射シールド５および第２輻射シ
ールド６としては、銅などの熱伝導性の良い金属材料等
を用いる必要があるが、ＳＱＵＩＤ２からの微弱な計測
電流を阻害する渦電流を低減させるため、上記の銅材等
は細い線状または細い条状に形成して使用する。With this configuration, the first radiation shield 5 and the second radiation shield 5 are formed by the vaporized gas of liquid helium 3.
It is possible to cool the radiation shield 6 and remove the radiant heat from the outer container 8. As the first radiation shield 5 and the second radiation shield 6, it is necessary to use a metal material having good thermal conductivity such as copper, but in order to reduce the eddy current that inhibits the weak measurement current from the SQUID 2, The copper material, etc. should be formed into a thin line or thin strip before use.
【０００９】次に、上記の輻射シールドのさらに詳細な
構成を図に基づいて説明する。図２は、第１輻射シール
ド５について図示したものであり、第２輻射シールド６
も同一の構成を有している。図２に示すように、第１輻
射シールド５は、銅の細い条材である細条銅部材１５が
複数個、電気絶縁性を有する絶縁基板１６の表面上に接
着または貼付されて構成されている。ここに、細条銅部
材１５は細長部材に相当している。Next, a more detailed structure of the above radiation shield will be described with reference to the drawings. FIG. 2 shows the first radiation shield 5 and the second radiation shield 6
Also have the same configuration. As shown in FIG. 2, the first radiation shield 5 is composed of a plurality of thin copper members 15 which are thin strips of copper, which are adhered or attached onto the surface of an insulating substrate 16 having electrical insulation. There is. Here, the thin copper member 15 corresponds to an elongated member.
【００１０】この場合、絶縁基板１６としては厚さ0.1
〜1.0 mm程度のガラス繊維強化樹脂等から成る板材が用
いられ、この絶縁基板１６上に厚さ0.03〜0.2 mm程度の
銅箔を全面に貼付し、エッチングなどの方法を用いて幅
0.1 mm程度の溝部１７（銅箔の無い部分）を多数形成す
ると同時に多数の細条銅部材１５を形成して得ることが
できる。そして、形成される細条銅部材１５の幅は0.1
〜1.0 mm程度になるようにする。In this case, the insulating substrate 16 has a thickness of 0.1.
A plate material made of glass fiber reinforced resin or the like having a thickness of about 1.0 mm is used, and a copper foil having a thickness of about 0.03 to 0.2 mm is attached on the entire surface of the insulating substrate 16 and the width is made by a method such as etching.
This can be obtained by forming a large number of groove portions 17 (a portion having no copper foil) of about 0.1 mm and simultaneously forming a large number of thin copper members 15. The width of the thin copper member 15 formed is 0.1.
It should be about 1.0 mm.
【００１１】上記のように構成すると、従来のこの種の
輻射シールドにおける銅箔材が幅10〜25mm程度であるの
に比べ、格段に小さな寸法とすることができ、ＳＱＵＩ
Ｄ２により計測しようとしている外部磁場変動の透過性
を向上させることができる。換言すれば、細条銅部材１
５に発生させる渦電流値を最小限に抑えることができ、
微弱な外部磁場変動が直接ＳＱＵＩＤ２に到達すること
になる。With the above-mentioned structure, the copper foil material in the conventional radiation shield of this type has a width of about 10 to 25 mm, which is much smaller than the copper foil material.
It is possible to improve the transparency of the fluctuation of the external magnetic field to be measured by D2. In other words, the strip copper member 1
The eddy current value generated in 5 can be minimized,
Weak external magnetic field fluctuations will reach SQUID2 directly.
【００１２】上記の輻射シールド板材５または６を用い
て実際に施工する場合には、この板材を所要のシールド
形状になるように切断加工や折り曲げ加工を施せばよ
い。ただし、細条銅部材１５の長手方向の長さは変えず
にそのまま用いなければならず、途中で切断等してはな
らない。熱伝導性能が低下するからである。上記の輻射
シールド板材５または６は、絶縁基板１６の厚さを非常
に薄くして、別のガラス繊維強化樹脂等から成るシール
ド材支持体（図示せず）等に取り付けて使用してもかま
わない。When the radiation shield plate 5 or 6 is actually used for construction, the plate may be cut or bent so as to have a desired shield shape. However, the length in the longitudinal direction of the thin copper member 15 must be used as it is without being changed, and it should not be cut in the middle. This is because the heat conduction performance is reduced. The radiation shield plate member 5 or 6 may be used by attaching the shield member support (not shown) made of another glass fiber reinforced resin or the like to the insulating substrate 16 having a very thin thickness. Absent.
【００１３】次に、上記クライオスタットに用いる輻射
シールドの他の実施例のさらに詳細な構成を図３に基づ
いて説明する。図３は、複数個使用することにより輻射
シールドを形成可能な帯状部材２０を断面図によって示
したもので、この輻射シールド用帯状部材２０は、銅の
細い条材である細条銅部材２１が複数個、電気絶縁性を
有する絶縁基板２４の表面上に接着または貼付され、細
条銅部材２１の表面に絶縁膜２２が接着または貼付され
て構成されている。ここに、細条銅部材２１は細長部材
に相当している。Next, a more detailed structure of another embodiment of the radiation shield used for the cryostat will be described with reference to FIG. FIG. 3 is a sectional view showing a strip-shaped member 20 capable of forming a radiation shield by using a plurality of strips. The radiation-shielding strip-shaped member 20 includes a thin copper member 21 which is a thin strip of copper. A plurality of them are adhered or stuck on the surface of an insulating substrate 24 having an electric insulation property, and an insulating film 22 is adhered or stuck on the surface of a strip copper member 21. Here, the strip copper member 21 corresponds to an elongated member.
【００１４】この場合、絶縁基板２４としては厚さ0.1
mm、幅 5〜25mm程度のポリイミド箔が用いられ、この絶
縁基板２４上に厚さ0.03〜0.1 mm程度の銅箔を全面に貼
付し、エッチングなどの方法を用いて幅0.01mm程度の空
隙部２３（銅箔の無い部分）を多数形成すると同時に細
条銅部材２１を多数形成し、絶縁膜として銅箔の表面に
厚さ0.01〜0.05mm程度のポリイミド箔を全面に貼付する
ことにより得ることができる。そして、形成される細条
銅部材２１の幅は0.1 〜1.0 mm程度になるようにする。In this case, the insulating substrate 24 has a thickness of 0.1.
A polyimide foil with a width of 5 mm to 25 mm and a width of 5 mm to 25 mm is used. A copper foil having a thickness of 0.03 mm to 0.1 mm is attached to the entire surface of the insulating substrate 24, and a space having a width of about 0.01 mm is formed by etching or the like. Obtained by forming a large number of thin copper members 21 at the same time as forming a large number of 23 (portions without a copper foil) and sticking a polyimide foil having a thickness of about 0.01 to 0.05 mm on the entire surface of the copper foil as an insulating film. You can The width of the thin copper member 21 formed is set to be about 0.1 to 1.0 mm.
【００１５】このように構成しても、従来のこの種の輻
射シールドに比べ、ＳＱＵＩＤ２により計測しようとし
ている外部磁場変動の透過性を向上させることができ
る。上記の輻射シールド用帯状部材２０を用いて実際に
施工する場合には、図１において、第１輻射シールド５
および第２輻射シールド６の首に相当する部分の近傍で
は比較的幅の広い図２に示すシールド材等を用い、容器
の底部付近にこの輻射シールド用帯状部材２０を使用す
るとよい。この帯状部材２０の基板２４は薄く細長い帯
状をなしているので、単に折り曲げるだけで任意の形状
に容易に適合させることができ、円筒状容器の底部の屈
曲部等に用いるのに適しているからである。ここで、容
器の底部で複数の帯状部材が重複するような場合には、
重複部分を切除することで対処でき、従来の場合よりも
施工が格段に簡素化される。また、熱的な接続について
は、例えば、ハンダ付けなどで容易に行うことができ、
この面でも施工は非常に容易である。Even with this configuration, the transparency of fluctuations in the external magnetic field to be measured by SQUID2 can be improved as compared with the conventional radiation shield of this type. When actually using the band member 20 for the radiation shield described above, the first radiation shield 5 in FIG.
Also, it is preferable to use a relatively wide shield material or the like shown in FIG. 2 in the vicinity of the portion corresponding to the neck of the second radiation shield 6 and to use the radiation shield strip 20 near the bottom of the container. Since the substrate 24 of the belt-shaped member 20 has a thin and long strip-like shape, it can be easily adapted to any shape by simply bending it, and is suitable for use as a bent portion of the bottom of a cylindrical container. Is. Here, when a plurality of strip-shaped members overlap at the bottom of the container,
This can be dealt with by cutting off the overlapping portion, and the construction is much simpler than in the conventional case. Also, for thermal connection, for example, it can be easily made by soldering,
Also in this respect, construction is very easy.
【００１６】なお、本発明は、上記実施例に限定される
ものではない。上記実施例は、例示であり、本発明の特
許請求の範囲に記載された技術的思想と実質的に同一な
構成を有し、同様な作用効果を奏するものは、いかなる
ものであっても本発明の技術的範囲に包含される。The present invention is not limited to the above embodiment. The above-mentioned embodiment is an exemplification, has substantially the same configuration as the technical idea described in the scope of the claims of the present invention, and has any similar effect to the present invention. It is included in the technical scope of the invention.
【００１７】[0017]
【発明の効果】以上説明したように、本発明によるクラ
イオスタットにおいては、輻射シールドの機能を有する
細い線材または細い条材等の細長部材とそれを支持する
絶縁基板とが一体化されているので、輻射シールドの施
工が極めて容易である。そして、この細長部材の幅員ま
たは径を非常に小さく形成することが可能なので、ＳＱ
ＵＩＤ等により測定すべき微弱な磁場変動に対しても悪
影響を与えることが非常に少ない。さらに、本発明の輻
射シールド材には近時の電子回路製造技術が応用できる
ため量産性に富み、従来品よりも安価に供給可能であ
り、産業上の効果が非常に大きい、という利点を有す
る。As described above, in the cryostat according to the present invention, the elongated member such as a thin wire or thin strip having a radiation shield function and the insulating substrate supporting the elongated member are integrated. Installation of the radiation shield is extremely easy. Since the width or diameter of this elongated member can be made very small, SQ
Very little adverse effect is exerted even on a weak magnetic field fluctuation to be measured by UID or the like. Furthermore, the radiation shield material of the present invention has the advantages that it can be applied to recent electronic circuit manufacturing technology, has high mass productivity, can be supplied at a lower cost than conventional products, and has a great industrial effect. .
【図１】本発明の一実施例であるクライオスタットの全
体構成を示す断面図である。FIG. 1 is a cross-sectional view showing the overall configuration of a cryostat that is an embodiment of the present invention.
【図２】図１における輻射シールドのさらに詳細な構成
を示す部分斜視図である。FIG. 2 is a partial perspective view showing a more detailed structure of the radiation shield in FIG.
【図３】本発明の他の実施例における輻射シールドの一
部分である帯状部材のさらに詳細な構成を示す断面図で
ある。FIG. 3 is a cross-sectional view showing a more detailed structure of a belt-shaped member which is a part of a radiation shield according to another embodiment of the present invention.
１ クライオスタット ２ ＳＱＵＩＤ ３ 液体ヘリウム ４ 内部容器 ５ 第１輻射シールド ６ 第２輻射シールド ７ 真空層 ８ 外部容器 ９ 断熱材 １０ 断熱体 １１ 蓋 １２ 液体ヘリウム給排口 １３ 計測用導線引出口 １４ 支持機構 １５ 細条銅部材 １６ 絶縁基板 １７ 溝部 ２０ 輻射シールド用帯状部材 ２１ 細条銅部材 ２２ 絶縁膜 ２３ 空隙部 ２４ 絶縁基板 DESCRIPTION OF SYMBOLS 1 Cryostat 2 SQUID 3 Liquid helium 4 Inner container 5 1st radiation shield 6 2nd radiation shield 7 Vacuum layer 8 Outer container 9 Insulation material 10 Insulator 11 Lid 12 Liquid helium supply / discharge port 13 Measurement lead wire outlet 14 Support mechanism 15 Fine strip copper member 16 Insulating substrate 17 Groove 20 Radiation shield strip member 21 Fine strip copper member 22 Insulating film 23 Void 24 Insulating substrate
Claims (3)
内部容器と、 当該内部容器を包囲する輻射遮蔽手段と、 前記内部容器および輻射遮蔽手段とを真空状態に保持し
つつ包囲する外部容器と、 を備えたクライオスタットにおいて、 前記輻射遮蔽手段は、熱伝導率の高い複数の細長部材
が、相互に電気的絶縁状態に保持されるとともに相互に
密な状態で並設され、かつ、電気絶縁性を有する基板上
に接着されて構成される部分を含むことを特徴とするク
ライオスタット。1. An inner container capable of accommodating a superconducting device and a cooling medium, a radiation shielding means surrounding the inner container, and an outer container surrounding the inner container and the radiation shielding means while maintaining them in a vacuum state. And a plurality of elongated members having a high thermal conductivity are held in an electrically insulating state with each other and are arranged in a dense state with each other, and A cryostat, comprising a portion that is formed by being bonded onto a substrate having a.
態に保持されるとともに相互に密な状態で並設され、か
つ、電気絶縁性を有する基板上に接着されて構成される
帯状部材を複数個含むことを特徴とする請求項１に記載
したクライオスタット。2. The radiation shielding means comprises a plurality of elongated members having a high thermal conductivity, which are held in an electrically insulating state with each other and are arranged in a dense state with each other, and have an electrical insulating property. The cryostat according to claim 1, further comprising a plurality of strip-shaped members that are adhered onto the substrate.
内部容器と、 当該内部容器を包囲する輻射遮蔽手段と、 前記内部容器および輻射遮蔽手段とを真空状態に保持し
つつ包囲する外部容器と、 を備えたクライオスタットにおいて、 前記輻射遮蔽手段は、熱伝導率の高い複数の細長部材
が、相互に電気的絶縁状態に保持されるとともに相互に
密な状態で並設され、かつ、電気絶縁性を有する基板上
に接着されて構成される帯状部材を複数個含むことを特
徴とするクライオスタット。3. An inner container capable of accommodating the superconducting device and the cooling medium, a radiation shielding means surrounding the inner container, and an outer container surrounding the inner container and the radiation shielding means while maintaining them in a vacuum state. And a plurality of elongated members having a high thermal conductivity are held in an electrically insulating state with each other and are arranged in a dense state with each other, and A cryostat comprising a plurality of strip-shaped members which are adhered onto a substrate having.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4197484A JPH0621520A (en) | 1992-07-02 | 1992-07-02 | Cryostat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4197484A JPH0621520A (en) | 1992-07-02 | 1992-07-02 | Cryostat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0621520A true JPH0621520A (en) | 1994-01-28 |
Family
ID=16375244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4197484A Pending JPH0621520A (en) | 1992-07-02 | 1992-07-02 | Cryostat |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621520A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6563312B2 (en) * | 2000-08-31 | 2003-05-13 | Hitachi, Ltd. | Minimal magnetic field-measurement dewar vessel |
| WO2015118957A1 (en) * | 2014-02-05 | 2015-08-13 | 住友重機械工業株式会社 | Cooling device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6149465B2 (en) * | 1981-01-05 | 1986-10-29 | Yoshiaki Sakai |
-
1992
- 1992-07-02 JP JP4197484A patent/JPH0621520A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6149465B2 (en) * | 1981-01-05 | 1986-10-29 | Yoshiaki Sakai |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6563312B2 (en) * | 2000-08-31 | 2003-05-13 | Hitachi, Ltd. | Minimal magnetic field-measurement dewar vessel |
| WO2015118957A1 (en) * | 2014-02-05 | 2015-08-13 | 住友重機械工業株式会社 | Cooling device |
| JP2015149345A (en) * | 2014-02-05 | 2015-08-20 | 住友重機械工業株式会社 | Cooling device |
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|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |