JPH06213616A - Xy scanner table for tunnel electron microscope using piezoelectric element - Google Patents
Xy scanner table for tunnel electron microscope using piezoelectric elementInfo
- Publication number
- JPH06213616A JPH06213616A JP20415092A JP20415092A JPH06213616A JP H06213616 A JPH06213616 A JP H06213616A JP 20415092 A JP20415092 A JP 20415092A JP 20415092 A JP20415092 A JP 20415092A JP H06213616 A JPH06213616 A JP H06213616A
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- Prior art keywords
- piezoelectric element
- scanner
- stm
- piezoelectric elements
- direction driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、圧電素子を用いたＸＹ
スキャナテーブルに係り、特にＳＴＭ（走査型トンネル
顕微鏡）に用いられるＸＹスキャナテーブルに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to XY using a piezoelectric element.
The present invention relates to a scanner table, and more particularly to an XY scanner table used for STM (scanning tunneling microscope).
【０００２】[0002]
【従来の技術】従来、このようなＳＴＭに用いられるス
キャナとしては、以下に示すようなものがあった。 （１）ＸＹＺの３軸が連動するタイプ これはＳＴＭのスキャナに一般的に使われているタイプ
であり、図６に示すように、トライポッドと呼ばれてい
るものや、図７に示すように、円筒形のものが代表的で
ある。2. Description of the Related Art Conventionally, as a scanner used for such an STM, there has been the following one. (1) Type in which three axes of XYZ are interlocked This is a type generally used in STM scanners, as shown in FIG. 6, a so-called tripod, and as shown in FIG. The cylindrical one is typical.
【０００３】図６において、ベース１上に載置された試
料２は、ＸＹ方向駆動圧電素子Ｐx，Ｐy ３とＺ方向駆
動圧電素子Ｐz ４によって支持部材５を介して駆動され
る探針６を具備している。ａは走査の軌跡である。ま
た、図７において、ベース１上に載置された試料２はＸ
Ｙ方向駆動圧電素子Ｐx1，Ｐy1７、Ｐx2，Ｐy2８によっ
て駆動される探針９を具備している。ｂは走査の軌跡で
ある。In FIG. 6, a sample 2 placed on a base 1 is driven by a XY driving piezoelectric element P x , P y 3 and a Z driving piezoelectric element P z 4 via a supporting member 5. It is equipped with a needle 6. a is a locus of scanning. In FIG. 7, the sample 2 placed on the base 1 is X
The probe 9 is equipped with a Y-direction driving piezoelectric element P x1 , P y1 7, P x2 , P y2 8. b is the locus of scanning.
【０００４】これらの図に示すように、試料２の表面に
沿ってＸＹ方向に走査を行うと、その走査面は必ず曲面
となる。そのため、走査範囲が広くなる程、ＳＴＭ像中
に含まれる誤差は大きくなる。そのために、この方式は
観察用ＳＴＭのみの用途としてしか使用できない。 （２）スキャナに微小ＸＹテーブルを用いるタイプ 上記の問題を解決するためには、図８に示すように、Ｘ
Ｙテーブル１１のＸＹ走査はＸＹ方向駆動圧電素子１
２，１３で行い、探針１４のＺ軸制御は別個のＺ方向駆
動圧電素子Ｐ2 １５で行わせるようにすればよい。この
ように構成すると、走査面は試料１６に対して平面であ
るので走査によるＳＴＭ像の歪みは、原理上、発生しな
い。ｃは走査の軌跡である。As shown in these figures, when scanning is performed in the XY directions along the surface of the sample 2, the scanning surface is always a curved surface. Therefore, the wider the scanning range, the larger the error contained in the STM image. Therefore, this method can be used only as an application for observation STM only. (2) Type using a small XY table for the scanner To solve the above problem, as shown in FIG.
The XY scanning of the Y table 11 is performed by the XY driving piezoelectric element 1.
2 and 13, and the Z-axis control of the probe 14 may be performed by a separate Z-direction driving piezoelectric element P 2 15. According to this structure, since the scanning surface is a plane with respect to the sample 16, the distortion of the STM image due to scanning does not occur in principle. c is the locus of scanning.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、そのた
めには走査に用いる微少ＸＹテーブルが正確に移動しな
ければならない。図９は従来の圧電素子を用いたＸＹテ
ーブル式スキャナの例である。この図に示すように、テ
ーブル２１の四方に圧電素子ＰX1２２，ＰY1２３，Ｐ X2
２４，ＰY2２５を取り付け、向かい合う圧電素子をプッ
シュプルに駆動し、Ｘ方向変位とＹ方向変位を独立して
制御するようにしている。この構成においても走査範囲
を広くとると、図１０に示すように、テーブル２１が周
辺にきたとき、Ｘ軸とＹ軸の動きに干渉が起きてしま
う。その結果、探針の走査の軌跡に歪みが生じ、直ちに
ＳＴＭ像の歪みにつながってくる。[Problems to be Solved by the Invention]
The XY table used for scanning must not move accurately
I have to. FIG. 9 shows an XY test using a conventional piezoelectric element.
It is an example of a cable type scanner. As shown in this figure,
Piezoelectric element P on each side of the cable 21X122, PY123, P X2
24, PY225 and attach the piezoelectric elements facing each other.
Drives to the sprue, and X direction displacement and Y direction displacement are independently
I'm trying to control. Scan range in this configuration
When the table is wide, as shown in FIG.
When you come to the side, the X-axis and Y-axis movements interfere with each other.
U As a result, the scanning path of the probe is distorted and immediately
This leads to distortion of the STM image.
【０００６】本発明は、上記問題点を除去し、いかなる
走査範囲においても誤差のない移動真直度が良好な走査
中の探針の姿勢安定性の良い圧電素子を用いたトンネル
電子顕微鏡用ＸＹスキャナテーブルを提供することを目
的とする。The present invention eliminates the above-mentioned problems, and an XY scanner for a tunnel electron microscope using a piezoelectric element having good posture stability of a probe during scanning, which has no error in any scanning range and has good movement straightness. It is intended to serve a table.
【０００７】[0007]
【課題を解決するための手段】本発明は、上記目的を達
成するために、圧電素子を用いたトンネル電子顕微鏡用
ＸＹスキャナテーブルにおいて、テーブルと、該テーブ
ルのＸ方向の両側面に取り付けられる第１及び第２のＸ
方向駆動圧電素子と、該第１及び第２のＸ方向駆動圧電
素子の端面に取り付けられる第１及び第２の連結部材
と、該第１及び第２の連結部材のそれぞれのＹ方向の両
側面に取り付けられる一対の第１及び第２のＹ方向駆動
圧電素子と、該一対の第１及び第２のＹ方向駆動圧電素
子の端面に取り付けられる第１及び第２の固定部とを設
け、前記Ｘ方向駆動圧電素子の駆動による前記テーブル
の移動と前記Ｙ方向駆動圧電素子の駆動による前記テー
ブルの移動の間で干渉をなくすようにしたものである。In order to achieve the above-mentioned object, the present invention provides an XY scanner table for a tunnel electron microscope using a piezoelectric element, which is attached to the table and both side surfaces in the X direction of the table. 1st and 2nd X
Direction driving piezoelectric element, first and second connecting members attached to end faces of the first and second X direction driving piezoelectric elements, and both side surfaces of the first and second connecting members in the Y direction A pair of first and second Y-direction driving piezoelectric elements attached to the first and second Y-direction driving piezoelectric elements, and a first and a second fixing portion attached to end faces of the pair of first and second Y-direction driving piezoelectric elements. Interference is eliminated between the movement of the table by driving the X-direction driving piezoelectric element and the movement of the table by driving the Y-direction driving piezoelectric element.
【０００８】[0008]
【作用】本発明によれば、上記したように、Ｘ方向駆動
圧電素子の駆動による前記テーブルの移動と前記Ｙ方向
駆動圧電素子の駆動による前記テーブルの移動の間で干
渉をなくすようにしたので、いかなる走査範囲において
も誤差のない移動真直度が良好で、歪みのない正確なＳ
ＴＭ像を得ることができる圧電素子を用いたトンネル電
子顕微鏡用ＸＹスキャナテーブルを得ることができる。According to the present invention, as described above, interference is eliminated between the movement of the table by driving the X-direction driving piezoelectric element and the movement of the table by driving the Y-direction driving piezoelectric element. , Good straightness of movement without error in any scanning range, accurate S without distortion
An XY scanner table for a tunnel electron microscope using a piezoelectric element capable of obtaining a TM image can be obtained.
【０００９】[0009]
【実施例】以下、本発明の実施例を図を参照しながら詳
細に説明する。図１は本発明の実施例を示す圧電素子を
用いたＳＴＭ用ＸＹスキャナテーブルの平面図、図２は
そのＸＹスキャナテーブルの右側面図、図３は図１のＡ
−Ａ線断面図である。Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a plan view of an XY scanner table for STM using a piezoelectric element showing an embodiment of the present invention, FIG. 2 is a right side view of the XY scanner table, and FIG. 3 is A of FIG.
FIG.
【００１０】これらの図に示すように、テーブル３０の
左右にはＸ方向駆動圧電素子３１，３２が固定され、そ
れらのＸ方向駆動圧電素子ＰX1３１，ＰX2３２のそれぞ
れの他端にはブロック状の連結部材３３，３４が取り付
けられている。また、それらのブロック状の連結部材３
３，３４の両側面にはＹ方向駆動圧電素子Ｐy1３５，Ｐ
y2３７とＰy1３６，Ｐy2３８がそれぞれ取り付けられて
いる。更に、Ｙ方向駆動圧電素子Ｐy1３５とＰy1３６の
他端は第１の固定部４１に、Ｙ方向駆動圧電素子Ｐy2３
７とＰy2３８の他端は、第２の固定部４２にそれぞれ取
り付けられている。As shown in these figures, X-direction driving piezoelectric elements 31, 32 are fixed on the left and right of the table 30, and the other ends of the X-direction driving piezoelectric elements P X1 31, P X2 32 are fixed. Block-shaped connecting members 33 and 34 are attached. Also, those block-shaped connecting members 3
The Y-direction driving piezoelectric elements P y1 35, P are provided on both side surfaces of 3, 34.
y2 37, P y1 36, and P y2 38 are attached, respectively. Further, the other ends of the Y-direction driving piezoelectric elements P y1 35 and P y1 36 are attached to the first fixing portion 41, and the Y-direction driving piezoelectric element P y2 3
The other ends of 7 and P y2 38 are attached to the second fixing portion 42, respectively.
【００１１】このように、テーブル３０、圧電素子ＰX1
３１，ＰX2３２、ブロック状の連結部材３３，３４及び
圧電素子Ｐy1３５，Ｐy2３７，Ｐy1３６，Ｐy2３８をＨ
形に並べ、１次元テーブルを２重に構成することによ
り、図のようにＸＹ干渉の無い動作を行わせることがで
きる。 以下、本発明のＳＴＭ用ＸＹスキャナテーブル
の動作を図４及び図５を用いて説明する。In this way, the table 30 and the piezoelectric element P X1
31, P X2 32, block-shaped connecting members 33 and 34, and piezoelectric elements P y1 35, P y2 37, P y1 36, and P y2 38 to H
By arranging them in a shape and constructing a two-dimensional one-dimensional table, it is possible to perform an operation without XY interference as shown in the figure. The operation of the STM XY scanner table of the present invention will be described below with reference to FIGS. 4 and 5.
【００１２】図４は本発明の実施例を示す圧電素子を用
いたＳＴＭ用ＸＹスキャナテーブルのＸ方向移動説明図
であり、図４（ａ）はそのＳＴＭ用ＸＹスキャナテーブ
ルの平面図、図４（ｂ）はそのＳＴＭ用ＸＹスキャナテ
ーブルの右側面図、図４（ｃ）は図４（ａ）のＢ−Ｂ線
断面図である。これらの図に示すように、ＸＹスキャナ
テーブルをＸ方向に移動させる場合には、圧電素子３１
を伸長させるとともに、圧電素子３２を収縮させる。つ
まり、プッシュプル動作を行わせることにより、テーブ
ル３０をＸ方向に移動させることができる。FIG. 4 is an explanatory view showing movement of the STM XY scanner table in the X direction using a piezoelectric element according to an embodiment of the present invention. FIG. 4A is a plan view of the STM XY scanner table. 4B is a right side view of the STM XY scanner table, and FIG. 4C is a cross-sectional view taken along the line BB of FIG. 4A. As shown in these figures, when the XY scanner table is moved in the X direction, the piezoelectric element 31
Is expanded and the piezoelectric element 32 is contracted. That is, the table 30 can be moved in the X direction by performing the push-pull operation.
【００１３】図５は本発明の実施例を示す圧電素子を用
いたＳＴＭ用ＸＹスキャナテーブルのＹ方向移動説明図
であり、図５（ａ）はその圧電素子を用いたＳＴＭ用Ｘ
Ｙスキャナテーブルの平面図、図５（ｂ）はその圧電素
子を用いたＳＴＭ用ＸＹスキャナテーブルの右側面図、
図５（ｃ）は図５（ａ）のＣ−Ｃ線断面図である。次
に、これらの図に示すように、ＸＹスキャナテーブルを
Ｙ方向に移動させる場合には、圧電素子３５，３６を伸
長させるとともに、圧電素子３７，３８を収縮させる。
つまり、プッシュプル動作を行わせることにより、テー
ブル３０をＹ方向に移動させることができる。FIG. 5 is an explanatory view of the movement of the XY scanner table for STM using a piezoelectric element according to the embodiment of the present invention in the Y direction. FIG.
FIG. 5B is a plan view of the Y scanner table, and FIG. 5B is a right side view of the STM XY scanner table using the piezoelectric element.
FIG. 5C is a sectional view taken along the line CC of FIG. Next, as shown in these figures, when the XY scanner table is moved in the Y direction, the piezoelectric elements 35 and 36 are expanded and the piezoelectric elements 37 and 38 are contracted.
That is, the table 30 can be moved in the Y direction by performing the push-pull operation.
【００１４】なお、２次元スキャナとして用いる場合
は、往復運動させる方向を中央の慣性質量の少ない方向
（図中ではＸ方向）にして走査を行わせる。ところで、
ＳＴＭ用ＸＹスキャナテーブルの場合、ＳＴＭにおいて
正確な像を得るためには、探針を動かす時にＸＹＺの３
軸方向にそれぞれ干渉せずに独立して動作させることが
必要となる。その場合、Ｚ軸とＸＹ軸とは前述のように
スキャナテーブル式とすることにより、独立にできるの
で、要は、ＸＹの２軸が干渉せず移動真直度の良い微少
テーブルを使用すればよい。When the scanner is used as a two-dimensional scanner, the reciprocating motion is performed in a direction in which the central inertial mass is small (X direction in the drawing). by the way,
In the case of an XY scanner table for STM, in order to obtain an accurate image in STM, the XYZ 3
It is necessary to operate independently without interfering with each other in the axial direction. In this case, the Z-axis and the XY-axis can be made independent by using the scanner table type as described above. In short, it is sufficient to use a micro table having a good movement straightness without the two XY axes interfering with each other. .
【００１５】特に、このようにな観点から、本発明のＳ
ＴＭ用ＸＹスキャナテーブルは、ＳＴＭを用いての比較
測長や位置決めを行う超微細ＳＴＭ用ＸＹスキャナテー
ブルとして好適である。なお、本発明は上記実施例に限
定されるものではなく、本発明の趣旨に基づいて種々の
変形が可能であり、これらを本発明の範囲から排除する
ものではない。Particularly, from such a viewpoint, the S of the present invention is
The TM XY scanner table is suitable as an ultrafine STM XY scanner table for performing comparative measurement and positioning using STM. The present invention is not limited to the above-mentioned embodiments, and various modifications can be made based on the spirit of the present invention, and these modifications are not excluded from the scope of the present invention.
【００１６】[0016]
【発明の効果】以上、詳細に説明したように、本発明に
よれば、次のような効果を奏することができる。 （１）いかなる走査範囲においても誤差のない移動真直
度が良好で、歪みのない正確なＳＴＭ像を得ることがで
きる圧電素子を用いたＳＴＭ用ＸＹスキャナテーブルを
得ることができる。 （２）また、ＳＴＭにおいては、探針と試料間のギャッ
プを一定に保ちながら試料表面を２次元的に走査するこ
とで、試料の３次元形状を得ている。そのため、走査面
の歪みが得られるＳＴＭ像の歪みと直接結びついてお
り、走査を行なわせるスキャナの設計には注意が必要で
ある。特に、ＳＴＭを用いての比較測長や位置決めを行
う場合には、同時に二つのＳＴＭ観察を行なうため、ス
キャナによるＳＴＭ像の歪みは最小に抑えなければなら
ない。As described in detail above, according to the present invention, the following effects can be obtained. (1) It is possible to obtain an STM XY scanner table using a piezoelectric element, which has good movement straightness without any error in any scanning range and can obtain an accurate STM image without distortion. (2) Further, in the STM, the three-dimensional shape of the sample is obtained by two-dimensionally scanning the sample surface while keeping the gap between the probe and the sample constant. Therefore, the distortion of the scanning plane is directly related to the distortion of the STM image, and attention must be paid to the design of the scanner for scanning. In particular, when performing comparative length measurement or positioning using the STM, two STM observations are performed simultaneously, so the distortion of the STM image by the scanner must be minimized.
【００１７】このような観点から、本発明のＳＴＭ用Ｘ
Ｙスキャナテーブルは、ＳＴＭを用いての比較測長や位
置決めを行うナノメータオーダーの超微細ＳＴＭのＸＹ
スキャナテーブルとして好適である。その結果、これま
では観察用途が主であったＳＴＭを測定装置の分野にま
で広げていくことが可能となる。From such a viewpoint, the X for STM of the present invention
The Y scanner table is an XY of ultra-fine STM of nanometer order that performs comparative length measurement and positioning using STM.
It is suitable as a scanner table. As a result, it is possible to expand the STM, which has been mainly used for observation, to the field of measuring devices.
【００１８】更には、ＳＴＭによる原子レベルの位置決
め技術を応用すれば、小形で超高分解能な微少ＸＹテー
ブルとしての使用もでき、ナノマシニング分野への発展
が期待できる。Further, by applying the atomic level positioning technology by STM, it can be used as a small XY table having a small size and an ultrahigh resolution, and it can be expected to develop into the field of nanomachining.
【図１】本発明の実施例を示す圧電素子を用いたＳＴＭ
用ＸＹスキャナテーブルの平面図である。FIG. 1 is an STM using a piezoelectric element showing an embodiment of the present invention.
FIG. 3 is a plan view of an XY scanner table for use.
【図２】本発明の実施例を示す圧電素子を用いたＳＴＭ
用ＸＹスキャナテーブルの右側面図である。FIG. 2 is an STM using a piezoelectric element showing an embodiment of the present invention.
It is a right side view of the XY scanner table for use.
【図３】図１のＡ−Ａ線断面図である。3 is a cross-sectional view taken along the line AA of FIG.
【図４】本発明の実施例を示す圧電素子を用いたＳＴＭ
用ＸＹスキャナテーブルのＸ方向移動説明図である。FIG. 4 is an STM using a piezoelectric element showing an embodiment of the present invention.
FIG. 8 is a diagram illustrating movement of a dedicated XY scanner table in an X direction.
【図５】本発明の実施例を示す圧電素子を用いたＳＴＭ
用ＸＹスキャナテーブルのＹ方向移動説明図である。FIG. 5 is an STM using a piezoelectric element showing an embodiment of the present invention.
FIG. 7 is an explanatory view of movement of a dedicated XY scanner table in a Y direction.
【図６】従来のＸＹＺの３軸が連動するトライポッドス
キャナを示す図である。FIG. 6 is a diagram showing a conventional tripod scanner in which three XYZ axes are interlocked.
【図７】従来の円筒形スキャナを示す図である。FIG. 7 is a diagram showing a conventional cylindrical scanner.
【図８】従来のテーブル式スキャナを示す図である。FIG. 8 is a diagram showing a conventional table type scanner.
【図９】従来のＸＹテーブル式スキャナを示す平面図で
ある。FIG. 9 is a plan view showing a conventional XY table type scanner.
【図１０】従来のＸＹテーブル式スキャナのＸ方向移動
説明図である。FIG. 10 is a diagram illustrating movement of a conventional XY table type scanner in the X direction.
３０ テーブル ３１，３２ Ｘ方向駆動圧電素子 ３３，３４ ブロック状の連結部材 ３５，３７，３６，３８ Ｙ方向駆動圧電素子 ４１ 第１の固定部 ４２ 第２の固定部 30 table 31, 32 X-direction driving piezoelectric element 33, 34 block-shaped connecting member 35, 37, 36, 38 Y-direction driving piezoelectric element 41 first fixing portion 42 second fixing portion
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 41/09 Ｈ０２Ｎ 2/00 Ｂ 8525−5Ｈ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H01L 41/09 H02N 2/00 B 8525-5H
Claims (4)
方向の両側面に取り付けられる第１及び第２のＸ方向駆
動圧電素子と、（ｃ）該第１及び第２のＸ方向駆動圧電
素子の端面に取り付けられる第１及び第２の連結部材
と、（ｄ）該第１及び第２の連結部材のそれぞれのＹ方
向の両側面に取り付けられる一対の第１及び第２のＹ方
向駆動圧電素子と、（ｅ）該一対の第１及び第２のＹ方
向駆動圧電素子の端面に取り付けられる第１及び第２の
固定部とを設け、（ｆ）前記Ｘ方向駆動圧電素子の駆動
による前記テーブルの移動と前記Ｙ方向駆動圧電素子の
駆動による前記テーブルの移動の間での干渉をなくすよ
うにしたことを特徴とする圧電素子を用いたトンネル電
子顕微鏡用ＸＹスキャナテーブル。1. A table, and (b) X of the table.
First and second X-direction driving piezoelectric elements attached to both side surfaces in the direction, and (c) first and second connecting members attached to end surfaces of the first and second X-direction driving piezoelectric elements, (D) A pair of first and second Y-direction driving piezoelectric elements attached to both side surfaces of the first and second connecting members in the Y direction, and (e) a pair of first and second Y-direction driving piezoelectric elements. First and second fixing portions attached to the end surface of the Y-direction driving piezoelectric element are provided, and (f) the table is moved by driving the X-direction driving piezoelectric element and the table is driven by the Y-direction driving piezoelectric element. An XY scanner table for a tunnel electron microscope using a piezoelectric element, which is characterized in that interference is eliminated during the movement of the.
ッシュプル動作を行う請求項１記載の圧電素子を用いた
ＳＴＭ用ＸＹスキャナテーブル。2. The XY scanner table for STM using the piezoelectric element according to claim 1, wherein the piezoelectric element performs push-pull operation between opposing piezoelectric elements.
ある請求項１記載の圧電素子を用いたトンネル電子顕微
鏡用ＸＹスキャナテーブル。3. The XY scanner table for a tunnel electron microscope using the piezoelectric element according to claim 1, wherein the piezoelectric element is an ultra-fine driving piezoelectric element.
連結部材である請求項１記載の圧電素子を用いたトンネ
ル電子顕微鏡用ＸＹスキャナテーブル。4. An XY scanner table for a tunnel electron microscope using a piezoelectric element according to claim 1, wherein the first and second connecting members are block-shaped connecting members.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20415092A JP3104889B2 (en) | 1992-07-31 | 1992-07-31 | XY scanner table for tunneling electron microscope using piezoelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20415092A JP3104889B2 (en) | 1992-07-31 | 1992-07-31 | XY scanner table for tunneling electron microscope using piezoelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06213616A true JPH06213616A (en) | 1994-08-05 |
| JP3104889B2 JP3104889B2 (en) | 2000-10-30 |
Family
ID=16485670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20415092A Expired - Fee Related JP3104889B2 (en) | 1992-07-31 | 1992-07-31 | XY scanner table for tunneling electron microscope using piezoelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3104889B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103111990A (en) * | 2011-11-17 | 2013-05-22 | 上海航天测控通信研究所 | Movement mechanism of one-dimensional micro-positioning platform |
-
1992
- 1992-07-31 JP JP20415092A patent/JP3104889B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103111990A (en) * | 2011-11-17 | 2013-05-22 | 上海航天测控通信研究所 | Movement mechanism of one-dimensional micro-positioning platform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3104889B2 (en) | 2000-10-30 |
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