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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Application filed by Dai Nippon Printing Co LtdfiledCriticalDai Nippon Printing Co Ltd
Priority to JP1448686UpriorityCriticalpatent/JPH062134Y2/ja
Publication of JPS62128355UpublicationCriticalpatent/JPS62128355U/ja
Application grantedgrantedCritical
Publication of JPH062134Y2publicationCriticalpatent/JPH062134Y2/ja
Apparatus for optically measuring the distance between two grating-like structures and the size of periodic pattern elements forming one of the grating-like structures