JPH0620969Y2 - 格子干渉型変位検出装置 - Google Patents

格子干渉型変位検出装置

Info

Publication number
JPH0620969Y2
JPH0620969Y2 JP1988006587U JP658788U JPH0620969Y2 JP H0620969 Y2 JPH0620969 Y2 JP H0620969Y2 JP 1988006587 U JP1988006587 U JP 1988006587U JP 658788 U JP658788 U JP 658788U JP H0620969 Y2 JPH0620969 Y2 JP H0620969Y2
Authority
JP
Japan
Prior art keywords
light
diffraction grating
grating
light receiving
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988006587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01112416U (enrdf_load_stackoverflow
Inventor
暢久 西沖
龍夫 板橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP1988006587U priority Critical patent/JPH0620969Y2/ja
Publication of JPH01112416U publication Critical patent/JPH01112416U/ja
Application granted granted Critical
Publication of JPH0620969Y2 publication Critical patent/JPH0620969Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1988006587U 1988-01-21 1988-01-21 格子干渉型変位検出装置 Expired - Lifetime JPH0620969Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988006587U JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988006587U JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Publications (2)

Publication Number Publication Date
JPH01112416U JPH01112416U (enrdf_load_stackoverflow) 1989-07-28
JPH0620969Y2 true JPH0620969Y2 (ja) 1994-06-01

Family

ID=31210894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988006587U Expired - Lifetime JPH0620969Y2 (ja) 1988-01-21 1988-01-21 格子干渉型変位検出装置

Country Status (1)

Country Link
JP (1) JPH0620969Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5380887B2 (ja) * 2008-04-04 2014-01-08 株式会社ニコン 露光方法及びデバイス製造方法、並びに露光装置
JP5734484B2 (ja) * 2014-03-12 2015-06-17 太陽誘電株式会社 変位計測装置及び変位計測方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5939683A (ja) * 1982-08-27 1984-03-05 株式会社日立製作所 吊り具

Also Published As

Publication number Publication date
JPH01112416U (enrdf_load_stackoverflow) 1989-07-28

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