JPH06198255A - Cleaning apparatus and cleaning method - Google Patents

Abstract

PURPOSE:To provide excellent cleaning effect without using a solvent which possibly pollutes environments by installing a cleaning container which can be kept vacuum, a vacuum-evacuating means for the cleaning container, a circulating and supplying means to recover a cleaning liquid and supply the cleaning liquid again, and a circulating fan to forcibly circulate the ambient gas. CONSTITUTION:A cleaning apparatus is provided with a cleaning container 2 in which articles 1 to be cleaned are put and the inside of which can be kept vacuum, a vacuum- evacuating means 3 to make the cleaning container 2 vacuum, a cleaning liquid circulating and supplying means 4 to supply a cleaning liquid to the cleaning container 2 and at the same time to recover the cleaning liquid from the cleaning container 2 and supply it again, and a circulating fan 20 to forcibly circulate the ambient gas in the cleaning container 2. The staining components adhering to the articles 1 to be cleaned are washed out and dissolved and thus the articles are cleaned by spraying the cleaning liquid to the articles 1 to be cleaned through a cleaning nozzle 5 and the remaining cleaning liquid adhering to the articles 1 to be cleaned are quickly evaporated and vacuum drying is carried out by making the cleaning container 2 vacuum after the cleaning.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus and a cleaning method suitable for removing dirt components such as cutting oil adhering to the surface of various metal parts prior to heat treatment. It is a thing.

[0002]

2. Description of the Related Art When this type of cleaning is performed, a chlorinated hydrocarbon solvent such as trichlorethylene is used in order to dissolve and remove hydrocarbon-based fats and oils which are the main components of dirt. Was traditionally common.

[0003]

However, in recent years, it has been pointed out that the above-mentioned solvents may cause environmental pollution. Therefore, when handling or treating such solvents, it is necessary to prevent environmental pollution. From the viewpoint, various measures are indispensable, which not only causes an increase in equipment costs and operating costs, but also raises a concern that such a solvent itself cannot be used.

In view of the above circumstances, it is an object of the present invention to provide a cleaning apparatus and a cleaning method which can obtain an excellent cleaning effect without using a solvent which may pollute the environment.

[0005]

A cleaning apparatus according to the present invention comprises a cleaning container in which an object to be cleaned is housed and the inside of which can be maintained in a vacuum, and an evacuation means for evacuating the inside of the cleaning container. A cleaning liquid circulating supply means for supplying the cleaning liquid to the cleaning container, collecting the cleaning liquid from the cleaning container and supplying the cleaning liquid again, and a circulation fan for forcibly circulating the atmospheric gas in the cleaning container. is there.

As the cleaning liquid, it is preferable to use a hydrocarbon solvent refined from kerosene or soft oil. Further, it is preferable to provide a cleaning nozzle in the cleaning container for spraying the cleaning liquid supplied by the circulation supply means onto the object to be cleaned. Further, it is conceivable that the circulation fan also serves as a heating source for raising the temperature of the object to be cleaned by circulating the atmospheric gas to preheat the object to be cleaned. Further, it is conceivable that a distillation means for distilling and cleaning the cleaning liquid is provided in parallel with the circulation supply means.

Further, in the cleaning method of the present invention, when cleaning is performed by the cleaning apparatus according to any one of claims 1 to 5, after the cleaning liquid is sprayed on the object to be cleaned while the circulating fan is operating, It is characterized in that the cleaning liquid adhering to the object to be cleaned is dropped while the circulating fan is operated to perform draining. Further, when performing the cleaning by the cleaning device according to claim 5, after performing preliminary cleaning by circulatingly supplying the cleaning liquid by the circulation supply means, final cleaning is performed by using the cleaning liquid cleaned by the distillation means. Good to do.

[0008]

In the present invention, the cleaning liquid is sprayed from the cleaning nozzle onto the object to be cleaned to wash away or dissolve the dirt components adhering to the object to be cleaned. After the cleaning, the inside of the cleaning container is evacuated to quickly evaporate the residual cleaning liquid adhering to the object to be cleaned and vacuum-dry it. As the cleaning liquid, a solvent that can dissolve contaminants such as fats and oils and does not pollute the environment, for example, a hydrocarbon solvent refined from kerosene or soft oil is used.

Further, the electric energy supplied to the circulation fan is spent for the work of circulating the atmospheric gas, and finally for raising the temperature of the atmospheric gas itself, so that the atmospheric gas is circulated. The temperature of the atmospheric gas can be raised only by doing so, and therefore the circulating fan can also serve as a heating source for preheating the object to be cleaned prior to cleaning.

Further, when the cleaning liquid is sprayed onto the object to be cleaned from the cleaning nozzle, the circulating fan is driven to spray the cleaning liquid onto the entire object to be cleaned by the atmosphere gas flow, and the object to be cleaned after cleaning is cleaned. When the liquid is drained, the circulation fan is driven to circulate the atmospheric gas, and the liquid flow is promoted by the atmospheric gas flow. Further, the cleaning liquid is distilled by a distillation means to be cleaned and used for finish cleaning.

[0011]

1 is a system diagram of a cleaning apparatus according to an embodiment of the present invention, and FIG. 2 is a sectional view of a cleaning container in the cleaning apparatus. The cleaning apparatus of the present embodiment is for cleaning chips, cutting oil, etc. adhering to the surface of a metal part prior to heat-treating it, and a cleaning container 2 in which an object to be cleaned 1 is stored, Vacuum evacuation means 3 for evacuating the inside of the cleaning container 2, circulation supply means 4 for circulating the cleaning liquid and supplying the cleaning liquid to the cleaning container 2, and distilling a part of the cleaning liquid to remove dirt components in the cleaning liquid. Distillation means 6 for performing a cleaning process is a main constituent element, and kerosene capable of dissolving cutting oil is used as a cleaning liquid.

The cleaning container 2 is a horizontal cylindrical vacuum container in which the object to be cleaned 1 is housed in a basket 11 and arranged therein. In addition, since kerosene having flammability is used as the cleaning liquid in this cleaning device, the inside of the cleaning container 2 is filled with an inert gas such as nitrogen gas in order to prevent the cleaning liquid from being ignited during the preheating process and the cleaning process described later. Will be replaced by. The cleaning container 2 is provided with a circulation fan 20 for forcibly circulating the atmospheric gas inside the cleaning container 2 and also serving as a heating source for preheating.

As shown in FIG. 2, the circulation fan 20 is of a radial fan type, and an impeller 22 is arranged in a casing 21 provided in a bulging form at the top of the cleaning container 2, and the impeller 22 is cleaned. A fan motor 23 provided outside the container 2 is configured to rotate via a power transmission mechanism 24. Reference numeral 25 denotes the rotation axis of the impeller 22 penetrating the upper surface of the casing 21, and 2
Reference numeral 6 is a bearing unit for supporting the rotary shaft 25 and vacuum-sealing the penetrating portion. Reference numerals 27 and 28 are pulleys and V-belts constituting the power transmission mechanism 24.

Further, the lower portion of the casing 21 is a duct portion 29 having a double structure in which the outer peripheral side is a blowout duct 29a and the central side is a suction duct 29b. The lower end of the duct portion 29 projects into the cleaning container 2, the lower end of the blow-out duct 29a on the outer peripheral side is formed in a bellmouth shape, and the suction port 29c is provided at the lower end of the suction duct 29b on the center side. Has been. further,
An annular guide plate 30 is provided at a position directly below the impeller 22 in the casing 21, and a short tubular suction duct 31 is connected to the center of the guide plate 30, and the suction duct 31 and the suction duct 29b are connected to each other. A gap serving as a bypass 32 is secured between them.

The circulation fan 2 configured as described above
When 0 is actuated, the atmospheric gas is discharged from the inside of the casing 21 to the blow-out duct 29a on the outer peripheral side of the duct portion 29 by the impeller 22 as shown by the arrow in the figure, and a part of it is passed through the blow-out duct 29a and washed as it is. The atmospheric gas blown into the container 2 and blown into the cleaning container 2 is sucked into the suction port 29c on the center side of the duct portion 29 and sucked into the casing 21 through the suction duct 29b. Most of the discharged atmospheric gas is not blown into the cleaning container 2 but is immediately sucked into the impeller 22 again through the bypass passage 32. In this case, the ambient gas to be bypassed is the guide plate 30, the bypass passage 32, the suction duct 31.
When passing through the bypass path formed by the above, a predetermined passage resistance is received, but the passage resistance is sufficiently smaller than the passage resistance received by the atmospheric gas blown out into the cleaning container 2 and returned from there. And the ratio of the ventilation resistances thereof is appropriately set, so that the ratio of the amount of atmospheric gas passing through the bypass 32 and the amount of atmospheric gas blown into the cleaning container 2 is determined. .

The circulation fan 20 described above not only circulates the atmospheric gas in the cleaning container 2 as described above, but also heats the atmospheric gas to preheat the object to be cleaned 1 before cleaning. It also serves as a heating source. That is, the electric energy supplied to the fan motor 23 of the circulation fan 20 is converted into mechanical energy by the circulation fan 20 and is consumed for the work of circulating the atmospheric gas. Eventually, the loss is removed and the energy is converted into heat energy, which is consumed to raise the temperature of the atmospheric gas itself. That is, the circulation fan 20
By supplying a predetermined power (electrical energy) to the atmosphere and forcibly circulating the atmosphere gas in the cleaning container 2, the temperature of the atmosphere gas can be raised to a predetermined temperature without providing a special heating device such as an electric heater. It is possible to preheat the article to be cleaned 1 by the atmospheric gas heated in this way.

Therefore, in the present embodiment, the capacity of the fan motor 23 is not determined by the required static air pressure determined by the required circulating air volume and passage resistance in the cleaning container 2, but the ambient gas is controlled by the required temperature (for example, the temperature). 40-60 ° C
It is decided to obtain the energy required for heating up to (degree). Then, if the capacity of the fan motor 23 is determined in this way, the amount of air blown by the circulation fan 20 becomes excessive. Therefore, the surplus portion of the amount of air blown by the circulation fan 20 is blown to the cleaning container 2. The flow rate of the atmospheric gas blown into the cleaning container 2 is suppressed to an appropriate value (for example, about 5 m / s) by bypassing the bypass passage 23 without any action.

On the other hand, the vacuum evacuation means 3 is for performing vacuum drying by vacuuming the inside of the cleaning container 2 after cleaning, and comprises a vacuum pump 41, a condenser 42, a vacuum valve 43 and a vacuum exhaust pipe 44. Has been done. The condenser 42 is liquefied by cooling the vapor of the cleaning liquid contained in the exhaust gas,
The liquefied cleaning liquid is passed through the recovery pipe 45 to the recovery tank 54.
It is for recovery (described later). Reference numeral 46 is a shutoff valve provided in the middle of the recovery pipe 45. The most common oil rotary pump may be used as the vacuum pump 41, but another type of vacuum pump such as a roots pump may be appropriately adopted depending on the required degree of vacuum.

Further, the circulation supply means 4 is for supplying the cleaning liquid to the cleaning nozzle 51 by means of a cleaning nozzle 51 provided around the work zone in the cleaning container 2 in order to spray the cleaning liquid onto the object to be cleaned 1. The supply pump 53, a recovery tank 5 for storing the cleaning liquid recovered from the bottom of the cleaning container 2.
4, and a supply pipe 56, a recovery pipe 57, a return pipe 58 which form a circulation path, and a shutoff valve 59, a filter 60, a shutoff valve 61, a shutoff valve 62, which are provided in the middle thereof.
It consists of a check valve 63. Further, nitrogen gas is introduced into the recovery tank 54 through a nitrogen gas supply pipe 67 in order to prevent the cleaning liquid (kerosene) from being ignited in the unlikely event that the recovery tank 54 has a predetermined pressure (about atmospheric pressure). ) Is replaced with nitrogen gas. Reference numeral 68 is a pressure reducing valve, and 69 is a safety valve.

Further, the distillation means 6 is provided in parallel with the circulation supply means 4, and a part of the cleaning liquid recovered in the recovery tank 54 is distilled to disinfect the cleaning nozzle 51.
Is to supply to. The distillation means 6 is a distiller 71 for heating and evaporating the cleaning liquid introduced from the recovery tank 54, a condenser 72 for cooling and liquefying the vapor of the cleaning liquid evaporated in the distiller 71, and liquefying it. It comprises a supply tank 52 for storing the cleaning liquid. Nitrogen gas is introduced into the supply tank 52 through the nitrogen gas supply pipe 67. When the cleaning liquid is pressure-fed to the cleaning nozzle 51, the stop valve 55 is closed and the inside of the supply tank 52 has a predetermined pressure (about atmospheric pressure). ) Is filled with nitrogen gas. Reference numeral 75 is branched from the middle of the return pipe 58 to introduce a cleaning liquid from the recovery tank 54 into the distiller 71. Reference numerals 76 and 77 are a stop valve and a needle valve provided in the middle thereof, and 78 is a valve. A vapor pipe connecting the distiller 71 and the condenser 72, a return pipe 79 connecting the supply tank 52 and the supply pump 53, and a check valve 80 provided on the inlet side of the pump 74 on the way. A valve 81 is a shut-off valve provided on the inlet side of the supply pump 53.

The distiller 71 has a heater 82 for heating and evaporating the cleaning liquid at the bottom thereof, a discharge pipe 83 for discharging dirt components as evaporation residue and a discharge valve 84.
And are provided. Further, the distillation means 6 in the present embodiment is supposed to perform distillation and liquefaction under a vacuum atmosphere so that distillation can be performed at a low temperature, and a vacuum exhaust means for this purpose is attached to the condenser 72. This vacuum exhaust means includes a vacuum pump 91, an exhaust pipe 92, and a vacuum valve 93 provided in the middle thereof.
The range from the shutoff valve 76 in the middle of the introduction pipe 75 to the distiller 71, the steam pipe 78, the condenser 72, the liquid pool 73, and the check valve 80 in the middle of the return pipe 79 is, for example, 30 to
The vacuum is maintained at about 60 Torr.

A cleaning work procedure by the cleaning device having the above-mentioned configuration will be described. First, the object to be cleaned 1 is stored in the basket 11, and the basket 11 is stored in the cleaning container 2.
The inside of the cleaning container 2 is once evacuated by the vacuum evacuation means 3, and then nitrogen gas is introduced until the atmospheric pressure is reached to replace the inside of the cleaning container 2 with nitrogen gas. Further, the gas in each of the tanks 52 and 54 is also replaced.

Next, the object to be cleaned 1 is preheated for the purpose of improving the cleaning effect and shortening the vacuum drying time.
That is, by operating the circulation fan 20 as described above and forcibly circulating the atmosphere gas (nitrogen gas in this embodiment) in the cleaning container 2, the circulation fan 2
The temperature of the atmospheric gas is raised by the electric energy supplied to the object 0.
By spraying on the object 1, the object to be cleaned 1 is raised to a predetermined preheating temperature, for example, about 60 ° C.

When the object to be cleaned 1 reaches the preheating temperature, the cleaning process is started. The cleaning process is divided into two steps, that is, preliminary cleaning and finish cleaning. That is, the supply pump 53 is operated and the cleaning liquid stored in the recovery tank 54 is pressure-fed to the cleaning nozzle 51 and sprayed onto the object to be cleaned 1 to remove solid matter such as chips attached to the object to be cleaned 1. When it is washed off, oils and fats such as cutting oil are dissolved in the cleaning liquid. Then, the cleaning liquid sprayed on the object to be cleaned 1 is recovered from the bottom of the cleaning container 2 into the recovery tank 54 again through the recovery pipe 57. At that time, the solid matter in the cleaning liquid is removed by the filter 60. At this time, the circulation fan 20 may be continuously operated without being stopped so that the atmosphere gas flow is formed in the cleaning container 2. By doing so, the cleaning liquid blown out from the cleaning nozzle 51 flows into the inside or the back side of the object to be cleaned 1 along the atmosphere gas flow, and the cleaning liquid can be sprayed over the entire object to be cleaned 1.

The spraying time of the cleaning liquid is set in advance in consideration of the amount of the object to be cleaned 1 and the degree of dirt, so that the quantity of the object to be cleaned 1 is large or the shape is complicated so that the dirt cannot be easily removed. In that case, set the spraying time longer.
When the above-mentioned preliminary cleaning is completed, the next step is the final cleaning. That is, the stop valve 81 is opened and the stop valve 62 is closed, and all or part of the cleaning liquid in the supply tank 52 is sprayed on the article to be cleaned 1. This finish cleaning step may be performed subsequent to the preliminary cleaning step, but may be allowed after a while.

After the cleaning process is completed, a predetermined liquid draining time is secured, and then the process proceeds to the vacuum exhaust process. That is, the supply pump 53 is stopped and the stop valve 59 is closed to stop the supply of the cleaning liquid, and the state is maintained for a predetermined time until the cleaning liquid adhering to the object to be cleaned 1 is dropped and collected in the recovery tank 54. To do. At this time, if the circulation fan 20 is operated as it is without being stopped, the dripping of the cleaning liquid adhering to the object to be cleaned 1 is promoted by the atmosphere gas flow circulating in the cleaning container 2 to drain the cleaning liquid. The time required can be shortened. When the drainage is completed, the stop valve 61 is closed, the circulation fan 20 is stopped, and then the vacuum exhaust means 3
Thus, the interior of the cleaning container 2 is evacuated to a predetermined degree of vacuum and the state is maintained for a predetermined time. Then, the evaporation temperature of the cleaning liquid in the cleaning container 2 is much lower than the evaporation temperature under normal pressure, and the residual cleaning liquid adhering to the object to be cleaned 1 that has been preheated to a high temperature is quickly evaporated and exhausted. The object to be cleaned 1 is dried in a short time. At this time, the vapor of the cleaning liquid contained in the exhaust gas is reliquefied by the condenser 42 and returned to the recovery tank 54 through the recovery pipe 45.

When the cleaning process is completed, a distillation process is performed in parallel with the above vacuum exhaust process. The distilling step is performed in order to distill and clean a part of the cleaning liquid that has been soiled by cleaning the object to be cleaned 1, and a part of the cleaning liquid accumulated in the recovery tank 54 at the end of the cleaning process is distilled by the distiller 71. The cleaning liquid is evaporated by heating there, and the vapor is reliquefied by the condenser 72 and stored in the supply tank 52, and a sufficiently cleaned cleaning liquid is stored in the supply tank 52 in an appropriate amount. Contamination components such as cutting oil contained in the cleaning liquid are left in the distiller 71 as evaporation residues, and therefore these can be discharged by opening the discharge valve 84 and appropriately treated. In addition, as described above, the vacuum pump 91 is used in the still 71 and the condenser 72 to perform the distillation process at a low temperature.
Keep it in vacuum by. Further, since the interior of the still 71 is evacuated, the cleaning liquid is introduced from the recovery tank 54 into the still 71 by vacuum suction only by opening the stop valve 76 and the needle valve 77.

Here, the amount of the cleaning liquid to be distilled, that is, the amount of the cleaning liquid accumulated in the recovery tank 54 at the end of the cleaning process, is the total amount of the cleaning liquid, the allowable concentration of dirt components (cutting oil, etc.) in the cleaning liquid, Although it is set as appropriate in consideration of the degree of contamination of the cleaning product 1, the cleanliness of the cleaning liquid obtained by distillation, etc., it is preferably set to about half of the total amount of the cleaning liquid. That is, at the end of the cleaning process, about half of the cleaning liquid is left in the recovery tank 54, and the other half is sent to the distiller 71. Then, it is distilled by the distiller 71 to be sufficiently cleaned and then returned to the supply tank 52. The cleaning liquid in the recovery tank 54 used for the preliminary cleaning is mixed with the distilled liquid at the completion of each process. Therefore, the entire cleaning liquid returns to the original cleanness before cleaning. That is, the cleanliness after the preliminary cleaning is always automatically maintained at a constant concentration within the allowable range.

As described above, since kerosene is used as the cleaning liquid in the above-mentioned cleaning device, it is possible to dissolve the oil and fat components such as the cutting oil, which is the main component of dirt, and to obtain an excellent cleaning effect. Since kerosene has no concern about environmental pollution, no special measures to prevent environmental pollution are required, and because it is easy and cheap to handle, the equipment cost is higher than that of the conventional case where cleaning is performed using a special solvent. It is extremely advantageous in terms of operating costs. This is true not only when using kerosene, but also when using, for example, light oil or a hydrocarbon solvent refined from soft oil.

Since the above apparatus has the circulation fan 20 for forcibly circulating the atmospheric gas, the cleaning liquid blown out from the cleaning nozzle 51 by performing the cleaning while operating the circulation fan 20. Since it is possible to spray the whole of the object to be cleaned 1 by the atmosphere gas flow, an excellent cleaning effect can be obtained, and the liquid draining time can be shortened by performing draining while operating the circulation fan 20. There are advantages. Further, since the cleaning liquid is distilled by the distiller 71 to be cleaned and the final cleaning is performed using the cleaning liquid, the cleaning liquid can be sufficiently cleaned. Further, since the circulation fan 20 is used as a heating source for preheating the object to be cleaned 1, the atmospheric gas and the object to be cleaned 1 can be efficiently preheated without providing special heating means such as an electric heater. It is possible to achieve the simplification of the structure.

In the above embodiment, the inside of the cleaning container 2 was replaced with an inert gas such as nitrogen gas, so that the inert gas was circulated as an atmospheric gas.
When cleaning is performed in the air atmosphere, the air in the cleaning container 2 may be used as an atmosphere gas and circulated. In addition, the model of the circulation fan 20, its installation position and the number of installations,
The direction of the atmosphere gas flow formed in the cleaning container 2 is not limited to the above embodiment, and may be changed as appropriate. For example, the circulation fan 20 is provided laterally on the side of the cleaning container 2 so that the atmosphere gas flows sideways. To the outside, or to install the circulation fan 20 at the bottom of the cleaning container 2 so as to blow out the atmospheric gas upward, or to install the circulation fan 20 at a position away from the cleaning container 2 and to install them by a duct. You may make it connect. Further, an airflow direction plate for adjusting the wind direction of the atmospheric gas is provided in the cleaning container 2 so that the direction of the atmospheric gas flow can be changed between the cleaning process and the draining process, for example. The direction of the atmosphere gas flow may be changed according to the shape, size, and amount of the cleaning product 1.

Further, in the above embodiment, the circulation fan 20 is used.
Since it also serves as a heating source for preheating, the amount of air blown becomes excessively large. Therefore, the bypass passage 32 for bypassing a part of the amount of air blow was secured. Bypass 32
It is also possible to omit the above and blow out the entire air flow into the cleaning container 2. The circulation fan 20 also serves as a heating source for preheating, but another heating source such as an electric heater may be separately used as a preheating source.

[0033]

As described above, according to the present invention, a cleaning container in which an object to be cleaned is stored and the inside of which can be maintained in a vacuum, and a vacuum evacuation means for evacuating the inside of the cleaning container Since the cleaning liquid is supplied to the cleaning container, and the cleaning liquid is circulated and supplied from the cleaning container to be supplied again, and the circulation fan for forcibly circulating the atmospheric gas in the cleaning container is provided, Not only is it possible to obtain an excellent cleaning effect by spraying the product to be cleaned, but it is also possible to perform efficient cleaning because it can be dried in a short time by performing vacuum drying after cleaning. is there. If a hydrocarbon-based solvent refined from kerosene or soft oil is used as the cleaning liquid, no special environmental pollution prevention measures are required because there is no concern about environmental pollution, and it is easy to handle and inexpensive. It is significantly advantageous in terms of equipment costs and operating costs as compared with the conventional case where cleaning is performed using a different solvent. In addition, if a cleaning liquid cleaning nozzle is provided in the cleaning container and the cleaning liquid is sprayed onto the object to be cleaned and the circulation fan is operated to perform cleaning, the cleaning liquid can be cleaned. It can be sprayed on the whole and the cleaning effect can be further enhanced. Further, if the circulation fan is operated to drain the liquid, the cleaning liquid adhering to the object to be cleaned is blown off by the atmosphere gas flow, so that the liquid draining time can be shortened. Further, if the cleaning liquid is cleaned by the distillation means and used for finish cleaning, cleaning can be performed to a higher degree of cleanliness. Further, if the circulation fan also serves as a heating source for preheating the object to be cleaned, there is an advantage that the atmospheric gas and the object to be cleaned can be efficiently heated without providing special heating means. .

[Brief description of drawings]

FIG. 1 is a system diagram of a cleaning device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a cleaning container and a circulation fan in the same device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Object to be cleaned 2 Cleaning container 3 Vacuum exhaust means 4 Circulation supply means 6 Distillation means 20 Circulation fan 51 Cleaning nozzle.

Claims (7)

[Claims] 1. A cleaning container in which an object to be cleaned is housed and which can maintain a vacuum inside thereof, a vacuum evacuation means for evacuating the inside of the cleaning container, a cleaning liquid is supplied to the cleaning container, and a cleaning container is also provided. A cleaning apparatus, comprising: a circulation supply unit for cleaning liquid, which is collected from the cleaning container and supplied again, and a circulation fan for forcibly circulating the atmospheric gas in the cleaning container. 2. The cleaning apparatus according to claim 1, wherein a hydrocarbon solvent refined from kerosene or soft oil is used as the cleaning liquid. 3. The cleaning nozzle for spraying the cleaning liquid supplied by the circulation supply means onto the object to be cleaned is provided in the cleaning container. The cleaning device described. 4. The circulation fan also serves as a heating source for raising the temperature of the object to be cleaned by circulating the atmospheric gas to preheat the object to be cleaned before cleaning. The cleaning device according to any one of 1 to 3. 5. The cleaning apparatus according to claim 1, wherein distillation means for distilling and cleaning the cleaning liquid is provided in parallel with the circulation supply means. 6. A method for cleaning with the cleaning device according to claim 1, wherein the circulating fan is operated after the cleaning liquid is sprayed onto the object to be cleaned while the circulating fan is operated. A cleaning method, characterized in that the cleaning liquid adhering to the object to be cleaned is dropped while draining. 7. A method of cleaning with the cleaning apparatus according to claim 5, wherein the cleaning solution is circulated and supplied by the circulation supply means to perform preliminary cleaning, and then the cleaning solution cleaned by the distillation means is used. A cleaning method characterized by performing finish cleaning using the method.