JPH06196115A - Surface producing type ion generator - Google Patents
Surface producing type ion generatorInfo
- Publication number
- JPH06196115A JPH06196115A JP4346455A JP34645592A JPH06196115A JP H06196115 A JPH06196115 A JP H06196115A JP 4346455 A JP4346455 A JP 4346455A JP 34645592 A JP34645592 A JP 34645592A JP H06196115 A JPH06196115 A JP H06196115A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- charge conversion
- ion generator
- conversion electrode
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000498 cooling water Substances 0.000 claims abstract description 33
- 238000001816 cooling Methods 0.000 claims abstract description 22
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 20
- 239000011733 molybdenum Substances 0.000 claims abstract description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- 239000004020 conductor Substances 0.000 claims abstract description 6
- 238000006243 chemical reaction Methods 0.000 claims description 71
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000005260 corrosion Methods 0.000 abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 7
- 150000002500 ions Chemical class 0.000 description 37
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052792 caesium Inorganic materials 0.000 description 6
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000005596 ionic collisions Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、イオン加速器に使用す
る表面生成型イオン発生装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface generation type ion generator used in an ion accelerator.
【０００２】[0002]
【従来の技術】従来のこの種の表面生成型イオン発生装
置としては、例えば「The 6th Symposium on Accelerat
or Science and Technology 」（IONICS PUBLISHING CO
MPANY、1987年発行、p.70−p.71）に記載された、図４
に示すようなものが知られている。同図において、１は
中央にイオンビームが取り出される穴を持つリペラ、２
はリペラ１にフランジ取り付けされているバレル、３は
バレル２にフランジ取り付けされているエンドプレート
である。2. Description of the Related Art As a conventional surface generation type ion generator of this type, for example, "The 6th Symposium on Accelerat
or Science and Technology "(IONICS PUBLISHING CO
MPANY, published in 1987, p.70-p.71), Figure 4
The ones shown in are known. In the figure, 1 is a repeller having a hole for extracting an ion beam in the center, 2
Is a barrel attached to the repeller 1 by a flange, and 3 is an end plate attached by a flange to the barrel 2.
【０００３】４はリペラ１とバレル２とエンドプレート
３で構成される真空容器内に設置されたモリブデンから
なる荷電変換用電極、５はバレル２の円周上に極性を交
互に変えて設置された永久磁石、６は永久磁石５を格納
するベッセル、７はリペラ１とバレル２とエンドプレー
ト３で構成される真空容器内に設置されたフィラメン
ト、８は荷電変換用電極４を支持する支持棒、９はリペ
ラ１とバレル２とエンドプレート３で構成される真空容
器内にセシウム蒸気を導入するためのセシウム導入管、
１０はリペラ１とバレル２とエンドプレート３で構成さ
れる真空容器内に、生成すべきイオン核種から成るガス
を導入するためのガス導入管である。Reference numeral 4 denotes a charge conversion electrode made of molybdenum, which is installed in a vacuum container composed of a repeller 1, a barrel 2 and an end plate 3, and 5 is installed on the circumference of the barrel 2 with the polarities alternately changed. A permanent magnet, 6 a vessel for storing the permanent magnet 5, 7 a filament installed in a vacuum container composed of the repeller 1, barrel 2 and end plate 3, 8 a support rod for supporting the charge conversion electrode 4. , 9 is a cesium introducing pipe for introducing cesium vapor into a vacuum container composed of a repeller 1, a barrel 2 and an end plate 3,
Reference numeral 10 is a gas introduction pipe for introducing a gas containing an ion nuclide to be produced into a vacuum container constituted by the repeller 1, the barrel 2 and the end plate 3.
【０００４】１１はエンドプレート３に取り付けられた
電極取付ポート、１２は電極取付ポート１１に取り付け
られた絶縁フランジ、１３は絶縁フランジ１２を挟んで
電極取付ポートに固定され、支持棒８に電気的に接合さ
れている電極支持フランジ、１４は荷電変換用電極４と
支持棒８の回りを囲むスパッタ保護カバー、１５はリペ
ラ１とバレル２とエンドプレート３で構成される真空容
器と電極支持フランジ１３の間に電圧を印加する高圧電
源である。Reference numeral 11 denotes an electrode mounting port mounted on the end plate 3, 12 is an insulating flange mounted on the electrode mounting port 11, 13 is fixed to the electrode mounting port with the insulating flange 12 interposed therebetween, and is electrically connected to the support rod 8. The electrode support flange joined to the electrode, 14 is a spatter protection cover surrounding the charge conversion electrode 4 and the support rod 8, and 15 is a vacuum container composed of the repeller 1, the barrel 2 and the end plate 3 and the electrode support flange 13. It is a high voltage power supply that applies a voltage between the two.
【０００５】図５は上記図４の表面生成型イオン発生装
置の荷電変換用電極４と支持棒８部分の詳細図であり、
１６は支持棒８の一部を成すフランジと荷電変換用電極
を締め込むリングナット、１７は冷却水をシールするＯ
リング、１８は支持棒８に内蔵され、冷却水の流路を成
す支持棒内管である。FIG. 5 is a detailed view of the charge conversion electrode 4 and the support rod 8 of the surface generation type ion generator shown in FIG.
Reference numeral 16 is a ring nut for tightening the flange forming part of the support rod 8 and the charge conversion electrode, and 17 is O for sealing cooling water.
The ring 18 is a support rod inner tube which is built in the support rod 8 and forms a flow path of cooling water.
【０００６】上記表面生成型イオン発生装置の動作につ
いて説明する。バレル２の円周上に極性を交互にして配
置された永久磁石５は、リペラ１とバレル２とエンドプ
レート３で構成される真空容器内にカスプ磁場を発生す
る。また、荷電変換用電極４は、高圧電源１５によっ
て、真空容器に対して負の電位になっている。この状態
で、ガス導入管１０から、生成すべきイオンから成るガ
スを真空容器内に導入する。The operation of the surface generation type ion generator will be described. Permanent magnets 5 arranged on the circumference of the barrel 2 with alternating polarities generate a cusp magnetic field in a vacuum container composed of the repeller 1, the barrel 2 and the end plate 3. Further, the charge conversion electrode 4 has a negative potential with respect to the vacuum container by the high voltage power supply 15. In this state, a gas containing ions to be generated is introduced into the vacuum container from the gas introduction pipe 10.
【０００７】そして、フィラメント７に通電加熱のう
え、フィラメント７と真空容器の間に電圧をかけると、
フィラメント７から熱電子が放出される。真空容器内の
ガスはこの熱電子によって励起され、正イオンのプラズ
マとなる。このプラズマは永久磁石５が発生するカスプ
磁場によって閉じ込められているので、電位の低い荷電
変換用電極４に正イオンが集まり、電極面に衝突する。
このイオン衝突によって電極面が荒れにくいように、荷
電変換用電極４はモリブデンからできている。When the filament 7 is electrically heated and a voltage is applied between the filament 7 and the vacuum container,
Thermoelectrons are emitted from the filament 7. The gas in the vacuum container is excited by the thermoelectrons and becomes positive ion plasma. Since this plasma is confined by the cusp magnetic field generated by the permanent magnet 5, positive ions gather at the charge conversion electrode 4 having a low potential and collide with the electrode surface.
The charge conversion electrode 4 is made of molybdenum so that the electrode surface is not easily roughened by this ion collision.
【０００８】一方、セシウム導入管９からは、セシウム
蒸気が真空容器内に導入されている。このセシウムが電
子のドナー物質となり、荷電変換用電極４に集まった正
イオンは荷電変換する。この荷電変換によって生成され
た負イオンは、電位の高いリペラ１へ向かって飛び出し
ていき、リペラ１の中央に開けた穴を通り抜け、イオン
発生装置の外へ取り出される。On the other hand, cesium vapor is introduced into the vacuum vessel from the cesium introducing pipe 9. The cesium serves as an electron donor substance, and the positive ions collected in the charge conversion electrode 4 are converted into charge. The negative ions generated by this charge conversion jump out toward the repeller 1 having a high potential, pass through a hole formed in the center of the repeller 1, and are taken out of the ion generator.
【０００９】前記動作時、荷電変換用電極４には、イオ
ンが集まって電極に衝突する際に放出される熱とフィラ
メント７に通電加熱する際に放射される熱の一部が流入
する。このため、そのままでは荷電変換用電極４が高温
となってしまうため、冷却水によって冷却している。す
なわち、図５において、水冷用の冷却水は、支持棒内管
１８の内側を通って荷電変換用電極４の背面に送給さ
れ、電極を直接冷却した後、支持棒内管１８と支持棒８
との間に形成された排水路を通って外部へ排出される。
なお、荷電変換用電極４を囲んで配置されたスパッタ保
護カバー１４は、イオンが荷電変換用電極４以外の部分
に集まらないよう保護するものである。During the above-described operation, the heat emitted when the ions gather and collide with the electrode and a part of the heat emitted when the filament 7 is heated by energization flow into the charge conversion electrode 4. For this reason, the charge conversion electrode 4 becomes high in temperature as it is, and therefore it is cooled by the cooling water. That is, in FIG. 5, the cooling water for water cooling is sent to the back surface of the charge conversion electrode 4 through the inside of the support rod inner tube 18 to directly cool the electrode, and then to the support rod inner tube 18 and the support rod. 8
It is discharged to the outside through a drainage channel formed between
The sputter protection cover 14 arranged so as to surround the charge conversion electrode 4 protects ions from being collected in a portion other than the charge conversion electrode 4.
【００１０】[0010]
【発明が解決しようとする課題】上記した表面生成型イ
オン発生装置では、荷電変換用電極４にイオンが衝突し
て電極面が荒れるため、荷電変換用電極４に、イオンに
衝突されても電極面が荒れにくいモリブデンが採用され
ている。一方、イオンのビーム電流を大きくすると、荷
電変換用電極４の温度が上昇し、電極面にセシウムが付
着しなくなる。したがって、イオンのビーム電流を大き
くするには電極面の冷却効率を上げる必要があり、前述
したように荷電変換用電極４を直接水冷していた。In the above-mentioned surface generation type ion generator, since the ions collide with the charge conversion electrode 4 and the electrode surface is roughened, even if the charge conversion electrode 4 collides with the ions, Molybdenum is used to prevent the surface from becoming rough. On the other hand, when the ion beam current is increased, the temperature of the charge conversion electrode 4 rises and cesium does not adhere to the electrode surface. Therefore, in order to increase the ion beam current, it is necessary to increase the cooling efficiency of the electrode surface, and as described above, the charge conversion electrode 4 is directly water-cooled.
【００１１】しかしながら、荷電変換用電極４を構成す
るモリブデンは酸化しやすく、直接水冷することにより
腐食するので、長期間使用していると、Ｏリングのシー
ル面が荒れ、冷却水をシールできなくなってしまう。こ
のため、従来の表面生成型イオン発生装置では、荷電変
換用電極の寿命が短いなどの問題があった。However, molybdenum which constitutes the charge conversion electrode 4 is easily oxidized and corroded by direct water cooling, so that the sealing surface of the O-ring becomes rough and the cooling water cannot be sealed after long-term use. Will end up. Therefore, the conventional surface generation type ion generator has a problem that the life of the charge conversion electrode is short.
【００１２】本発明は上記課題を解決するために成され
たもので、荷電変換用電極の冷却水による腐食を低減
し、荷電変換用電極の寿命の長い表面生成型イオン発生
装置を得ることを目的としている。The present invention has been made to solve the above problems, and it is an object of the present invention to obtain a surface generation type ion generator which reduces corrosion of a charge conversion electrode due to cooling water and has a long life of the charge conversion electrode. Has an aim.
【００１３】[0013]
【課題を解決するための手段】第１の発明に係る表面生
成型イオン発生装置は、荷電変換用電極を冷却水によっ
て直接冷却するように構成された表面生成型イオン発生
装置において、荷電変換用電極の電極外面部をモリブデ
ンにより構成するとともに、冷却水と接する電極背面部
を銅により構成したものである。A surface generation type ion generator according to a first aspect of the invention is a surface generation type ion generator configured to directly cool a charge conversion electrode with cooling water. The electrode outer surface portion of the electrode is made of molybdenum, and the electrode back surface portion in contact with the cooling water is made of copper.
【００１４】また、第２の発明に係る表面生成型イオン
発生装置は、荷電変換用電極を冷却水によって間接冷却
するように構成された表面生成型イオン発生装置におい
て、モリブデンからなる荷電変換用電極と接触する間接
冷却用の支持棒として良熱伝導材を用い、該支持棒と荷
電変換用電極との接触面に柔軟性に富んだ金属製の伝熱
シートを挟んだものである。The surface generating ion generator according to the second aspect of the present invention is a surface generating ion generator configured to indirectly cool a charge conversion electrode with cooling water. A good heat conductive material is used as a support rod for indirect cooling that contacts with, and a highly flexible metal heat transfer sheet is sandwiched between contact surfaces of the support rod and the charge conversion electrode.
【００１５】[0015]
【作用】第１の発明に係る表面生成型イオン発生装置の
場合、イオンを生成するための電極外面部は従来と同じ
モリブデンで構成し、冷却水と接する電極背面部を腐食
性と熱伝導性に優れた銅で構成したので、冷却水による
耐食性が向上するとともに、電極面の冷却効率が良くな
る。このため、荷電変換用電極の寿命が長くなり、イオ
ンのビーム電流も大きくすることができる。In the case of the surface generation type ion generator according to the first aspect of the invention, the outer surface of the electrode for generating ions is made of molybdenum, which is the same as the conventional one, and the rear surface of the electrode in contact with cooling water is corrosive and heat conductive. Since it is made of excellent copper, the corrosion resistance against cooling water is improved and the cooling efficiency of the electrode surface is improved. Therefore, the life of the charge conversion electrode is extended and the ion beam current can be increased.
【００１６】第２の発明に係る表面生成型イオン発生装
置の場合、冷却用の支持棒として銅またはアルミニウム
などの良熱伝導材を用い、該支持棒と荷電変換用電極の
接触面との間に、アルミニウムまたはインジウムなどの
柔軟性に富んだ金属製の伝熱シートを挟んだので、支持
棒と荷電変換用電極間の熱抵抗を小さくすることがで
き、間接冷却方式にもかかわらず、電極面の冷却効率を
落とさずに済む。また、荷電変換用電極に直接冷却水が
触れないので、荷電変換用電極は冷却水による腐食がな
くなる。このため、荷電変換用電極の寿命を長くでき
る。また、間接冷却方式のため、冷却水のシールを破ら
ずに荷電変換用電極を取り替えることができ、メンテナ
ンス性が向上する。In the case of the surface generating ion generator according to the second aspect of the present invention, a good heat conductive material such as copper or aluminum is used as a supporting rod for cooling, and the supporting rod is placed between the contact surface of the charge conversion electrode. Since a heat transfer sheet made of a highly flexible metal such as aluminum or indium is sandwiched between the electrodes, it is possible to reduce the thermal resistance between the support rod and the charge conversion electrode. It is not necessary to reduce the cooling efficiency of the surface. Further, since the cooling water does not come into direct contact with the charge conversion electrode, the charge conversion electrode is not corroded by the cooling water. Therefore, the life of the charge conversion electrode can be extended. Further, because of the indirect cooling method, the charge conversion electrode can be replaced without breaking the seal of the cooling water, and the maintainability is improved.
【００１７】[0017]
【実施例】第１の発明に係る表面生成型イオン発生装置
の第１の実施例を図１に基づいて説明する。図１は荷電
変換用電極と支持棒部分の断面図である。図において、
荷電変換用電極４は銅とモリブデンのクラッド材からな
り、電極外面部４ａがモリブデン、冷却水と直接接する
電極背面部４ｂが銅とされている。水冷用の冷却水は、
支持棒内管１８の内側を通って荷電変換用電極４の背面
に送給され、電極背面部４ｂを直接冷却した後、支持棒
内管１８と支持棒８の間に形成された排水路を通って外
部へ排出される。電極背面部４ｂを構成する銅は、冷却
水に対する耐食性が良く、冷却水によって簡単には腐食
されないので、Ｏリング１７のシール面が荒れにくい。
また、銅はモリブデンよりも熱伝導が良く、電極面の冷
却効率を向上することができる。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the surface generation type ion generator according to the first invention will be described with reference to FIG. FIG. 1 is a sectional view of a charge conversion electrode and a support rod portion. In the figure,
The charge conversion electrode 4 is made of a clad material of copper and molybdenum, the outer surface 4a of the electrode is molybdenum, and the back surface 4b of the electrode that is in direct contact with the cooling water is copper. The cooling water for water cooling is
After being fed to the back surface of the charge conversion electrode 4 through the inside of the support rod inner tube 18 and directly cooling the electrode back surface portion 4b, the drainage channel formed between the support rod inner tube 18 and the support rod 8 is removed. It passes through and is discharged to the outside. The copper forming the electrode back surface portion 4b has good corrosion resistance to cooling water and is not easily corroded by the cooling water, so that the sealing surface of the O-ring 17 is not easily roughened.
Further, copper has better thermal conductivity than molybdenum, and can improve the cooling efficiency of the electrode surface.
【００１８】第１の発明に係る表面生成型イオン発生装
置の第２の実施例を図２に基づいて説明する。図２は荷
電変換用電極と支持棒部分の断面図である。図におい
て、荷電変換用電極４の電極背面部４ｂとなる銅材の表
面に、メッキまたはイオンビーム蒸着などの方法でモリ
ブデンをコーティングすることにより、電極外面部４ａ
をモリブデン、電極背面部４ｂを銅としたものである。A second embodiment of the surface generation type ion generator according to the first invention will be described with reference to FIG. FIG. 2 is a sectional view of the charge conversion electrode and the support rod portion. In the figure, the surface of the copper material that becomes the electrode back surface portion 4b of the charge conversion electrode 4 is coated with molybdenum by a method such as plating or ion beam vapor deposition to form the electrode outer surface portion 4a.
Is molybdenum and the back surface 4b of the electrode is copper.
【００１９】水冷用の冷却水は、支持棒内管１８の内側
を通って荷電変換用電極４の背面に送給され、電極背面
部４ｂを直接冷却した後、支持棒内管１８と支持棒８の
間に形成された排水路を通って外部へ排出される。前述
したように、銅は冷却水に対する耐食性が良く、冷却水
によって簡単には腐食されないので、Ｏリング１７のシ
ール面が荒れにくい。また、銅はモリブデンよりも熱伝
導が良く、電極面の冷却効率を向上することができる。
さらに、電極背面部４ｂを構成する銅の表面にモリブデ
ンをコーティングしたので、低コスト化を図ることがで
きる。The cooling water for water cooling is sent to the back surface of the charge conversion electrode 4 through the inside of the support rod inner tube 18 to directly cool the electrode back surface portion 4b, and then the support rod inner tube 18 and the support rod. The water is discharged to the outside through the drainage channel formed between 8 and 8. As described above, copper has a good corrosion resistance against cooling water and is not easily corroded by the cooling water, so that the sealing surface of the O-ring 17 is not easily roughened. Further, copper has better thermal conductivity than molybdenum, and can improve the cooling efficiency of the electrode surface.
Further, since the surface of copper forming the electrode back surface portion 4b is coated with molybdenum, cost reduction can be achieved.
【００２０】第２の発明に係る表面生成型イオン発生装
置の実施例を図３に基づいて説明する。図３は荷電変換
用電極と支持棒部分の断面図である。図において、１９
は、モリブデンからなる荷電変換用電極４と支持棒８と
の間に挟まれた、アルミニウムまたはインジウムなどの
柔らかい金属箔でできた伝熱シートである。間接冷却用
の支持棒８は、銅またはアルミニウムなどの良熱伝導材
でできており、荷電変換用電極４との間に伝熱シート１
９を挟んだ状態でねじ込まれている。An embodiment of the surface generation type ion generator according to the second invention will be described with reference to FIG. FIG. 3 is a sectional view of the charge conversion electrode and the support rod portion. In the figure, 19
Is a heat transfer sheet made of a soft metal foil such as aluminum or indium sandwiched between the charge conversion electrode 4 made of molybdenum and the support rod 8. The support bar 8 for indirect cooling is made of a good heat conductive material such as copper or aluminum, and is placed between the heat transfer sheet 1 and the charge conversion electrode 4.
It is screwed in with 9 being sandwiched.
【００２１】水冷用の冷却水は、支持棒内管１８の内側
を通って支持棒８の先端部に送給され、支持棒８の管壁
を通して荷電変換用電極４を間接冷却した後、支持棒内
管１８と支持棒８の間に形成された排水路を通って外部
へ排出される。The cooling water for water cooling is fed to the tip of the support rod 8 through the inside of the support rod inner tube 18, and the charge conversion electrode 4 is indirectly cooled through the tube wall of the support rod 8 and then supported. It is discharged to the outside through a drainage channel formed between the rod inner tube 18 and the support rod 8.
【００２２】支持棒８と荷電変換用電極４の間に挟まれ
た伝熱シート１９は、銅またはアルミニウムなどの柔ら
かい金属であるため、添着性が良く、支持棒８および荷
電変換用電極４との接触面積が大きくなり、接触熱抵抗
を小さくすることができるので、電極面の冷却効率を落
とさずに済む。また、電極面がイオンの衝突により荒れ
てきて、荷電変換用電極４を交換しなければならない場
合にも、冷却水のシールを破らずに荷電変換用電極４の
交換ができる。Since the heat transfer sheet 19 sandwiched between the support rod 8 and the charge conversion electrode 4 is made of a soft metal such as copper or aluminum, the heat transfer sheet 19 has a good attachment property, and the heat transfer sheet 19 and the charge conversion electrode 4 can be attached together. Since the contact area is increased and the contact thermal resistance can be reduced, it is not necessary to reduce the cooling efficiency of the electrode surface. Further, even when the electrode surface becomes rough due to collision of ions and the charge conversion electrode 4 needs to be replaced, the charge conversion electrode 4 can be replaced without breaking the seal of the cooling water.
【００２３】[0023]
【発明の効果】第１の発明によれば、荷電変換用電極の
電極外面部をモリブデンにより構成するとともに、冷却
水と接する電極背面部を銅により構成したので、荷電変
換用電極の腐食を低減することができるとともに、荷電
変換用電極の冷却効率を上げることができ、荷電変換用
電極の寿命が長く、かつビーム電流の大きい表面生成型
イオン発生装置を得ることができる。According to the first aspect of the present invention, since the outer surface of the charge conversion electrode is made of molybdenum and the back of the electrode in contact with the cooling water is made of copper, corrosion of the charge conversion electrode is reduced. In addition, the efficiency of cooling the charge conversion electrode can be improved, the life of the charge conversion electrode is long, and a surface generation ion generator with a large beam current can be obtained.
【００２４】第２の発明によれば、モリブデンからなる
荷電変換用電極と接触する間接冷却用の支持棒として良
熱伝導材を用い、該支持棒と荷電変換用電極との接触面
に柔軟性に富んだ金属製の伝熱シートを挟んだので、荷
電変換用電極を電極面の冷却効率を下げずに冷却するこ
とができ、荷電変換用電極の腐食がなく、また、冷却水
のシールを破らずに荷電変換用電極を取り替えることが
でき、荷電変換用電極の寿命が長く、かつメンテナンス
性の良い表面生成型イオン発生装置を得ることができ
る。According to the second aspect of the present invention, a good heat conductive material is used as a support rod for indirect cooling that is in contact with the charge conversion electrode made of molybdenum, and the contact surface between the support rod and the charge conversion electrode is flexible. Since a rich metal heat transfer sheet is sandwiched, the charge conversion electrode can be cooled without lowering the cooling efficiency of the electrode surface, there is no corrosion of the charge conversion electrode, and the cooling water is sealed. It is possible to replace the charge conversion electrode without breaking, and it is possible to obtain a surface generation type ion generator having a long life of the charge conversion electrode and good maintainability.
【図１】第１の発明の第１の実施例による表面生成型イ
オン発生装置の荷電変換用電極と支持棒部分の断面図で
ある。FIG. 1 is a sectional view of a charge conversion electrode and a support rod portion of a surface generation type ion generator according to a first embodiment of the first invention.
【図２】第１の発明の第２の実施例による表面生成型イ
オン発生装置の荷電変換用電極と支持棒部分の断面図で
ある。FIG. 2 is a sectional view of a charge conversion electrode and a support rod portion of a surface generation type ion generator according to a second embodiment of the first invention.
【図３】第２の発明の一実施例による表面生成型イオン
発生装置の荷電変換用電極と支持棒部分の断面図であ
る。FIG. 3 is a sectional view of a charge conversion electrode and a support rod portion of a surface generation type ion generator according to an embodiment of the second invention.
【図４】従来の表面生成型イオン発生装置の構造図であ
る。FIG. 4 is a structural diagram of a conventional surface generation ion generator.
【図５】図４中の荷電変換用電極と支持棒部分の断面図
である。5 is a cross-sectional view of a charge conversion electrode and a support rod portion in FIG.
４ 荷電変換用電極 ４ａ 電極外面部 ４ｂ 電極背面部 ８ 支持棒 １４ スパッタ保護カバー １６ リングナット １７ Ｏリング １８ 支持棒内管 １９ 金属製の伝熱シート 4 Charge conversion electrode 4a Electrode outer surface 4b Electrode back surface 8 Support rod 14 Spatter protection cover 16 Ring nut 17 O-ring 18 Support rod inner tube 19 Metal heat transfer sheet
─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成５年６月２１日[Submission date] June 21, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００２２[Name of item to be corrected] 0022
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００２２】支持棒８と荷電変換用電極４の間に挟まれ
た伝熱シート１９は、インジウム，銅またはアルミニウ
ムなどの柔らかい金属であるため、添着性が良く、支持
棒８および荷電変換用電極４との接触面積が大きくな
り、接触熱抵抗を小さくすることができるので、電極面
の冷却効率を落とさずに済む。また、電極面がイオンの
衝突により荒れてきて、荷電変換用電極４を交換しなけ
ればならない場合にも、冷却水のシールを破らずに荷電
変換用電極４の交換ができる。The heat transfer sheet 19 sandwiched between the support rod 8 and the charge conversion electrode 4 is made of a soft metal such as indium, copper or aluminum, and therefore has a good attachment property, and the support rod 8 and the charge conversion electrode 4 are attached. Since the contact area with 4 becomes large and the contact thermal resistance can be reduced, it is not necessary to lower the cooling efficiency of the electrode surface. Further, even when the electrode surface becomes rough due to collision of ions and the charge conversion electrode 4 needs to be replaced, the charge conversion electrode 4 can be replaced without breaking the seal of the cooling water.
Claims (2)
却するように構成された表面生成型イオン発生装置にお
いて、 荷電変換用電極の電極外面部をモリブデンにより構成す
るとともに、冷却水と接する電極背面部を銅により構成
したことを特徴とする表面生成型イオン発生装置。1. A surface generating ion generator configured to directly cool a charge conversion electrode with cooling water, wherein an outer surface of the charge conversion electrode is made of molybdenum, and an electrode rear surface in contact with the cooling water is provided. A surface generation type ion generator characterized in that the part is made of copper.
却するように構成された表面生成型イオン発生装置にお
いて、 モリブデンからなる荷電変換用電極と接触する間接冷却
用の支持棒として良熱伝導材を用い、該支持棒と荷電変
換用電極との接触面に柔軟性に富んだ金属製の伝熱シー
トを挟んだことを特徴とする表面生成型イオン発生装
置。2. A surface generating ion generator configured to indirectly cool a charge conversion electrode with cooling water, wherein a good heat conductive material is used as a support rod for indirect cooling that is in contact with the charge conversion electrode made of molybdenum. A surface generation type ion generator characterized in that a heat transfer sheet made of a highly flexible metal is sandwiched between contact surfaces of the support rod and the charge conversion electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4346455A JP2842498B2 (en) | 1992-12-25 | 1992-12-25 | Surface generation type ion generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4346455A JP2842498B2 (en) | 1992-12-25 | 1992-12-25 | Surface generation type ion generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06196115A true JPH06196115A (en) | 1994-07-15 |
| JP2842498B2 JP2842498B2 (en) | 1999-01-06 |
Family
ID=18383553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4346455A Expired - Fee Related JP2842498B2 (en) | 1992-12-25 | 1992-12-25 | Surface generation type ion generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2842498B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013137994A (en) * | 2011-11-30 | 2013-07-11 | Fei Co | System for attachment of electrode into inductively coupled plasma source |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374041A (en) * | 1989-08-14 | 1991-03-28 | Nissin High Voltage Co Ltd | Plasma sputter type negative ion source |
-
1992
- 1992-12-25 JP JP4346455A patent/JP2842498B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374041A (en) * | 1989-08-14 | 1991-03-28 | Nissin High Voltage Co Ltd | Plasma sputter type negative ion source |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013137994A (en) * | 2011-11-30 | 2013-07-11 | Fei Co | System for attachment of electrode into inductively coupled plasma source |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2842498B2 (en) | 1999-01-06 |
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