JPH0619566Y2 - フィルム基板成膜装置 - Google Patents

フィルム基板成膜装置

Info

Publication number
JPH0619566Y2
JPH0619566Y2 JP1986174657U JP17465786U JPH0619566Y2 JP H0619566 Y2 JPH0619566 Y2 JP H0619566Y2 JP 1986174657 U JP1986174657 U JP 1986174657U JP 17465786 U JP17465786 U JP 17465786U JP H0619566 Y2 JPH0619566 Y2 JP H0619566Y2
Authority
JP
Japan
Prior art keywords
film substrate
heater
film
heating
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986174657U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6381863U (en, 2012
Inventor
富佐雄 中村
映介 上田
正義 今村
伸男 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1986174657U priority Critical patent/JPH0619566Y2/ja
Publication of JPS6381863U publication Critical patent/JPS6381863U/ja
Application granted granted Critical
Publication of JPH0619566Y2 publication Critical patent/JPH0619566Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986174657U 1986-11-12 1986-11-12 フィルム基板成膜装置 Expired - Lifetime JPH0619566Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986174657U JPH0619566Y2 (ja) 1986-11-12 1986-11-12 フィルム基板成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986174657U JPH0619566Y2 (ja) 1986-11-12 1986-11-12 フィルム基板成膜装置

Publications (2)

Publication Number Publication Date
JPS6381863U JPS6381863U (en, 2012) 1988-05-30
JPH0619566Y2 true JPH0619566Y2 (ja) 1994-05-25

Family

ID=31113248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986174657U Expired - Lifetime JPH0619566Y2 (ja) 1986-11-12 1986-11-12 フィルム基板成膜装置

Country Status (1)

Country Link
JP (1) JPH0619566Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010165818A (ja) * 2009-01-15 2010-07-29 Fuji Electric Holdings Co Ltd 薄膜光電変換素子の製造方法及び成膜装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107076A (ja) * 1982-12-09 1984-06-21 Ricoh Co Ltd 薄膜形成装置

Also Published As

Publication number Publication date
JPS6381863U (en, 2012) 1988-05-30

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