JPH06193910A - Reducing method for load of air conditioner - Google Patents
Reducing method for load of air conditionerInfo
- Publication number
- JPH06193910A JPH06193910A JP34605792A JP34605792A JPH06193910A JP H06193910 A JPH06193910 A JP H06193910A JP 34605792 A JP34605792 A JP 34605792A JP 34605792 A JP34605792 A JP 34605792A JP H06193910 A JPH06193910 A JP H06193910A
- Authority
- JP
- Japan
- Prior art keywords
- air conditioner
- exhaust gas
- outside air
- load
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、空調機負荷軽減方法に
関し、特に、半導体製造工場のクリーンルーム用空調機
において、導入外気の昇温に要する負荷を軽減すること
ができるため、エネルギーコストの節減に有効であり、
また、寒冷期における空調機内の冷水コイルの凍結防止
に有効な空調機負荷軽減方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioner load reducing method, and more particularly, in a clean room air conditioner of a semiconductor manufacturing plant, it is possible to reduce the load required to raise the temperature of the introduced outside air. Is effective for
Further, the present invention relates to an air conditioner load reduction method effective for preventing freezing of the cold water coil in the air conditioner in the cold season.
【０００２】[0002]
【従来の技術】一般に、空調機に導入された外気は、冷
水コイルまたは温水コイルによって温度を調整され、さ
らに加湿ヘッダから蒸気を付加して湿度を調整された
後、室内に供給される。この空調機による温度の制御
は、冷水コイルまたは温水コイル内に通水する冷水また
は温水の流量を調整して行なわれる。また、湿度の制御
は、加湿ヘッダからの蒸気放出量を調整して行なわれ
る。この空調機において、空調対象エリアの空気を循環
させて当該空調機に導入される外気と混合し、前述の温
度・湿度処理の負荷軽減を図ることが実施されている。2. Description of the Related Art Generally, the temperature of outside air introduced into an air conditioner is adjusted by a cold water coil or a hot water coil, and then steam is added from a humidifying header to adjust the humidity and then supplied to a room. The temperature control by the air conditioner is performed by adjusting the flow rate of cold water or hot water passing through the cold water coil or the hot water coil. The humidity is controlled by adjusting the amount of steam released from the humidifying header. In this air conditioner, the air in the area to be air-conditioned is circulated and mixed with the outside air introduced into the air conditioner to reduce the load of the temperature / humidity treatment described above.
【０００３】ところで、半導体製造工場のクリーンルー
ムにおいては、空調機に導入される外気に対して、空調
対象エリアから循環される空気の混合割合は、クリーン
ルーム全体から外部に排気される空気量と比較すると、
非常に少量である。これは、クリーンルーム内に設置さ
れた各種の製造装置からの排ガスは、有害成分を含むた
め、これをスクラバー等の除害装置により処理して有害
成分を除去した後、大気中へ放散され、空調機に循環さ
れず、この排ガスがクリーンルーム内から排気される空
気の大半を占めるからである。このクリーンルームから
の排ガスは、プロセス処理後の排ガスであるため、その
温度は３０℃前後であるのが一般的であり、その有する
熱量を導入される外気に与えることができれば、空調機
における外気の昇温に要するエネルギーを低減すること
かできるため、エネルギーコストの節減に有効である。By the way, in a clean room of a semiconductor manufacturing plant, the mixing ratio of the air circulated from the air conditioning target area to the outside air introduced into the air conditioner is compared with the amount of air exhausted from the entire clean room to the outside. ,
Very small amount. This is because the exhaust gas from various manufacturing equipment installed in the clean room contains harmful components, so after it is treated by a scrubber or other detoxifying device to remove the harmful components, it is released into the atmosphere and air-conditioned. This is because the exhaust gas does not circulate in the machine and occupies most of the air exhausted from the clean room. Since the exhaust gas from this clean room is the exhaust gas after the process treatment, its temperature is generally around 30 ° C., and if the heat quantity of the exhaust gas can be given to the introduced outside air, Since the energy required to raise the temperature can be reduced, it is effective in reducing energy costs.
【０００４】[0004]
【発明が解決しようとする課題】しかし、この大気放散
する排ガスを空調機に導入される外気に直接混合するこ
とは、不測の事態における安全性の問題から実施するの
が困難である。一方、寒冷期においては、外気温度が低
下し、空調機による外気の昇温に要するエネルギーが多
大となり、空調機の負荷が大となり、さらに、冷水コイ
ルが凍結してしまうという問題があった。However, it is difficult to directly mix the exhaust gas emitted into the atmosphere with the outside air introduced into the air conditioner due to the safety problem in an unexpected situation. On the other hand, in the cold season, there is a problem that the outside air temperature decreases, the energy required for raising the outside air by the air conditioner becomes large, the load on the air conditioner becomes large, and the cold water coil freezes.
【０００５】そこで本発明の目的は、半導体製造工場の
クリーンルーム用空調機において、導入外気の昇温に要
する負荷を軽減することができるため、エネルギーコス
トの節減に有効であり、また、寒冷期における空調機内
の冷水コイルの凍結防止に有効な空調機負荷軽減方法を
提供することにある。Therefore, an object of the present invention is to reduce the load required for raising the temperature of the introduced outside air in a clean room air conditioner of a semiconductor manufacturing plant, which is effective in saving energy costs, and in the cold season. An object of the present invention is to provide a method for reducing the load on an air conditioner that is effective in preventing freezing of the cold water coil in the air conditioner.
【０００６】[0006]
【課題を解決するための手段】前記課題を解決するため
に、本発明は、クリーンルーム内の半導体製造装置から
の排ガスを排ガス処理装置により除害処理した後、処理
後の排ガスを空調機の外気導入側に設けた熱交換器に導
入し、空調機に導入する外気と前記処理後の排ガスとの
熱交換を行なうことを特徴とする空調機負荷軽減方法を
提供するものである。In order to solve the above-mentioned problems, the present invention is directed to removing exhaust gas from a semiconductor manufacturing apparatus in a clean room by an exhaust gas processing apparatus, and then treating the exhaust gas to the outside of an air conditioner. The present invention provides a method for reducing the load on an air conditioner, which is characterized in that the heat is exchanged between the outside air introduced into the heat exchanger provided on the introduction side and introduced into the air conditioner and the treated exhaust gas.
【０００７】以下、本発明の空調機負荷軽減方法（以
下、「本発明の方法」という）について詳細に説明す
る。The air conditioner load reduction method of the present invention (hereinafter referred to as the "method of the present invention") will be described in detail below.
【０００８】本発明の方法においては、図１に示すよう
に、半導体製造用クリーンルーム内に設置された各種の
半導体製造装置から排出される排ガスを除害装置に導入
し、該排ガスが含有する有害成分を除去する。この排ガ
ス中には、例えば、各種のフッ酸、塩酸ガス、リン酸、
硝酸、硫酸等の酸性ガス、アンモニアガス等の塩基性ガ
ス、アセトン、ＩＰＡ、その他の有機溶剤等の有機系ガ
スなどの各種の有害成分が含有されている。さらに、排
ガス中には、一般排気、熱排気等が含まれている。本発
明の方法において、用いられる除害装置は、これらの有
害成分を排ガス中から除去するものであり、排ガス中に
含まれる有害成分の種類、量等に応じて各種装置が用い
られる。例えば、酸スクラバー、アルカリスクラバー、
有機スクラバー等の各種の処理装置が用いられる。In the method of the present invention, as shown in FIG. 1, exhaust gas discharged from various semiconductor manufacturing apparatuses installed in a semiconductor manufacturing clean room is introduced into a harm removing apparatus, and harmful gas contained in the exhaust gas is introduced. Remove the ingredients. In this exhaust gas, for example, various kinds of hydrofluoric acid, hydrochloric acid gas, phosphoric acid,
It contains various harmful components such as acidic gases such as nitric acid and sulfuric acid, basic gases such as ammonia gas, organic gases such as acetone, IPA and other organic solvents. Further, the exhaust gas contains general exhaust gas, thermal exhaust gas, and the like. The abatement device used in the method of the present invention removes these harmful components from the exhaust gas, and various devices are used according to the type and amount of the harmful components contained in the exhaust gas. For example, acid scrubber, alkali scrubber,
Various processing devices such as an organic scrubber are used.
【０００９】除害装置によって処理され、有害成分を除
去された排ガスは、熱交換器に供給される。このとき、
熱交換器への排ガスの流通経路に切替えダンパを配設
し、外気温度に応じて、熱交換器への排ガスの供給量ま
たは大気放散する排ガスの量を調整できるようにすれ
ば、空調機に導入する外気の温度が制御可能となる点
で、好ましい。例えば、外気温度が５℃以下の場合に
は、切替えダンパを熱交換器側に切替え、排ガスを熱交
換器に供給し、外気温度が６℃以上の場合には、大気放
散側に切替え、排ガスを大気放散させるようにすれば、
寒冷期における空調機内の冷水コイルの凍結防止および
空調機の負荷低減に有効である。The exhaust gas treated by the abatement device to remove harmful components is supplied to the heat exchanger. At this time,
By installing a switching damper in the exhaust gas flow path to the heat exchanger and adjusting the amount of exhaust gas supplied to the heat exchanger or the amount of exhaust gas emitted to the atmosphere in accordance with the outside air temperature, an air conditioner can be installed. It is preferable in that the temperature of the introduced outside air can be controlled. For example, when the outside air temperature is 5 ° C or lower, the switching damper is switched to the heat exchanger side, the exhaust gas is supplied to the heat exchanger, and when the outside air temperature is 6 ° C or higher, the switching damper is switched to the atmosphere diffusion side. If you try to dissipate
It is effective in preventing freezing of the cold water coil in the air conditioner and reducing the load on the air conditioner during the cold season.
【００１０】切替えダンパは、手動切替え方式または自
動切替え方式のいずれのものでもよい。The switching damper may be either a manual switching system or an automatic switching system.
【００１１】熱交換器に導入された排気ガスは、外気と
熱交換を行った後、大気中に放散される。排気ガスとの
熱交換により昇温または冷却された外気は、空調機に導
入され、調温および調湿された後、クリーンルーム内に
導入され、クリーンルーム内の温度および湿度が調整さ
れる。The exhaust gas introduced into the heat exchanger exchanges heat with the outside air and is then diffused into the atmosphere. The outside air whose temperature has been raised or cooled by heat exchange with exhaust gas is introduced into an air conditioner, whose temperature and humidity have been adjusted, and then introduced into a clean room, where the temperature and humidity inside the clean room are adjusted.
【００１２】本発明の方法において、用いられる熱交換
器、除害装置および空調機は、通常用いられているもの
でよく、特に制限されない。In the method of the present invention, the heat exchanger, detoxifying device and air conditioner used may be those usually used and are not particularly limited.
【００１３】ここで、本発明の方法を寒冷期における空
調機に適用する場合について、図１に基づいて説明する
と、まず、半導体製造クリーンルーム内に設置された各
種の製造装置から排出される排ガスは、通常、３０℃前
後の温度（Ｔ4 ）を有する。したがって、除害装置より
有害成分が除去された排ガスもほぼ同じ温度（Ｔ5 ）≒
３０℃を有する。この処理後の排ガスを熱交換器に供給
し、寒冷期には５℃（Ｔ1 ）以下となる外気と熱交換せ
しめ、空調機に導入される外気の温度Ｔ2 を１０℃程度
に昇温することができる。そのため、空調機内の冷水コ
イルの凍結を防止することができる。空調機に導入され
た外気は、通常、２０℃（Ｔ3 ）程度に昇温されるとと
もに、湿度を調整された後、クリーンルーム内に供給さ
れる。以上のとおり、寒冷期に低温の外気を直接に空調
機内に導入せずに、クリーンルームからの排ガスが有す
る熱量を利用して外気を昇温してから、空調機に導入す
るため、外気の昇温に要する空調機の負荷を軽減するこ
とができ、排熱の回収および利用ができ、エネルギーコ
ストの節減に有効である。Here, the case where the method of the present invention is applied to an air conditioner in the cold season will be described with reference to FIG. 1. First, exhaust gas emitted from various manufacturing apparatuses installed in a semiconductor manufacturing clean room is Usually has a temperature (T 4 ) around 30 ° C. Therefore, the exhaust gas from which harmful components have been removed by the abatement device has almost the same temperature (T 5 ) ≈
Having 30 ° C. The exhaust gas after this treatment is supplied to a heat exchanger so that heat is exchanged with the outside air that becomes 5 ° C. (T 1 ) or less in the cold season, and the temperature T 2 of the outside air introduced into the air conditioner is raised to about 10 ° C. can do. Therefore, freezing of the cold water coil in the air conditioner can be prevented. The outside air introduced into the air conditioner is usually heated to about 20 ° C. (T 3 ) and adjusted in humidity, and then supplied into the clean room. As described above, in the cold season, the low-temperature outside air is not directly introduced into the air conditioner, but rather the temperature of the outside air is raised using the heat quantity of the exhaust gas from the clean room before it is introduced into the air conditioner. The load on the air conditioner required for heating can be reduced, and exhaust heat can be recovered and used, which is effective in saving energy costs.
【００１４】また、以上、寒冷期における外気の昇温に
本発明の方法を適用する場合について説明したが、本発
明の方法は暑熱期における外気の冷却にクリーンルーム
からの排ガスを利用する場合にも適用可能てあることは
勿論である。例えば、本発明の方法において、Ｔ1 が４
０℃の場合、Ｔ2 を３８℃まで降温することができ、冷
水コイルの負荷軽減が可能となる。Although the case of applying the method of the present invention to the temperature rise of the outside air in the cold season has been described above, the method of the present invention is also applicable to the case of using the exhaust gas from the clean room to cool the outside air in the hot season. Of course, it is applicable. For example, in the method of the present invention, T 1 is 4
When the temperature is 0 ° C., T 2 can be lowered to 38 ° C., and the load on the cold water coil can be reduced.
【００１５】[0015]
【発明の効果】本発明の空調機負荷軽減方法によれば、
半導体製造工場のクリーンルーム用空調機において、導
入外気の昇温に要する負荷を軽減することができる。そ
のため、エネルギーコストの節減に有効であり、また、
寒冷期における空調機内の冷水コイルの凍結防止に有効
である。According to the air conditioner load reducing method of the present invention,
In a clean room air conditioner of a semiconductor manufacturing factory, it is possible to reduce the load required to raise the temperature of the introduced outside air. Therefore, it is effective in saving energy costs, and
It is effective in preventing freezing of the cold water coil in the air conditioner during the cold season.
【図１】 本発明の空調機負荷軽減方法を説明するブロ
ック図。FIG. 1 is a block diagram illustrating an air conditioner load reduction method according to the present invention.
Claims (1)
排ガスを排ガス処理装置により除害処理した後、処理後
の排ガスを空調機の外気導入側に設けた熱交換器に導入
し、空調機に導入する外気と前記処理後の排ガスとの熱
交換を行なうことを特徴とする空調機負荷軽減方法。1. Exhaust gas from a semiconductor manufacturing device in a clean room is detoxified by an exhaust gas treatment device, and the treated exhaust gas is introduced into a heat exchanger provided on the outside air introduction side of the air conditioner and introduced into the air conditioner. A method for reducing the load on an air conditioner, characterized in that heat exchange is performed between the outside air to be treated and the exhaust gas after the treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34605792A JPH06193910A (en) | 1992-12-25 | 1992-12-25 | Reducing method for load of air conditioner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP34605792A JPH06193910A (en) | 1992-12-25 | 1992-12-25 | Reducing method for load of air conditioner |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06193910A true JPH06193910A (en) | 1994-07-15 |
Family
ID=18380851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP34605792A Withdrawn JPH06193910A (en) | 1992-12-25 | 1992-12-25 | Reducing method for load of air conditioner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06193910A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002206771A (en) * | 2001-01-09 | 2002-07-26 | Tokyo Electron Ltd | Apparatus and method for supplying treated air |
| JP2016077736A (en) * | 2014-10-21 | 2016-05-16 | 株式会社東芝 | Intake structure of building, building having the same, and intake method of building |
| JP2016189957A (en) * | 2015-03-31 | 2016-11-10 | オルガノ株式会社 | Air cleaning method and air cleaning device |
-
1992
- 1992-12-25 JP JP34605792A patent/JPH06193910A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002206771A (en) * | 2001-01-09 | 2002-07-26 | Tokyo Electron Ltd | Apparatus and method for supplying treated air |
| JP4606600B2 (en) * | 2001-01-09 | 2011-01-05 | 東京エレクトロン株式会社 | Process air supply apparatus and method |
| JP2016077736A (en) * | 2014-10-21 | 2016-05-16 | 株式会社東芝 | Intake structure of building, building having the same, and intake method of building |
| JP2016189957A (en) * | 2015-03-31 | 2016-11-10 | オルガノ株式会社 | Air cleaning method and air cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20000307 |