JPH06188158A - Capacitor - Google Patents

Capacitor

Info

Publication number
JPH06188158A
JPH06188158A JP33893392A JP33893392A JPH06188158A JP H06188158 A JPH06188158 A JP H06188158A JP 33893392 A JP33893392 A JP 33893392A JP 33893392 A JP33893392 A JP 33893392A JP H06188158 A JPH06188158 A JP H06188158A
Authority
JP
Japan
Prior art keywords
tantalum
capacitor
foil
dielectric layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33893392A
Other languages
Japanese (ja)
Other versions
JP3316896B2 (en
Inventor
Kazumi Naito
一美 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Holdings Corp
Original Assignee
Showa Denko KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko KK filed Critical Showa Denko KK
Priority to JP33893392A priority Critical patent/JP3316896B2/en
Publication of JPH06188158A publication Critical patent/JPH06188158A/en
Application granted granted Critical
Publication of JP3316896B2 publication Critical patent/JP3316896B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a nonpolar capacitor wherein its capacity is high, its high- frequency characteristic value is good and its cost is low by a method wherein an aluminum or tantalum foil or rod which is provided with a fine hole on the surface is used as one electrode and a semiconductor layer which is formed on a dielectric layer composed of an oxide of tantalum is used as the other electrode. CONSTITUTION:Many fine holes 2 are made on both faces of a foil 1. An oxide layer 3 of tantalum is formed as a dielectric layer at the inside of the fine holes 2 and along the surface of the foil. A semiconductor layer 4 is formed on the back of the oxide layer 3 of tantalum. In addition, a dielectric layer 5 is attached to the back of the semiconductor layer 4, the whole is sealed with a sealing resin 6, lead terminals 7, 7 are attached to the foil and the dielectric layer, they are extracted by the sealing resin, and a capacitor product is formed. Thereby, the capacity of the capacitor product is larger than that of an aluminum electrolytic capacitor, the product is reliable and the cost can be made lower than that of a tantalum electrolytic capacitor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、タンタルの酸化物を誘
電体層とした高容量のコンデンサに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high capacity capacitor having a dielectric layer of tantalum oxide.

【0002】[0002]

【従来の技術】従来、タンタル電解コンデンサは、タン
タルの箔、棒、焼結体等の表面に設けた酸化皮膜を誘電
体として形成されている。このようなタンタル電解コン
デンサは、小型で大容量が取れ、しかも誘電体の安定性
のため産業界で広く使用されている。
2. Description of the Related Art Conventionally, a tantalum electrolytic capacitor is formed by using an oxide film provided on the surface of a tantalum foil, a rod, a sintered body or the like as a dielectric. Such a tantalum electrolytic capacitor has a small size and a large capacity, and is widely used in industry due to the stability of the dielectric.

【0003】一方、アルミニウム電解コンデンサは、ア
ルミニウムの箔、棒、焼結体等の表面に設けた酸化皮膜
を誘電体として形成されている。このようなアルミニウ
ム電解コンデンサは、安価で大容量が取れるため、これ
また多方面の分野で使用されているものである。
On the other hand, the aluminum electrolytic capacitor has an oxide film formed on the surface of an aluminum foil, a rod, a sintered body or the like as a dielectric. Since such an aluminum electrolytic capacitor is inexpensive and can have a large capacity, it is also used in various fields.

【0004】[0004]

【発明が解決しようとする課題】しかし、タンタル電解
コンデンサは、材料が幾分高価であり、アルミニウム電
解コンデンサは、誘電体の不安定性のため幾分信頼性に
欠ける。また、両コンデンサとも一般に極性があるため
に、ある種の用途には適さないという不都合がある。
However, tantalum electrolytic capacitors are somewhat expensive in material and aluminum electrolytic capacitors are somewhat unreliable due to dielectric instability. Further, since both capacitors generally have polarities, there is a disadvantage that they are not suitable for certain applications.

【0005】さらに近年の電子機器の軽小短薄化に伴っ
て、コンデンサにおいても、より小型で高容量なものが
要望されている。本発明者は、上記の問題点を解決すべ
く鋭意研究した結果、表面に細孔を設けたり、あるいは
空隙部を設けたりして、表面積を大きくしたアルミニウ
ムまたはチタンの箔、棒あるいは焼結体等をコンデンサ
に用いると優れた特性が得られることを発見した。
Further, with the recent trend toward smaller, lighter, thinner electronic devices, there is also a demand for capacitors having smaller size and higher capacity. The present inventor, as a result of earnest research to solve the above problems, as a result of providing pores or voids on the surface to increase the surface area of an aluminum or titanium foil, rod or sintered body. It has been discovered that excellent characteristics can be obtained by using, for example, a capacitor.

【0006】本発明は、上記発見に基づいて完成された
もので、高容量で高周波特性値が良好、かつ、廉価な無
極性コンデンサを提供することを目的とする。
The present invention was completed based on the above findings, and an object of the present invention is to provide a nonpolar capacitor having a high capacity, a good high frequency characteristic value, and a low price.

【0007】[0007]

【課題を解決するための手段】本発明は、上記の目的を
達成すべくなされたもので、その要旨は、表面に細孔を
有するアルミニウムまたはチタンの箔あるいは棒を一方
の電極とし、該細孔内部および表面に沿って設けたタン
タルの酸化物を誘電体層とし、該誘電体層上に設けた半
導体層を他方の電極とするコンデンサ、およびアルミニ
ウムまたはチタンを主成分とする焼結体を一方の電極と
し、該焼結体の空隙部内部および表面に沿って設けたタ
ンタルの酸化物を誘電体層とし、該誘電体層上に設けた
半導体層を他方の電極とするコンデンサにある。
The present invention has been made to achieve the above object, and the gist thereof is to use, as one electrode, an aluminum or titanium foil or rod having pores on the surface thereof. A tantalum oxide provided inside and along the surface of a hole serves as a dielectric layer, a capacitor having a semiconductor layer provided on the dielectric layer as the other electrode, and a sintered body containing aluminum or titanium as a main component. There is provided a capacitor in which one electrode is used, a tantalum oxide provided along the inside and the surface of the void of the sintered body is used as a dielectric layer, and the semiconductor layer provided on the dielectric layer is used as the other electrode.

【0008】以下本発明を詳細に説明する。図1は、箔
を用いた本発明に係るコンデンサの一実施例を示す縦断
面図で、箔1には両面に多数の細孔2が設けられてい
る。この箔1の細孔を有する面には、細孔2の内部およ
び箔表面に沿ってタンタルの酸化物層3が誘電体層とし
て設けられ、これらタンタルの酸化物層3の裏面には、
半導体層4が設けられて本発明のコンデンサが構成され
ている。また上記4の裏面には、誘電体層5が取付けら
れ、全体が封口樹脂6によって封口されるとともに、上
記箔および導電体層にはリード端子7,7が取付けら
れ、上記封口樹脂により引出されてコンデンサ製品が形
成される。
The present invention will be described in detail below. FIG. 1 is a vertical cross-sectional view showing an embodiment of a capacitor according to the present invention using a foil. The foil 1 is provided with a large number of pores 2 on both sides. On the surface of the foil 1 having pores, a tantalum oxide layer 3 is provided as a dielectric layer along the inside of the pores 2 and along the foil surface, and on the back surface of the tantalum oxide layer 3,
The semiconductor layer 4 is provided to form the capacitor of the present invention. A dielectric layer 5 is attached to the back surface of the above-mentioned 4, and the whole is sealed with a sealing resin 6, and lead terminals 7 and 7 are attached to the foil and the conductor layer and pulled out by the sealing resin. To form a capacitor product.

【0009】本発明の一方の電極にはアルミニウムまた
はチタンの箔、棒あるいはアルミニウムまたはチタンを
主成分とする焼結体が使用される。
For one of the electrodes of the present invention, an aluminum or titanium foil, a rod, or a sintered body containing aluminum or titanium as a main component is used.

【0010】このような金属に、表面積を大にする目的
で細孔もしくは空隙部を形成する方法は、箔、棒の場合
は、例えば、エッチングによって、また焼結体の場合に
は、焼結することによって形成することができる。
A method of forming pores or voids in such a metal for the purpose of increasing the surface area is as follows. In the case of a foil or a rod, for example, by etching, or in the case of a sintered body, it is sintered. It can be formed by

【0011】エッチングの方法、焼結圧力、温度等によ
って細孔の大きさ、深さ、空隙部の容量を変化させるこ
とができ、このような細孔または空隙部の内面および金
属表面に沿って後述するタンタルの酸化物が形成され
る。
The size and depth of the pores and the volume of the voids can be changed by the etching method, the sintering pressure, the temperature, etc., and along the inner surface of such pores or voids and the metal surface. An oxide of tantalum, which will be described later, is formed.

【0012】エッチングの方法としては、例えばアルミ
ニウムの場合、電解コンデンサ業界で一般に行われてい
る直流印加あるいは交流印加の電解エッチング方法等が
あげられる。
As an etching method, for example, in the case of aluminum, a direct current-applied or alternating-current-applied electrolytic etching method generally used in the electrolytic capacitor industry can be used.

【0013】本発明の誘電体酸化皮膜層として形成する
タンタルの酸化物層は、例えばタンタルのハロゲン化
物、タンタルとアセトニルアセトネート塩、アルコキシ
ド塩、カルボン酸塩、炭酸塩またはオキシン塩のような
錯塩、タンタルと他の金属たとえばカドミウムとの複合
塩等を酸化させることによって設けられる。
The tantalum oxide layer formed as the dielectric oxide film layer of the present invention is, for example, a tantalum halide, a tantalum / acetonylacetonate salt, an alkoxide salt, a carboxylate salt, a carbonate salt or an oxine salt. It is provided by oxidizing a complex salt or a complex salt of tantalum and another metal such as cadmium.

【0014】このようなタンタルの化合物を融解また
は、適当な溶媒に溶解させて、前述した細孔あるいは空
隙部に導入した後酸化することによって、細孔あるいは
空隙部および金属表面に沿ってタンタルの酸化物層が形
成される。この場合、タンタルの酸化物が細孔あるいは
空隙部を塞がないように導入するには、導入条件あるい
は細孔の径等を考慮することが必要であり、予備実験に
よって条件等が決定される。
Such a tantalum compound is melted or dissolved in an appropriate solvent, introduced into the above-mentioned pores or voids, and then oxidized to form tantalum along the pores or voids and the metal surface. An oxide layer is formed. In this case, in order to introduce the tantalum oxide without blocking the pores or voids, it is necessary to consider the introduction conditions, the diameter of the pores, etc., and the conditions etc. are determined by preliminary experiments. .

【0015】本発明において誘電体層上に形成される導
電体層としては例えば、TCNQ塩、ポリピロールで代
表される電導性高分子または二酸化鉛、二酸化鉛と硫酸
鉛との混合物等が挙げられる。このうち、耐熱性が有
り、電導度が多角、廉価ということから、二酸化鉛また
は二酸化鉛と硫酸鉛との混合物が好ましい。また、半導
体層としては前述した二種以上を使用してもよい。
In the present invention, examples of the conductor layer formed on the dielectric layer include TCNQ salt, a conductive polymer represented by polypyrrole or lead dioxide, a mixture of lead dioxide and lead sulfate, and the like. Of these, lead dioxide or a mixture of lead dioxide and lead sulfate is preferable because it has heat resistance, has a wide electrical conductivity, and is inexpensive. Further, two or more kinds of the above-mentioned semiconductor layers may be used.

【0016】半導体層を前述した細孔あるいは空隙部お
よび金属表面の誘電体層上へ設ける方法は、半導体を融
解して導入する方法、半導体を誘電体層上で作製する方
法等が挙げられる。
Examples of the method for providing the semiconductor layer on the above-mentioned pores or voids and the dielectric layer on the metal surface include a method of melting and introducing the semiconductor, a method of manufacturing the semiconductor on the dielectric layer, and the like.

【0017】このうち、半導体を誘電体層上で作製する
方法が好ましく、とりわけ本発明者等が先に提案した半
導体を化学的析出法で作製する方法(特開昭62−25
6423号公報、特開昭63−51621号公報)が好
ましい。
Of these, the method of producing a semiconductor on a dielectric layer is preferable, and in particular, the method of producing a semiconductor previously proposed by the present inventors by a chemical deposition method (JP-A-62-25).
6423 and JP-A-63-51621) are preferable.

【0018】さらに、半導体層上に電気的接触をよくす
るために、導電体層を設けてもよい。導電体層として
は、例えば、導電ペーストの固化、メッキ、金属蒸着、
耐熱性の導電樹脂フィルムの形成等により設層すること
ができる。
Further, a conductor layer may be provided on the semiconductor layer in order to improve electrical contact. As the conductor layer, for example, solidification of the conductive paste, plating, metal deposition,
It can be provided by forming a heat resistant conductive resin film or the like.

【0019】以上のように、構成される本発明のコンデ
ンサは例えば、樹脂モールド、樹脂ケース、金属製の外
装ケース、樹脂のディッピング、ラミネートフィルムに
よる外装などの外装により各種用途のコンデンサ製品と
することができる。
The capacitor of the present invention configured as described above is made into a capacitor product for various uses by, for example, a resin mold, a resin case, a metal outer case, a resin dipping, an outer case such as a laminate film. You can

【0020】[0020]

【実施例】以下、実施例、比較例を示して本発明をさら
に詳しく説明する。なお、各例のコンデンサの特性値を
表1、表2に一括して示した。
EXAMPLES The present invention will be described in more detail with reference to Examples and Comparative Examples. The characteristic values of the capacitors of each example are collectively shown in Tables 1 and 2.

【0021】実施例1 端子をかしめ付けしたリード線を接続した長さ1cm、
幅3mm、厚さ90μmのアルミニウム箔を陽極とし、
直流により箔の表面を電気化学的にエッチング処理し、
直径3.6μm、深さ20μmの細孔を全面に有するア
ルミニウム箔を得た。このアルミニウム箔を五塩化タン
タルのアルコール溶液に浸漬し、引上げ後、注水するこ
とにより五塩化タンタルを酸化して細孔内及びアルミニ
ウム箔の表面にタンタルの酸化物層を形成した。次に酢
酸鉛三水和物2モル/lの水溶液と過硫酸アンモニウム
4モル/lの水溶液の混合液に誘電体が形成されたアル
ミニウム箔を下端から3mm部分のみを浸漬し、60℃
20分放置した。この操作を3回行った後、生成した二
酸化鉛と硫酸鉛からなる半導体層上に銀ペーストを塗布
し、端子リード線を取り出した後、樹脂封口してコンデ
ンサを作製した。
Example 1 A lead wire having terminals crimped thereto was connected to a length of 1 cm,
An aluminum foil with a width of 3 mm and a thickness of 90 μm is used as an anode,
The surface of the foil is electrochemically etched with a direct current,
An aluminum foil having pores with a diameter of 3.6 μm and a depth of 20 μm on the entire surface was obtained. This aluminum foil was immersed in an alcohol solution of tantalum pentachloride, pulled up, and then water was poured to oxidize the tantalum pentachloride to form an oxide layer of tantalum in the pores and on the surface of the aluminum foil. Next, the aluminum foil on which the dielectric was formed was immersed in a mixed solution of an aqueous solution of lead acetate trihydrate of 2 mol / l and an ammonium persulfate solution of 4 mol / l only 3 mm from the lower end, and the temperature was changed to 60 ° C.
It was left for 20 minutes. After this operation was performed 3 times, a silver paste was applied on the generated semiconductor layer made of lead dioxide and lead sulfate, the terminal lead wires were taken out, and the resin was sealed to produce a capacitor.

【0022】実施例2 実施例1で五塩化タンタルの代わりに、タンタルのアセ
トニルアセトン塩を使用し、同時に過硫酸アンモニウム
4水溶液で酸化してタンタルの酸化物を形成し、さらに
半導体層として2モル/lの酢酸鉛水溶液アルミニウム
箔を浸漬して、白金電極との間の電解反応によって二酸
化鉛層を設けた以外は実施例1と同様にしてコンデンサ
を作製した。
Example 2 In Example 1, tantalum acetonylacetone salt was used in place of tantalum pentachloride, and at the same time, it was oxidized with ammonium persulfate 4 aqueous solution to form tantalum oxide. A capacitor was produced in the same manner as in Example 1 except that a lead acetate aqueous solution aluminum foil (1/1) was dipped and a lead dioxide layer was provided by an electrolytic reaction with a platinum electrode.

【0023】実施例3 実施例1でアルミニウム箔の代わりに、チタン箔を使用
し、直径5μm、深さ10μmの細孔を全面に設け、さ
らに五塩化タンタルの代わりに、タンタルのオキシン塩
のクロロホルム溶液にチタン箔を浸漬して引上げ750
℃で酸化することによってタンタルの酸化物を形成した
以外は実施例1と同様にしてコンデンサを作製した。
Example 3 In Example 1, a titanium foil was used in place of the aluminum foil, pores having a diameter of 5 μm and a depth of 10 μm were formed on the entire surface, and tantalum pentachloride was replaced with chloroform of oxine salt of tantalum. Dip titanium foil in the solution and pull up 750
A capacitor was produced in the same manner as in Example 1 except that the tantalum oxide was formed by oxidizing at 0 ° C.

【0024】比較例1 実施例1と同様なアルミニウム箔をホウ酸とホウ酸アン
モニウムの水溶液中で電気化学的に処理してアルミナ誘
電体層を形成した。このアルミニウム箔の下面3mm×
3mmの部分のみ、エチレングリコール−アジピン酸ア
ンモニウム系の電解液を含ませたセパレーターで包み、
金属ケースに入れてアタクチックポリプロピレンで封口
した。
Comparative Example 1 An aluminum foil similar to that of Example 1 was electrochemically treated in an aqueous solution of boric acid and ammonium borate to form an alumina dielectric layer. Lower surface of this aluminum foil 3 mm ×
Wrap only the 3 mm part in a separator containing an ethylene glycol-ammonium adipate-based electrolyte,
It was placed in a metal case and sealed with atactic polypropylene.

【0025】[0025]

【表1】 [Table 1]

【0026】[0026]

【表2】 [Table 2]

【0027】[0027]

【発明の効果】以上述べたように、本発明のコンデンサ
は、アルミニウム電解コンデンサより容量が大きく、信
頼性があり、タンタル電解コンデンサより廉価である。
また高周波性能が良く、しかも極性がないため利用価値
が高い等の多くの長所を有する。
As described above, the capacitor of the present invention has a larger capacity than aluminum electrolytic capacitors, is more reliable, and is cheaper than tantalum electrolytic capacitors.
Further, it has many advantages such as good high frequency performance and high utility value because it has no polarity.

【図面の簡単な説明】[Brief description of drawings]

【図1】箔を用いた本発明に係るコンデンサの一実施例
を示す縦断面図である。
FIG. 1 is a vertical sectional view showing an embodiment of a capacitor according to the present invention using a foil.

【符号の説明】[Explanation of symbols]

1 箔 2 細孔 3 タンタルの酸化物層 4 半導体層 5 導電体層 6 封口樹脂 7 リード端子 1 Foil 2 Pore 3 Tantalum Oxide Layer 4 Semiconductor Layer 5 Conductor Layer 6 Sealing Resin 7 Lead Terminal

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 表面に細孔を有するアルミニウムまたは
チタンの箔あるいは棒を一方の電極とし、該細孔内部お
よび表面に沿って設けたタンタルの酸化物を誘電体層と
し、該誘電体層上に設けた半導体層を他方の電極とする
ことを特徴とするコンデンサ。
1. An aluminum or titanium foil or rod having pores on the surface is used as one electrode, and a tantalum oxide provided inside and along the surface of the pores is used as a dielectric layer on the dielectric layer. A capacitor, characterized in that the semiconductor layer provided on the other side is used as the other electrode.
【請求項2】 アルミニウムまたはチタンを主成分とす
る焼結体を一方の電極とし、該焼結体の空隙部内部およ
び表面に沿って設けたタンタルの酸化物を誘電体層と
し、該誘電体層上に設けた半導体層を他方の電極とする
ことを特徴とするコンデンサ。
2. A sintered body containing aluminum or titanium as a main component is used as one electrode, and a tantalum oxide provided inside and along the surface of the void of the sintered body is used as a dielectric layer. A capacitor, wherein the semiconductor layer provided on the layer is used as the other electrode.
JP33893392A 1992-12-18 1992-12-18 Capacitor Expired - Lifetime JP3316896B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33893392A JP3316896B2 (en) 1992-12-18 1992-12-18 Capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33893392A JP3316896B2 (en) 1992-12-18 1992-12-18 Capacitor

Publications (2)

Publication Number Publication Date
JPH06188158A true JPH06188158A (en) 1994-07-08
JP3316896B2 JP3316896B2 (en) 2002-08-19

Family

ID=18322697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33893392A Expired - Lifetime JP3316896B2 (en) 1992-12-18 1992-12-18 Capacitor

Country Status (1)

Country Link
JP (1) JP3316896B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098279A (en) * 2006-10-10 2008-04-24 Toyo Aluminium Kk Electrode material for aluminum electrolytic capacitor, and its manufacturing method
JP2017539092A (en) * 2014-12-09 2017-12-28 エプコス アクチエンゲゼルシャフトEpcos Ag Method for producing electrode film for capacitor, electrode film and capacitor using this electrode film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008098279A (en) * 2006-10-10 2008-04-24 Toyo Aluminium Kk Electrode material for aluminum electrolytic capacitor, and its manufacturing method
JP2017539092A (en) * 2014-12-09 2017-12-28 エプコス アクチエンゲゼルシャフトEpcos Ag Method for producing electrode film for capacitor, electrode film and capacitor using this electrode film
US10354807B2 (en) 2014-12-09 2019-07-16 Epcos Ag Method for producing electrode foils for capacitors, electrode foils, and capacitors comprising said electrode foils

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