JPH0618751Y2 - 機械の摺動面荷重補償装置 - Google Patents

機械の摺動面荷重補償装置

Info

Publication number
JPH0618751Y2
JPH0618751Y2 JP1586187U JP1586187U JPH0618751Y2 JP H0618751 Y2 JPH0618751 Y2 JP H0618751Y2 JP 1586187 U JP1586187 U JP 1586187U JP 1586187 U JP1586187 U JP 1586187U JP H0618751 Y2 JPH0618751 Y2 JP H0618751Y2
Authority
JP
Japan
Prior art keywords
pressure
air supply
sliding surface
back pressure
pressure air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1586187U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63124436U (enExample
Inventor
栄一 黒川
一弘 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP1586187U priority Critical patent/JPH0618751Y2/ja
Publication of JPS63124436U publication Critical patent/JPS63124436U/ja
Application granted granted Critical
Publication of JPH0618751Y2 publication Critical patent/JPH0618751Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)
JP1586187U 1987-02-05 1987-02-05 機械の摺動面荷重補償装置 Expired - Lifetime JPH0618751Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1586187U JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1586187U JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Publications (2)

Publication Number Publication Date
JPS63124436U JPS63124436U (enExample) 1988-08-12
JPH0618751Y2 true JPH0618751Y2 (ja) 1994-05-18

Family

ID=30807184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1586187U Expired - Lifetime JPH0618751Y2 (ja) 1987-02-05 1987-02-05 機械の摺動面荷重補償装置

Country Status (1)

Country Link
JP (1) JPH0618751Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5924944B2 (ja) * 2012-01-10 2016-05-25 株式会社ミツトヨ すべり案内装置
JP6618110B2 (ja) * 2015-09-24 2019-12-11 三井精機工業株式会社 工作機械における移動体支持装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6116575B2 (ja) 2012-10-04 2017-04-19 イーグル工業株式会社 メカニカルシール
JP6132525B2 (ja) 2012-11-30 2017-05-24 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6116575B2 (ja) 2012-10-04 2017-04-19 イーグル工業株式会社 メカニカルシール
JP6132525B2 (ja) 2012-11-30 2017-05-24 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS63124436U (enExample) 1988-08-12

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