JPH06186457A - Optical coupling module and assembling device - Google Patents

Abstract

PURPOSE:To improve the yield of an optical integrated array and to improve the productivity of an optical coupling module by constituting the module of a fiber array composed of a specified matrix, an attachment comprising a fiber guide and an optical integrated array having an optical element. CONSTITUTION:This device comprizes m-rows X n-columns of a fiber array 61 (m, n are integers, m>=1, n>=1) composed of m-layers of fiber ribbons 62 bundling n-fibers 63 and (m+alpha)-rows X (n+beta)-columns of a fiber guide (alpha, betaare integers, alpha>=1, beta>=1). The device comprises an attachment 65 arraying the fiber array 61 by means of the m rows from among (m+alpha)-rows and the n-columns from among (n+beta)-columns of the fiber guide and (m+alpha)-rows X(n+beta)-columns of optical elements and is provided with an optical integrated array in which the m-rows from among (m+alpha)-rows and the n-columns from among (n+beta)-columns of the respective rows of the optical elements are optically coupled with the fiber array 61.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical coupling module and its assembling apparatus, and more particularly to a structure and an assembly suitable for improving productivity.

[0002]

2. Description of the Related Art Conventionally, for example, a procedure of
Electronic Components and Technology Conference, 1992, pp. 77-82.
Page (Proceeding of Electronic Components and Technol
ogy Conference, 1992, pp. 77-82), ibid, the same year, pages 98 to 107, ibid, the same year, 8th page.
The optical coupling modules described in pages 53 to 860 are known.

The conventional module has a fiber array consisting of four or eight fibers, an attachment for arranging the fiber arrays by the same number of fiber guides, and an optical element for the same number, and is an optical integrated circuit for optically coupling with the fiber array. And an array. The fiber guide consists of a ferrule or V-groove guide. The integrated optical array is a one-dimensional array of optical elements.

[0004]

In order to improve the performance of a large-scale computer or a broadband switch, it is required to increase the throughput and the density of the connections between housings or between wiring boards. In recent years, in order to break the limit of electric cables, optical interconnection using fiber cables has been studied.

A conventional module is used for this optical interconnection. However, the above-mentioned conventional module does not consider the manufacturing yield. In terms of manufacturing yield, in reality, the yield rate of optical elements is more dominant than that of fibers and fiber guides. In the conventional module using the same number of fiber guides and the same number of optical elements as the number of fibers, non-defective optical elements must be continuous as a one-dimensional array.

In the conventional module, assuming that the number of fibers is 8 and the non-defective product rate per optical element is p, the non-defective product ratio Po of the optical integrated array is as follows.

[0007]

[Equation 1]

According to the above formula, the yield rate of the optical element is p = 70%, and the yield rate of the array is Po = 5.8%. Even if p = 90%, only the yield rate Po = 43% can be obtained.

When manufacturing this optical integrated array, if the total number of optical elements that can be formed on one wafer is N, the production yield Yo of good array products that can be taken out from one wafer is given by the following equation.

[0010]

[Equation 2]

In order to improve the non-defective array rate of the conventional module, it is easy to consider a means for providing an extra number of optical elements. However, since the number of fibers and the number of fiber guides are the same, non-defective optical elements must be continuous as a one-dimensional array.

For example, when eight fibers and (8 + 2) optical elements are used, the array yield rate Pp and array production yield Y are shown.
p, the ratio Rp of Yp to the conventional output Yo is given by the following equation.

[0013]

[Equation 3]

[0014]

[Equation 4]

[0015]

[Equation 5]

According to these equations, P = 70% and P
It becomes p = 9.2% and Rp = 1.28 times. Although the production amount will increase slightly, the array non-defective rate is less than 10%. p = 9
Even if 0%, Pp = 51.7% and Rp = 0.96 times. The rate of non-defective arrays will increase, but the production will be lower than before. Therefore, it is considered that such measures are not a good idea.

In order to realize higher throughput and higher density of optical interconnection in the future, it is essential to increase the number of fibers and the number of optical elements. At this time, the fiber array and the optical integrated array are considered to be two-dimensional. Similar to the conventional module, when the same number of fiber guides and optical elements as m × n fiber arrays are used, the array non-defective rate Po and the production output Yo are as follows.

[0018]

[Equation 6]

[0019]

[Equation 7]

For example, when m = 8 and n = 10, p
= 70%, Po ≈ 0%, and p = 90% at most Po
= 0.022%, and almost no good product can be obtained. Even if p ≧ 90% is distributed inside the wafer, it is impossible to make a profit. Therefore, it is expected that the problem of productivity of the optical integrated array will become more prominent in the future.

As described above, the conventional module has a problem in the productivity of the optical integrated array. The present invention provides a module constituting means and an assembling means for the purpose of improving the productivity of an optical integrated array.

[0022]

In order to achieve the above object, the present invention provides, as means for constructing an optical coupling module, m rows × n columns (m, n) consisting of m layers of fiber ribbons in which n fibers are bundled. Is an integer, m ≧ 1, n ≧ 1) fiber array, and (m + α) rows × (n + β) columns (α and β are integers,
It has a fiber guide of α ≧ 0, β ≧ 1), m rows from (m + α) rows of the fiber guide, and (n +) of each row.
An attachment for arranging the fiber arrays by n columns out of β) columns and an optical element of (m + α) rows × (n + β) columns, where m is selected from (m + α) rows of the optical elements.
Rows, and (n + β) columns of each row, n rows are provided with an optical integrated array optically coupled to the fiber array.

Further, as means for assembling this optical coupling module, a chuck for holding the n fibers individually for each layer of the m-layer fiber ribbon, and a chuck for individually moving the chucks to move the n fibers individually. And a computer for controlling the micro-positioner based on the characteristic data of the optical element.

[0024]

According to the module construction means, (m + α) rows ×
Since the number of fiber guides in (n + β) columns is larger than the number of fiber arrays in m rows × n columns, (m + α) rows × (n
It is possible to select m rows and n columns from the optical elements in the + β) column and optically couple with the fiber array. Unlike the conventional module, it is not necessary that the non-defective optical elements are continuous, so that the degree of freedom in selection becomes extremely large. Array non-defective rate is Pc, production is Yc, and Yc is compared to the conventional production Yo.
When the ratio of Rc is Rc, the following equation is obtained.

[0025]

[Equation 8]

[0026]

[Equation 9]

[0027]

[Equation 10]

By the way, in the case of selecting (m × n) pieces from (m + α) × (n + β) pieces, the number of fibers is different for each row of the fiber guide, so that the arrangement of the fiber array becomes complicated. It becomes difficult to assemble the module. However, in the module configuration means, the fiber array is arranged by using m rows from the (m + α) rows of the fiber guide and n rows from the (n + β) columns of each row,
Assembly is not complicated.

According to the module assembling means, it becomes possible to automatically arrange the fiber array for the good optical element in the layer order of the fiber ribbon by using the computer controlled micro positioner and the chuck. Despite the large degree of freedom, the module can be easily assembled.

[0030]

1 to 4 are explanatory views of an optical coupling module according to an embodiment of the present invention. The left side of FIG. 1 is a sectional view and the right side is a front view. 2 is a sectional view taken along the line AA ′ of FIG. 1, FIG.
1 is a sectional view taken along the line BB 'in FIG. 1, and FIG. 4 is a sectional view taken along the line CC' in FIG.

The optical coupling module of this embodiment shown in FIGS. 1 to 4 includes a fiber array 61 made of a fiber cable 63, a connector 60 made of an attachment 65 of the fiber array 61, and a receptacle 40 to which the connector 60 is connected. The package 20 is sealed with the cap 30, and the optical integrated array 10 and the semiconductor element 12 mounted on the package 20 are provided.

The fiber array 61 is composed of 8 rows × 10 columns of fibers. That is, as shown in FIG. 2, the fiber cable 63 is composed of eight layers of fiber ribbons 62 bundled by the jacket 64, and each fiber ribbon 62 is composed of ten fibers bundled by a resin coating. The fiber is made of silica fiber and has a diameter of 125 μm. The row spacing and the column spacing of the fiber array 61 are both 250 μm.

A head portion 67, an insertion hole for the guide pin 68, and a tail portion 74 are formed in the attachment 65 by precision resin molding. As shown in FIG. 3, 10 rows × 1
It has four rows of fiber guide holes 73. The fiber guide hole 73 extends from the head portion 67 to the tail portion 74. The row interval and the column interval are both 180 μm. The fiber array 61 is arranged with the fiber guide hole 73 as a ferrule.

The connector 60 is attached to the tip of the fiber cable 63 as shown in FIG. It comprises an attachment 65, a holder 66, a plug 69, and a cover 72. Like the attachment 65, the holder 66 is processed by precision resin molding. The plug 69 is made of high-strength plastic, and the spring 70 and the claw 71 are molded. The protective cover 71 is made of a heat shrinkable tube.

The receptacle 40, as shown in FIG.
Attachment guide 41, sleeve 42, socket 4
It consists of three. The attachment guide 41 is formed with a guide hole 44 in the head portion 67 and a guide hole 45 in the guide pin 68 by precision resin molding. Sleeve 42
The socket and the socket 43 are integrated, and are processed by grinding or microwelding a high-rigidity alloy material. The attachment 65 is inserted into the sleeve 42, and the plug 69 is inserted into the socket 43. In the socket 43,
The guide groove 46 of the spring 70 and the latch hole 4 of the claw 71
7 is processed.

The cap 30 is seam-welded to the package 20 and laser-welded to the receptacle 40.
The lens array 31 at the center of the cap 30 is made of a glass plate. On its surface, 10 rows × 14 columns of microlenses are formed. The row interval and the column interval are 180 μm. The lens array 31 is fixed to the cap by low melting point glass.

As shown in FIG. 1, the package 20 is a flat package including a base 21, frames 22, 23 and I / O terminals 24. The base 21 is made of ceramics having high thermal conductivity and low dielectric constant. A wiring pattern is formed on the frame 22, and I / O terminals 24 are connected to the wiring pattern. A seal ring is formed on the upper surface of the frame 23.

Optical elements 15 of 10 rows × 14 columns are formed on the surface of the optical integrated array 10 (lower side of FIG. 1, front side of FIG. 4). The row interval and the column interval are 180 μm. The optical element 15 is a surface emitting laser diode or a photodiode. The oscillation light of the laser diode or the detection light of the photodiode is emitted or incident from the back surface of the optical integrated array 10 (the upper side of FIG. 1, the back side of FIG. 4). The integrated optical array 10 is flip-chip connected to the semiconductor element 12 by solder bumps 11.

The semiconductor element 12 is formed with 140 circuits for independently driving the optical element 15. It consists of a laser diode driver circuit and a photodiode amplifier circuit. Eighty out of 140 are connected to the I / O terminal 14 by the wiring ribbon 13.

In this embodiment, a fiber array 61 having 8 rows × 10 columns, an attachment 65 having (8 + 2) rows × (10 + 4) columns of fiber guide holes 73, and (8+
2) An optical integrated array 10 having optical elements 15 in rows × (10 + 4) columns is provided. As shown in FIG. 4, among the non-defective optical elements 15, there are a defective element 17 marked with □ and a non-defective element 16 marked with Δ (good but inferior to the unmarked element). Mixed. Avoiding these, as shown in FIG. 3, 8 rows out of (8 + 2) rows × (10 + 4) columns,
The fiber array 61 is arranged by selecting the ten fiber guide holes 73 from each row.

In this embodiment, the yield rate p of the optical element 15 is p.
= 70% and p = 90%, the following table shows the results of calculating the non-defective product ratio Pc and the production ratio Rc of the optical integrated array 10 by the formulas 6 and 8.

[0042]

[Table 1]

[0043]

[Table 2]

In this embodiment, p = 90%, α = 0, β =
In the case of 4, the production ratio Rc is maximized, and if α and β are set too large, the miniaturization of the module is hindered. Therefore, α = 2 and β = 4 are selected. As a result, even if p = 70%, the array non-defective rate Pc is 10% or more, p
= 90%, Pc≈100% is obtained. Conventional (α = β
= 0), the non-defective array rate Pc is remarkably improved as compared with the case where almost non-defective products could not be obtained.

When the optical integrated array 10 is actually manufactured, almost all of the optical integrated arrays can be made to be non-defective, except for a simple process error in the manufacturing lot and a decrease in p due to a local wafer defect. It was

The fiber guide hole 73 and the optical element 15
By setting the row spacing and the column spacing to be equal to or less than the row spacing and the column spacing of the fibers in the fiber cable 63, the module can be downsized despite the fact that the number of the fiber guide holes 73 and the optical elements 15 is increased from the number of the fibers. I was able to.

In this embodiment, the combination of the attachment 65 and the optical integrated array 10 limits the combination of the connector 60 and the receptacle 40.
If you want to avoid the limitation when using, 10 rows x 1
Attachment 6 with four rows of fiber guide holes 73
A conversion adapter or the like in which 5 and an attachment having fiber guide holes of 8 rows × 10 columns are connected may be used.

Next, the assembling apparatus of the optical coupling module of this embodiment will be described with reference to FIGS.

FIG. 5 is an overall configuration diagram of the assembly device for the attachment 65, and FIG. 6 is a central enlarged view. As shown in FIG. 5 and FIG. 6, the assembling apparatus has one for each layer of the fiber ribbon 62.
A chuck 117 for holding 0 fibers individually, and a micro positioner 115, 114, 113 for arranging 10 fibers to the fiber guide holes 73 of 10 rows out of 14 rows by moving the chuck 117 individually.
And a computer 131 for controlling the micro positioners 115, 114, 113 based on the characteristic data of the optical integrated array 10. Below, attachment 65
The assembly process will be described in order.

First, in step 1, the fiber cable 63
The outer cover 64 and the coating of the fiber ribbon 62 are stripped off to expose the fiber array 61. The length of the tip of the fiber array 61 is sequentially increased for each layer of the fiber ribbon 62. The fiber cable 63 processed in this way is fixed to the holder 105 of the pedestal 101.

In step 2, the attachment 65 is fixed to the holder 104 of the micro positioner 103. The micro positioner 103 moves in the y-axis direction on the slide rail 102 fixed to the pedestal 101.

In step 3, ten fibers are individually held by the chuck 117 in order from the longest layer of the fiber ribbon 62 (FIG. 6 shows the tenth fiber of the sixth layer held). . The computer 131 moves the micro-positioners 113, 114, 115 while observing with the monitor 132 connected to the microscope 121. The chuck 117 has a thickness of 180 μm.
It is composed of one substrate, and each substrate is provided with a groove for holding a fiber and a vacuum suction hole on the side surface. Further, each is provided with a piezo element, and can be finely moved individually under the stage 116. The micro positioner 113 moves in the y-axis direction on the slide rail 112 fixed to the column 111, and the micro positioners 114 and 115 finely move in the x-axis and z-axis directions, respectively. The microscope 121 has a support 1
23 and a supporter 122.

In step 4, the chuck 117 is moved based on the position of the defective element 17 as shown in FIG. 4, and ten fibers are arranged at a predetermined interval as shown in FIG. After that, while observing with the microscope 121, the entire ten fibers are moved by the micro positioners 113, 114, 115, and the attachment 65 is moved by the micro positioner 103. Thus, the fiber guide hole 7
Insert 10 fibers into 3 given rows and columns. For facilitating insertion, the tail portion 74 of the attachment 65 is processed into a step shape and the fiber guide hole 73 has a wide mouth portion 75 as shown in FIG.

In step 5, all 80 fibers are inserted into attachment 65 and then bonded. Head 67
Is optically polished, the holder 66 and the guide pin 68 are attached, the plug 69 is fitted, and the cover 72 is covered. This completes the assembly of the connector 60 including the attachment 65.

The package 20 side is assembled by the following steps.

First, the optical integrated array 10 is mounted on the semiconductor element 12.
Flip chip connection to. Eighty circuits are connected to the I / O terminal 24 by the wiring ribbon 13 except for the circuit connected to the defective element 17 of the optical integrated array 10. After the optical axes of the optical array 10 and the lens array 31 fixed to the cap 30 in advance are aligned, the cap 30 is temporarily fixed to the package 20 by laser welding and sealed by seam welding. The attachment guide 41 is fitted into the sleeve 42 in advance, the optical axes of the receptacle 40 and the optical integrated array 10 are aligned, and then the receptacle 40 is laser-welded to the cap 30.

In the above assembling apparatus and assembling process, the fiber array 61 can be easily arranged on the good optical element 15 of the optical integrated array 10 by the automatic control of the computer 131. Therefore, as described above, the yield rate of the optical integrated array 10 is improved and the productivity of the optical coupling module is also improved.

The embodiment of the present invention has been described with reference to the drawings. In this embodiment, the receptacle type is adopted as the type of the optical coupling module, but the present invention can also be implemented with the pigtail type. Although resin molding was used for processing the attachment, mechanical processing such as zirconia or etching processing such as silicon can also be used. Although a ferrule-type through hole is used for the fiber guide, it may be a U groove or a V groove.

Not limited to the present embodiment, the effect of the present invention is that m rows × n columns (m, n are integers, m ≧ 1, n ≧ 1) fiber array and (m + α) rows × (n + β) columns. (Α and β are integers,
It is exhibited by an optical coupling module including an attachment having a fiber guide of α ≧ 0 and β ≧ 1) and an optical integrated array having optical elements of (m + α) rows × (n + β) columns. Further, in the assembling apparatus of the present embodiment, it is a requirement that the fibers are arranged by automatic control, and the configuration or arrangement of the assembling apparatus can be changed according to the module structure.

[0060]

According to the present invention, the yield rate of the optical integrated array is dramatically improved, and the productivity of the optical coupling module is improved.

[Brief description of drawings]

FIG. 1 is a partial sectional view of an optical coupling module according to an embodiment of the present invention.

FIG. 2 is a sectional view taken along the line AA ′ of FIG.

FIG. 3 is a sectional view taken along line BB ′ of FIG.

FIG. 4 is a sectional view taken along the line CC ′ of FIG.

FIG. 5 is an explanatory diagram of an optical coupling module assembling apparatus that is an embodiment of the present invention.

FIG. 6 is a perspective view of an optical coupling module assembling apparatus that is an embodiment of the present invention.

[Explanation of symbols]

10 ... Optical integrated array, 12 ... Semiconductor element, 15 ... Optical element, 20 ... Package, 24 ... I / O terminal, 30 ... Cap, 31 ... Lens array, 40 ... Receptacle, 60
... connector, 61 ... fiber array, 62 ... fiber ribbon, 63 ... fiber cable, 65 ... attachment, 73 ... fiber guide hole.

Claims (9)

[Claims] 1. A m-row × n-column structure comprising m layers of fiber ribbons in which n fibers are bundled (m and n are integers, and m ≧ 1, n ≧).
1) the fiber array and (m + α) rows × (n + β) columns (α and β are integers, α ≧ 0,
(m + α) rows, wherein the fiber guides are β ≧ 1), and the fiber guides are arranged in m rows from (m + α) rows, and (n + β) columns in each row are arranged in n columns. X (n + β) columns of optical elements, and m rows out of (m + α) rows of the optical elements, and n rows out of (n + β) rows of each row are provided with an optical integrated array optically coupled to the fiber array. An optical coupling module characterized in that 2. The optical coupling module according to claim 1, wherein a row interval and a column interval between the fiber guide and the optical element are equal to or less than a row interval and a column interval of the fiber array, respectively. 3. The attachment according to claim 1, wherein the attachment comprises a ferrule, the fiber guide comprises a hole formed in the ferrule, or the attachment comprises a substrate, and the fiber guide is formed in the substrate. Optical coupling module consisting of a groove. 4. The (m + α) rows for increasing the optical coupling efficiency between the fiber array and the optical integrated array according to claim 1.
An optical coupling module including a lens array of (n + β) rows. 5. The optical coupling module according to claim 1, comprising a semiconductor element on which (m + α) × (n + β) circuits for driving the optical integrated array are formed. 6. The method according to claim 1 or 5, wherein (m + α) ×
From among (n + β) optical elements or circuits,
An optical coupling module comprising (m × n) I / O terminals selectively connected to (m × n). 7. The package according to claim 1, further comprising a package on which the optical integrated array and a receptacle are mounted, the receptacle being connected to the attachment attached to the tip of the fiber array, or the fiber array. An optical coupling module comprising a package on which the attachment and the optical integrated array are mounted, wherein the fiber array is taken out of the package. 8. The chuck according to claim 1, wherein the chuck holds each of the n fibers individually for each layer of the m-layer fiber ribbon, and the n fibers are moved to the (n + α) by individually moving the chuck. ) A device for assembling an optical coupling module, comprising a micro-positioner arranged for n fiber guides out of n and a computer for controlling the micro-positioner based on characteristic data of the optical element. 9. The optical coupling according to claim 8, wherein the tip of the m-layer fiber ribbon is processed long in advance for each layer, and the n-fibers are arranged in the fiber guide in order from the long layer by the micro-positioner. Module assembly equipment.