JPH06177298A - Integrated circuit - Google Patents

Integrated circuit

Info

Publication number
JPH06177298A
JPH06177298A JP43A JP32646992A JPH06177298A JP H06177298 A JPH06177298 A JP H06177298A JP 43 A JP43 A JP 43A JP 32646992 A JP32646992 A JP 32646992A JP H06177298 A JPH06177298 A JP H06177298A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit chip
resin
chip
air passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP43A
Other languages
Japanese (ja)
Inventor
Atsushi Obuchi
淳 大渕
Hideyuki Akagi
秀幸 赤木
Jun Shibata
潤 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP43A priority Critical patent/JPH06177298A/en
Publication of JPH06177298A publication Critical patent/JPH06177298A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To suppress the rise in temperature of an integrated circuit chip and thus prevent its malfunction by providing a microfan in a duct running in the plastic package of the integrated circuit. CONSTITUTION:An integrated circuit chip 2 on a die pad 1 is connected through a wire 4 with terminals 3 for external connection. The chip and part of the terminals are integrally molded with resin 6. A microfan is provided in the resin 6 to draw air at one end of a duct 7 in the resin and discharge it at the other end; that is, the microfan passes outside air inside the device to cool the chip 2.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、発熱により発生する
誤動作を防止することが可能な集積回路装置(以下IC
装置と呼ぶ)に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated circuit device (hereinafter referred to as IC which can prevent malfunction caused by heat generation).
The device is called).

【0002】[0002]

【従来の技術】図7は従来のIC装置の構成を示す断面
図である。図において、1はダイパッド、2はこのダイ
パッド1の上面に載置された集積回路チップ(以下IC
チップと呼ぶ)、3はワイヤ4を介してICチップ2を
外部基板(図示せず)に接続させるために設けられた複
数の端子、5はICチップ2の近傍に配設されたヒート
スプレッダ、6はダイパッド1、ICチップ2、ワイヤ
4、ヒートスプレッダ5及び端子3の一部を封止して一
体化する樹脂である。
2. Description of the Related Art FIG. 7 is a sectional view showing the structure of a conventional IC device. In the figure, 1 is a die pad, 2 is an integrated circuit chip (hereinafter referred to as an IC) mounted on the upper surface of the die pad 1.
3 is a plurality of terminals provided for connecting the IC chip 2 to an external substrate (not shown) via the wires 4. Reference numeral 5 is a heat spreader arranged in the vicinity of the IC chip 2. Is a resin that seals and integrates a part of the die pad 1, the IC chip 2, the wires 4, the heat spreader 5, and the terminals 3.

【0003】次に上記のように構成されたIC装置の動
作について説明する。まず、ICチップ2は端子3を介
して接続される外部基板より送りこまれる信号を処理し
た後、再び外部基板側に送出する動作を繰り返すうちに
発熱する。この熱は、ダイパッド1、ワイヤ4及び樹脂
6を伝わって外気中に放熱される。しかし、樹脂6の熱
伝導率は低く放熱が充分でないので、ICチップ2付近
の樹脂6の温度が極部的に上昇し、ICチップ2が許容
温度以上となり誤動作を引き起こす。
Next, the operation of the IC device configured as described above will be described. First, the IC chip 2 processes the signal sent from the external board connected through the terminal 3, and then generates heat while repeating the operation of sending it to the external board side again. This heat is transmitted to the outside air through the die pad 1, the wire 4 and the resin 6. However, since the thermal conductivity of the resin 6 is low and the heat radiation is not sufficient, the temperature of the resin 6 near the IC chip 2 rises extremely, and the IC chip 2 exceeds the allowable temperature, causing malfunction.

【0004】したがって、図に示すように樹脂6内のI
Cチップ2近傍に熱伝導率の高いヒートスプレッダ5を
設けて、ICチップ2の温度を一旦ヒートスプレッダ5
にうけて、樹脂6内に均一に温度を伝えて、樹脂6より
外気中に放熱させることにより、ICチップ2付近の放
熱性を改善している。
Therefore, as shown in FIG.
A heat spreader 5 having a high thermal conductivity is provided in the vicinity of the C chip 2 so that the temperature of the IC chip 2 is temporarily increased.
In response to this, the temperature is evenly transmitted to the inside of the resin 6 and the heat is radiated from the resin 6 to the outside air, thereby improving the heat radiation performance in the vicinity of the IC chip 2.

【0005】[0005]

【発明が解決しようとする課題】従来のIC装置は以上
のように構成されているので、ICチップ2の発熱をヒ
ートスプレッダ5の熱伝導を利用し、樹脂6より外気中
に放熱しているので、ICチップ2の発熱を効率良く放
熱できずICチップ2が許容温度以上となりIC装置の
誤動作を引き起こすという問題点があった。
Since the conventional IC device is constructed as described above, the heat of the IC chip 2 is radiated to the outside air from the resin 6 by utilizing the heat conduction of the heat spreader 5. However, there is a problem in that the heat generated by the IC chip 2 cannot be dissipated efficiently and the IC chip 2 exceeds the allowable temperature, causing malfunction of the IC device.

【0006】この発明は上記のような問題点を解消する
ためになされたもので、ICチップの温度上昇を抑制し
て誤動作を防止できるIC装置を得ることを目的とす
る。
The present invention has been made in order to solve the above problems, and an object thereof is to obtain an IC device capable of suppressing the temperature rise of an IC chip and preventing malfunction.

【0007】[0007]

【課題を解決するための手段】この発明に係る請求項1
の集積回路装置は、集積回路チップに沿って樹脂中に設
けられた通風路中にマイクロファンを備えたものであ
る。
[Means for Solving the Problems] Claim 1 according to the present invention
The integrated circuit device of (1) is provided with a micro fan in an air passage provided in resin along the integrated circuit chip.

【0008】この発明に係る請求項2の集積回路装置
は、集積回路チップに沿って樹脂中に設けられた通風路
中にマイクロファンを備えるとともに、集積回路チップ
の温度上昇によって発生する起電力をマイクロファンに
供給する熱電対を備えたものである。
An integrated circuit device according to a second aspect of the present invention is provided with a microfan in a ventilation path provided in a resin along the integrated circuit chip and generates an electromotive force generated by a temperature rise of the integrated circuit chip. It is equipped with a thermocouple for supplying to a micro fan.

【0009】この発明に係る請求項3の集積回路装置
は、集積回路チップに沿って樹脂中に設けられた通風路
中の外気の対流により回転するマイクロファンと、この
マイクロファンの発生する起電力の値が所定の値を超え
た時に異常信号を発生する異常信号発生手段とを備えた
ものである。
According to a third aspect of the present invention, there is provided an integrated circuit device, wherein a microfan which is provided along the integrated circuit chip in resin and which is rotated by convection of outside air in a ventilation passage, and an electromotive force generated by the microfan. And an abnormal signal generating means for generating an abnormal signal when the value of exceeds a predetermined value.

【0010】[0010]

【作用】この発明における請求項1のマイクロファン
は、通風路内に外気を循環させて、ICチップの熱を外
部に放出する。
The microfan according to the first aspect of the present invention circulates the outside air in the ventilation passage to radiate the heat of the IC chip to the outside.

【0011】この発明における請求項2の熱電対はIC
チップの温度上昇を検知することにより超電力を発生
し、この超電力によりマイクロファンを駆動する。
The thermocouple according to claim 2 of the present invention is an IC
Super power is generated by detecting the temperature rise of the chip, and the micro fan is driven by this super power.

【0012】この発明における請求項3の異常信号手段
はマイクロファンで発生した起電力が所定の値を超えた
時に異常信号を発生する。
The abnormal signal means of the third aspect of the present invention generates an abnormal signal when the electromotive force generated by the microfan exceeds a predetermined value.

【0013】[0013]

【実施例】実施例1.以下、この発明の実施例を図につ
いて説明する。図1及び図2は、この発明の実施例1に
おけるIC装置の構成を示す縦断面図及び横断面図であ
る。図において、従来の場合と同様の部分は同一符号を
付して説明を省略する。7はICチップ2より上方側の
樹脂6内にX状に形成され、各開放端にそれぞれ通風入
口7aを有するとともに、中央部上方に貫通する通風出
口7bを有する通風路、8は通風路7の各通風入口7a
の近傍にそれぞれ設けられ、電力供給線9を介して端子
3から電力が供給されて駆動することにより、通風入口
7aから外気を吸入し、通風出口7bから排出させるマ
イクロファンである。
EXAMPLES Example 1. Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are a longitudinal sectional view and a lateral sectional view showing the configuration of an IC device according to a first embodiment of the present invention. In the figure, the same parts as those in the conventional case are designated by the same reference numerals, and the description thereof will be omitted. An air passage 7 is formed in an X shape in the resin 6 above the IC chip 2 and has an air inlet 7a at each open end and an air outlet 7b penetrating above the central portion, and 8 is an air passage 7 Ventilation entrance 7a
, Which are provided in the vicinity of each of the above, and are driven by electric power supplied from the terminal 3 through the electric power supply line 9 to suck the outside air from the ventilation inlet 7a and discharge it from the ventilation outlet 7b.

【0014】次に上記のように構成されたIC装置の動
作について説明する。まず、マイクロファン8に電力供
給線9よりICチップ2の駆動に使われる電力の一部を
供給し、マイクロファン8を回転させることにより、外
気を通風入口7aより導入し通風路7内を循環させた
後、通風出口7bより排出させる。上記実施例1によれ
ばこのように外気が通風路7内を常に循環することによ
り、ICチップ2にて発熱した熱を外気で外部に放出し
ているので、ICチップ2が許容温度以上になることは
ない。
Next, the operation of the IC device configured as described above will be described. First, a part of the electric power used for driving the IC chip 2 is supplied to the micro fan 8 from the power supply line 9, and the micro fan 8 is rotated to introduce the outside air from the ventilation inlet 7a and circulate in the ventilation passage 7. After that, the air is discharged from the ventilation outlet 7b. According to the first embodiment described above, since the outside air constantly circulates in the ventilation passage 7 in this way, the heat generated in the IC chip 2 is released to the outside by the outside air, so that the IC chip 2 is heated to the allowable temperature or higher. It never happens.

【0015】実施例2.上記実施例1の場合、マイクロ
ファン8は電力供給線9によりICチップ2の駆動に使
われる電力の一部が供給されていたが、ここでは図3に
示すように熱電対10を設けて、ICチップ2の温度上
昇によって熱電対10に発生する起電力を、マイクロフ
ァン8に供給し駆動させるようにしても、実施例1と同
様の効果を奏する。
Example 2. In the case of the first embodiment, the micro fan 8 is supplied with a part of the electric power used for driving the IC chip 2 by the electric power supply line 9, but here, as shown in FIG. 3, a thermocouple 10 is provided, Even when the electromotive force generated in the thermocouple 10 due to the temperature rise of the IC chip 2 is supplied to the microfan 8 to be driven, the same effect as that of the first embodiment is obtained.

【0016】実施例3.上記実施例1の場合、マイクロ
ファン8は電力供給線9により電力供給されているが、
ここでは図4に示すようにバンプ11を設け、ICチッ
プ2より直接マイクロファン8に電力を供給できるよう
にしても、実施例1と同様の効果を奏する。
Embodiment 3. In the case of the first embodiment, the micro fan 8 is powered by the power supply line 9,
Here, even if bumps 11 are provided as shown in FIG. 4 so that electric power can be directly supplied to the micro fan 8 from the IC chip 2, the same effect as that of the first embodiment is obtained.

【0017】実施例4.上記各実施例では樹脂6により
一体化しているIC装置について述べたが、ここでは図
5に示すように、ダイパッド1、ICチップ2、ワイヤ
4、マイクロファン8、バンプ11及び端子3の一部を
金属キャップ12で一体化し、この金属キャップ12内
に冷却媒体13を充填させ、この冷却媒体13によりI
Cチップ2を冷却させるようにしたIC装置において
も、マイクロファン8を駆動させ、冷却媒体13を対流
させるようにしたので、ICチップ2の熱を冷却媒体1
3により効率よく放熱することができる。
Embodiment 4. In each of the above embodiments, the IC device integrated by the resin 6 is described, but here, as shown in FIG. 5, a part of the die pad 1, the IC chip 2, the wire 4, the micro fan 8, the bump 11 and the terminal 3 is shown. Are integrated by a metal cap 12, a cooling medium 13 is filled in the metal cap 12, and the cooling medium 13
Also in the IC device which is designed to cool the C chip 2, the micro fan 8 is driven to convect the cooling medium 13, so that the heat of the IC chip 2 is cooled by the cooling medium 1.
3 allows efficient heat dissipation.

【0018】実施例5.図6はこの発明の実施例5にお
けるIC装置の構成を示す断面図である。図において、
従来の場合と同様の部分は同一符号を付して説明を省略
する。14はICチップ2より上方側の樹脂6内にX状
に形成され、各開放端にそれぞれ通風出口14aを有す
るとともに、中央部上方に貫通する通風入口14bを有
する通風路、15は通風路14の各通風出口14aの近
傍にそれぞれ設けられたマイクロファン、16は外気の
対流により回転させられるマイクロファン15より生じ
る起電力を信号線17を介し入力し、この起電力からI
Cチップ2の発熱量を換算し、この値が異常値に達する
とIC装置の動作を停止させる自己防御回路である。
Example 5. 6 is a sectional view showing the structure of an IC device according to the fifth embodiment of the present invention. In the figure,
The same parts as those in the conventional case are designated by the same reference numerals and the description thereof will be omitted. An air passage 14 is formed in an X shape in the resin 6 above the IC chip 2 and has an air outlet 14a at each open end and an air inlet 14b penetrating above the central portion, and 15 is an air passage 14 Micro-fans, 16 respectively provided near the respective ventilation outlets 14a of, input the electromotive force generated by the micro-fan 15 rotated by convection of the outside air through the signal line 17, and from this electromotive force I
This is a self-defense circuit that converts the amount of heat generated by the C chip 2 and stops the operation of the IC device when this value reaches an abnormal value.

【0019】次に上記のように構成されたIC装置の動
作について説明する。まず、ICチップ2は端子3を介
して接続され外部基板(図示せず)より送りこまれる信
号を処理した後、再び外部基板側に送出する動作を繰り
返すうちに発熱する。この発熱は、通風路14に外気を
通風入口14bから導入させ、通風出口14aから排出
させるという外気の対流を起こし、この外気の対流によ
り、マイクロファン15は回転し、起電力を発生する。
Next, the operation of the IC device configured as described above will be described. First, the IC chip 2 is connected through the terminal 3, processes a signal sent from an external board (not shown), and then generates heat while repeating the operation of sending it to the external board side again. The generated heat causes a convection of the outside air that is introduced into the ventilation passage 14 from the ventilation inlet 14b and discharged from the ventilation outlet 14a, and the convection of the outside air causes the microfan 15 to rotate and generate an electromotive force.

【0020】すなわち、ICチップ2の発熱の度合いに
応じてマイクロファン15より発生する起電力も変化す
ることととなる。よって、自己防御回路16はマイクロ
ファン15より発生する起電力を信号線17を介して常
に検出し、検出される起電力の値からICチップ2の発
熱量を換算し、この値が許容温度以上になるとIC装置
の動作をストップさせる。
That is, the electromotive force generated by the micro fan 15 also changes according to the degree of heat generation of the IC chip 2. Therefore, the self-defense circuit 16 constantly detects the electromotive force generated by the micro fan 15 via the signal line 17, converts the heat generation amount of the IC chip 2 from the detected electromotive force, and the value is equal to or higher than the allowable temperature. Then, the operation of the IC device is stopped.

【0021】実施例6.上記各実施例では通風路7及び
14をICチップ2の上部側に設けているIC装置につ
いて述べたが、これに限られることはなく、ICチップ
2の下部側に通風路を設けても同様の効果を奏する。
Example 6. In each of the above-described embodiments, the IC device in which the ventilation passages 7 and 14 are provided on the upper side of the IC chip 2 has been described, but the present invention is not limited to this, and even if the ventilation passages are provided on the lower side of the IC chip 2, the same applies. Produce the effect of.

【0022】実施例7.上記各実施例では通風路7及び
14をX状に設けているIC装置について述べたが、こ
れに限られることはなく、直線状の通風路を複数個併設
しても同様の効果を奏する。
Example 7. In each of the above embodiments, the IC device in which the ventilation passages 7 and 14 are provided in the X shape has been described, but the present invention is not limited to this, and the same effect can be obtained even if a plurality of linear ventilation passages are provided.

【0023】実施例8.上記各実施例ではマイクロファ
ン8を通風入口7a近傍に設けているIC装置について
述べたが、これに限られることはなく、通風出口7b近
傍にマイクロファンを設けても同様の効果を奏する。
Example 8. In each of the above-mentioned embodiments, the IC device provided in the vicinity of the ventilation opening 7a has been described, but the present invention is not limited to this, and a similar effect can be obtained by providing a microfan in the vicinity of the ventilation outlet 7b.

【0024】実施例9.上記実施例5ではマイクロファ
ン15を通風出口14a近傍に設けているIC装置につ
いて述べたが、これに限られることなく、通風入口14
b近傍にマイクロファンを設けても同様の効果を奏す
る。
Example 9. Although the IC device provided in the vicinity of the ventilation outlet 14a is described in the fifth embodiment, the invention is not limited to this, and the ventilation inlet 14 is not limited thereto.
Even if a micro fan is provided in the vicinity of b, the same effect can be obtained.

【0025】[0025]

【発明の効果】以上のように、請求項1の発明によれば
集積回路チップに沿って樹脂中に設けられた通風路中に
マイクロファンを備えるようにし、又、請求項2の発明
によれば集積回路チップに沿って樹脂中に設けられた通
風路中にマイクロファンを備えるとともに、集積回路チ
ップの温度上昇によって発生する起電力をマイクロファ
ンに供給する熱電対を備えるようにし、又、請求項3の
発明によれば集積回路チップに沿って樹脂中に設けられ
た通風路中の外気の対流により回転するマイクロファン
と、このマイクロファンの発生する起電力の値が所定の
値を超えた時に異常信号を発生する異常信号発生手段と
を備えるようにしたので、ICチップの温度上昇を抑制
して誤動作を防止できるIC装置を得ることができると
いう効果がある。
As described above, according to the invention of claim 1, the micro-fan is provided in the ventilation passage provided in the resin along the integrated circuit chip, and according to the invention of claim 2. For example, a micro-fan is provided in a ventilation path provided in the resin along the integrated circuit chip, and a thermocouple is provided to supply electromotive force generated by a temperature rise of the integrated circuit chip to the micro-fan. According to the invention of Item 3, the microfan which is provided along the integrated circuit chip in the resin by the convection of the outside air in the ventilation passage and the value of the electromotive force generated by the microfan exceeds a predetermined value. Since the abnormal signal generating means for generating an abnormal signal is provided at times, there is an effect that it is possible to obtain an IC device capable of suppressing the temperature rise of the IC chip and preventing malfunction.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施例1におけるIC装置の構成を
示す縦断面図である。
FIG. 1 is a vertical sectional view showing the configuration of an IC device according to a first embodiment of the present invention.

【図2】図1によるIC装置の構成を示す横断面図であ
る。
FIG. 2 is a cross-sectional view showing the configuration of the IC device according to FIG.

【図3】この発明の実施例2におけるIC装置の構成を
示す断面図である。
FIG. 3 is a sectional view showing the configuration of an IC device according to a second embodiment of the present invention.

【図4】この発明の実施例3におけるIC装置の構成を
示す断面図である。
FIG. 4 is a sectional view showing a configuration of an IC device according to a third embodiment of the present invention.

【図5】この発明の実施例4におけるIC装置の構成を
示す断面図である。
FIG. 5 is a sectional view showing a configuration of an IC device according to a fourth embodiment of the present invention.

【図6】この発明の実施例5におけるIC装置の構成を
示す断面図である。
FIG. 6 is a sectional view showing the structure of an IC device according to a fifth embodiment of the present invention.

【図7】従来のIC装置の構成を示す断面図である。FIG. 7 is a cross-sectional view showing a configuration of a conventional IC device.

【符号の説明】 1 ダイパッド 2 ICチップ 3 端子 4 ワイヤ 6 樹脂 7、14 通風路 7a、14b 通風入口 7b、14a 通風出口 8、15 マイクロファン 9 電力供給線 10 熱電対 11 バンプ 12 金属キャップ 13 冷却媒体 16 自己防御回路 17 信号線[Explanation of reference numerals] 1 die pad 2 IC chip 3 terminal 4 wire 6 resin 7, 14 ventilation passages 7a, 14b ventilation inlet 7b, 14a ventilation outlet 8, 15 micro fan 9 power supply line 10 thermocouple 11 bump 12 metal cap 13 cooling Medium 16 Self-defense circuit 17 Signal line

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 ダイパッドに載置される集積回路チッ
プ、上記集積回路チップにワイヤを介して接続されると
ともに外部と接続するために設けられた端子、上記集積
回路チップと上記端子の一部とを封止して一体化する樹
脂、上記集積回路チップに沿って、上記樹脂中に設けら
れた通風路、上記通風路に設けられ、上記通風路の一端
から外気を吸入し、他端に排出するマイクロファンを備
えたことを特徴とする集積回路装置。
1. An integrated circuit chip mounted on a die pad, a terminal connected to the integrated circuit chip via a wire and provided for external connection, the integrated circuit chip and a part of the terminal. A resin that seals and integrates the resin, an air passage provided in the resin along the integrated circuit chip, and provided in the air passage. The outside air is sucked in from one end of the air passage and discharged to the other end. An integrated circuit device comprising a micro fan for controlling.
【請求項2】 ダイパッドに載置される集積回路チッ
プ、上記集積回路チップにワイヤを介して接続されると
ともに外部と接続するために設けられた端子、上記集積
回路チップと上記端子の一部とを封止して一体化する樹
脂、上記集積回路チップに沿って、上記樹脂中に設けら
れた通風路、上記通風路に設けられ、上記通風路の一端
から外気を吸入し、他端に排出するマイクロファン、上
記集積回路チップの温度上昇を検知することにより起電
力を発生し、上記起電力を上記マイクロファンに供給す
る熱電対を備えたことを特徴とする集積回路装置。
2. An integrated circuit chip mounted on a die pad, a terminal connected to the integrated circuit chip through a wire and provided for external connection, the integrated circuit chip and a part of the terminal. A resin that seals and integrates the resin, an air passage provided in the resin along the integrated circuit chip, and provided in the air passage. The outside air is sucked in from one end of the air passage and discharged to the other end. And a thermocouple for generating an electromotive force by detecting a temperature rise of the integrated circuit chip and supplying the electromotive force to the microfan.
【請求項3】 ダイパッドに載置される集積回路チッ
プ、上記集積回路チップにワイヤを介して接続されると
ともに外部と接続するために設けられた端子、上記集積
回路チップと上記端子の一部とを封止して一体化する樹
脂、上記集積回路チップに沿って、上記樹脂中に設けら
れた通風路、上記通風路に設けられ、上記集積回路チッ
プの温度上昇により増減し通風路を流れる外気により回
転して起電力を発生するマイクロファン、上記マイクロ
ファンで発生する上記起電力が所定の値を超えた時に異
常信号を発生する異常信号発生手段を備えたことを特徴
とする集積回路装置。
3. An integrated circuit chip mounted on a die pad, a terminal connected to the integrated circuit chip via a wire and provided for external connection, the integrated circuit chip and a part of the terminal. A resin that seals and integrates the air, an air passage provided in the resin along the integrated circuit chip, and an outside air that is provided in the air passage and that increases and decreases due to a temperature rise of the integrated circuit chip and flows through the air passage. An integrated circuit device comprising: a micro fan that is rotated by to generate an electromotive force; and an abnormal signal generation unit that generates an abnormal signal when the electromotive force generated by the micro fan exceeds a predetermined value.
JP43A 1992-12-07 1992-12-07 Integrated circuit Pending JPH06177298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP43A JPH06177298A (en) 1992-12-07 1992-12-07 Integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP43A JPH06177298A (en) 1992-12-07 1992-12-07 Integrated circuit

Publications (1)

Publication Number Publication Date
JPH06177298A true JPH06177298A (en) 1994-06-24

Family

ID=18188163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP43A Pending JPH06177298A (en) 1992-12-07 1992-12-07 Integrated circuit

Country Status (1)

Country Link
JP (1) JPH06177298A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19507662A1 (en) * 1995-03-04 1996-09-26 Robert Price Power circuit cooling method for central processing unit of computer
US20220264765A1 (en) * 2021-02-17 2022-08-18 Meta Platforms, Inc. Ic package with embedded fan-based cooling system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19507662A1 (en) * 1995-03-04 1996-09-26 Robert Price Power circuit cooling method for central processing unit of computer
US20220264765A1 (en) * 2021-02-17 2022-08-18 Meta Platforms, Inc. Ic package with embedded fan-based cooling system
US11570930B2 (en) * 2021-02-17 2023-01-31 Meta Platforms, Inc. IC package with embedded fan-based cooling system

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