JPH0617337Y2 - Ceramic substrate paste filling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a paste filling device for a ceramic substrate, which fills a through hole of a ceramic substrate with a paste serving as a through-hole conductor.

The manufacturing process of the ceramic substrate includes a paste filling process of filling the paste into the through holes that connect the circuit patterns formed on the front surface side and the back surface side of the green sheet.

An object of the present invention is to provide a paste filling device for a ceramic substrate (hereinafter referred to as paste filling device) that can efficiently fill the paste into the through hole.

[Conventional technology]

FIG. 4 is a schematic diagram showing the structure of a conventional paste filling device,
FIG. 5 is a schematic diagram showing paste filling with a squeegee.

As shown in FIG. 4, the conventional paste filling device has a structure in which the vacuum table 3 having a plurality of suction holes 3-1 to 3-n and the vacuum 8 are integrated.

In this paste filling device, a film 6 having air permeability is arranged on the vacuum table 3, and the green sheet 1 is placed on the film 6 and the vacuum 8 is placed.
By operating the green sheet 1 through hole 1-1
The paste 5 is filled in ~ 1-n.

This paste filling device is, as shown in FIG.
The target is the green sheet 1 in which the paste 5 is preliminarily filled in the through holes 1-1 to 1-n. 2 in the figure
Is a film 2 attached to the green sheet 1, and this film 2 has a through hole of the green sheet 1.
Holes equivalent to 1-1 to 1-n are drilled.

Next, FIG. 5 is a diagram schematically showing paste filling with a squeegee.

The paste filling method shown in FIG. 5 is such that the squeegee 7 is moved in the direction of the arrow and the paste 5 supplied on the film 2 is poured into the through holes 1-1 to 1-n of the green sheet 1 to be filled. is there. This paste filling method is
It is widely used because it does not require a dedicated paste filling device. However, in the method shown in FIG. 5, it is technically difficult to uniformly and surely fill the paste 5 into all of the through holes 1-1 to 1-n, and thus it has recently been adopted as the above-mentioned method. It is positioned as a pre-process of the paste filling process shown in the figure.

The procedure for filling the paste into the through holes using the conventional paste filling device will be described below with reference to FIG. The green sheet shown in FIG.
The paste is preliminarily filled in the through holes by the paste filling means shown in the figure.

On the vacuum table 3, a film 6 having a thickness of about 200 μm and having air permeability is arranged. This film 6
Is made of a polyolefin resin with a pore size on the order of submicron and has three-dimensional network-like connecting holes that are connected in the vertical and horizontal directions, so it has good air permeability and excellent chemical resistance, and especially absorbs organic solvents. Is very fast.

Therefore, when this film 6 is used, the solvent content of the paste 5 is quickly absorbed, and the bleeding (bleeding) of the paste 5 on the contact surface between the green sheet 1 and the film 6 is eliminated,
There is no risk that an extra conductor will be formed which will interfere with printing a land pattern or the like on the surface of the green sheet in a later step.

The vacuum 8 is activated to suck air in the direction of the arrow. As a result, the suction holes 3- of the vacuum table 3
Through hole through the film 6 having breathability of 1 to 3-n
The air in 1-1 to 1-n is sucked toward the vacuum 8 side, and the paste 5 is introduced into the through holes 1-1 to 1-n. The paste 5 introduced into the through holes 1-1 to 1-n reaches the film 6 through the through holes 1-1 to 1-n of the green sheet 1 and is cut off by the film 6. 1
Filled within ~ 1-n.

When the paste 5 is filled in the through holes 1-1 to 1-n of the green sheet 1, the vacuum 8 is stopped and the green sheet 1 is removed together with the film 6. After that, the green sheet 1 and the film 6 are separated from each other, the green sheet 1 is sent to the next step, and the film 6 is replaced with a new one. The film 6 is replaced every time the paste filling process for one green sheet 1 is completed. This is because the paste adhered to the surface of the film 6 when the same film 6 is continuously used. This is because there is a risk that 5 will adhere to another green sheet 1 to be processed next.

[Problems to be solved by the invention]

As is clear from the above description, in the conventional paste filling apparatus, the film 6 must be replaced with a new one each time one green sheet 1 is filled with the paste 5. However, for that purpose, the thickness is about 200 μm, which is extremely thin, such as “positioning work for accurately positioning the film 6 at a predetermined position” and “work for extending the wrinkles of the film 6 to ensure flatness”. Since the time is wasted, the paste filling efficiency is significantly reduced.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a paste filling device capable of improving the work efficiency of filling the paste into the through holes and filling an appropriate amount of the paste into the through holes. Has an aim.

[Means for solving problems]

 FIG. 1 is a principle view of the paste filling device of the present invention.

As shown in the principle diagram of FIG. 1, the paste filling device according to the present invention includes a vacuum table 8 having a vacuum table 3 having a plurality of suction holes 3-1 to 3-n, and a vacuum table 3 on the vacuum table 3. The plurality of films 6 (hereinafter referred to as film 6-), which are placed in a laminated state and are separable one by one.
Thickness detecting device 10 for detecting the laminated thickness of 1 to 6-n)
And a suction amount adjusting means 11 for adjusting the suction amount of the paste 5 corresponding to the laminated thickness of the films 6-1 to 6-n.

[Action]

This paste filling device is equipped with the suction amount adjusting means 11 for adjusting the suction amount of the paste 5 corresponding to the laminated thickness of the films 6-1 to 6-n placed on the vacuum table 3. The amount of the paste 5 filled in the through holes 1-1 to 1-n of the green sheet 1 does not change depending on the number of laminated films 6.

Since this paste filling device has a device configuration in which the films 6 are arranged in a laminated state, it is not necessary to replace the films 6 each time one green sheet 1 is processed. Therefore, when this paste filling device is used, the paste filling process is remarkably made efficient.

〔Example〕

 The present invention will be described in detail below with reference to the drawings.

FIG. 2 is a schematic diagram of a paste filling device according to an embodiment of the present invention, and FIG. 3 is a diagram showing the vacuum suction amount with respect to the film thickness of the embodiment.

As shown in FIG. 2, the paste filling apparatus according to the present invention is equipped with a vacuum table 3 equipped with a vacuum table 3 having a plurality of suction holes 3-1 to 3-n, and laminated on the vacuum table 3. In this state, an image pickup device 12 for photographing side surfaces of a plurality of films 6-1 to 6-n arranged in a separable manner, and the films 6-1 to 6-1 photographed by the image pickup device 12 A display 13 for displaying the laminated thickness based on the side image of 6-n, and films 6-1 to 6 taken by the image pickup device 12.
A leak valve 15 is provided as a suction amount adjusting means for adjusting the suction amount of the paste 5 corresponding to the laminated thickness of -n.

When the paste 5 is filled into the through holes 1-1 to 1-n of the green sheet 1 using this paste filling device, a plurality of films 6-1 to 6-n are arranged on the vacuum table 3 in a laminated state. Then, the paste 5 is filled with the green sheet 1 placed thereon.

Now, with the vacuum 8, the suction holes 3-1 to 3-n of the vacuum table 3 and the micro holes (vent holes) of the films 6-1 to 6-n
When the air in the through holes 1-1 to 1-n is discharged to the outside of the vacuum 8 through the paste, the paste 5 reaches the uppermost film 6-1 through the through holes 1-1 to 1-n of the green sheet 1, The film 6-1 blocks and blocks the through holes 1-1 to 1-n.

In this way, when the step of filling the paste 5 into one green sheet 1 is completed, the green sheet 1 is removed from the vacuum table 3 together with the film 6-1 adhered to the back surface.

Next, the new green sheet 1 is placed on the film (eg
6-2), and the paste 5 is filled in the through holes by the same procedure as above. After that, this work is repeated up to the film 6-n.

As is clear from the above description, the paste filling device according to the present invention is configured so that the films 6-1 to 6 arranged in the laminated state are arranged.
-By removing n one by one, a new film 6 is always positioned in the uppermost layer part, so that a troublesome work such as replacing the film 6 each time one green sheet 1 is filled with the paste 5 Is eliminated, and the paste filling process is significantly improved in efficiency.

The imaging device 12 irradiates the side surfaces of the stacked films 6-1 to 6-n with light and receives the reflected light to photograph the side surfaces of the films 6-1 to 6-n. And display it 13
Is displayed and the laminated thickness of the films 6-1 to 6-n is measured.

Further, the paste filling device according to the present invention has an optimum suction amount characteristic diagram of the vacuum 8 corresponding to the laminated thickness of the films 6-1 to 6-n, as shown in FIG. The adjustment of the optimum suction amount of the vacuum 8 is performed by taking out the suction amount of the vacuum 8 corresponding to the laminated thickness of the film 6 measured by the image pickup device 12 from the optimum suction amount characteristic diagram.
An optimum vacuum suction amount is set with respect to the laminated thickness of the film 6 via a suction valve 15 for adjusting the suction amount.

[Effect of device]

As is clear from the above description, the paste filling device according to the present invention has a structure in which the films used in the process of filling the paste into the through holes can be arranged in a laminated state, and thus one green sheet can be used. The paste filling process is significantly streamlined by eliminating the need to replace the film with a new one each time the sheet is processed.

[Brief description of drawings]

FIG. 1 is a principle view of a paste filling device of the present invention, a side sectional view of an essential part, FIG. 2 is a schematic view of a paste filling device of one embodiment of the present invention, and FIG. 3 is a film thickness of one embodiment. FIG. 4 is a diagram showing a suction amount of vacuum with respect to FIG. 4, FIG. 4 is a schematic diagram of a conventional paste filling device, and FIG. 5 is a schematic diagram showing paste filling with a squeegee. In the figure, 1 is a green sheet, 1-1 to 1-n are through holes, 2 is a film, 3 is a vacuum table, and 3-1 to 3-n
Is a suction hole, 5 is a paste, 6,6-1 to 6-n is a film,
7 is a squeegee, 8 is a vacuum, 10 is a thickness detector, 11
Is a suction amount adjusting means, 12 is an image pickup device, 13 is an indicator, and 15 is a leak valve.

Claims (1)

[Scope of utility model registration request] 1. A green sheet (1) having through-holes (1-1 to 1-n) formed on a vacuum table (3) via a film (6) having air permeability, and the vacuum sheet (1) is placed on the vacuum table (3). A paste filling device for a ceramic substrate for sucking and filling the paste (5) supplied on the green sheet (1) into the through holes (1-1 to 1-n) by operating 8). , A vacuum (8) having a vacuum table (3) having a plurality of suction holes (3-1 to 3-n), and a stackable state on the vacuum table (3), and can be separated one by one Thickness detecting device (10) for detecting the laminated thickness of a plurality of films (6) placed in various shapes, and the film detected by the thickness detecting device (10)
A paste filling device for a ceramic substrate, comprising: a suction amount adjusting means (11) for adjusting the suction amount of the paste (5) in accordance with the laminated thickness of (6).