JPH06160313A - Fluorescent x-ray analysis - Google Patents
Fluorescent x-ray analysisInfo
- Publication number
- JPH06160313A JPH06160313A JP22059893A JP22059893A JPH06160313A JP H06160313 A JPH06160313 A JP H06160313A JP 22059893 A JP22059893 A JP 22059893A JP 22059893 A JP22059893 A JP 22059893A JP H06160313 A JPH06160313 A JP H06160313A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- sample
- shutter
- output
- fluorescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、分光結晶を固定した
蛍光X線分析方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorescent X-ray analysis method in which a dispersive crystal is fixed.
【0002】[0002]
【従来の技術】原子炉の冷却水等に含まれる各種の金属
またはそのイオン等を検出する場合は、冷却水を濾過し
たフィルタを試料として蛍光X線分析を行う。しかし、
このような試料は、それ自体が放射能を持つ場合があ
り、この場合、X線の照射により発生する蛍光X線と試
料自体の放射能によって発生するX線とが同時に検出さ
れる。すなわち、試料自体の放射能によるX線が、検出
しようとする蛍光X線のバックグラウンドとして含まれ
ている場合がある。走査型またはエネルギ分散型の蛍光
X線分析装置においては、X線検出器の走査角あるいは
検出しようとするパルス波高を所定値より僅かに変位し
た値に設定することにより、試料の放射能を検出して補
正を加えることができる。2. Description of the Related Art When detecting various metals or their ions contained in cooling water of a nuclear reactor, fluorescent X-ray analysis is carried out using a filter obtained by filtering the cooling water as a sample. But,
Such a sample may itself have radioactivity, and in this case, fluorescent X-rays generated by irradiation of X-rays and X-rays generated by the radioactivity of the sample itself are simultaneously detected. That is, X-rays due to the radioactivity of the sample itself may be included as the background of the fluorescent X-rays to be detected. In a scanning or energy dispersive X-ray fluorescence analyzer, the radioactivity of a sample is detected by setting the scanning angle of the X-ray detector or the pulse wave height to be detected to a value slightly displaced from a predetermined value. You can add a correction.
【0003】[0003]
【発明が解決しようとする課題】しかし、分光結晶を固
定した同時型蛍光X線分析装置においては、このような
手段によって試料自体の放射能に基づく測定誤差を簡単
に補正することができない。したがって、この発明は、
同時型蛍光X線分析装置において、試料自体の放射能に
基づく誤差を容易に補正し得る蛍光X線分析方法を提供
するものである。However, in the simultaneous X-ray fluorescence analyzer in which the dispersive crystal is fixed, the measurement error due to the radioactivity of the sample itself cannot be easily corrected by such means. Therefore, the present invention
It is intended to provide a fluorescent X-ray analysis method capable of easily correcting an error due to the radioactivity of the sample itself in the simultaneous fluorescent X-ray analysis apparatus.
【0004】[0004]
【課題を解決するための手段および作用】この発明は試
料に分光結晶を対設して、その試料から発生する種々の
波長のX線のうち、特定の波長のX線、すなわち、検出
しようとする物質の特性X線のみに回折を生じさせ、こ
の分光結晶に対設した適宣のX線検出器でその特性X線
を検出するように、上記分光結晶および検出器を予め所
定の位置に固定した同時型蛍光X線分析装置において、
上記試料に一次X線を照射して試料を励起するためのX
線管におけるX線放射窓の前面に、開閉自在なX線シャ
ッタを設ける。この同時型蛍光X線分析装置を用いて、
上記シャッタを閉じた状態でX線検出器の第1の出力を
観測すると、試料が放射能を持っている場合、その放射
線に基づく出力を知ることができる。したがって、シャ
ッタを開いて任意の試料をX線で励起することにより、
その試料に含まれる所望の物質の特性X線の強度を上記
分光結晶を介して検出する前後において、上述のように
シャッタを一旦閉じて検出器の第1の出力を観測し、こ
の第1の出力を測定値から差し引くことにより、試料自
体の放射能に基づく測定誤差が補正される。このよう
に、この発明は試料自体の放射能に基づく測定誤差を簡
単な装置によって補正することのできる作用・効果があ
る。This invention intends to detect X-rays of a specific wavelength, that is, to detect X-rays of various wavelengths generated from the sample, by disposing a dispersive crystal on the sample. The spectroscopic crystal and the detector are preliminarily set at predetermined positions so that only the characteristic X-ray of the substance to be diffracted is generated, and the characteristic X-ray is detected by an appropriate X-ray detector opposite to the spectroscopic crystal. In the fixed simultaneous X-ray fluorescence analyzer,
X for irradiating the sample with a primary X-ray to excite the sample
An openable and closable X-ray shutter is provided on the front surface of the X-ray emission window of the X-ray tube. Using this simultaneous X-ray fluorescence analyzer,
When the first output of the X-ray detector is observed with the shutter closed, the output based on the radiation can be known when the sample has radioactivity. Therefore, by opening the shutter and exciting any sample with X-rays,
Before and after the characteristic X-ray intensity of the desired substance contained in the sample is detected via the dispersive crystal, the shutter is closed once as described above, and the first output of the detector is observed. By subtracting the output from the measured value, the measurement error due to the radioactivity of the sample itself is corrected. As described above, the present invention has the action and effect of being able to correct the measurement error based on the radioactivity of the sample itself with a simple device.
【0005】[0005]
【実施例】以下、この発明の一実施例を図面にしたがっ
て説明する。図1は、この実施例の縦断面図、図2はそ
のA−A断面図で、真空室1内にターンテーブル2を設
けて、その上に複数個の板状またはシート状の試料3を
載置するようにしてある。このテーブル2の一部と対向
するように試料の挿入取出口4を設けるとともに真空室
1の気密壁に取り付けたX線管5のX線放射窓6を上記
テーブル2上における試料3の1つに対向させて、さら
に、その窓6の前面にX線シャッタ7を設けてある。こ
のシャッタ7は、電動機8で駆動されて図2に実線およ
び鎖線で示すように、X線管の窓6を開閉するものであ
る。上記X線管5に対向する試料3の側部には、いずれ
も固定された複数個宛のスリット9と分光結晶10、X
線検出器11およびその前面のスリット12などを設け
てある。なお、この実施例では、真空室1内に複数個の
試料3を収納できるようにしたが、この発明では、真空
室1内に1つの試料3を収納するようにしてもよい。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a vertical cross-sectional view of this embodiment, and FIG. 2 is a cross-sectional view taken along the line A-A. A turntable 2 is provided in a vacuum chamber 1 on which a plurality of plate-shaped or sheet-shaped samples 3 are placed. It is supposed to be placed. A sample insertion / extraction port 4 is provided so as to face a part of the table 2, and an X-ray emission window 6 of an X-ray tube 5 attached to an airtight wall of the vacuum chamber 1 is provided as one of the samples 3 on the table 2. Further, an X-ray shutter 7 is provided in front of the window 6 so as to face the window. The shutter 7 is driven by an electric motor 8 to open and close the window 6 of the X-ray tube as shown by a solid line and a chain line in FIG. On the side of the sample 3 facing the X-ray tube 5, a plurality of slits 9 and a dispersive crystal 10, X are fixed.
A line detector 11 and a slit 12 on the front surface thereof are provided. In this embodiment, the plurality of samples 3 can be stored in the vacuum chamber 1. However, in the present invention, one sample 3 may be stored in the vacuum chamber 1.
【0006】上述の装置において、まず、シャッタ7を
閉じた状態で各X線検出器11の第1の出力を読み取っ
て、これを記録しておく。つぎに、シャッタ7を鎖線の
ように開いて試料3の1つにX線を照射し、そのときの
各検出器11の第2の出力を読み取る。この第2の出力
から、記録しておいた第1の出力をそれぞれ差し引くこ
とによって、各分光結晶の格子面間隔とその配置角とに
よって定まる物質の値を正確に知ることができる。In the above-mentioned apparatus, first, the first output of each X-ray detector 11 is read with the shutter 7 closed, and this is recorded. Next, the shutter 7 is opened like a chain line and one of the samples 3 is irradiated with X-rays, and the second output of each detector 11 at that time is read. By subtracting the recorded first output from the second output, the value of the substance determined by the lattice plane spacing of each dispersive crystal and its arrangement angle can be accurately known.
【0007】[0007]
【発明の効果】以上説明したように、この発明によれ
ば、X線管の窓に開閉自在なシャッタを設けるだけの簡
単な構造によって、試料が放射能を持っている場合の誤
差を補正することができる。As described above, according to the present invention, the error when the sample has radioactivity is corrected by the simple structure in which the window of the X-ray tube is provided with the openable shutter. be able to.
【図1】この発明の一実施例を示す縦断面図である。FIG. 1 is a vertical sectional view showing an embodiment of the present invention.
【図2】図1におけるA−A断面図である。FIG. 2 is a sectional view taken along line AA in FIG.
3…試料、5…X線管、6…X線管放射窓、7…シャッ
タ、10…分光結晶、11…X線検出器。3 ... Sample, 5 ... X-ray tube, 6 ... X-ray tube radiation window, 7 ... Shutter, 10 ... Spectroscopic crystal, 11 ... X-ray detector.
Claims (1)
自在なX線シャッタを設けて、上記シャッタを介して試
料を上記X線管の窓に対設し、上記試料に固定分光結晶
を対設するとともに試料から発生して上記分光結晶で回
折したX線が入射するようにX線検出器を配設した同時
型蛍光X線分析装置を用い、 上記シャッタを閉じた状態で上記X線検出器の第1の出
力を測定し、一方、上記シャッタを開いた状態で上記X
線検出器の第2の出力を測定し、この第2の出力から上
記第1の出力を減算することにより、上記試料が持つ放
射能による測定誤差を補正することを特徴とする蛍光X
線分析方法。1. An X-ray shutter that can be opened and closed is provided in front of an X-ray emission window of an X-ray tube, and a sample is opposed to the window of the X-ray tube through the shutter, and a fixed spectroscopic crystal is fixed on the sample. And a simultaneous X-ray fluorescence analyzer equipped with an X-ray detector so that X-rays generated from the sample and diffracted by the dispersive crystal are incident on the X-ray analyzer with the shutter closed. The first output of the line detector is measured, while the X-axis is measured with the shutter open.
Fluorescent X characterized in that the measurement error due to the radioactivity of the sample is corrected by measuring the second output of the line detector and subtracting the first output from the second output.
Line analysis method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5220598A JPH0734002B2 (en) | 1993-08-11 | 1993-08-11 | X-ray fluorescence analysis method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5220598A JPH0734002B2 (en) | 1993-08-11 | 1993-08-11 | X-ray fluorescence analysis method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06160313A true JPH06160313A (en) | 1994-06-07 |
JPH0734002B2 JPH0734002B2 (en) | 1995-04-12 |
Family
ID=16753494
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5220598A Expired - Lifetime JPH0734002B2 (en) | 1993-08-11 | 1993-08-11 | X-ray fluorescence analysis method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0734002B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017122647A (en) * | 2016-01-07 | 2017-07-13 | 株式会社リガク | Fluorescent x-ray analyzer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6069832U (en) * | 1983-10-20 | 1985-05-17 | 株式会社リコー | disc brake device |
-
1993
- 1993-08-11 JP JP5220598A patent/JPH0734002B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6069832U (en) * | 1983-10-20 | 1985-05-17 | 株式会社リコー | disc brake device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017122647A (en) * | 2016-01-07 | 2017-07-13 | 株式会社リガク | Fluorescent x-ray analyzer |
Also Published As
Publication number | Publication date |
---|---|
JPH0734002B2 (en) | 1995-04-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |