JPH0614399Y2 - 静電偏向器 - Google Patents

静電偏向器

Info

Publication number
JPH0614399Y2
JPH0614399Y2 JP1988134239U JP13423988U JPH0614399Y2 JP H0614399 Y2 JPH0614399 Y2 JP H0614399Y2 JP 1988134239 U JP1988134239 U JP 1988134239U JP 13423988 U JP13423988 U JP 13423988U JP H0614399 Y2 JPH0614399 Y2 JP H0614399Y2
Authority
JP
Japan
Prior art keywords
insulator
outer cylinder
deflector
electrostatic deflector
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988134239U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0254153U (enrdf_load_stackoverflow
Inventor
安秀 藤谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1988134239U priority Critical patent/JPH0614399Y2/ja
Publication of JPH0254153U publication Critical patent/JPH0254153U/ja
Application granted granted Critical
Publication of JPH0614399Y2 publication Critical patent/JPH0614399Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988134239U 1988-10-14 1988-10-14 静電偏向器 Expired - Lifetime JPH0614399Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988134239U JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988134239U JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Publications (2)

Publication Number Publication Date
JPH0254153U JPH0254153U (enrdf_load_stackoverflow) 1990-04-19
JPH0614399Y2 true JPH0614399Y2 (ja) 1994-04-13

Family

ID=31392814

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988134239U Expired - Lifetime JPH0614399Y2 (ja) 1988-10-14 1988-10-14 静電偏向器

Country Status (1)

Country Link
JP (1) JPH0614399Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6953938B2 (en) * 2002-10-03 2005-10-11 Canon Kabushiki Kaisha Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2816849B2 (ja) * 1988-10-06 1998-10-27 株式会社トプコン 静電偏向器

Also Published As

Publication number Publication date
JPH0254153U (enrdf_load_stackoverflow) 1990-04-19

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