JPH06139563A - Production of magnetic disk - Google Patents

Production of magnetic disk

Info

Publication number
JPH06139563A
JPH06139563A JP28570892A JP28570892A JPH06139563A JP H06139563 A JPH06139563 A JP H06139563A JP 28570892 A JP28570892 A JP 28570892A JP 28570892 A JP28570892 A JP 28570892A JP H06139563 A JPH06139563 A JP H06139563A
Authority
JP
Japan
Prior art keywords
layer
lubricant
solution
fluorine
magnetic disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP28570892A
Other languages
Japanese (ja)
Inventor
Naoto Matsuo
直人 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP28570892A priority Critical patent/JPH06139563A/en
Publication of JPH06139563A publication Critical patent/JPH06139563A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a uniform lubricating layer by applying a first soln. prepared by diluting a fluorine-base lubricant with a volatile org. solvent on a magnetic layer to form a lubricant layer, and then applying a second soln. having lower concn. of the fluorine-base lubricant than the first soln. on the lubricant layer. CONSTITUTION:The first soln. prepared by diluting a fluorine-base lubricant with a volatile org. solvent is applied on a protective layer 5 by spin coating to form a lubricant layer 7. The layer 7 includes such a part 8 where the lubricant layer is enough formed and such a part 9 where the lubricant layer is not enough formed. Then the second soln. having the concn. of fluorine-base lubricant 10-20% of the concn. of the first soln. is applied on the layer 7 by spin coating. Thereby, the part 8 is removed while the part 9 is covered with a new lubricant 10 to form a uniform lubricant layer 7.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気記録再生装置等に
用いられる磁気ディスクの製造方法に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic disk used in a magnetic recording / reproducing apparatus or the like.

【0002】[0002]

【従来の技術】図4は磁気ディスクを示す断面図であ
る。図4において1はAl等の材料で構成された基体、
2は基体1の上に設けられたNi−P膜で、基体1とN
i−P膜2で基板が構成されている。3は基板上に設け
られた下地膜で、下地膜3はCr等の材料で構成され
る。4は下地膜3上に設けられた磁性層で、磁性層4は
Co−Cr−Ta等の磁性材料で構成されている。5は
磁性層4上に設けられた保護層で、保護層5はC等で構
成される。6は保護層5上に設けられた潤滑層である。
潤滑層6は図5に示す様に、保護層5上に形成されてい
る。保護層5に図5に示す様な凹凸が発生しているの
は、基板上にテクスチャー加工等を施し、しかもスパッ
タリング法やメッキ法などの薄膜技術で各膜が形成され
ているために、基板上の凹凸が保護層5の表面凹凸とし
て反映されるからである。
2. Description of the Related Art FIG. 4 is a sectional view showing a magnetic disk. In FIG. 4, 1 is a base made of a material such as Al,
Reference numeral 2 denotes a Ni-P film provided on the base 1,
The i-P film 2 constitutes a substrate. A base film 3 is provided on the substrate, and the base film 3 is made of a material such as Cr. A magnetic layer 4 is provided on the underlayer film 3, and the magnetic layer 4 is made of a magnetic material such as Co—Cr—Ta. A protective layer 5 is provided on the magnetic layer 4, and the protective layer 5 is made of C or the like. Reference numeral 6 is a lubricating layer provided on the protective layer 5.
The lubricating layer 6 is formed on the protective layer 5, as shown in FIG. The unevenness as shown in FIG. 5 is formed on the protective layer 5 because the substrate is textured and the films are formed by a thin film technique such as a sputtering method or a plating method. This is because the irregularities on the top are reflected as the irregularities on the surface of the protective layer 5.

【0003】潤滑層6は揮発性有機溶媒によって希釈さ
れたフッ素系潤滑剤を保護層5上に塗布して形成され
る。フッ素系潤滑剤の塗布方法としては、以下の2つの
方法が知られている。一方はディスクハンガーで保護層
5まで形成した磁気ディスクを保持し、その磁気ディス
クをディスクハンガーごとフッ素系潤滑剤を揮発性有機
溶媒にて希釈した溶液に浸漬させ、その後に溶液から磁
気ディスクを引き上げるかもしくは溶液の抜き取りによ
り揮発性有機溶媒を蒸発させて潤滑層6を形成する方法
である。他方は磁気ディスクをスピンドルモーターによ
って低速回転させながら、フッ素系潤滑剤を揮発性有機
溶媒によって希釈させた溶液を適量磁気ディスクの上に
射出させ、次に磁気ディスクを高速回転させて溶媒の蒸
発を行なって潤滑層6を形成するスピンコート法と呼ば
れる方法である。
The lubricating layer 6 is formed by coating the protective layer 5 with a fluorine-based lubricant diluted with a volatile organic solvent. The following two methods are known as a method for applying a fluorine-based lubricant. One holds a magnetic disk having a protective layer 5 formed by a disk hanger, and the magnetic disk is dipped together with the disk hanger in a solution prepared by diluting a fluorinated lubricant with a volatile organic solvent, and then the magnetic disk is pulled up from the solution. Alternatively, it is a method of forming the lubricating layer 6 by evaporating the volatile organic solvent by extracting the solution. On the other hand, while rotating the magnetic disk at a low speed with a spindle motor, a solution prepared by diluting a fluorine-based lubricant with a volatile organic solvent is injected onto the magnetic disk, and then the magnetic disk is rotated at a high speed to evaporate the solvent. This is a method called spin coating in which the lubricating layer 6 is formed by going on.

【0004】従来の磁気ディスクでは表面粗さがRaで
60〜120Åであったので、粗度として較差を10%
程度含む事から必然的に潤滑層の厚さの較差も同程度の
6〜12Åが許容されてきた。従って、潤滑層の厚さの
誤差を10Å程度に管理すれば十分な磁気ヘッドとの摺
動時の潤滑性を得ることができる。
Since the surface roughness Ra of the conventional magnetic disk is 60 to 120Å, the difference in roughness is 10%.
As a result, the difference in the thickness of the lubricating layer is inevitably allowed to be 6 to 12 Å. Therefore, if the error in the thickness of the lubricating layer is controlled to about 10Å, sufficient lubricity when sliding with the magnetic head can be obtained.

【0005】しかしながら近年では、磁気ディスクと磁
気ヘッド間の浮上間隔を狭くして、磁気記録再生装置の
記憶容量を増大させている。従って、磁気ディスクの表
面粗度は10〜80Å程度になってきている。この様に
磁気ディスクの表面粗度が小さくなって行くと潤滑層の
厚さの誤差も5Å程度に管理しなければならない。
However, in recent years, the flying distance between the magnetic disk and the magnetic head has been narrowed to increase the storage capacity of the magnetic recording / reproducing apparatus. Therefore, the surface roughness of the magnetic disk is about 10 to 80Å. As the surface roughness of the magnetic disk becomes smaller in this way, the error in the thickness of the lubricating layer must be controlled to about 5Å.

【0006】[0006]

【発明が解決しようとする課題】しかしながら前記従来
の潤滑層の形成方法では、5Å程度に管理することは困
難であり、磁気ヘッドと磁気ディスク間の摺動性が悪く
なるという問題点があった。
However, in the conventional method of forming the lubricating layer, it is difficult to control the thickness to about 5Å, and there is a problem that the slidability between the magnetic head and the magnetic disk deteriorates. .

【0007】本発明は前記従来の課題を解決するもので
あり、磁気ディスクの表面粗度が小さくなっても、所定
の誤差の間で潤滑層の形成を行うことができる磁気ディ
スクの製造方法を提供することを目的としている。
The present invention solves the above-mentioned conventional problems, and provides a method for manufacturing a magnetic disk, which can form a lubricating layer within a predetermined error even if the surface roughness of the magnetic disk becomes small. It is intended to be provided.

【0008】[0008]

【課題を解決するための手段】この目的を達成するため
に、磁性層上にフッ素系潤滑剤を揮発性有機溶媒によっ
て希釈した第1の溶液を塗布して潤滑層を形成し、次に
フッ素系潤滑剤を揮発性有機溶媒によって希釈され、し
かも第1の溶液よりもフッ素系潤滑剤の濃度が低い第2
の溶液を前記潤滑層の上に塗布する。
To achieve this object, a first solution prepared by diluting a fluorine-based lubricant with a volatile organic solvent is applied on the magnetic layer to form a lubricating layer, and then a fluorine layer is formed. The second lubricant, which is diluted with a volatile organic solvent and has a lower concentration of fluorine lubricant than the first solution
Is applied on the lubricating layer.

【0009】[0009]

【作用】この方法により、第1の溶液で潤滑層が余分に
付着した部分を第2の溶液で溶かし出すとともに第1の
溶液で潤滑層の付着が不十分な部分には第2の溶液で十
分に潤滑層を付着させることができる。
By this method, the portion where the lubricating layer is excessively adhered by the first solution is dissolved by the second solution, and the portion where the lubricating layer is not sufficiently adhered by the first solution is treated by the second solution. The lubricating layer can be sufficiently attached.

【0010】[0010]

【実施例】以下本発明の一実施例における磁気ディスク
の製造方法を図1(a)(b)(c)を用いて説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a magnetic disk according to an embodiment of the present invention will be described below with reference to FIGS. 1 (a) (b) (c).

【0011】まず図1(a)は潤滑層を形成する前の磁
気ディスクを示しており、5は保護層であり、これは従
来の構成と同じである。図示していないが基板、下地
膜、磁性層も従来と同じ構成である。次に第1の溶液す
なわちフッ素系潤滑剤(例えばモンテフロロ社製 Fo
mblin Z)を揮発性有機溶媒で希釈した溶液(フ
ッ素系潤滑剤の濃度は0.01%〜1.00%)を作製
し、その第1の溶液をスピンコート法によって磁気ディ
スクの上に塗布し、図1(b)に示す潤滑層7を形成す
る。この時潤滑層7には図1(b)に示すように潤滑層
7が余分に形成された部分8及び潤滑層7の形成が足り
ない部分9が形成されている。次に第2の溶液すなわち
フッ素系潤滑剤(例えばモンテフロロ社製 Fombl
in Z)を揮発性有機溶媒で希釈し、しかもフッ素系
潤滑剤の濃度を第1の溶液のフッ素系潤滑剤の濃度の1
0%〜20%とした溶液を作製する。この第2の溶液を
スピンコート法によって磁気ディスクの上に塗布する。
すると図1(b)に示す部分8は除去され、部分9には
新たな潤滑剤が付着し、図1(c)に示す様に均一な潤
滑層7を形成することができる。この様な現象が発生す
るのは下記の理由によるものだと考えられる。部分8に
ついては、保護層5を構成する分子と潤滑層7を構成す
る分子との間の分子間力が弱いために、第2の溶液を塗
布すると、部分8が除去され、さらに部分9については
保護層5を構成する分子と潤滑層7を構成する分子との
間の分子間力が強いために、第2の溶液を塗布しても除
去されない。更に部分9には保護層5に近いために(分
子間力が大きいために)第2の溶液を塗布すると、部分
9に補充部分10が付着していく。
First, FIG. 1A shows a magnetic disk before forming a lubricating layer, and 5 is a protective layer, which is the same as the conventional structure. Although not shown, the substrate, the base film, and the magnetic layer have the same structure as the conventional one. Next, the first solution, that is, a fluorine-based lubricant (for example, Fo manufactured by Monte Floro Co., Ltd.)
mblin Z) is diluted with a volatile organic solvent to prepare a solution (concentration of the fluorine-based lubricant is 0.01% to 1.00%), and the first solution is applied onto the magnetic disk by spin coating. Then, the lubricating layer 7 shown in FIG. 1B is formed. At this time, as shown in FIG. 1B, the lubricating layer 7 is formed with a portion 8 where the lubricating layer 7 is excessively formed and a portion 9 where the lubricating layer 7 is insufficiently formed. Next, the second solution, that is, a fluorine-based lubricant (for example, Fombl manufactured by Monte Floro Co., Ltd.
in Z) is diluted with a volatile organic solvent, and the concentration of the fluorinated lubricant is set to 1 of the concentration of the fluorinated lubricant of the first solution.
A solution of 0% to 20% is prepared. This second solution is applied onto the magnetic disk by spin coating.
Then, the portion 8 shown in FIG. 1 (b) is removed, and a new lubricant is attached to the portion 9 to form a uniform lubricating layer 7 as shown in FIG. 1 (c). It is considered that such a phenomenon occurs due to the following reasons. Regarding the portion 8, since the intermolecular force between the molecules forming the protective layer 5 and the molecules forming the lubricating layer 7 is weak, when the second solution is applied, the portion 8 is removed. Since the intermolecular force between the molecules forming the protective layer 5 and the molecules forming the lubricating layer 7 is strong, is not removed even when the second solution is applied. Further, since the portion 9 is close to the protective layer 5 (because of the large intermolecular force), when the second solution is applied, the replenishment portion 10 is attached to the portion 9.

【0012】この様な現象によって潤滑層7は均一に保
護層5上に形成できると考えられる。
It is considered that the lubricating layer 7 can be uniformly formed on the protective layer 5 by such a phenomenon.

【0013】また本実施例が従来例よりも均一に潤滑層
7が形成できることを具体的に説明する。
Further, it will be specifically described that this embodiment can form the lubricating layer 7 more uniformly than the conventional example.

【0014】まず本実施例及び従来例それぞれの方法を
用いて保護層上に約80Åの潤滑層を形成し、その潤滑
層の半径方向に沿った膜厚分布をそれぞれ測定した。こ
の結果を図2(a)(b)に示す。図2(a)から判る
様に本実施例では、膜厚のばらつきが約5Å程度である
ことが判る。従って磁気ディスクの表面粗度が小さくな
っても、均一に潤滑層が形成でき、磁気ヘッドとの摺動
時の潤滑性も良くなる。又図2(b)から判る様に従来
例では本実施例の様に2回に分けて潤滑層を形成せずに
1回で行なっているので、非常に膜厚にばらつきが生じ
ており、これでは表面粗度が小さな磁気ディスクに潤滑
層を形成した場合、磁気ヘッドとの摺動時の潤滑性が悪
くなる。
First, a lubricating layer having a thickness of about 80Å was formed on the protective layer by using the methods of the present example and the conventional example, and the thickness distribution of the lubricating layer in the radial direction was measured. The results are shown in FIGS. 2 (a) and 2 (b). As can be seen from FIG. 2A, in this embodiment, the variation in film thickness is about 5Å. Therefore, even if the surface roughness of the magnetic disk becomes small, the lubricating layer can be formed uniformly, and the lubricity when sliding on the magnetic head is improved. Further, as can be seen from FIG. 2B, in the conventional example, unlike the present example, the process is performed once without forming the lubricating layer, so that the film thickness greatly varies. With this, when a lubricating layer is formed on a magnetic disk having a small surface roughness, the lubricity when sliding on the magnetic head deteriorates.

【0015】次に第2の溶液のフッ素系潤滑剤の濃度を
第1の溶液フッ素系潤滑剤の濃度の10%〜20%とし
た理由について説明する。
Next, the reason why the concentration of the fluorinated lubricant in the second solution is set to 10% to 20% of the concentration of the fluorinated lubricant in the first solution will be described.

【0016】図3は第2の溶液に対する膜厚のばらつき
の関係を示すグラフである。図3から判るように第2の
溶液のフッ素系潤滑剤の濃度を第1のフッ素系潤滑剤の
濃度の10%〜20%とする事によって膜厚のばらつき
が3%〜5%と非常に小さくなっていることが判る。
FIG. 3 is a graph showing the relationship of variation in film thickness with respect to the second solution. As can be seen from FIG. 3, when the concentration of the fluorine-based lubricant in the second solution is set to 10% to 20% of the concentration of the first fluorine-based lubricant, the variation in the film thickness is 3% to 5%. You can see that it is getting smaller.

【0017】以上の様に本実施例では、第1の溶液で潤
滑層を形成した後に、第2の溶液で更に潤滑層を形成す
ることによって、均一な潤滑層を形成することができ
る。
As described above, in this embodiment, a uniform lubricating layer can be formed by forming the lubricating layer with the first solution and then forming the lubricating layer with the second solution.

【0018】[0018]

【発明の効果】本発明は、磁性層上にフッ素系潤滑剤を
揮発性有機溶媒によって希釈した第1の溶液を塗布して
潤滑層を形成し、次にフッ素系潤滑剤を揮発性有機溶媒
によって希釈され、しかも第1の溶液よりもフッ素系潤
滑剤の濃度が低い第2の溶液を前記潤滑層の上に塗布す
る事により、第1の溶液で潤滑層が余分に付着した部分
を第2の溶液で溶かし出すとともに第1の溶液で潤滑層
の付着が不十分な部分には第2の溶液で十分に潤滑層を
付着させることができるので、均一な潤滑層を形成する
事ができ、磁気ヘッドとの摺動時の潤滑性を良くする事
ができる。
According to the present invention, the first layer obtained by diluting the fluorine-based lubricant with the volatile organic solvent is applied on the magnetic layer to form the lubricating layer, and then the fluorine-based lubricant is added with the volatile organic solvent. The second solution, which is diluted with the solution and has a lower concentration of the fluorine-based lubricant than the first solution, is applied onto the lubricating layer, so that the portion where the lubricating layer is excessively adhered to the first solution is It is possible to form a uniform lubrication layer because the second solution can sufficiently adhere the lubrication layer to the portion where the adhesion of the lubrication layer is insufficient with the first solution. It is possible to improve the lubricity when sliding with the magnetic head.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における磁気ディスクの製造
方法を示す断面図
FIG. 1 is a sectional view showing a method of manufacturing a magnetic disk according to an embodiment of the present invention.

【図2】潤滑層の膜厚のばらつきを示すグラフFIG. 2 is a graph showing variations in the thickness of the lubricating layer.

【図3】第2の溶液のフッ素系潤滑剤の濃度と潤滑層の
膜厚のばらつきの関係を示すグラフ
FIG. 3 is a graph showing the relationship between the concentration of the fluorinated lubricant in the second solution and the variation in the thickness of the lubricating layer.

【図4】従来の磁気ディスクを示す断面図FIG. 4 is a sectional view showing a conventional magnetic disk.

【図5】従来の磁気ディスクを示す部分拡大断面図FIG. 5 is a partially enlarged sectional view showing a conventional magnetic disk.

【符号の説明】[Explanation of symbols]

7 潤滑層 7 Lubrication layer

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】基板上に少なくとも磁性層を形成し、前記
磁性層上にフッ素系潤滑剤を揮発性有機溶媒によって希
釈した第1の溶液を塗布して潤滑層を形成し、次にフッ
素系潤滑剤を揮発性有機溶媒によって希釈し、しかも前
記第1の溶液よりもフッ素系潤滑剤の濃度が低い第2の
溶液を前記潤滑層の上に塗布したことを特徴とする磁気
ディスクの製造方法。
1. A magnetic layer is formed on at least a substrate, a first solution prepared by diluting a fluorine-based lubricant with a volatile organic solvent is applied on the magnetic layer to form a lubricating layer, and then a fluorine-based lubricant is formed. A method of manufacturing a magnetic disk, wherein a lubricant is diluted with a volatile organic solvent, and a second solution having a concentration of a fluorine-based lubricant lower than that of the first solution is applied on the lubricating layer. .
【請求項2】第2の溶液のフッ素系潤滑剤の濃度を第1
の溶液のフッ素系潤滑剤の濃度の10%〜20%とした
事を特徴とする請求項1記載の磁気ディスクの製造方
法。
2. The concentration of the fluorinated lubricant in the second solution is set to the first
The method for producing a magnetic disk according to claim 1, wherein the concentration of the fluorine-based lubricant in the solution is 10% to 20%.
JP28570892A 1992-10-23 1992-10-23 Production of magnetic disk Pending JPH06139563A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28570892A JPH06139563A (en) 1992-10-23 1992-10-23 Production of magnetic disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28570892A JPH06139563A (en) 1992-10-23 1992-10-23 Production of magnetic disk

Publications (1)

Publication Number Publication Date
JPH06139563A true JPH06139563A (en) 1994-05-20

Family

ID=17695002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28570892A Pending JPH06139563A (en) 1992-10-23 1992-10-23 Production of magnetic disk

Country Status (1)

Country Link
JP (1) JPH06139563A (en)

Similar Documents

Publication Publication Date Title
JP4769376B2 (en) Method for manufacturing a magnetic recording medium
US6565718B1 (en) Magnetic recording medium with high density, thin dual carbon overcoats
JPS63220420A (en) Recording medium and production thereof
JPH0520658A (en) Substrate for magnetic recording medium and production thereof
JPH06139563A (en) Production of magnetic disk
JP2000268358A (en) Production of recording medium
US20140231385A1 (en) Method for manufacturing a magnetic media having ultra thin bonded lubrication layer
JPH09219020A (en) Magnetic recording medium and its production
JP2849635B2 (en) Magneto-optical recording element and method of manufacturing the same
JPS61208620A (en) Magnetic disk
JPH02208827A (en) Production of magnetic recording medium
JP2681300B2 (en) Method of texturing a substrate for a magnetic recording medium
JPS61220128A (en) Magnetic recording medium
JP2001093141A (en) Manufacture of magnetic recording medium
JPS59124031A (en) Manufacture of magnetic disk
Wah et al. Ultraviolet irradiation of lubricant and additives thin films to reduce wear to the magnetic head
JP2001297430A (en) Laser zone texture machining method of substrate for magnetic recording medium, substrate for magnetic recording medium manufactured by using the method and magnetic recording medium using the board
JPH0554378A (en) Production of magnetic disk medium
JP2545677B2 (en) How to apply photoresist
JPH10235655A (en) Metal mold for molding substrate, its manufacturing and magnetic disc
JP2000155939A (en) Method of manufacturing information recording medium
JP2002100032A (en) Method for producing magnetic recording medium
JPS6194235A (en) Manufacture of magnetic recording medium
JPH0393037A (en) Magnetic disk and its manufacture
JP2001229528A (en) Method for manufacturing magnetic disk