JPH06139542A - Perpendicular magnetic recording medium - Google Patents

Perpendicular magnetic recording medium

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Publication number
JPH06139542A
JPH06139542A JP28861092A JP28861092A JPH06139542A JP H06139542 A JPH06139542 A JP H06139542A JP 28861092 A JP28861092 A JP 28861092A JP 28861092 A JP28861092 A JP 28861092A JP H06139542 A JPH06139542 A JP H06139542A
Authority
JP
Japan
Prior art keywords
magnetic
backing layer
layer
soft magnetic
soft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP28861092A
Other languages
Japanese (ja)
Inventor
Isatake Kaizu
功剛 貝津
Iwao Okamoto
巌 岡本
Hiroaki Wakamatsu
弘晃 若松
Kenji Sato
賢治 佐藤
Kenichi Aoshima
賢一 青島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP28861092A priority Critical patent/JPH06139542A/en
Publication of JPH06139542A publication Critical patent/JPH06139542A/en
Withdrawn legal-status Critical Current

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  • Thin Magnetic Films (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent reduction of reproducing efficiency by forming a soft magnetic backing layer having specified characteristics and a perpendicular recording layer on a nonmagnetic substrate to constitute a perpendicular magnetic recording medium. CONSTITUTION:This magnetic recording medium consists of a soft magnetic backing layer 12 and a perpendicular recording layer 13 formed on a nonmagnetic substrate 11. This soft magnetic backing layer 12 has 20-1000 relative magnetic permeability and >10kG saturation magnetic flux density. Further, film thickness deltaumum and relative magnetic permeability muu of the soft magnetic backing layer satisfy the relation of muuXdeltau (mum)>200. By this method, no magnetic saturation is caused in the top end of a head main pole or in the soft magnetic backing layer facing to the top end of the main magnetic pole by external floating magnetic field. The magnetic resistance of the backing layer can be decreased because its film thickness is controlled considering the relation with the low relative magnetic permeability, which prevents reduction of the reproducing efficiency.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は垂直磁化記録方式の磁気
ディスク装置等に用いる垂直磁気記録媒体に係り、特に
信頼性の向上を図った垂直磁気記録媒体に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording medium used in a magnetic disk device of a perpendicular magnetization recording system, and more particularly to a perpendicular magnetic recording medium having improved reliability.

【0002】近年、コンピュータシステムにおける情報
処理量の増大により、磁気ディスク装置での記録情報も
増加し、より小型で大容量化が進められ、高密度記録化
が要求されている。これに伴って従来の水平磁化記録方
式に比べて遙に高密度記録が可能な垂直磁化記録方式が
開発され、垂直磁化記録方式の媒体として高比透磁率な
軟磁性裏打ち層上に垂直記録層を積層した二層膜構造の
垂直磁気記録媒体が提案され、実用化が進められてい
る。
In recent years, as the amount of information processing in computer systems has increased, the amount of recorded information in magnetic disk devices has also increased, and there has been a demand for smaller size, larger capacity, and higher density recording. Along with this, a perpendicular magnetization recording method has been developed that enables much higher density recording than the conventional horizontal magnetization recording method. As a medium of the perpendicular magnetization recording method, a perpendicular recording layer is formed on a soft magnetic backing layer with high relative permeability. A perpendicular magnetic recording medium having a double-layered film structure in which magnetic layers are stacked has been proposed and put into practical use.

【0003】このような二層膜構造の垂直磁気記録媒体
では、高比透磁率な軟磁性裏打ち層の存在により、該軟
磁性裏打ち層に外部からの漏洩する浮遊磁界が吸収され
易く、その吸収された浮遊磁界が対応する垂直磁気ヘッ
ドの主磁極に集中し、その磁界集中により記録・再生を
阻害する傾向にある、このため、そのような外部からの
浮遊磁界の影響を防止した信頼性の良い媒体構造が必要
とされている。
In the perpendicular magnetic recording medium having such a two-layer film structure, due to the presence of the soft magnetic backing layer having a high relative magnetic permeability, the stray magnetic field leaking from the outside is easily absorbed in the soft magnetic backing layer, and the absorption thereof. The generated stray magnetic field concentrates on the main magnetic pole of the corresponding perpendicular magnetic head, and the magnetic field concentration tends to hinder recording / reproduction. Therefore, the reliability of the stray magnetic field from the outside is prevented. A good media structure is needed.

【0004】[0004]

【従来の技術】従来の二層膜構造の垂直磁気記録媒体1
は図12に示すように、表面にNiPめっき処理、或いはア
ルマイト処理を施したアルミニウム、またはガラス等か
らなる非磁性基板2上に、例えば1μmの膜厚のNiFe膜
からなる高比透磁率(μ=1500以上) な軟磁性裏打ち層
3と、該軟磁性裏打ち層3の膜厚方向に垂直な磁化容易
軸を有する0.1 μmの膜厚のCoCr膜からなる垂直記録層
4とが順に積層された構成からなっている。
2. Description of the Related Art A conventional perpendicular magnetic recording medium 1 having a double-layer film structure.
As shown in FIG. 12, a high relative magnetic permeability (μ) of, for example, a NiFe film with a thickness of 1 μm is formed on a non-magnetic substrate 2 made of aluminum or glass whose surface is subjected to NiP plating or alumite treatment. = 1500 or more), and a perpendicular recording layer 4 made of a CoCr film having a thickness of 0.1 μm and having an easy axis of magnetization perpendicular to the thickness direction of the soft magnetic backing layer 3 was sequentially laminated. It consists of a composition.

【0005】そしてかかる構成の垂直磁気記録媒体1に
対して情報の記録・再生を行う垂直磁気ヘッド5からの
記録磁界は前記垂直記録層4を垂直に磁化した後、その
直下の前記軟磁性裏打ち層3を水平方向に通過して再び
垂直記録層4を垂直に通って前記垂直磁気ヘッド5へ帰
還する磁気回路により記録される。また、既に記録され
た垂直記録層4から漏洩する記録磁界により垂直磁気ヘ
ッド5の主磁極6が磁化され、それと鎖交するコイル7
に生じる電圧を再生信号として出力することによって再
生を行っている。
The recording magnetic field from the perpendicular magnetic head 5 for recording / reproducing information on / from the perpendicular magnetic recording medium 1 having such a structure magnetizes the perpendicular recording layer 4 vertically, and then the soft magnetic backing layer immediately below the perpendicular recording layer 4. Recording is performed by a magnetic circuit that passes through the layer 3 in the horizontal direction, passes through the perpendicular recording layer 4 again, and returns to the perpendicular magnetic head 5. In addition, the main magnetic pole 6 of the perpendicular magnetic head 5 is magnetized by the recording magnetic field leaked from the already recorded perpendicular recording layer 4, and the coil 7 interlinks with it.
Reproduction is performed by outputting the voltage generated at the reproduction signal.

【0006】[0006]

【発明が解決しようとする課題】ところで、前記垂直磁
気記録媒体1における高比透磁率な軟磁性裏打ち層3
は、上記のように垂直磁気ヘッド5の主磁極6からの記
録磁界の強度を高めるなど、記録・再生時の垂直磁気ヘ
ッド5の一部の機能を担っており、記録・再生効率を向
上させる役割を果たしている。
By the way, the soft magnetic backing layer 3 having a high relative permeability in the perpendicular magnetic recording medium 1 is used.
Plays a part of the function of the perpendicular magnetic head 5 at the time of recording / reproducing, such as increasing the strength of the recording magnetic field from the main magnetic pole 6 of the perpendicular magnetic head 5 as described above, and improves the recording / reproducing efficiency. Play a role.

【0007】しかしながら、その軟磁性裏打ち層3の存
在により、逆にこの記録媒体1に対向する垂直磁気ヘッ
ド5の主磁極6先端に記録磁界と無関係な外部から漏洩
する浮遊磁界までが必然的に集中し、これが強い磁界と
なって対向する垂直記録層4を磁化したり、該垂直磁気
ヘッド5の主磁極6先端、若しくはその主磁極6先端と
対応する軟磁性裏打ち層3を磁気的に飽和させて再生効
率が低下するという現象が生じる。
However, due to the existence of the soft magnetic backing layer 3, on the contrary, even a stray magnetic field leaking from the outside unrelated to the recording magnetic field to the tip of the main magnetic pole 6 of the perpendicular magnetic head 5 facing the recording medium 1 is inevitable. The magnetic field is concentrated and becomes a strong magnetic field to magnetize the opposing perpendicular recording layer 4, or magnetically saturate the tip of the main magnetic pole 6 of the perpendicular magnetic head 5 or the soft magnetic underlayer 3 corresponding to the tip of the main magnetic pole 6. As a result, the phenomenon that the regeneration efficiency is lowered occurs.

【0008】この浮遊磁界の発生源は、磁気ディスク装
置内の主にディスク回転用モータ、ヘッド位置制御用の
ボイスコイルモータ(VCM)などであり、いずれも垂
直磁気記録媒体1と接近した位置に配置されており、通
常、これらの部分から漏洩してくる浮遊磁界は記録磁界
の数千分の一程度と微弱なもので、この程度の浮遊磁界
では垂直記録層4を記録磁化を減磁、または消磁するこ
とはない。
The source of the stray magnetic field is mainly a disk rotating motor in the magnetic disk device, a voice coil motor (VCM) for controlling the head position, and the like, both of which are located close to the perpendicular magnetic recording medium 1. The stray magnetic field leaking from these portions is weak, which is several thousandths of the recording magnetic field. At such a stray magnetic field, the recording magnetization of the perpendicular recording layer 4 is demagnetized. Or it does not degauss.

【0009】しかし、このような微弱な浮遊磁界も前記
軟磁性裏打ち層3の広い領域に吸収されて対向する垂直
磁気ヘッド5の主磁極6先端に集中することで、垂直記
録層4の記録磁化を減磁、或いは消磁するほどにまで異
常に高められる。
However, such a weak stray magnetic field is also absorbed in a wide area of the soft magnetic backing layer 3 and concentrated on the tip of the main magnetic pole 6 of the perpendicular magnetic head 5 which opposes it, whereby the recording magnetization of the perpendicular recording layer 4 is increased. Is abnormally increased to such an extent that it is demagnetized or demagnetized.

【0010】また、この現象は記録再生効率が高くなる
ほど強くなり、前記軟磁性裏打ち層3の存在が浮遊磁界
による記録磁化を消失させる危険性を高めている。従っ
て、集中によって磁界強度が高められた浮遊磁界により
前記垂直記録層4の記録磁化を減磁させたり、その磁界
強度が著しく高くなると消去(消磁)させてしまうとい
う大きな欠点があった。
This phenomenon becomes stronger as the recording / reproducing efficiency becomes higher, and the existence of the soft magnetic backing layer 3 increases the risk of losing the recording magnetization due to the stray magnetic field. Therefore, there is a big defect that the recording magnetization of the perpendicular recording layer 4 is demagnetized by the stray magnetic field whose magnetic field strength is increased by the concentration, or erased (demagnetized) when the magnetic field strength is remarkably increased.

【0011】そこでこのような問題を解決する方法とし
て軟磁性裏打ち層の比透磁率を50〜800 にして外部から
漏洩する浮遊磁界のヘッド主磁極先端への集中を低減す
ること、また、該軟磁性裏打ち層の比透磁率を低くする
と再生時の垂直磁気ヘッドと軟磁性裏打ち層により構成
される磁気回路の磁気抵抗が増加して再生効率が悪化す
ることから前記軟磁性裏打ち層の膜厚を厚くして前記磁
気抵抗を低減させることが特開平3−224122号公
報により既に提案されている。
Therefore, as a method of solving such a problem, the soft magnetic backing layer is made to have a relative magnetic permeability of 50 to 800 to reduce the concentration of a stray magnetic field leaking from the outside at the tip of the main magnetic pole of the head. When the relative permeability of the magnetic backing layer is lowered, the magnetic resistance of the magnetic circuit composed of the perpendicular magnetic head and the soft magnetic backing layer at the time of reproduction increases and the reproduction efficiency deteriorates. JP-A-3-224122 has already proposed to increase the thickness to reduce the magnetic resistance.

【0012】しかし、前記軟磁性裏打ち層の比透磁率を
低くすると、外部から漏洩する浮遊磁界がより強い場合
には、やはりヘッド主磁極先端、またはその主磁極先端
と対応する軟磁性裏打ち層を磁気的に飽和させて再生効
率が低下する。また、低比透磁率の軟磁性裏打ち層は高
比透磁率の従来の軟磁性裏打ち層に比べて保磁力が大き
く該低比透磁率の軟磁性裏打ち層の膜厚を厚くすると、
その軟磁性裏打ち層内に構成する磁壁からの磁束の漏れ
が増加し、その磁束がノイズとなって再生時に増加して
再生特性が劣化するという問題があった。
However, if the relative magnetic permeability of the soft magnetic backing layer is lowered, when the stray magnetic field leaking from the outside is stronger, the head main magnetic pole tip or the soft magnetic backing layer corresponding to the main magnetic pole tip is also formed. Magnetically saturated to reduce the reproduction efficiency. Further, the soft magnetic backing layer having a low relative magnetic permeability has a large coercive force as compared with a conventional soft magnetic backing layer having a high relative magnetic permeability, and when the film thickness of the soft magnetic backing layer having a low relative magnetic permeability is increased,
There has been a problem that the leakage of magnetic flux from the domain wall formed in the soft magnetic underlayer increases, and the magnetic flux becomes noise and increases during reproduction, degrading the reproduction characteristics.

【0013】本発明は上記した従来の問題点に鑑み、軟
磁性裏打ち層に吸収される浮遊磁界を極力抑制し、対応
する垂直磁気ヘッドの主磁極先端への磁界集中による垂
直記録層の記録磁化の減磁、消磁等の防止と、低比透磁
率な厚い軟磁性裏打ち層の磁壁に起因するノイズを低減
した新規な垂直磁気記録媒体を提供することを目的とす
るものである。
In view of the conventional problems described above, the present invention suppresses the stray magnetic field absorbed in the soft magnetic backing layer as much as possible, and the recording magnetization of the perpendicular recording layer due to the magnetic field concentration at the tip of the corresponding main magnetic pole of the perpendicular magnetic head. It is an object of the present invention to provide a novel perpendicular magnetic recording medium in which the demagnetization, demagnetization, etc. are prevented and the noise caused by the domain wall of the thick soft magnetic backing layer having a low relative permeability is reduced.

【0014】[0014]

【課題を解決するための手段】本発明は上記した目的を
達成するため、非磁性基板上に、軟磁性裏打ち層と垂直
記録層とを積層してなる磁気記録媒体において、前記軟
磁性裏打ち層は20〜1000の比透磁率と10KG以上の飽和磁
束密度を有してなる構成とする。
To achieve the above object, the present invention provides a magnetic recording medium comprising a non-magnetic substrate and a soft magnetic backing layer and a perpendicular recording layer laminated on the non-magnetic substrate. Has a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more.

【0015】また、前記軟磁性裏打ち層の膜厚δu(μ
m) と比透磁率μu とが、μu ×δu(μm) > 200から
なる関係にある構成とする。また、前記軟磁性裏打ち層
が2μm以下の膜厚の軟磁性膜を少なくとも2層積層し
た構成とする。
The thickness of the soft magnetic backing layer δu (μ
m) and the relative magnetic permeability μu have a relationship of μu × δu (μm)> 200. Further, the soft magnetic backing layer has a structure in which at least two soft magnetic films having a thickness of 2 μm or less are laminated.

【0016】また、前記複数層状に積層した軟磁性膜間
に、0.1 μm以下の膜厚の非磁性分断層を設けた構成と
する。更に、非磁性基板上に、軟磁性裏打ち層と垂直記
録層とを積層してなる磁気記録媒体において、前記軟磁
性裏打ち層と垂直記録層との間に、20〜1000の比透磁率
と10KG以上の飽和磁束密度を有する中間磁性層を設けた
構成とする。
Further, a non-magnetic dividing layer having a thickness of 0.1 μm or less is provided between the soft magnetic films laminated in the plurality of layers. Furthermore, in a magnetic recording medium in which a soft magnetic backing layer and a perpendicular recording layer are laminated on a non-magnetic substrate, a relative magnetic permeability of 20 to 1000 and 10 KG are provided between the soft magnetic backing layer and the perpendicular recording layer. An intermediate magnetic layer having the above saturation magnetic flux density is provided.

【0017】更に、前記中間磁性層の膜厚δi(μm) と
比透磁率μi とが、μi ×δi(μm) < 200からなる関
係にある構成とする。
Further, the film thickness δi (μm) of the intermediate magnetic layer and the relative magnetic permeability μi have a relation of μi × δi (μm) <200.

【0018】[0018]

【作用】本発明の垂直磁気記録媒体では、非磁性基板上
に20〜1000の比透磁率と10KG以上の飽和磁束密度を有す
る軟磁性裏打ち層を、比透磁率μu ×膜厚δu(μm) >
200からなる関係となる膜厚に設け、該軟磁性裏打ち層
上に垂直記録層を積層した媒体構成とすることにより、
軟磁性裏打ち層の比透磁率μu が低く、飽和磁束密度が
大きいので、外部から漏洩する浮遊磁界によるヘッド主
磁極先端、または該主磁極先端と対応する軟磁性裏打ち
層の磁気的な飽和が生じ難くなり、膜厚も低比透磁率と
の兼ね合いにより制御されるのでその磁気抵抗は小さく
なり、再生効率の低下が解消され、かつ前記浮遊磁界の
ヘッド主磁極先端への集中による垂直記録層の記録磁化
の減磁、消磁等を防止することができる。
In the perpendicular magnetic recording medium of the present invention, a soft magnetic backing layer having a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more is formed on a non-magnetic substrate by a relative magnetic permeability μu × film thickness δu (μm). >
By providing a film thickness of the relationship of 200, by forming a perpendicular magnetic recording layer laminated on the soft magnetic backing layer,
Since the relative permeability μu of the soft magnetic underlayer is low and the saturation magnetic flux density is large, magnetic saturation of the head main pole tip or the soft magnetic underlayer corresponding to the tip of the main pole due to the stray magnetic field leaking from the outside occurs. It becomes difficult and the film thickness is controlled in consideration of the low relative permeability, so that the magnetic resistance becomes small, the reduction of the reproducing efficiency is eliminated, and the stray magnetic field is concentrated on the tip of the main magnetic pole of the head. It is possible to prevent demagnetization and demagnetization of recording magnetization.

【0019】また、非磁性基板上に設けた高透磁率な軟
磁性裏打ち層と垂直記録層との間に、20〜1000の比透磁
率と10KG以上の飽和磁束密度を有する中間磁性層を、比
透磁率μi ×膜厚δi(μm) < 200からなる関係となる
膜厚に設けた媒体構成とすることにより、該中間磁性層
の比透磁率μi が低く、飽和磁束密度が大きいので、外
部から漏洩する浮遊磁界によるヘッド主磁極先端と対応
する該中間磁性層の磁気的な飽和が生じ難く、また浮遊
磁界が集中する領域はせいぜいヘッド主磁極先端より1
μmの距離までであるので該中間磁性層の膜厚を少なく
とも1μmとすることによりその直下にある高透磁率な
軟磁性裏打ち層の磁気的な飽和が生じることはなく、ま
た、前記高透磁率な軟磁性裏打ち層の存在によりその磁
気抵抗は小さくなるので、再生効率の低下が解消され、
かつ前記浮遊磁界のヘッド主磁極先端への集中による垂
直記録層の記録磁化の減磁、消磁等を防止することがで
きる。
Further, an intermediate magnetic layer having a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more is provided between the high magnetic permeability soft magnetic backing layer provided on the non-magnetic substrate and the perpendicular recording layer. When the medium structure is such that the relative magnetic permeability μi x the film thickness δi (μm) <200, the intermediate magnetic layer has a low relative magnetic permeability μi and a large saturation magnetic flux density. Magnetic saturation of the intermediate magnetic layer corresponding to the head main magnetic pole tip due to the stray magnetic field leaking from the magnetic field hardly occurs, and the area where the stray magnetic field is concentrated is at most 1 mm from the head main magnetic pole tip.
Since the distance is up to .mu.m, by setting the thickness of the intermediate magnetic layer to at least 1 .mu.m, magnetic saturation of the high-permeability soft magnetic backing layer immediately thereunder does not occur, and the high permeability The presence of such a soft magnetic backing layer reduces its magnetic resistance, eliminating the decrease in reproduction efficiency.
Moreover, it is possible to prevent demagnetization, demagnetization, etc. of the recording magnetization of the perpendicular recording layer due to the concentration of the stray magnetic field at the tip of the head main magnetic pole.

【0020】更に、非磁性基板上に軟磁性裏打ち層とし
て、20〜1000の比透磁率と10KG以上の飽和磁束密度を有
する2μm以下の膜厚の軟磁性膜を繰り返して複数層積
層し、その軟磁性裏打ち層上に垂直記録層を設けた媒体
構成とすることにより、外部から漏洩する浮遊磁界によ
るヘッド主磁極先端と対応する前記積層構成の軟磁性裏
打ち層の磁気的な飽和が生じ難くなり、また積層した各
軟磁性膜内に形成された磁壁から漏出する磁束も減少す
るので該磁束の漏出によるノイズも低減され、再生特性
を向上させることができる。
Further, as a soft magnetic backing layer, a plurality of soft magnetic films having a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more and a thickness of 2 μm or less are repeatedly laminated on a non-magnetic substrate, By adopting a medium structure in which a perpendicular recording layer is provided on the soft magnetic backing layer, magnetic saturation of the soft magnetic backing layer of the above-mentioned laminated structure corresponding to the head main magnetic pole tip due to a stray magnetic field leaked from the outside is less likely to occur. Also, since the magnetic flux leaking from the domain wall formed in each laminated soft magnetic film is reduced, the noise due to the leakage of the magnetic flux is also reduced, and the reproducing characteristic can be improved.

【0021】更に、非磁性基板上に軟磁性裏打ち層とし
て、20〜1000の比透磁率と10KG以上の飽和磁束密度を有
する2μm以下の膜厚の軟磁性膜と非磁性分断層とを繰
り返して複数層積層し、その軟磁性裏打ち層上に垂直記
録層を設けた媒体構成とすることにより、各軟磁性膜が
非磁性分断層により確実に磁気的に分離され、外部から
漏洩する浮遊磁界によるヘッド主磁極先端と対応する前
記積層構成の軟磁性裏打ち層の磁気的な飽和がより生じ
難くなる。また積層した各軟磁性膜内に形成された磁壁
から漏出する磁束も著しく減少し、該磁束の漏出による
ノイズもより低減され、再生特性を向上させることがで
きる。
Furthermore, as a soft magnetic backing layer on a non-magnetic substrate, a soft magnetic film having a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more and a thickness of 2 μm or less and a non-magnetic component layer are repeatedly formed. By stacking multiple layers and providing a perpendicular magnetic recording layer on the soft magnetic backing layer, each soft magnetic film is reliably magnetically separated by a non-magnetic dividing layer, and the stray magnetic field leaks from the outside. Magnetic saturation of the soft magnetic backing layer having the above-described laminated structure corresponding to the tip of the head main magnetic pole is less likely to occur. Further, the magnetic flux leaking from the domain wall formed in each laminated soft magnetic film is significantly reduced, the noise due to the leak of the magnetic flux is further reduced, and the reproducing characteristic can be improved.

【0022】[0022]

【実施例】以下図面を用いて本発明の実施例について詳
細に説明する。図1は本発明に係る垂直磁気記録媒体の
第1実施例を示す要部断面図である。
Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a cross-sectional view of essential parts showing a first embodiment of a perpendicular magnetic recording medium according to the present invention.

【0023】図において、11は例えば表面にNiPめっき
処理を施したアルミニウムからなる非磁性基板であり、
該非磁性基板11上に、例えば低比透磁率 (μu=200)で、
20KGの飽和磁束密度を有する10μmの膜厚δu のFeCo膜
からなる軟磁性裏打ち層12と、その軟磁性裏打ち層12上
に該軟磁性裏打ち層12の膜厚方向に垂直な磁化容易軸を
有する0.1 μmの膜厚のCoCr膜からなる垂直記録層13と
を積層状に配設した構成としている。
In the figure, 11 is a non-magnetic substrate made of aluminum whose surface is NiP plated, for example.
On the non-magnetic substrate 11, for example, with low relative permeability (μu = 200),
A soft magnetic backing layer 12 made of a FeCo film having a thickness of δu of 10 μm having a saturation magnetic flux density of 20KG, and an easy axis of magnetization perpendicular to the film thickness direction of the soft magnetic backing layer 12 on the soft magnetic backing layer 12 The perpendicular recording layer 13 made of a CoCr film having a film thickness of 0.1 μm is arranged in a laminated form.

【0024】なお、前記軟磁性裏打ち層12及び垂直記録
層13は、スパッタ用の電力パワー密度を5.5 W/cm2
Ar等からなるスパッタガス圧を5mTorr ,基板温度を 2
00℃とするスパッタ条件によるスパッタリング法により
成膜する。
The soft magnetic backing layer 12 and the perpendicular recording layer 13 have a power power density for sputtering of 5.5 W / cm 2 ,
Sputtering gas pressure of Ar etc. is 5 mTorr, substrate temperature is 2
A film is formed by the sputtering method under the sputtering condition of 00 ° C.

【0025】このような第1実施例の垂直磁気記録媒体
では、計算機シュミレーションによる再生出力の軟磁性
裏打ち層12の比透磁率μu ×膜厚δu 依存性を示す図2
により、該軟磁性裏打ち層12の比透磁率μu ×膜厚δu
が200 以上であれば再生出力はほぼ飽和する。従って、
その軟磁性裏打ち層12の膜厚δu は媒体構成上の内部応
力等の関係より10μm以下が妥当であるので、その比透
磁率μu は20以上必要である。
In the perpendicular magnetic recording medium of the first embodiment described above, the dependence of the reproduction output by computer simulation on the relative permeability μu × thickness δu of the soft magnetic backing layer 12 is shown in FIG.
Therefore, the relative magnetic permeability of the soft magnetic backing layer 12 μu × film thickness δu
If is over 200, the playback output is almost saturated. Therefore,
Since it is appropriate that the film thickness δu of the soft magnetic backing layer 12 is 10 μm or less in view of the internal stress in the medium structure, the relative magnetic permeability μu must be 20 or more.

【0026】また、図3に磁気ディスク装置内で予測さ
れる最大の8Oeの浮遊磁界中における再生出力の軟磁性
裏打ち層の比透磁率依存性を示しており、この図3によ
り軟磁性裏打ち層の比透磁率μu が1000以上では磁気的
飽和により再生出力が減少することから、1000以下にす
ることが必要である。
FIG. 3 shows the dependence of the reproduction output on the relative magnetic permeability of the soft magnetic backing layer in the maximum stray magnetic field of 8 Oe predicted in the magnetic disk drive. When the relative magnetic permeability μu of 1000 is 1000 or more, the reproduction output decreases due to magnetic saturation, so it is necessary to set it to 1000 or less.

【0027】更に、図4には同じく8Oeの浮遊磁界中に
おける再生出力の軟磁性裏打ち層の比透磁率及び飽和磁
束密度依存性を示したもので、この図により、比透磁率
μuを500,1000,2000 と変化させると共に、膜厚も変化
させて比透磁率μu ×膜厚δu の値を一定とした3種類
の軟磁性裏打ち層を有する各垂直磁気記録媒体では、例
えば比透磁率が 500の軟磁性裏打ち層の飽和磁束密度は
5KG以上、比透磁率が1000の軟磁性裏打ち層の飽和磁束
密度としては10KG以上が必要である。
Further, FIG. 4 also shows the dependence of the reproduction output on the relative magnetic permeability and the saturation magnetic flux density of the soft magnetic underlayer in the stray magnetic field of 8 Oe. From this figure, the relative magnetic permeability μu is 500, In each perpendicular magnetic recording medium having three kinds of soft magnetic backing layers, the relative magnetic permeability μu x the film thickness δu was made constant by changing the film thickness to 1000, 2000 and the film thickness was also changed. The saturation magnetic flux density of the soft magnetic backing layer is required to be 5 kg or more, and the saturation magnetic flux density of the soft magnetic backing layer having a relative magnetic permeability of 1000 is required to be 10 kg or more.

【0028】更に、図5は第1実施例の垂直磁気記録媒
体と従来の垂直磁気記録媒体の両記録媒体面に垂直に外
部浮遊磁界をその強度を変化させて印加した状態で再生
出力を測定したもので、従来の垂直磁気記録媒体よりも
第1実施例の垂直磁気記録媒体がより強い7Oe程度の外
部浮遊磁界に対しても再生出力が低下しないことが判明
した。なお、この第1実施例の垂直磁気記録媒体に再生
出力が80%程度減少する外部浮遊磁界を印加し、その
後、該外部浮遊磁界を取り去ると再生出力は元の状態に
戻ることから、この程度の外部浮遊磁界の強度では垂直
記録層の記録磁化は減磁されないが、ヘッド主磁極先
端、またはその主磁極先端と対応する軟磁性裏打ち層の
磁気的飽和が再生出力を低下させる原因であることが認
められた。
Further, FIG. 5 shows the reproduction output measured in a state where an external stray magnetic field is applied perpendicularly to both recording medium surfaces of the perpendicular magnetic recording medium of the first embodiment and the conventional perpendicular magnetic recording medium while varying its strength. It was found that the perpendicular magnetic recording medium of the first embodiment did not lower the reproduction output even with an external stray magnetic field of about 7 Oe, which is stronger than the conventional perpendicular magnetic recording medium. It should be noted that when an external stray magnetic field whose reproducing output is reduced by about 80% is applied to the perpendicular magnetic recording medium of the first embodiment and then the external stray magnetic field is removed, the reproducing output returns to the original state. The recording magnetization of the perpendicular recording layer is not demagnetized by the strength of the external stray magnetic field, but the magnetic saturation of the head main magnetic pole tip or the soft magnetic backing layer corresponding to the main magnetic pole tip causes the reproduction output to decrease. Was recognized.

【0029】更に、図6は第1実施例の軟磁性裏打ち層
と従来例の軟磁性裏打ち層とのBーH磁化曲線を示した
もので、この図により従来例の軟磁性裏打ち層よりも比
透磁率が低く、高い飽和磁束密度を有する第1実施例の
軟磁性裏打ち層の方が大きな外部浮遊磁界強度まで磁気
的に飽和しないことが明らかである。
Further, FIG. 6 shows B—H magnetization curves of the soft magnetic backing layer of the first embodiment and the soft magnetic backing layer of the conventional example, and this figure shows that the soft magnetic backing layer of the conventional example does not. It is clear that the soft magnetic backing layer of the first embodiment having a low relative magnetic permeability and a high saturation magnetic flux density does not magnetically saturate up to a large external stray magnetic field strength.

【0030】従って、このような第1実施例の垂直磁気
記録媒体では、外部から漏洩する浮遊磁界によるヘッド
主磁極先端、または該主磁極先端と対応する軟磁性裏打
ち層の磁気的な飽和が生じ難くなり、膜厚も低比透磁率
との兼ね合いにより制御されてその磁気抵抗も小さくな
るので、再生効率の低下が解消され、かつ前記浮遊磁界
のヘッド主磁極先端への集中による垂直記録層の記録磁
化の減磁、消磁等を防止することが可能となる。
Therefore, in such a perpendicular magnetic recording medium of the first embodiment, magnetic saturation of the head main magnetic pole tip or the soft magnetic underlayer corresponding to the main magnetic pole tip occurs due to the stray magnetic field leaking from the outside. It becomes difficult, and the film thickness is controlled in consideration of the low relative magnetic permeability to reduce the magnetic resistance, so that the reduction of the reproducing efficiency is eliminated, and the stray magnetic field is concentrated on the tip of the main magnetic pole of the head, so that It is possible to prevent demagnetization and demagnetization of the recording magnetization.

【0031】図7は本発明に係る垂直磁気記録媒体の第
2実施例を示す要部断面図であり、図1と同等部分には
同一符号を付している。この図で示す実施例が図1で示
す実施例と異なる点は、非磁性基板11と垂直記録層13と
の間に、例えば高比透磁率(μ= 2000)で、20KGの飽和
磁束密度を有する10μmの膜厚のNiFe膜からなる軟磁性
裏打ち層21と、その軟磁性裏打ち層21上に低比透磁率
(μi = 200) で、10KGの飽和磁束密度を有する1μm
の膜厚δiのFeCo膜からなる中間磁性層22を配設した構
成とした点である。
FIG. 7 is a cross-sectional view of an essential part showing a second embodiment of the perpendicular magnetic recording medium according to the present invention, and the same parts as those in FIG. 1 are designated by the same reference numerals. The embodiment shown in this figure is different from the embodiment shown in FIG. 1 in that a saturated magnetic flux density of 20 KG is provided between the non-magnetic substrate 11 and the perpendicular recording layer 13 with high relative permeability (μ = 2000). The soft magnetic backing layer 21 made of a NiFe film having a film thickness of 10 μm and a low magnetic permeability (μi = 200) on the soft magnetic backing layer 21 having a saturation magnetic flux density of 10 KG
The intermediate magnetic layer 22 made of a FeCo film having a thickness of Δi is arranged.

【0032】このような第2実施例の垂直磁気記録媒体
では、図8に計算機により3Oeの外部浮遊磁界中におけ
る従来の垂直磁気記録媒体と対向する垂直磁気ヘッドの
主磁極6先端と、その近傍の磁束密度をシュミレーショ
ンした結果を示すように、外部浮遊磁界が集中している
領域は、垂直磁気ヘッドの主磁極6先端より対向する垂
直磁気記録媒体の軟磁性裏打ち層3側へのせいぜい1μ
m程度までであることから、その領域に相当する部分に
本実施例においては低比透磁率(μi = 200)で、10KG
の飽和磁束密度を有する1μmの膜厚δi のFeCo膜から
なる中間磁性層22を配設しているので、該中間磁性層22
及びその直下にある高透磁率な軟磁性裏打ち層21の磁気
的な飽和が生じることはなく、その高透磁率な軟磁性裏
打ち層21の存在によりその磁気抵抗は小さくなり、再生
効率の低下が解消される。また前記浮遊磁界のヘッド主
磁極先端への集中による垂直記録層13の記録磁化の減
磁、消磁等を防止することができる。
In such a perpendicular magnetic recording medium of the second embodiment, the tip of the main magnetic pole 6 of the perpendicular magnetic head facing the conventional perpendicular magnetic recording medium in an external stray magnetic field of 3 Oe and its vicinity are calculated by a computer in FIG. As shown by the result of simulating the magnetic flux density of the magnetic recording medium, the area where the external stray magnetic field is concentrated is 1 μm at most from the tip of the main magnetic pole 6 of the perpendicular magnetic head to the soft magnetic backing layer 3 side of the perpendicular magnetic recording medium which faces the magnetic pole.
Since it is up to about m, the portion corresponding to the area has a low relative magnetic permeability (μi = 200) of 10 KG in this embodiment.
Since the intermediate magnetic layer 22 made of the FeCo film having a saturation magnetic flux density of 1 .mu.m and a film thickness .delta.i is provided, the intermediate magnetic layer 22
And magnetic saturation of the high-permeability soft magnetic backing layer 21 thereunder does not occur, and the presence of the high-permeability soft magnetic backing layer 21 reduces its magnetic resistance, resulting in a reduction in reproduction efficiency. Will be resolved. Further, it is possible to prevent demagnetization and demagnetization of the recording magnetization of the perpendicular recording layer 13 due to the concentration of the stray magnetic field at the tip of the head main magnetic pole.

【0033】図9は本発明に係る垂直磁気記録媒体の第
3実施例を示す要部断面図である。本実施例では、表面
にNiPめっき処理を施したアルミニウムからなる非磁性
基板であり、該非磁性基板11上に軟磁性裏打ち層31とし
て、例えば低比透磁率 (μu=200)で、20KGの高飽和磁束
密度を有する1μmの膜厚のFeCo膜からなる軟磁性膜32
と、1μmの膜厚のCr膜からなる非磁性分断層33とを交
互に繰り返して10層ほど積層した構成とし、その軟磁性
裏打ち層31上に該軟磁性裏打ち層31の膜厚方向に垂直な
磁化容易軸を有する0.1 μmの膜厚のCoCr膜からなる垂
直記録層13を配設した構成としている。
FIG. 9 is a cross-sectional view of essential parts showing a third embodiment of the perpendicular magnetic recording medium according to the present invention. In this embodiment, the surface is a non-magnetic substrate made of aluminum whose surface is subjected to NiP plating, and the soft magnetic backing layer 31 on the non-magnetic substrate 11 has, for example, a low relative permeability (μu = 200) and a high strength of 20 KG. Soft magnetic film 32 made of FeCo film having a saturation magnetic flux density and a thickness of 1 μm
And a non-magnetic dividing layer 33 made of a Cr film having a thickness of 1 μm are alternately repeated to form about 10 layers, and the soft magnetic backing layer 31 is perpendicular to the thickness direction of the soft magnetic backing layer 31. A perpendicular recording layer 13 made of a CoCr film having a thickness of 0.1 μm and having an easy axis of magnetization is arranged.

【0034】このような第3実施例の垂直磁気記録媒体
では、前記軟磁性裏打ち層31を構成する各軟磁性膜32が
非磁性分断膜により確実に磁気的に分離され、外部から
漏洩する浮遊磁界によるヘッド主磁極先端と対応する前
記積層構成の軟磁性裏打ち層31の磁気的な飽和が生じ難
くなる。また積層した膜厚の薄い各軟磁性膜内に形成さ
れた磁壁から漏出する磁束も減少し、該磁束の漏出によ
るノイズも著しく低減され、再生特性を向上させること
ができる。
In the perpendicular magnetic recording medium of the third embodiment as described above, each soft magnetic film 32 constituting the soft magnetic backing layer 31 is magnetically reliably separated by the non-magnetic dividing film, and the floating leaks from the outside. Magnetic saturation of the soft magnetic backing layer 31 of the above-described laminated structure corresponding to the tip of the main magnetic pole of the head due to a magnetic field is less likely to occur. Further, the magnetic flux leaking from the magnetic domain wall formed in each of the laminated thin soft magnetic films is reduced, the noise due to the leak of the magnetic flux is significantly reduced, and the reproducing characteristic can be improved.

【0035】図10(a),(b) は第1実施例と第3実施例の
垂直磁気記録媒体の再生時におけるノイズスペクトルの
発生の有無を調べた結果を示すもので、第1実施例の垂
直磁気記録媒体においては軟磁性裏打ち層の膜厚が厚い
ことから、その軟磁性裏打ち層の膜厚に比例してその磁
壁から漏出する磁束も増えるので図10(a) に示すように
該軟磁性裏打ち層の磁壁に起因するノイズが低周波数域
に生じている。これに対して第3実施例の垂直磁気記録
媒体では、図10(b) に示すように軟磁性裏打ち層での磁
壁に起因するノイズの発生が殆ど見られず、再生特性が
向上する。
FIGS. 10 (a) and 10 (b) show the results of examining whether or not a noise spectrum is generated during reproduction of the perpendicular magnetic recording media of the first and third embodiments. In the perpendicular magnetic recording medium of, since the thickness of the soft magnetic backing layer is large, the magnetic flux leaking from the domain wall increases in proportion to the film thickness of the soft magnetic backing layer, so that as shown in Fig. 10 (a). Noise caused by the domain wall of the soft magnetic underlayer occurs in the low frequency range. On the other hand, in the perpendicular magnetic recording medium of the third embodiment, as shown in FIG. 10 (b), the generation of noise due to the domain wall in the soft magnetic underlayer is hardly seen, and the reproduction characteristics are improved.

【0036】なお、前記第3実施例では軟磁性裏打ち層
として低比透磁率で、高飽和磁束密度を有する1μmの
膜厚のFeCo膜からなる軟磁性膜と、 0.1μmの膜厚のCr
膜からなる非磁性分断層とを交互に繰り返して複数層に
積層した構成の軟磁性裏打ち層を用いた場合の例につい
て説明したが、例えば20〜1000の低比透磁率で10KG以上
の高飽和磁束密度を有する2μm以下の膜厚の軟磁性膜
を繰り返して複数層に積層した構成の軟磁性裏打ち層を
用いた場合にも、第3実施例とほぼ同様な効果が得られ
る。
In the third embodiment, as the soft magnetic backing layer, a soft magnetic film made of FeCo film having a low relative permeability and a high saturation magnetic flux density and a film thickness of 1 μm and a Cr film having a film thickness of 0.1 μm are used.
An example of using a soft magnetic backing layer in which multiple layers of non-magnetic layers composed of films are alternately repeated has been described.For example, a low relative permeability of 20 to 1000 and high saturation of 10 KG or more Even when a soft magnetic backing layer having a structure in which a plurality of soft magnetic films having a magnetic flux density of 2 μm or less are repeatedly laminated is used, substantially the same effect as that of the third embodiment can be obtained.

【0037】また、前記第1、第2、第3実施例におけ
る20〜1000の比透磁率と10KG以上の飽和磁束密度を有す
るFeCo膜からなる軟磁性裏打ち層、中間磁性層、或いは
複数層積層する2μm以下の膜厚の軟磁性膜等を成膜時
に非磁性基板の半径方向、或いは円周方向に磁場を印加
して該非磁性基板の半径方向、或いは円周方向に磁化容
易軸を揃えた層膜構成とすることにより、各層膜内に形
成される磁壁の二次元的な形状のばらつき等に起因して
生じるノイズを更に低減することができ、再生特性が向
上する。
Further, a soft magnetic backing layer, an intermediate magnetic layer, or a plurality of laminated layers made of a FeCo film having a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more in the first, second and third embodiments. When a soft magnetic film or the like having a thickness of 2 μm or less is formed, a magnetic field is applied in the radial direction or the circumferential direction of the non-magnetic substrate to align the easy axis of magnetization in the radial direction or the circumferential direction of the non-magnetic substrate. With the layered film structure, it is possible to further reduce the noise generated due to variations in the two-dimensional shape of the domain wall formed in each layered film, and to improve the reproduction characteristics.

【0038】図11(a),(b) は磁場を印加して該非磁性基
板の半径方向、或いは円周方向に磁化容易軸を揃えて成
膜したFeCo膜からなる軟磁性裏打ち層、或いは中間磁性
層を適用した垂直磁気記録媒体と磁場を印加しないで成
膜したFeCo膜からなる軟磁性裏打ち層、或いは中間磁性
層を適用した垂直磁気記録媒体の再生時におけるノイズ
スペクトルの発生の有無を調べた結果を示すもので、磁
場を印加しないで成膜したFeCo膜からなる軟磁性裏打ち
層、或いは中間磁性層を適用した垂直磁気記録媒体は図
11(a) に示すように該軟磁性裏打ち層の磁壁に起因する
ノイズが低周波数域にて生じているのに対して、磁場を
印加して該非磁性基板の半径方向、或いは円周方向に磁
化容易軸を揃えて成膜したFeCo膜からなる軟磁性裏打ち
層、或いは中間磁性層を適用した垂直磁気記録媒体で
は、図11(b) に示すように軟磁性裏打ち層での磁壁に起
因するノイズの発生が著しく低減している。
11 (a) and 11 (b) show a soft magnetic backing layer made of a FeCo film formed by aligning the easy axis of magnetization in the radial direction or the circumferential direction of the non-magnetic substrate by applying a magnetic field, or an intermediate layer. Examine whether a noise spectrum is generated during reproduction of a perpendicular magnetic recording medium with a magnetic layer and a soft magnetic backing layer consisting of a FeCo film formed without applying a magnetic field, or a perpendicular magnetic recording medium with an intermediate magnetic layer. The perpendicular magnetic recording medium to which the soft magnetic backing layer made of FeCo film formed without applying a magnetic field or the intermediate magnetic layer is applied is shown in the figure.
As shown in 11 (a), while noise caused by the domain wall of the soft magnetic underlayer occurs in the low frequency range, a magnetic field is applied to the nonmagnetic substrate in the radial direction or the circumferential direction. In a perpendicular magnetic recording medium with a soft magnetic backing layer consisting of a FeCo film formed with the easy axis of magnetization aligned or with an intermediate magnetic layer, this is due to the domain wall in the soft magnetic backing layer as shown in Fig. 11 (b). The generation of noise is significantly reduced.

【0039】更に、以上の実施例では軟磁性裏打ち層、
或いは中間磁性層として低比透磁率で、高飽和磁束密度
を有するFeCo膜を用いた場合の例に付いて説明したが、
該FeCo膜の代わりにFeCoにNi等の第3元素等を添加した
磁性膜、或いはFeCo膜と同様なに機能する磁性膜を用い
ることもでき、そのFeCo膜やNiFe膜からなる軟磁性裏打
ち層の成膜方法としてはスパッタリング法に限定される
ものではなく、めっき法により成膜するようにしてもよ
い。
Further, in the above embodiments, the soft magnetic backing layer,
Alternatively, an example of using a FeCo film having a low relative magnetic permeability and a high saturation magnetic flux density as the intermediate magnetic layer has been described,
Instead of the FeCo film, a magnetic film in which a third element such as Ni is added to FeCo or a magnetic film having the same function as the FeCo film can be used, and the soft magnetic backing layer made of the FeCo film or the NiFe film can be used. The film forming method is not limited to the sputtering method, and the film may be formed by the plating method.

【0040】垂直記録層もCoCr膜に限定されるものでは
なく、例えばCoCrTa膜等の硬磁性膜を用いてもよく、更
に必要に応じて垂直記録層上に保護膜や潤滑膜を設ける
ことはいうまでもない。
The perpendicular recording layer is not limited to the CoCr film, and a hard magnetic film such as a CoCrTa film may be used. Further, a protective film or a lubricating film may be provided on the perpendicular recording layer if necessary. Needless to say.

【0041】[0041]

【発明の効果】以上の説明から明らかなように、本発明
に係る垂直磁気記録媒体によれば、非磁性基板と垂直記
録層との間に20〜1000の比透磁率と10KG以上の飽和磁束
密度を有する軟磁性裏打ち層を、比透磁率μu ×膜厚δ
u(μm) > 200からなる関係となる膜厚に設けた媒体構
成、若しくは非磁性基板上に設けたNiFe膜からなる軟磁
性裏打ち層と垂直記録層との間に20〜1000の比透磁率と
10KG以上の飽和磁束密度を有する中間磁性層を、比透磁
率μi ×膜厚δi(μm) < 200からなる関係となる膜厚
に設けた媒体構成とすることにより、外部からの浮遊磁
界によるヘッド主磁極先端、または該主磁極先端と対応
する軟磁性裏打ち層の磁気的な飽和が生じ難くなり、膜
厚も低比透磁率との兼ね合いにより制御されてその磁気
抵抗も小さくなるので、再生効率の低下が解消され、か
つ前記浮遊磁界のヘッド主磁極先端への集中による垂直
記録層の記録磁化の減磁、消磁等を防止することが可能
となる。
As is apparent from the above description, according to the perpendicular magnetic recording medium of the present invention, the relative magnetic permeability of 20 to 1000 and the saturation magnetic flux of 10 KG or more are provided between the non-magnetic substrate and the perpendicular recording layer. The soft magnetic backing layer having a density is formed by comparing the relative magnetic permeability μu with the film thickness δ.
u (μm)> 200, or a medium structure provided with a film thickness that satisfies the relation, or a relative magnetic permeability of 20 to 1000 between the soft magnetic backing layer made of a NiFe film provided on a non-magnetic substrate and the perpendicular recording layer. When
The medium magnetic layer having a saturation magnetic flux density of 10 KG or more is formed to have a film thickness such that the relative magnetic permeability μi × the film thickness δi (μm) <200. Magnetic saturation of the main magnetic pole tip or the soft magnetic backing layer corresponding to the main magnetic pole tip is less likely to occur, and the magnetic resistance is also reduced by controlling the film thickness in combination with the low relative magnetic permeability, so that the reproduction efficiency is improved. Is eliminated, and demagnetization and demagnetization of the recording magnetization of the perpendicular recording layer due to the concentration of the stray magnetic field at the tip of the main magnetic pole of the head can be prevented.

【0042】また、非磁性基板と垂直記録層との間に軟
磁性裏打ち層として、20〜1000の比透磁率と10KG以上の
飽和磁束密度を有する2μm以下の膜厚のFeCo膜からな
る軟磁性膜を繰り返して複数層に積層した構成、或いは
同様なFeCo膜からなる軟磁性膜と0.1 μm以下の膜厚の
Cr膜からなる非磁性分断層とを交互に繰り返して複数層
に積層した構成、更に前記軟磁性裏打ち層及び中間磁性
層の磁化容易軸の方向を径方向、または周方向に揃えた
構成とすることにより、外部からの浮遊磁界によるヘッ
ド主磁極先端と対応する前記積層構成の軟磁性裏打ち層
の磁気的な飽和が生じ難くなる。また軟磁性裏打ち層、
中間磁性層内での磁壁に起因する磁束の漏出によるノイ
ズも著しく低減され、再生特性及び信頼性を向上させる
ことができる利点を有し、実用上優れた効果を奏する。
Further, as a soft magnetic backing layer between the non-magnetic substrate and the perpendicular recording layer, a soft magnetic FeCo film having a relative permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more and a thickness of 2 μm or less is used. The film is repeatedly laminated into multiple layers, or a soft magnetic film made of the same FeCo film and a film thickness of 0.1 μm or less.
A structure in which a non-magnetic dividing layer made of a Cr film is alternately repeated to be laminated in a plurality of layers, and further, the directions of the easy axis of magnetization of the soft magnetic backing layer and the intermediate magnetic layer are aligned in the radial direction or the circumferential direction. As a result, magnetic saturation of the soft magnetic backing layer of the above-described laminated structure corresponding to the tip of the head main pole due to a stray magnetic field from the outside hardly occurs. Also a soft magnetic backing layer,
Noise due to leakage of magnetic flux due to magnetic domain walls in the intermediate magnetic layer is also significantly reduced, and there is an advantage that reproduction characteristics and reliability can be improved, and a practically excellent effect is exhibited.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の垂直磁気記録媒体の第1実施例を示
す要部断面図である。
FIG. 1 is a sectional view of an essential part showing a first embodiment of a perpendicular magnetic recording medium of the present invention.

【図2】 本発明の第1実施例に係る軟磁性裏打ち層の
比透磁率×膜厚と再生出力の変化を示す図である。
FIG. 2 is a diagram showing changes in relative permeability × film thickness and reproduction output of the soft magnetic backing layer according to the first example of the present invention.

【図3】 本発明の第1実施例に係る浮遊磁界中での軟
磁性裏打ち層の比透磁率と再生出力の変化を示す図であ
る。
FIG. 3 is a diagram showing changes in relative permeability and reproduction output of the soft magnetic backing layer in a stray magnetic field according to the first example of the present invention.

【図4】 本発明の第1実施例に係る浮遊磁界中での軟
磁性裏打ち層の比透磁率及び飽和磁束密度と再生出力の
変化を示す図である。
FIG. 4 is a diagram showing changes in relative permeability and saturation magnetic flux density of the soft magnetic backing layer and reproduction output in a stray magnetic field according to the first example of the present invention.

【図5】 本発明の第1実施例と従来例の垂直磁気記録
媒体の外部浮遊磁界強度による再生出力の変化を示す図
である。
FIG. 5 is a diagram showing changes in reproduction output according to the external stray magnetic field strength of the perpendicular magnetic recording media of the first embodiment of the present invention and the conventional example.

【図6】 本発明の第1実施例に係る軟磁性裏打ち層と
従来例の軟磁性裏打ち層とのBーH磁化曲線を示す図で
ある。
FIG. 6 is a diagram showing BH magnetization curves of the soft magnetic backing layer according to the first example of the present invention and the conventional soft magnetic backing layer.

【図7】 本発明の垂直磁気記録媒体の第2実施例を示
す要部断面図である。
FIG. 7 is a cross-sectional view of essential parts showing a second embodiment of the perpendicular magnetic recording medium of the present invention.

【図8】 外部浮遊磁界中でのヘッド主磁極先端の近傍
における磁束密度を示す図である。
FIG. 8 is a diagram showing a magnetic flux density in the vicinity of a tip of a head main magnetic pole in an external stray magnetic field.

【図9】 本発明の垂直磁気記録媒体の第3実施例を示
す要部断面図である。
FIG. 9 is a cross-sectional view of essential parts showing a third embodiment of the perpendicular magnetic recording medium of the present invention.

【図10】 本発明の第1実施例と第3実施例の垂直磁気
記録媒体の再生時におけるノイズスペクトルの発生状況
を示す図である。
FIG. 10 is a diagram showing how noise spectra are generated during reproduction of the perpendicular magnetic recording media of the first and third embodiments of the present invention.

【図11】 本発明の磁場の印加、無印加で成膜した軟磁
性裏打ち層、或いは中間磁性層を適用した垂直磁気記録
媒体の再生時におけるノイズスペクトルの発生状況を示
す図である。
FIG. 11 is a diagram showing a noise spectrum generation state during reproduction of a perpendicular magnetic recording medium to which a soft magnetic backing layer formed with or without application of a magnetic field of the present invention or an intermediate magnetic layer is applied.

【図12】 従来の垂直磁気記録媒体を説明するための要
部断面斜視図である。
FIG. 12 is a cross-sectional perspective view of an essential part for explaining a conventional perpendicular magnetic recording medium.

【符号の説明】[Explanation of symbols]

2,11 非磁性基板 3,12,21,31 軟磁性裏打ち層 4,13 垂直記録層 6 主磁極 22 中間磁性層 32 軟磁性膜 33 非磁性分断層 2,11 Non-magnetic substrate 3,12,21,31 Soft magnetic backing layer 4,13 Perpendicular recording layer 6 Main pole 22 Intermediate magnetic layer 32 Soft magnetic film 33 Non-magnetic separation layer

───────────────────────────────────────────────────── フロントページの続き (72)発明者 佐藤 賢治 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 (72)発明者 青島 賢一 神奈川県川崎市中原区上小田中1015番地 富士通株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kenji Sato Kenji Sato 1015 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited (72) Kenichi Aoshima 1015 Kamedotachu, Nakahara-ku, Kawasaki City, Kanagawa Prefecture, Fujitsu Limited

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基板(11)上に、軟磁性裏打ち層(1
2)と垂直記録層(13)とを積層してなる磁気記録媒体にお
いて、 前記軟磁性裏打ち層(12)は20〜1000の比透磁率と10KG以
上の飽和磁束密度を有してなることを特徴とする垂直磁
気記録媒体。
1. A soft magnetic backing layer (1) on a non-magnetic substrate (11).
In the magnetic recording medium formed by laminating 2) and the perpendicular recording layer (13), the soft magnetic backing layer (12) has a relative magnetic permeability of 20 to 1000 and a saturation magnetic flux density of 10 KG or more. Characteristic perpendicular magnetic recording medium.
【請求項2】 前記軟磁性裏打ち層(12)の膜厚δu(μ
m) と比透磁率μu とが、μu ×δu(μm) > 200から
なる関係にあることを特徴とする請求項1の垂直磁気記
録媒体。
2. The film thickness δu (μ of the soft magnetic backing layer (12)
2. The perpendicular magnetic recording medium according to claim 1, wherein m) and relative permeability μu have a relationship of μu × δu (μm)> 200.
【請求項3】 前記軟磁性裏打ち層(12)が2μm以下の
膜厚の軟磁性膜を少なくとも2層積層してなることを特
徴とする請求項1、または請求項2の垂直磁気記録媒
体。
3. The perpendicular magnetic recording medium according to claim 1, wherein the soft magnetic backing layer (12) is formed by laminating at least two soft magnetic films having a thickness of 2 μm or less.
【請求項4】 前記複数層状に積層した軟磁性膜(32)間
に、0.1 μm以下の膜厚の非磁性分断層(33)を設けたこ
とを特徴とする請求項3の垂直磁気記録媒体。
4. The perpendicular magnetic recording medium according to claim 3, wherein a non-magnetic dividing layer (33) having a thickness of 0.1 μm or less is provided between the soft magnetic films (32) laminated in the plurality of layers. .
【請求項5】 非磁性基板(11)上に、軟磁性裏打ち層(1
2)と垂直記録層(13)とを積層してなる磁気記録媒体にお
いて、 前記軟磁性裏打ち層(12)と垂直記録層(13)との間に、20
〜1000の比透磁率と10KG以上の飽和磁束密度を有する中
間磁性層(22)を設けたことを特徴とする垂直磁気記録媒
体。
5. A soft magnetic backing layer (1) on a non-magnetic substrate (11).
In a magnetic recording medium in which 2) and a perpendicular recording layer (13) are laminated, between the soft magnetic backing layer (12) and the perpendicular recording layer (13), 20
A perpendicular magnetic recording medium comprising an intermediate magnetic layer (22) having a relative magnetic permeability of up to 1000 and a saturation magnetic flux density of 10 KG or more.
【請求項6】 前記中間磁性層(22)の膜厚δi(μm) と
比透磁率μi とが、μi ×δi(μm) < 200からなる関
係にあることを特徴とする請求項5の垂直磁気記録媒
体。
6. The perpendicular according to claim 5, wherein the film thickness δi (μm) of the intermediate magnetic layer (22) and the relative magnetic permeability μi have a relation of μi × δi (μm) <200. Magnetic recording medium.
JP28861092A 1992-10-27 1992-10-27 Perpendicular magnetic recording medium Withdrawn JPH06139542A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28861092A JPH06139542A (en) 1992-10-27 1992-10-27 Perpendicular magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28861092A JPH06139542A (en) 1992-10-27 1992-10-27 Perpendicular magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH06139542A true JPH06139542A (en) 1994-05-20

Family

ID=17732445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28861092A Withdrawn JPH06139542A (en) 1992-10-27 1992-10-27 Perpendicular magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH06139542A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6197890B1 (en) 1996-07-11 2001-03-06 Bridgestone Corporation Rubber composition containing SBR rubber, softener and a bis benzothiazolyl disulfide vulcanization accelerator
JP2002358618A (en) * 2000-12-28 2002-12-13 Showa Denko Kk Magnetic recording medium, manufacturing method therefor, and magnetic recording and reproducing device
EP1306834A1 (en) * 2001-10-24 2003-05-02 Toda Kogyo Corporation Perpendicular magnetic recording medium
US6638647B2 (en) 1999-12-10 2003-10-28 Nec Corporation Vertical recording medium with thin soft magnetic film
US7166375B2 (en) 2000-12-28 2007-01-23 Showa Denko K.K. Magnetic recording medium utilizing a multi-layered soft magnetic underlayer, method of producing the same and magnetic recording and reproducing device
JP2007242213A (en) * 2006-03-09 2007-09-20 Samsung Electronics Co Ltd Magnetic recording medium
JP2013045480A (en) * 2011-08-24 2013-03-04 Fuji Electric Co Ltd Magnetic recording medium

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6197890B1 (en) 1996-07-11 2001-03-06 Bridgestone Corporation Rubber composition containing SBR rubber, softener and a bis benzothiazolyl disulfide vulcanization accelerator
US6638647B2 (en) 1999-12-10 2003-10-28 Nec Corporation Vertical recording medium with thin soft magnetic film
JP2002358618A (en) * 2000-12-28 2002-12-13 Showa Denko Kk Magnetic recording medium, manufacturing method therefor, and magnetic recording and reproducing device
US7166375B2 (en) 2000-12-28 2007-01-23 Showa Denko K.K. Magnetic recording medium utilizing a multi-layered soft magnetic underlayer, method of producing the same and magnetic recording and reproducing device
EP1306834A1 (en) * 2001-10-24 2003-05-02 Toda Kogyo Corporation Perpendicular magnetic recording medium
SG108872A1 (en) * 2001-10-24 2005-02-28 Toda Kogyo Corp Perpendicular magnetic recording medium
US6916530B2 (en) 2001-10-24 2005-07-12 Toda Kogyo Corporation Perpendicular magnetic recording medium
JP2007242213A (en) * 2006-03-09 2007-09-20 Samsung Electronics Co Ltd Magnetic recording medium
JP2013045480A (en) * 2011-08-24 2013-03-04 Fuji Electric Co Ltd Magnetic recording medium

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