JPH0628652A - Perpendicular magnetic recording medium - Google Patents

Perpendicular magnetic recording medium

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Publication number
JPH0628652A
JPH0628652A JP18425492A JP18425492A JPH0628652A JP H0628652 A JPH0628652 A JP H0628652A JP 18425492 A JP18425492 A JP 18425492A JP 18425492 A JP18425492 A JP 18425492A JP H0628652 A JPH0628652 A JP H0628652A
Authority
JP
Japan
Prior art keywords
film
magnetic
recording medium
permeability
bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18425492A
Other languages
Japanese (ja)
Inventor
Junichi Akiyama
純一 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP18425492A priority Critical patent/JPH0628652A/en
Publication of JPH0628652A publication Critical patent/JPH0628652A/en
Priority to US08/558,971 priority patent/US5815342A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To suppress Barkhausen noises by forming a bias magnetic field- imparting film to the surface on the substrate side of a high-permeability magnetic film. CONSTITUTION:The bias magnetic field-imparting film 2 is formed on a substrate 1 and the high-permeability magnetic film 3 is formed thereon. Further, a perpendicularly magnetized film 4 for recording signal magnetization is formed thereon. An exchange interaction acts on the boundary between the bias film 2 and the high-permeability magnetic film 3 and the bias magnetic field is impressed to the magnetic film 3. As a result, the generation of the magnetic walls in the magnetic film 3 is suppressed and the Barkhausen noises are suppressed. A spacing layer, such as antiferromagnetic film, is not formed between the perpendicularly magnetized film 4 and the magnetic film 3 and therefore, the action of the thickness of the antiferromagnetic film as a spacing loss at the time of recording and reproducing does not arise. Consequently, the perpendicular magnetic recording medium having high recording and reproducing efficiency and high resolving power is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、磁気ディスクやVT
R等に使用される垂直磁気記録方式の磁気記録媒体に関
するものである。
BACKGROUND OF THE INVENTION The present invention relates to a magnetic disk and a VT.
The present invention relates to a perpendicular magnetic recording type magnetic recording medium used for R and the like.

【0002】[0002]

【従来の技術】垂直磁気記録方式に使用される垂直磁気
記録媒体としては、基板から離れた側に媒体面垂直方向
を磁化容易軸とする垂直磁化膜を形成し、基板から近い
側に高透磁率磁性膜を形成した2層構造の記録媒体があ
り(特開昭52ー78403号公報)、この2層構造垂
直磁気記録媒体は、垂直磁化膜が単層の記録媒体よりも
優れた記録再生特性を示すことが知られている。
2. Description of the Related Art As a perpendicular magnetic recording medium used in a perpendicular magnetic recording system, a perpendicular magnetic film having an easy axis of magnetization in the direction perpendicular to the medium surface is formed on the side distant from the substrate, and a high permeability is formed on the side closer to the substrate. There is a recording medium having a two-layer structure in which a magnetic susceptibility magnetic film is formed (Japanese Patent Laid-Open No. 52-78403), and this two-layer structure perpendicular magnetic recording medium is superior to a recording medium having a perpendicular magnetization film in a single layer. It is known to exhibit characteristics.

【0003】しかしながら、上記従来の2層構造垂直磁
気記録媒体においては、記録再生時にスパイク状のノイ
ズが観測される。このスパイク状ノイズは、垂直磁化膜
のみからなる単層構造の記録媒体を用いて記録再生実験
を行う際には観測されないことが確認されており、従っ
て、高透磁率磁性膜とその上に積層された垂直磁化膜と
の相互作用により生じるものではなく、高透磁率磁性膜
のみから生じるものである。また、このスパイク状ノイ
ズは、媒体中で一様に発生するものではなく、発生する
領域と発生しない領域があり、スパイク状ノイズが発生
する領域では磁壁が多く発生しており、スパイク状ノイ
ズが発生しない領域では磁壁は発生しない。このスパイ
ク状ノイズは、磁壁が不可逆的な遷移をすることに起因
するもので、一般にバルクハウゼンノイズと呼ばれてい
る。
However, in the above-described conventional two-layered perpendicular magnetic recording medium, spike noise is observed during recording and reproduction. It has been confirmed that this spike-like noise is not observed when a recording / reproducing experiment is performed using a recording medium having a single-layer structure composed of only a perpendicular magnetization film. It is not caused by the interaction with the perpendicularly magnetized film formed, but only by the high magnetic permeability magnetic film. Further, this spike-like noise does not occur uniformly in the medium, and there are regions where it occurs and regions where it does not occur, and there are many domain walls in the region where spike-like noise occurs, and spike-like noise is generated. The domain wall does not occur in the area where it does not occur. This spike noise is caused by the irreversible transition of the domain wall, and is generally called Barkhausen noise.

【0004】以上のことから、バルクハウゼンノイズの
発生を抑制するためには、高透磁率磁性膜中の磁壁の発
生を抑制すれば良いことがわかる。このバルクハウゼン
ノイズの発生を効果的に抑制するものとして、強磁性体
と反強磁性体の界面に生じる交換結合を利用することに
よって、反強磁性膜が高透磁率磁性膜へのバイアス磁界
を印加し、その結果、高透磁率磁性膜中の磁壁の発生を
抑制するという方法が知られている(特公平3−536
86号公報)。この垂直磁気記録媒体の構造は、基板上
にまず高透磁率磁性膜を形成し、この高透磁率磁性膜の
上に反強磁性膜を形成し、さらにこの反強磁性膜の上に
垂直磁化膜を形成したものである。このように形成され
た垂直磁気記録媒体の記録再生時においては、確かにバ
ルクハウゼンノイズが抑制されることが示されている。
From the above, it can be seen that in order to suppress the generation of Barkhausen noise, the generation of the domain wall in the high magnetic permeability magnetic film should be suppressed. In order to effectively suppress the generation of Barkhausen noise, exchange coupling generated at the interface between the ferromagnetic material and the antiferromagnetic material is used to allow the antiferromagnetic film to apply a bias magnetic field to the high permeability magnetic film. A method is known in which the magnetic field is applied and as a result, the generation of magnetic domain walls in the high magnetic permeability magnetic film is suppressed (Japanese Patent Publication No. 3-536).
No. 86). The structure of this perpendicular magnetic recording medium is such that a high-permeability magnetic film is first formed on a substrate, an antiferromagnetic film is formed on this high-permeability magnetic film, and then a perpendicular magnetization is formed on this antiferromagnetic film. A film is formed. It has been shown that Barkhausen noise is surely suppressed during recording / reproduction of the perpendicular magnetic recording medium thus formed.

【0005】しかしながら、この上述の構造は、垂直磁
化膜と高透磁率磁性膜との間に反強磁性膜を形成するた
め、反強磁性膜の厚みが記録再生時にスペーシング損失
として働き、その結果、記録再生効率と記録分解能の低
下をもたらし、バルクハウゼンノイズは抑制することが
できるものの、記録再生時における感度及び分解能が十
分でないという問題があった。
However, in the above-described structure, since the antiferromagnetic film is formed between the perpendicular magnetization film and the high magnetic permeability magnetic film, the thickness of the antiferromagnetic film acts as a spacing loss during recording and reproduction, As a result, although the recording and reproducing efficiency and the recording resolution are lowered and Barkhausen noise can be suppressed, there is a problem that the sensitivity and the resolution during recording and reproducing are insufficient.

【0006】[0006]

【発明が解決しようとする課題】上述の如く、基板上に
高透磁率磁性膜、高透磁率磁性膜、反強磁性膜、反強磁
性膜及び垂直磁化膜を順次形成した垂直磁気記録媒体に
おける記録再生時においては、バルクハウゼンノイズが
抑制される反面、垂直磁化膜と高透磁率磁性膜との間に
反強磁性膜を形成するため、反強磁性膜の厚みが記録再
生時にスペーシング損失として働き、その結果、記録再
生効率と記録分解能の低下をもたらし、バルクハウゼン
ノイズは抑制することができるものの、記録再生時にお
ける感度及び分解能が十分でないという問題があった。
As described above, in a perpendicular magnetic recording medium in which a high magnetic permeability magnetic film, a high magnetic permeability magnetic film, an antiferromagnetic film, an antiferromagnetic film and a perpendicular magnetic film are sequentially formed on a substrate. While Barkhausen noise is suppressed during recording / reproduction, an antiferromagnetic film is formed between the perpendicular magnetization film and the high-permeability magnetic film, so the thickness of the antiferromagnetic film reduces the spacing loss during recording / reproduction. As a result, recording and reproducing efficiency and recording resolution are lowered, and Barkhausen noise can be suppressed, but there is a problem that sensitivity and resolution during recording and reproducing are not sufficient.

【0007】本発明は、バルクハウゼンノイズを抑制す
ることができると共に、しかも高感度で、かつ、高分解
能の記録再生を可能とする垂直磁気記録媒体を提供する
ものである。
The present invention provides a perpendicular magnetic recording medium capable of suppressing Barkhausen noise, and having high sensitivity and high resolution recording / reproducing.

【0008】[0008]

【課題を解決するための手段】本発明は上記従来の課題
を解決するために、基板と、この基板上に形成されたバ
イアス磁界付与膜と、このバイアス磁界付与膜上に形成
された高透磁率磁性膜と、この高透磁率磁性膜上に形成
された信号磁化を記録する垂直磁化膜とから構成する。
In order to solve the above-mentioned conventional problems, the present invention provides a substrate, a bias magnetic field applying film formed on the substrate, and a high transparency film formed on the bias magnetic field applying film. It is composed of a magnetic susceptibility magnetic film and a perpendicular magnetization film formed on the high magnetic permeability magnetic film for recording signal magnetization.

【0009】[0009]

【作用】本発明によれば、基板上にバイアス膜、高透磁
率磁性膜及び垂直磁化膜を順次形成してなるので、バイ
アス膜と高透磁率磁性膜との界面には交換相互作用が働
き、この高透磁率磁性膜にはバイアス磁界が印加され、
その結果、高透磁率磁性膜中の磁壁発生が抑制されてバ
ルクハウゼンノイズを抑制することができる。
According to the present invention, since the bias film, the high-permeability magnetic film and the perpendicular magnetic film are sequentially formed on the substrate, exchange interaction works at the interface between the bias film and the high-permeability magnetic film. , A bias magnetic field is applied to this high permeability magnetic film,
As a result, the generation of domain walls in the high-permeability magnetic film is suppressed, and Barkhausen noise can be suppressed.

【0010】また、基板上に高透磁率磁性膜、垂直磁化
膜を順次形成し、垂直磁化膜のトラック幅方向の両端の
領域を互いに逆方向に垂直磁化することによって、該領
域は高透磁率磁性膜と磁気的に結合され、垂直磁化され
た領域に対応する高透磁率磁性膜中の磁化を磁気ディス
クのトラック幅方向(ディスク半径方向)に固着して動
きにくくすると、垂直磁化膜における垂直磁化領域の間
の記録再生領域4cの位置に対応する高透磁率磁性膜中
には、トラック幅方向にバイアス磁界が印加され、高透
磁率磁性膜3内の磁壁の発生を抑制することができ、バ
ルクハウゼンノイズの発生を抑制することができると共
に、垂直磁化膜の記録再生領域の位置に対応する高透磁
率磁性膜の領域におけるトラック長手方向(ディスク円
周方向)の透磁率は、ほとんど低下することがないので
記録再生効率の低下を招くことがない。
Further, a high-permeability magnetic film and a perpendicular magnetic film are sequentially formed on the substrate, and regions at both ends of the perpendicular magnetic film in the track width direction are perpendicularly magnetized in mutually opposite directions, whereby the high magnetic permeability of the region is achieved. When the magnetization in the high-permeability magnetic film, which is magnetically coupled to the magnetic film and corresponds to the vertically magnetized region, is fixed in the track width direction (disk radial direction) of the magnetic disk to make it hard to move, the perpendicular magnetic film A bias magnetic field is applied in the track width direction in the high-permeability magnetic film corresponding to the position of the recording / reproducing region 4c between the magnetized regions, and the generation of the domain wall in the high-permeability magnetic film 3 can be suppressed. The magnetic permeability in the track longitudinal direction (disk circumferential direction) in the region of the high magnetic permeability magnetic film that can suppress the generation of Barkhausen noise and corresponds to the position of the recording / reproducing region of the perpendicular magnetization film. , Never causing a decrease in recording efficiency because almost no reduction.

【0011】さらに、垂直磁化膜と高透磁率磁性膜との
間にスペーシング層が存在しないので、記録再生時のス
ペーシング損失がなく、高記録再生効率で、かつ、高分
解能を得ることができる。
Furthermore, since there is no spacing layer between the perpendicular magnetization film and the high-permeability magnetic film, there is no spacing loss during recording / reproduction, and high recording / reproducing efficiency and high resolution can be obtained. it can.

【0012】[0012]

【実施例】以下、図面を参照しながら本発明の一実施例
について説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0013】図1は、本発明の第1実施例に係る垂直磁
気記録媒体の構成を示す縦断面図である。この垂直磁気
記録媒体は、アルミ、ガラス等の円環板状のディスクか
らなる基板1上にFeMn、NiO等の反強磁性膜から
なるバイアス磁界付与膜2が形成され、このバイアス磁
界付与膜2上にパーマロイ、Fe基軟磁性膜、或いはZ
r系のアモルファス軟磁性膜等からなる高透磁率磁性膜
3が形成されている。さらに、高透磁率磁性膜3上に
は、信号磁化が記録されるCoCr、CoPt等からな
る垂直磁化膜4が形成されてなっている。
FIG. 1 is a vertical sectional view showing the structure of a perpendicular magnetic recording medium according to the first embodiment of the present invention. In this perpendicular magnetic recording medium, a bias magnetic field applying film 2 made of an antiferromagnetic film of FeMn, NiO or the like is formed on a substrate 1 made of an annular disk-shaped disk of aluminum, glass or the like. Permalloy, Fe-based soft magnetic film, or Z
A high-permeability magnetic film 3 made of an r-type amorphous soft magnetic film or the like is formed. Further, a perpendicular magnetic film 4 made of CoCr, CoPt or the like for recording signal magnetization is formed on the high magnetic permeability magnetic film 3.

【0014】バイアス磁界付与膜2は、反強磁性膜の代
わりにCoPt、CoPtCr、CoCr等の高抗磁力
磁性膜であっても構わない。また、バイアス磁界付与膜
2は、図2に示すように、磁性膜21と非磁性膜22と
が交互に積層され、非磁性膜22を介して積層された相
対向する磁性膜21,21が反強磁性的に結合した人工
格子膜であっても構わない。この人工格子膜は、例え
ば、n層からなる(CoFe/Cu)n 、(Co/C
u)n 、(Fe/Cr)n 等が挙げられる。
The bias magnetic field applying film 2 may be a high coercive force magnetic film of CoPt, CoPtCr, CoCr or the like instead of the antiferromagnetic film. Further, as shown in FIG. 2, the bias magnetic field applying film 2 has magnetic films 21 and non-magnetic films 22 alternately laminated, and magnetic films 21 and 21 facing each other laminated with the non-magnetic film 22 interposed therebetween. It may be an artificial lattice film that is antiferromagnetically coupled. This artificial lattice film is composed of, for example, (CoFe / Cu) n, (Co / C) composed of n layers.
u) n, (Fe / Cr) n and the like.

【0015】以上のような構成にすることにより、バイ
アス磁界付与膜2と高透磁率磁性膜3とは、その界面に
おいて交換結合し、高透磁率磁性膜3にバイアス磁界が
印加されるため、高透磁率磁性膜3内での磁壁の発生が
抑制され、スパイク上のバルクハウゼンノイズの発生を
抑制することができる。また、垂直磁化膜4は、高透磁
率磁性膜3上に直接形成されるため、記録再生時におけ
るスペーシング損失がなく、高分解能で、かつ、高い記
録再生効率を得ることが可能となる。
With the above structure, the bias magnetic field applying film 2 and the high magnetic permeability magnetic film 3 are exchange-coupled at the interface, and the bias magnetic field is applied to the high magnetic permeability magnetic film 3. Generation of magnetic domain walls in the high-permeability magnetic film 3 is suppressed, and Barkhausen noise on spikes can be suppressed. Further, since the perpendicular magnetic film 4 is formed directly on the high magnetic permeability magnetic film 3, there is no spacing loss during recording / reproduction, and high resolution and high recording / reproducing efficiency can be obtained.

【0016】なお、本実施例におけるバイアス磁界付与
膜2及び高透磁率磁性膜3をスパッタ法等によって成膜
する際には、磁気記録媒体の記録トラック幅方向に磁界
を加えながら誘導磁気異方性を付与すれば、高透磁率磁
性膜3に対して効果的にバイアス磁界を印加することが
できるようになる。
When the bias magnetic field applying film 2 and the high magnetic permeability magnetic film 3 in this embodiment are formed by the sputtering method or the like, the induced magnetic anisotropy is applied while applying a magnetic field in the recording track width direction of the magnetic recording medium. By imparting the property, the bias magnetic field can be effectively applied to the high magnetic permeability magnetic film 3.

【0017】図3は、本発明の第2実施例に係る垂直磁
気記録媒体の構成を示す縦断面図である。図3におい
て、基板1上に形成されたバイアス磁界付与膜2と高透
磁率磁性膜3との間には、非磁性膜5が設けられてい
る。バイアス磁界付与膜2の種類によって、高透磁率磁
性膜3との界面における交換結合の強度が異なるため、
高透磁率磁性膜3に加わるバイアス磁界の強度も異なる
ことになる。従って、交換結合が強すぎると高透磁率磁
性膜3に対して必要以上のバイアス磁界が加わるため、
高透磁率磁性膜3の透磁率μが減少して記録再生効率の
劣化を招いてしまう。そこで、非磁性膜5をバイアス磁
界付与膜2と高透磁率磁性膜3との間に設けることによ
って、交換結合の強度を調節することができ、最適な記
録再生感度を維持しながらバルクハウゼンノイズを抑制
することが可能となる。この非磁性膜5は、バイアス磁
界付与膜2及び高透磁率磁性膜3の磁気特性や膜厚等の
諸条件に応じてその種類や膜厚を選択すれば良い。
FIG. 3 is a vertical sectional view showing the structure of a perpendicular magnetic recording medium according to the second embodiment of the present invention. In FIG. 3, a nonmagnetic film 5 is provided between the bias magnetic field applying film 2 and the high magnetic permeability magnetic film 3 formed on the substrate 1. Since the strength of the exchange coupling at the interface with the high magnetic permeability magnetic film 3 differs depending on the type of the bias magnetic field applying film 2,
The strength of the bias magnetic field applied to the high-permeability magnetic film 3 also differs. Therefore, if the exchange coupling is too strong, an excessive bias magnetic field is applied to the high magnetic permeability magnetic film 3,
The magnetic permeability μ of the high-permeability magnetic film 3 is reduced and the recording / reproducing efficiency is deteriorated. Therefore, by providing the non-magnetic film 5 between the bias magnetic field applying film 2 and the high-permeability magnetic film 3, the strength of exchange coupling can be adjusted, and the Barkhausen noise can be maintained while maintaining the optimum recording / reproducing sensitivity. Can be suppressed. The type and film thickness of the non-magnetic film 5 may be selected according to various conditions such as the magnetic characteristics and film thickness of the bias magnetic field applying film 2 and the high magnetic permeability magnetic film 3.

【0018】図4は、本発明の第3実施例に係る垂直磁
気記録媒体の構成を示す縦断面図である。図4において
は、円環板状の磁気ディスクにおける最内周トラック4
1と最外周トラック41’との間の記録再生領域の外側
の対応する所定位置に環状にバイアス磁界付与膜2が形
成されている。この垂直磁気記録媒体は、以下に示す方
法により製造される。すなわち、まず、図5(a)に示
すように、基板1上にバイアス磁界付与膜を蒸着、スパ
ッタ法等により成膜する。次に、図5(b)に示すよう
に、バイアス磁界付与膜2上にレジスト51を塗布し、
磁気記録媒体の記録再生領域となるべき領域(例えば、
磁気ディスクの最内周トラックから最外周トラックを含
む領域)をマスク52によってマスクした後、感光させ
る。次に図5(c)に示すように、マスク52によって
感光しなかった領域をエッチング等により取り除き、図
5(d)に示すように、レジスト51を取り除いた後
で、高透磁率磁性膜3及び垂直磁化膜4を蒸着、スパッ
タ法等により成膜する。
FIG. 4 is a vertical sectional view showing the structure of a perpendicular magnetic recording medium according to the third embodiment of the present invention. In FIG. 4, the innermost track 4 on the annular disk-shaped magnetic disk
A bias magnetic field applying film 2 is formed in an annular shape at a corresponding predetermined position outside the recording / reproducing area between 1 and the outermost track 41 ′. This perpendicular magnetic recording medium is manufactured by the following method. That is, first, as shown in FIG. 5A, a bias magnetic field applying film is formed on the substrate 1 by vapor deposition, sputtering or the like. Next, as shown in FIG. 5B, a resist 51 is applied on the bias magnetic field applying film 2,
The area to be the recording / reproducing area of the magnetic recording medium (for example,
The area including the innermost track to the outermost track of the magnetic disk) is masked by the mask 52 and then exposed. Next, as shown in FIG. 5C, a region not exposed by the mask 52 is removed by etching or the like, and as shown in FIG. 5D, after removing the resist 51, the high magnetic permeability magnetic film 3 is formed. And the perpendicular magnetization film 4 is formed by vapor deposition, sputtering, or the like.

【0019】従って、以上のような構成にすると、バイ
アス磁界付与膜2に相対向する高透磁率磁性膜3の部分
にのみバイアス磁界が加わるため、この部分の磁壁の発
生は抑制される。そして、この部分の磁壁発生の抑制
は、結果として、バイアス磁界が形成されていない領域
まで効果的に磁壁の発生を抑制する。そのため、磁壁発
生によるバルクハウゼンノイズを抑制することができ
る。
Therefore, with the above-mentioned structure, since the bias magnetic field is applied only to the portion of the high magnetic permeability magnetic film 3 facing the bias magnetic field applying film 2, the generation of the domain wall in this portion is suppressed. As a result, the suppression of the domain wall generation in this portion effectively suppresses the generation of the domain wall even in the region where the bias magnetic field is not formed. Therefore, Barkhausen noise due to the generation of domain walls can be suppressed.

【0020】なお、バイアス磁界付与膜2上における高
透磁率磁性膜3の領域は、その領域に対応する垂直磁化
膜4において信号磁化の記録再生が行われず、透磁率μ
を考慮する必要がないので、バイアス磁界付与膜2と高
透磁率磁性膜3との交換結合強度を強くしても良い。ま
た、本実施例においては、記録再生領域における透磁率
μの低下がないので、磁気ヘッドとの磁気的相互作用を
強くすることができ、さらに高感度、かつ、高分解能の
記録再生を実現することが可能となる。
In the region of the high magnetic permeability magnetic film 3 on the bias magnetic field applying film 2, recording / reproduction of signal magnetization is not performed in the perpendicular magnetic film 4 corresponding to the region, and the magnetic permeability μ
Therefore, the exchange coupling strength between the bias magnetic field applying film 2 and the high magnetic permeability magnetic film 3 may be increased. Further, in the present embodiment, since the magnetic permeability μ does not decrease in the recording / reproducing area, the magnetic interaction with the magnetic head can be strengthened, and recording / reproducing with high sensitivity and high resolution can be realized. It becomes possible.

【0021】さらに、本発明に係る垂直磁気記録媒体
は、図6に示すように、高透磁率磁性膜3と垂直磁化膜
4との間にも、反強磁性膜2’を設けるようにしても良
い。この場合には、反強磁性膜2’は、スペーシング損
失を作用させない程度に、薄く形成するようにする。
Further, in the perpendicular magnetic recording medium according to the present invention, as shown in FIG. 6, an antiferromagnetic film 2'is provided between the high permeability magnetic film 3 and the perpendicular magnetization film 4. Is also good. In this case, the antiferromagnetic film 2'is formed so thin that it does not cause spacing loss.

【0022】図7は、本発明の第4実施例に係る垂直磁
気記録媒体の構成を示す縦断面図である。本実施例に係
る垂直磁気記録媒体は、基板1上に高透磁率磁性膜2、
垂直磁化膜3が順に形成されている。また、円環板状の
磁気ディスクにおける垂直磁化膜4の内周側及び外周側
には、所定幅の垂直磁化領域4a,4bが形成されてい
る。この垂直磁化領域4a,4bは互いに逆方向に、例
えば、内周側の垂直磁化領域4aは基板からヘッドに対
向する面方向に、外周側の垂直磁化領域4bはヘッドに
対向する面から基板方向に、垂直磁化されている。
FIG. 7 is a vertical sectional view showing the structure of a perpendicular magnetic recording medium according to the fourth embodiment of the present invention. The perpendicular magnetic recording medium according to the present embodiment has a high permeability magnetic film 2 on a substrate 1,
The perpendicular magnetization film 3 is formed in order. Further, vertical magnetic regions 4a and 4b having a predetermined width are formed on the inner peripheral side and the outer peripheral side of the perpendicularly magnetized film 4 in the annular disk-shaped magnetic disk. The perpendicularly magnetized regions 4a and 4b are opposite to each other, for example, the vertically magnetized region 4a on the inner circumference side is in the surface direction facing the head from the substrate, and the vertically magnetized region 4b on the outer circumference side is in the substrate direction from the surface facing the head. It is vertically magnetized.

【0023】従って、この垂直磁化領域4a,4bと高
透磁率磁性膜3とを磁気的に結合(交換相互作用による
交換結合又は静磁結合のいずれでも良い)させることに
よって、垂直磁化領域4a,4bに対応する高透磁率磁
性膜3中の磁化を磁気ディスクのトラック幅方向(ディ
スク半径方向)に固着して動きにくくすると、垂直磁化
膜4における垂直磁化領域4a,4bの間の記録再生領
域4cの位置に対応する高透磁率磁性膜3中には、破線
71で示すバイアス磁界が印加され、高透磁率磁性膜3
内の磁壁の発生を抑制することができるので、バルクハ
ウゼンノイズの発生を抑制することができる。また、垂
直磁化膜4の記録再生領域4cの位置に対応する高透磁
率磁性膜3の領域におけるトラック長手方向(ディスク
円周方向)の透磁率は、ほとんど低下することがないの
で記録再生効率の低下を招くことがない。さらに、高透
磁率磁性膜3と垂直磁化膜4との間に反強磁性膜等のス
ペーシング層を形成しないため、高い記録再生効率で、
かつ、高分解能の垂直磁気記録媒体を実現することがで
きる。
Therefore, the perpendicularly magnetized regions 4a, 4b and the high-permeability magnetic film 3 are magnetically coupled (either exchange coupling due to exchange interaction or magnetostatic coupling may be performed), so that the perpendicularly magnetized regions 4a, 4b. If the magnetization in the high-permeability magnetic film 3 corresponding to 4b is fixed in the track width direction (disk radial direction) of the magnetic disk to make it hard to move, the recording / reproducing area between the perpendicular magnetization areas 4a and 4b in the perpendicular magnetization film 4 will be described. A bias magnetic field indicated by a broken line 71 is applied to the high-permeability magnetic film 3 corresponding to the position 4c, so that the high-permeability magnetic film 3 is formed.
Since it is possible to suppress the generation of magnetic domain walls inside, it is possible to suppress the generation of Barkhausen noise. Further, since the magnetic permeability in the track longitudinal direction (disc circumferential direction) in the region of the high magnetic permeability magnetic film 3 corresponding to the position of the recording / reproducing region 4c of the perpendicular magnetization film 4 hardly decreases, the recording / reproducing efficiency is improved. It does not cause deterioration. Furthermore, since a spacing layer such as an antiferromagnetic film is not formed between the high-permeability magnetic film 3 and the perpendicular magnetic film 4, high recording / reproducing efficiency is achieved.
Moreover, a high-resolution perpendicular magnetic recording medium can be realized.

【0024】図8乃至図13に、本発明に係る垂直磁気
記録媒体のその他の変形例を示す。図8における垂直磁
気記録媒体は、高透磁率磁性膜3と垂直磁化膜4との間
に非磁性膜5を形成したものである。すなわち、高透磁
率磁性膜3と垂直磁化膜4との界面において、垂直磁化
膜4の記録再生領域4cに対応する位置にその界面にお
ける交換結合を断ち切ることができる程度の非磁性膜5
が形成されている。
8 to 13 show other modifications of the perpendicular magnetic recording medium according to the present invention. The perpendicular magnetic recording medium shown in FIG. 8 has a non-magnetic film 5 formed between a high-permeability magnetic film 3 and a perpendicular magnetic film 4. That is, at the interface between the high-permeability magnetic film 3 and the perpendicular magnetic film 4, the non-magnetic film 5 to the position corresponding to the recording / reproducing region 4c of the perpendicular magnetic film 4 to the extent that the exchange coupling at the interface can be cut off.
Are formed.

【0025】従って、高透磁率磁性膜3と垂直磁化膜4
との記録再生領域4cに対応する界面においては静磁的
に結合できるので、高透磁率磁性膜3を必要に応じて薄
くした場合にも、高透磁率磁性膜3は信号磁化によって
低下することなく良好な記録再生を実現することができ
る。
Therefore, the high permeability magnetic film 3 and the perpendicular magnetization film 4 are formed.
Since they can be magnetostatically coupled at the interface corresponding to the recording / reproducing area 4c, the high magnetic permeability magnetic film 3 is deteriorated by the signal magnetization even when the high magnetic permeability magnetic film 3 is thinned as necessary. It is possible to realize good recording and reproduction without any trouble.

【0026】図9における垂直磁気記録媒体は、基板1
上に高透磁率磁性膜3、垂直磁化膜4が形成されてい
る。そして、円環板状の磁気ディスクにおける垂直磁化
膜4の内周側及び外周側には、トラック幅方向に磁化さ
れた長手方向に配向性を有する高抗磁力磁性膜6a,6
bが所定幅で形成されているので、高透磁率磁性膜3と
高抗磁力磁性膜6a,6bとを磁気的に結合することが
でき、同様の効果が得ることができる。
The perpendicular magnetic recording medium shown in FIG.
A high permeability magnetic film 3 and a perpendicular magnetization film 4 are formed on the top. The high coercive force magnetic films 6a, 6 magnetized in the track width direction and oriented in the longitudinal direction are formed on the inner peripheral side and the outer peripheral side of the perpendicularly magnetized film 4 in the annular disk-shaped magnetic disk.
Since b is formed with a predetermined width, the high magnetic permeability magnetic film 3 and the high coercive force magnetic films 6a and 6b can be magnetically coupled, and the same effect can be obtained.

【0027】図10における垂直磁気記録媒体は、基板
1上の内周側及び外周側には、トラック幅方向に磁化さ
れた長手方向に配向性を有する高抗磁力磁性膜6a,6
bが形成され、この高抗磁力磁性膜6a,6bの間の記
録再生領域に対応する位置に高透磁率磁性膜3が形成さ
れている。さらに、この高透磁率3及び高抗磁力磁性膜
6a,6b上には信号磁化が記録再生される垂直磁化膜
4が形成されている。この場合においても、高抗磁力磁
性膜6a,6bの同一方向の磁化によって高透磁率磁性
膜3に破線101の方向にバイアス磁界を印加すること
ができ、同様の効果を得ることができる。
The perpendicular magnetic recording medium in FIG. 10 has high coercive force magnetic films 6a, 6 magnetized in the track width direction and oriented in the longitudinal direction on the inner and outer peripheral sides of the substrate 1.
b is formed, and the high magnetic permeability magnetic film 3 is formed at a position corresponding to the recording / reproducing area between the high coercive force magnetic films 6a and 6b. Further, on the high magnetic permeability 3 and the high coercive force magnetic films 6a and 6b, a perpendicular magnetization film 4 for recording and reproducing signal magnetization is formed. Also in this case, the bias magnetic field can be applied to the high magnetic permeability magnetic film 3 in the direction of the broken line 101 by the magnetization of the high coercive force magnetic films 6a and 6b in the same direction, and the same effect can be obtained.

【0028】図11における垂直磁気記録媒体は、基板
1上に第2の高透磁率磁性膜3’、非磁性膜5、この非
磁性膜5上に高抗磁力磁性膜6a,6b及び第1の高透
磁率磁性膜3が順次形成され、さらにこれら高抗磁力磁
性膜6a,6b及び第1の高透磁率磁性膜3上に垂直磁
化膜4が形成されてなっている。従って、高抗磁力磁性
膜6a,6bと高透磁率磁性膜3’とを静磁結合させた
場合には、高抗磁力磁性膜6a→高透磁率磁性膜3→高
抗磁力磁性膜6b→高透磁率磁性膜3’(或いはその
逆)の経路を有する磁気回路抵抗の小さな閉磁路(破線
111)が構成され、図9に示す垂直磁気記録媒体より
も強くて有効なバイアス磁界を印加することができるよ
うになる。
In the perpendicular magnetic recording medium shown in FIG. 11, the second high magnetic permeability magnetic film 3 ', the non-magnetic film 5 on the substrate 1, the high coercive force magnetic films 6a, 6b and the first magnetic film 5 on the non-magnetic film 5. The high magnetic permeability magnetic film 3 is sequentially formed, and the perpendicular magnetization film 4 is formed on the high coercive force magnetic films 6a and 6b and the first high magnetic permeability magnetic film 3. Therefore, when the high coercive force magnetic films 6a and 6b and the high magnetic permeability magnetic film 3 ′ are magnetostatically coupled, the high coercive force magnetic film 6a → the high magnetic permeability magnetic film 3 → the high coercive force magnetic film 6b → A closed magnetic circuit with a small magnetic circuit resistance (broken line 111) having a high magnetic permeability magnetic film 3 '(or vice versa) is formed, and a bias magnetic field stronger and more effective than that of the perpendicular magnetic recording medium shown in FIG. 9 is applied. Will be able to.

【0029】図12における垂直磁気記録媒体は、基板
1上に高抗磁力磁性膜6、非磁性膜5、高透磁力磁性膜
3、垂直磁化膜4が順次形成されてなっている。そし
て、高抗磁力磁性膜6と高透磁率磁性膜3とは静磁的に
結合されているので、高透磁率磁性膜3にはトラック幅
方向にバイアス磁界が印加されることになる。
In the perpendicular magnetic recording medium shown in FIG. 12, a high coercive force magnetic film 6, a nonmagnetic film 5, a high magnetic permeability magnetic film 3 and a perpendicular magnetization film 4 are sequentially formed on a substrate 1. Further, since the high coercive force magnetic film 6 and the high magnetic permeability magnetic film 3 are magnetostatically coupled, a bias magnetic field is applied to the high magnetic permeability magnetic film 3 in the track width direction.

【0030】図13における垂直磁気記録媒体は、基板
1上に高透磁率磁性膜3、垂直磁化膜4が順次形成さ
れ、記録再生領域の両端の位置に互いに反対方向の媒体
面垂直方向に磁化された永久磁石7a,7bが設けられ
ている。従って、上述の例と同様に高透磁率磁性膜3内
にトラック幅方向のバイアス磁界を印加することができ
る。なお、永久磁石7a,7bの代わりに高抗磁力磁性
膜6a,6bを用いても良い。
In the perpendicular magnetic recording medium shown in FIG. 13, a high-permeability magnetic film 3 and a perpendicular magnetization film 4 are sequentially formed on a substrate 1, and magnetized in opposite directions to the medium surface perpendicular direction at positions of both ends of a recording / reproducing area. Permanent magnets 7a and 7b are provided. Therefore, a bias magnetic field in the track width direction can be applied to the high magnetic permeability magnetic film 3 as in the above example. Note that high coercive force magnetic films 6a and 6b may be used instead of the permanent magnets 7a and 7b.

【0031】なお、本発明においては、いずれも磁気デ
ィスク等の円板状の一方の面にのみ信号磁化が記録させ
るべき垂直磁化膜を形成したが、これにこだわることは
なく、他方の面にも形成しても構わない。また、いずれ
も磁気ディスク等の円板状の垂直磁気記録媒体の例を示
したが、磁気テープ等のテープ状の垂直磁気記録媒体に
適用することもできる。
In the present invention, the perpendicular magnetic film to be recorded with signal magnetization is formed only on one disk-shaped surface of a magnetic disk or the like, but the present invention is not limited to this, and the other surface is formed. May also be formed. Further, in each of the examples, a disk-shaped perpendicular magnetic recording medium such as a magnetic disk is shown, but the present invention can be applied to a tape-shaped perpendicular magnetic recording medium such as a magnetic tape.

【0032】[0032]

【発明の効果】以上の通り本発明によれば、高透磁率磁
性膜中の磁壁の発生を抑制することができ、高透磁率磁
性膜と垂直磁化膜との界面に生じるバルクハウゼンノイ
ズを効果的に抑制することができる。また、垂直磁化膜
と高透磁率磁性膜との間には、反強磁性膜等のスペーシ
ング層を形成しないため、反強磁性膜の厚みが記録再生
時にスペーシング損失として働くことがなく、その結果
として、高い記録再生効率で、かつ、高分解能の垂直磁
気記録媒体を実現することができる。
As described above, according to the present invention, it is possible to suppress the generation of the domain wall in the high magnetic permeability magnetic film, and the effect of Barkhausen noise generated at the interface between the high magnetic permeability magnetic film and the perpendicular magnetization film can be obtained. Can be suppressed. Further, since a spacing layer such as an antiferromagnetic film is not formed between the perpendicular magnetization film and the high magnetic permeability magnetic film, the thickness of the antiferromagnetic film does not work as a spacing loss during recording / reproduction, As a result, a perpendicular magnetic recording medium with high recording / reproducing efficiency and high resolution can be realized.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の第1実施例に係る垂直磁気記録媒体
の構成を示す図。
FIG. 1 is a diagram showing the configuration of a perpendicular magnetic recording medium according to a first embodiment of the invention.

【図2】 図1におけるバイアス磁界付与膜の一例を示
す図。
FIG. 2 is a diagram showing an example of a bias magnetic field applying film in FIG.

【図3】 本発明の第2実施例に係る垂直磁気記録媒体
の構成を示す図。
FIG. 3 is a diagram showing the configuration of a perpendicular magnetic recording medium according to a second embodiment of the invention.

【図4】 本発明の第3実施例に係る垂直磁気記録媒体
の構成を示す図。
FIG. 4 is a diagram showing the configuration of a perpendicular magnetic recording medium according to a third embodiment of the invention.

【図5】 図4における垂直磁気記録媒体の製造工程を
示す図。
FIG. 5 is a diagram showing a manufacturing process of the perpendicular magnetic recording medium in FIG.

【図6】 本発明に係る垂直磁気記録媒体の構成の変形
例を示す図。
FIG. 6 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図7】 本発明の第4実施例に係る垂直磁気記録媒体
の構成を示す図。
FIG. 7 is a diagram showing the structure of a perpendicular magnetic recording medium according to a fourth embodiment of the invention.

【図8】 本発明に係る垂直磁気記録媒体の構成の変形
例を示す図。
FIG. 8 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図9】 本発明に係る垂直磁気記録媒体の構成の変形
例を示す図。
FIG. 9 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図10】 本発明に係る垂直磁気記録媒体の構成の変
形例を示す図。
FIG. 10 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図11】 本発明に係る垂直磁気記録媒体の構成の変
形例を示す図。
FIG. 11 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図12】 本発明に係る垂直磁気記録媒体の構成の変
形例を示す図。
FIG. 12 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【図13】 本発明に係る垂直磁気記録媒体の構成の変
形例を示す図。
FIG. 13 is a diagram showing a modification of the configuration of the perpendicular magnetic recording medium according to the present invention.

【符号の説明】[Explanation of symbols]

1 基板 2 バイアス磁界付与膜 3 高透磁率磁性膜 4 垂直磁化膜 5 非磁性膜 6a,6b 高抗磁力磁性膜 7a,7b 永久磁石 21 磁性膜 22 非磁性膜 41 最内周トラック 41’ 最外周トラック 51 レジスト 52 マスク 1 substrate 2 bias magnetic field applying film 3 high permeability magnetic film 4 perpendicular magnetization film 5 non-magnetic film 6a, 6b high coercive force magnetic film 7a, 7b permanent magnet 21 magnetic film 22 non-magnetic film 41 innermost track 41 'outermost circumference Track 51 Resist 52 Mask

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 基板と、この基板上に形成された高透磁
率磁性膜と、この高透磁率磁性膜上に形成された信号磁
化を記録する垂直磁化膜とからなる垂直磁気記録媒体に
おいて、少なくとも前記高透磁率磁性膜の基板側の面に
バイアス磁界付与膜を形成したことを特徴とする垂直磁
気記録媒体。
1. A perpendicular magnetic recording medium comprising a substrate, a high-permeability magnetic film formed on the substrate, and a perpendicular magnetic film for recording signal magnetization formed on the high-permeability magnetic film. A perpendicular magnetic recording medium, wherein a bias magnetic field applying film is formed on at least the surface of the high magnetic permeability magnetic film on the substrate side.
【請求項2】 前記バイアス磁界付与膜と前記高透磁率
磁性膜との間に非磁性膜を形成してなることを特徴とす
る請求項1記載の垂直磁気記録媒体。
2. The perpendicular magnetic recording medium according to claim 1, wherein a non-magnetic film is formed between the bias magnetic field applying film and the high magnetic permeability magnetic film.
【請求項3】 前記バイアス磁界付与膜は、反強磁性膜
であることを特徴とする請求項1又は請求項2記載の垂
直磁気記録媒体。
3. The perpendicular magnetic recording medium according to claim 1, wherein the bias magnetic field applying film is an antiferromagnetic film.
【請求項4】 前記バイアス磁界付与膜は、面内配向性
を有する高抗磁力磁性膜であることを特徴とする請求項
1又は請求項2記載の垂直磁気記録媒体。
4. The perpendicular magnetic recording medium according to claim 1, wherein the bias magnetic field applying film is a high coercive force magnetic film having in-plane orientation.
【請求項5】 前記バイアス磁界付与膜は、磁性膜と非
磁性膜とが交互に積層された少なくとも2つの前記磁性
膜からなる積層膜であって、前記非磁性膜を介して積層
された相対向する前記磁性膜が反強磁性的に結合してな
ることを特徴とする請求項1又は請求項2記載の垂直磁
気記録媒体。
5. The bias magnetic field applying film is a laminated film composed of at least two magnetic films in which a magnetic film and a nonmagnetic film are alternately laminated, and a relative film laminated with the nonmagnetic film interposed therebetween. The perpendicular magnetic recording medium according to claim 1 or 2, wherein the facing magnetic films are antiferromagnetically coupled.
【請求項6】 基板と、この基板上に形成された高透磁
率磁性膜と、この高透磁率磁性膜上に形成された信号磁
化を記録する垂直磁化膜からなる垂直磁気記録媒体であ
って、前記垂直磁化膜における記録再生領域の両端の所
定領域を相対する方向に垂直磁化することを特徴とする
垂直磁気記録媒体。
6. A perpendicular magnetic recording medium comprising a substrate, a high-permeability magnetic film formed on the substrate, and a perpendicular magnetic film for recording signal magnetization formed on the high-permeability magnetic film. A perpendicular magnetic recording medium, wherein predetermined regions at both ends of a recording / reproducing region of the perpendicular magnetization film are perpendicularly magnetized in opposite directions.
JP18425492A 1992-07-13 1992-07-13 Perpendicular magnetic recording medium Pending JPH0628652A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP18425492A JPH0628652A (en) 1992-07-13 1992-07-13 Perpendicular magnetic recording medium
US08/558,971 US5815342A (en) 1992-07-13 1995-11-13 Perpendicular magnetic recording/reproducing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18425492A JPH0628652A (en) 1992-07-13 1992-07-13 Perpendicular magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0628652A true JPH0628652A (en) 1994-02-04

Family

ID=16150097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18425492A Pending JPH0628652A (en) 1992-07-13 1992-07-13 Perpendicular magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0628652A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003036531A (en) * 2001-07-25 2003-02-07 Fuji Electric Co Ltd Manufacturing method of perpendicular magnetic recording medium
WO2003017258A1 (en) * 2001-08-17 2003-02-27 Showa Denko K.K. Magnetic recording medium, its manufacturing method, and magnetic recording/reproducing apparatus
US6723458B2 (en) 2001-08-17 2004-04-20 Showa Denko K.K. Magnetic recording medium, method of manufacture therefor, and magnetic read/write apparatus
US6846581B2 (en) 2001-03-22 2005-01-25 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording-reproducing apparatus using the same
US7105239B2 (en) 2001-11-27 2006-09-12 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording/reproducing apparatus using the same
KR20160089336A (en) 2014-12-15 2016-07-27 후지 이카 산쿄 가부시키가이샤 Sport science for artificial environment control room

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6846581B2 (en) 2001-03-22 2005-01-25 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording-reproducing apparatus using the same
JP2003036531A (en) * 2001-07-25 2003-02-07 Fuji Electric Co Ltd Manufacturing method of perpendicular magnetic recording medium
WO2003017258A1 (en) * 2001-08-17 2003-02-27 Showa Denko K.K. Magnetic recording medium, its manufacturing method, and magnetic recording/reproducing apparatus
US6723458B2 (en) 2001-08-17 2004-04-20 Showa Denko K.K. Magnetic recording medium, method of manufacture therefor, and magnetic read/write apparatus
US7105239B2 (en) 2001-11-27 2006-09-12 Kabushiki Kaisha Toshiba Perpendicular magnetic recording medium and magnetic recording/reproducing apparatus using the same
KR20160089336A (en) 2014-12-15 2016-07-27 후지 이카 산쿄 가부시키가이샤 Sport science for artificial environment control room

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