JPH05250651A - Perpendicular magnetic recording medium - Google Patents
Perpendicular magnetic recording mediumInfo
- Publication number
- JPH05250651A JPH05250651A JP4544992A JP4544992A JPH05250651A JP H05250651 A JPH05250651 A JP H05250651A JP 4544992 A JP4544992 A JP 4544992A JP 4544992 A JP4544992 A JP 4544992A JP H05250651 A JPH05250651 A JP H05250651A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- layer
- film
- recording medium
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気記憶装置に用いられ
る垂直磁気記録媒体に係り、特に装置内の漏洩する浮遊
磁界の影響を防止した垂直磁気記録媒体の構造に関する
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a perpendicular magnetic recording medium used in a magnetic storage device, and more particularly to a structure of a perpendicular magnetic recording medium which prevents the influence of a stray magnetic field leaking inside the device.
【0002】磁気ディスク装置の小型化、高密度記録化
に伴い、一般に広く用いられている水平磁気記録媒体に
比べて遙に高密度記録が可能な磁気記録媒体として、高
透磁率な軟磁性層上に膜厚方向に残留磁化を形成する垂
直磁気記録層を積層した二層膜構造の垂直磁気記録媒体
が提案され、かかる垂直磁気記録媒体と単磁極型の磁気
ヘッド等との組み合わせによる記録・再生が高密度記録
に最適であることが知られている。Along with the miniaturization and high density recording of magnetic disk devices, a soft magnetic layer having a high magnetic permeability as a magnetic recording medium capable of recording much higher density than a widely used horizontal magnetic recording medium. A perpendicular magnetic recording medium having a double-layer film structure in which a perpendicular magnetic recording layer that forms remnant magnetization in the film thickness direction is stacked is proposed, and recording by a combination of such a perpendicular magnetic recording medium and a single-pole magnetic head is performed. It is known that reproduction is optimal for high density recording.
【0003】しかし、単磁極型の磁気ヘッドと組み合わ
せた二層膜構造の垂直磁気記録媒体は、高透磁率な軟磁
性層の存在により装置内に漏洩する浮遊磁界が該磁気ヘ
ッドの主磁極に集中し易く、この集中により強められた
磁界によって該主磁極と対向する記録媒体における垂直
磁気記録層の記録磁化を減磁、或いは消磁する傾向にあ
る。このため、そのような装置内の浮遊磁界の影響を防
止した信頼性の良い媒体構造が必要とされている。However, in a perpendicular magnetic recording medium having a two-layer film structure combined with a single-pole type magnetic head, a stray magnetic field leaking into the device due to the presence of a soft magnetic layer having a high magnetic permeability is applied to the main pole of the magnetic head. It is easy to concentrate, and the magnetic field strengthened by this concentration tends to demagnetize or demagnetize the recording magnetization of the perpendicular magnetic recording layer in the recording medium facing the main pole. Therefore, there is a need for a reliable medium structure that prevents the effects of such stray magnetic fields in the device.
【0004】[0004]
【従来の技術】従来の二層膜構造の垂直磁気記録媒体は
図6の要部断面図に示すように、NiP表面処理等を施し
たアルミニウム円板等からなる非磁性基板1上に、一般
に広く用いられている Ni-Fe膜からなる高透磁率な軟磁
性層と比較して飽和磁束密度Bsが高く、かつその膜厚が
薄くても高い再生出力が得られる、例えばスパッタリン
グ法により成膜された 0.5μmの膜厚のγ−Fe4 Nから
なる高透磁率な軟磁性層2と該軟磁性層2の膜厚方向に
垂直な磁化容易軸を有する 0.1μmの膜厚の Co-Cr膜か
らなる磁気記録層、即ち、垂直記録層3とが順に積層さ
れた構成からなっている。2. Description of the Related Art A conventional perpendicular magnetic recording medium having a two-layer film structure is generally formed on a non-magnetic substrate 1 such as an aluminum disk having a NiP surface treatment, as shown in the cross-sectional view of the main part of FIG. High saturation magnetic flux density Bs compared to the widely used soft magnetic layer made of Ni-Fe film, and high reproduction output can be obtained even if the film thickness is thin. Of 0.5 μm thick γ-Fe 4 N having a high magnetic permeability, and Co-Cr having a thickness of 0.1 μm having an easy axis of magnetization perpendicular to the thickness direction of the soft magnetic layer 2. The magnetic recording layer made of a film, that is, the perpendicular recording layer 3 is laminated in this order.
【0005】そしてこのような垂直磁気記録媒体に対し
て情報を記録・再生する単磁極型の垂直磁気ヘッドにお
ける主磁極からの記録磁界は、対向する前記垂直記録層
3を垂直に磁化して通過し、その直下の前記軟磁性層2
を水平方向に通って再び該垂直記録層3を垂直に通過し
て前記垂直磁気ヘッド側へ帰還する磁気回路により情報
記録が行われ、また既に記録された前記垂直記録層3か
らの記録磁界により垂直磁気ヘッドの主磁極が磁化さ
れ、その主磁極と鎖交するコイルに生じる電圧を再生信
号として取り出すことによって情報再生を行っている。A recording magnetic field from the main magnetic pole of a single magnetic pole type perpendicular magnetic head for recording / reproducing information on / from such a perpendicular magnetic recording medium is perpendicularly magnetized and passes through the opposed perpendicular recording layer 3. And the soft magnetic layer 2 immediately below
Information is recorded by a magnetic circuit that passes through the recording medium in the horizontal direction and again vertically passes through the perpendicular recording layer 3 and returns to the side of the perpendicular magnetic head, and by the already recorded recording magnetic field from the perpendicular recording layer 3. The main magnetic pole of the perpendicular magnetic head is magnetized, and information is reproduced by extracting a voltage generated in a coil interlinking with the main magnetic pole as a reproduction signal.
【0006】[0006]
【発明が解決しようとする課題】ところで、前記垂直磁
気記録媒体は単磁極型の垂直磁気ヘッドとの組み合わせ
によって電磁変換特性が優れているとはいうものの、該
垂直磁気記録媒体での高透磁率な軟磁性層2の存在によ
りこの記録媒体に対向する垂直磁気ヘッドの主磁極に、
例えば磁気ディスク装置内のディスク駆動用モータ、ヘ
ッド位置決め用のボイスコイルモータなどから漏洩する
数Oe程度の浮遊磁界が集中し、これが強い磁界となって
対向する垂直記録層3を磁化して記録された情報磁化が
減磁、或いは消磁させてしまうといった問題があった。Although the perpendicular magnetic recording medium is excellent in electromagnetic conversion characteristics when combined with a single magnetic pole type perpendicular magnetic head, it has a high magnetic permeability in the perpendicular magnetic recording medium. Due to the presence of the soft magnetic layer 2, the main magnetic pole of the perpendicular magnetic head facing the recording medium,
For example, a stray magnetic field of about several Oe leaked from a disk drive motor, a head positioning voice coil motor, or the like in a magnetic disk device is concentrated, and this becomes a strong magnetic field, which is magnetized and recorded on the opposing perpendicular recording layer 3. There is a problem that the information magnetization is demagnetized or demagnetized.
【0007】このような情報磁化の減磁、或いは消磁が
生じる現象は、前記垂直磁気ヘッドの主磁極に集中した
浮遊磁界が強い磁界となって対向する垂直記録層3を通
してその直下の軟磁性層2に流れた際に、該軟磁性層2
に構成する磁区の磁壁が不規則に移動し、その部分の透
磁率が一時的に異常に高くなり、その部分に多くの浮遊
磁界が流れ込むことに起因している。The phenomenon of such demagnetization or demagnetization of the information magnetization is caused by a stray magnetic field concentrated in the main magnetic pole of the perpendicular magnetic head becoming a strong magnetic field and passing through the opposed perpendicular recording layer 3 through the soft magnetic layer immediately thereunder. 2 when flowing to the soft magnetic layer 2
This is because the magnetic domain walls of the magnetic domain that are formed irregularly move, the magnetic permeability of that portion temporarily becomes abnormally high, and many stray magnetic fields flow into that portion.
【0008】本発明は上記した従来の問題点に鑑み、垂
直磁気ヘッドの主磁極に集中した浮遊磁界による軟磁性
層の磁壁の不規則な移動を抑制して、垂直記録層の情報
磁化の減磁及び消磁の発生を防止するようにした新規な
垂直磁気記録媒体を提供することを目的とするものであ
る。In view of the above-mentioned conventional problems, the present invention suppresses the irregular movement of the domain wall of the soft magnetic layer due to the stray magnetic field concentrated on the main pole of the perpendicular magnetic head to reduce the information magnetization of the perpendicular recording layer. It is an object of the present invention to provide a novel perpendicular magnetic recording medium that prevents the generation of magnetism and demagnetization.
【0009】[0009]
【課題を解決するための手段】本発明は上記した目的を
達成するため、非磁性基板上に、高透磁率な軟磁性層を
介して垂直異方性を有する磁気記録層を積層した二層膜
構造の垂直磁気記録媒体において、前記軟磁性層をα-F
e16 N2 膜により構成する。In order to achieve the above-mentioned object, the present invention is a two-layer structure in which a magnetic recording layer having perpendicular anisotropy is laminated on a non-magnetic substrate via a soft magnetic layer having a high magnetic permeability. In a perpendicular magnetic recording medium having a film structure, the soft magnetic layer is formed by α-F
It is composed of an e 16 N 2 film.
【0010】また、非磁性基板上に、窒化鉄 (γ−Fe4
N)からなる高透磁率な軟磁性層と垂直異方性を有する
磁気記録層とを順に積層した二層膜構造の垂直磁気記録
媒体において、前記軟磁性層と磁気記録層との間にα-F
e16 N2 層を介在した構成とする。Further, iron nitride (γ-Fe 4
In a perpendicular magnetic recording medium having a two-layer film structure in which a high-permeability soft magnetic layer made of N) and a magnetic recording layer having perpendicular anisotropy are laminated in this order, α is provided between the soft magnetic layer and the magnetic recording layer. -F
The structure has an e 16 N 2 layer interposed.
【0011】[0011]
【作用】本発明では、軟磁性層と垂直異方性を有する磁
気記録層との二層膜構造における軟磁性層に、日本応用
磁気学会誌、Vol.14,No.2,P271〜274,(1990)「窒素イオ
ン注入によって作製したFe16N2 薄膜の構造と磁性」に
記載されている形成方法と略同様な方法により形成され
た高い飽和磁束密度Bsと、垂直磁気ヘッドの主磁極に集
中する浮遊磁界よりも高い数10〜数100 Oeの保磁力Hcを
有するα-Fe16 N 2 膜を用いた構成、或いは窒化鉄 (γ
−Fe4 N)からなる軟磁性層と磁気記録層との間に同様
に高飽和磁束密度と高保磁力を有するα-Fe16 N2 層を
介在した構成とすることによって、垂直磁気ヘッドの主
磁極に集中した浮遊磁界が前記磁気記録層を通してα-F
e16 N2 膜からなる軟磁性層、或いは磁気記録層を通し
て該磁気記録層と軟磁性層間に介在したα-Fe16 N2 層
に流れても、一般的な磁気ディスク装置においては前記
浮遊磁界の強度がα-Fe16 N2 膜からなる軟磁性層、或
いは前記介在したα-Fe16 N2 層の保磁力Hc以下である
ため、それらの層での磁区の部分的な磁壁の不規則な移
動が抑制される。In the present invention, the soft magnetic layer and the magnet having perpendicular anisotropy are used.
Applied to Japan as a soft magnetic layer in a two-layer structure with an air recording layer
Journal of Magnetics, Vol.14, No.2, P271-274, (1990) `` Nitrogen Io
Fe produced by ion implantation16N2Thin film structure and magnetism "
Formed by a method substantially similar to the described forming method
And a high saturation magnetic flux density Bs, and concentrated on the main pole of the perpendicular magnetic head.
Coercive force Hc of several tens to several hundreds Oe higher than the stray magnetic field inside
Have α-Fe16N 2Structure using a film or iron nitride (γ
−FeFourThe same between the soft magnetic layer consisting of N) and the magnetic recording layer
Α-Fe with high saturation magnetic flux density and high coercive force16N2Layers
With the interposition, the main structure of the perpendicular magnetic head
The stray magnetic field concentrated in the magnetic poles passes through the magnetic recording layer to α-F
e16N2Through the soft magnetic layer or magnetic recording layer
Α-Fe interposed between the magnetic recording layer and the soft magnetic layer16N2layer
Even if it flows to the
Stray magnetic field strength is α-Fe16N2A soft magnetic layer consisting of a film, or
Or the intervening α-Fe16N2The coercive force of the layer is less than Hc
Therefore, the partial domain wall irregular displacement of the magnetic domains in those layers
Motion is suppressed.
【0012】その結果、前記α-Fe16 N2 膜からなる軟
磁性層、或いは前記介在されたα-Fe16 N2 層に部分的
に多くの浮遊磁界が流れ込むことが阻止され、前記磁気
記録層の情報磁化の減磁及び消磁を防止することができ
る。As a result, a large amount of stray magnetic field is partially prevented from flowing into the soft magnetic layer formed of the α-Fe 16 N 2 film or the interposed α-Fe 16 N 2 layer, and the magnetic recording is performed. It is possible to prevent demagnetization and demagnetization of the information magnetization of the layer.
【0013】[0013]
【実施例】以下図面を用いて本発明の実施例について詳
細に説明する。図1は本発明に係る垂直磁気記録媒体の
一実施例を示す要部断面図であり、同図中において図5
に示す構成部分と対応する部分には同一符号を付してい
る。Embodiments of the present invention will be described in detail below with reference to the drawings. FIG. 1 is a cross-sectional view of an essential part showing an embodiment of a perpendicular magnetic recording medium according to the present invention. In FIG.
The same reference numerals are given to the portions corresponding to the constituent portions shown in.
【0014】図示のようにNiP表面処理等を施したアル
ミニウム円板等からなる非磁性基板1上に、 Ni-Fe膜か
らなる高透磁率な軟磁性層と比較して飽和磁束密度Bsが
高く、垂直磁気ヘッドの主磁極に集中する外部から漏洩
する浮遊磁界よりも高い保磁力Hcを有する 0.5μmの膜
厚のα-Fe16 N2 膜からなる高透磁率な軟磁性層12を介
して 0.1μmの膜厚の Co-Cr膜からなる磁気記録層、即
ち、垂直記録層3が積層された構成としている。As shown in the figure, the saturation magnetic flux density Bs is higher on the non-magnetic substrate 1 made of an aluminum disc or the like which has been subjected to NiP surface treatment or the like, as compared with the high magnetic permeability soft magnetic layer made of a Ni-Fe film. , Through the high-permeability soft magnetic layer 12 made of an α-Fe 16 N 2 film having a film thickness of 0.5 μm, which has a coercive force Hc higher than the stray magnetic field leaking from the outside concentrated on the main magnetic pole of the perpendicular magnetic head. A magnetic recording layer made of a Co—Cr film having a thickness of 0.1 μm, that is, a perpendicular recording layer 3 is laminated.
【0015】前記α-Fe16 N2 膜からなる高透磁率な軟
磁性層12は、日本応用磁気学会誌、Vol.14,No.2,P271〜
274,(1990)「窒素イオン注入によって作製したFe16N2
薄膜の構造と磁性」に記載している形成方法と略同様
に、例えば前記非磁性基板1上にスパッタリング法によ
り 0.5μmの膜厚のα−Fe膜を成膜した後、該α−Fe膜
にイオン注入法によって窒素を、例えば窒素注入量が10
16〜1017cm-2、電流密度が1μA/cm2 の条件で注入エ
ネルギーを膜厚方向に30〜150keVに制御して注入するこ
とにより、数10〜数100 Oeの均一な保磁力Hcを有する所
望のα-Fe16 N2膜からなる高透磁率な軟磁性層12を形
成することができる。The high magnetic permeability soft magnetic layer 12 made of the α-Fe 16 N 2 film is described in Japanese Society of Applied Magnetics, Vol. 14, No. 2, P271-.
274, (1990) "Fe 16 N 2 prepared by nitrogen ion implantation
In the same manner as the forming method described in "Structure and magnetism of thin film", for example, an α-Fe film having a thickness of 0.5 μm is formed on the non-magnetic substrate 1 by a sputtering method, and then the α-Fe film is formed. Nitrogen by an ion implantation method, for example, a nitrogen implantation amount of 10
A uniform coercive force Hc of several tens to several hundreds Oe is obtained by controlling the implantation energy in the film thickness direction to 30 to 150 keV under the conditions of 16 to 10 17 cm -2 and current density of 1 μA / cm 2. It is possible to form the high magnetic permeability soft magnetic layer 12 made of the desired α-Fe 16 N 2 film.
【0016】このような本実施例のα-Fe16 N2 膜から
なる軟磁性層12と従来例のγ−Fe4N膜からなる軟磁性
層2の磁化特性を図3(a) 及び(b) のM (磁化) −H
(磁界) 曲線図により示している。The magnetization characteristics of the soft magnetic layer 12 composed of the α-Fe 16 N 2 film of the present embodiment and the soft magnetic layer 2 composed of the γ-Fe 4 N film of the conventional example are shown in FIGS. b) M (magnetization) -H
(Magnetic field) Curved diagram is shown.
【0017】即ち、図3(b) に示すように従来例のγ−
Fe4 N膜からなる軟磁性層2の保磁力Hcはせいぜい数Oe
程度であるが、これに対して本実施例のα-Fe16 N2 膜
からなる軟磁性層12の保磁力Hcは、図3(a) に示すよう
に10数Oeから数100 Oeとなり、垂直磁気ヘッドの主磁極
に集中する外部から漏洩する浮遊磁界よりも高い保磁力
Hcを有している。That is, as shown in FIG. 3 (b), the conventional γ-
The coercive force Hc of the soft magnetic layer 2 made of Fe 4 N film is at most Oe.
On the other hand, the coercive force Hc of the soft magnetic layer 12 made of the α-Fe 16 N 2 film of this embodiment is 10 Oe to 100 Oe as shown in FIG. 3 (a). Higher coercive force than the stray magnetic field leaking from the outside concentrated on the main pole of the perpendicular magnetic head
Has Hc.
【0018】従って、垂直磁気ヘッドの主磁極に集中し
た装置内の浮遊磁界が本実施例の垂直磁気記録媒体にお
ける前記垂直記録層3を通してα-Fe16 N2 膜からなる
軟磁性層12に流れても、前記浮遊磁界の強度が該軟磁性
層12の保磁力Hc以下であるため、その層での部分的な磁
壁の不規則な移動が抑制されて、透磁率が一時的に異常
に高くなったり、それに起因して部分的に多くの浮遊磁
界が流れ込むことが阻止されるので、前記垂直記録層に
記録された磁化情報の減磁及び消磁を防止することがで
きる。Therefore, the stray magnetic field in the device concentrated in the main magnetic pole of the perpendicular magnetic head flows through the perpendicular recording layer 3 in the perpendicular magnetic recording medium of this embodiment to the soft magnetic layer 12 made of the α-Fe 16 N 2 film. However, since the strength of the stray magnetic field is less than or equal to the coercive force Hc of the soft magnetic layer 12, irregular movement of partial domain walls in the layer is suppressed, and the magnetic permeability is temporarily abnormally high. Or, it is possible to prevent a large amount of stray magnetic field from flowing partially due to this, so that it is possible to prevent demagnetization and demagnetization of the magnetization information recorded in the perpendicular recording layer.
【0019】なお、前記本実施例のα-Fe16 N2 膜から
なる軟磁性層12を備えた垂直磁気記録媒体と従来例のγ
−Fe4 N膜からなる軟磁性層2を備えた垂直磁気記録媒
体とをそれぞれ単磁極型の垂直磁気ヘッドと組み合わ
せ、再生中のそれらの媒体面に対して外部磁界がない場
合と数 Gaussの外部磁界がある場合の再生出力波形を比
較すると、図5(a) に示すように前記従来例の垂直磁気
記録媒体に対して外部磁界がない場合には再生出力信号
の波形は一定のレベルであるが、数 Gaussの外部磁界を
印加すると図5(b) に示すように再生出力信号の波形の
一部の再生出力が低下する。これは前記外部磁界により
垂直記録層3に記録された磁化情報が部分的に減磁、或
いは消磁されたことによるものである。The perpendicular magnetic recording medium provided with the soft magnetic layer 12 made of the α-Fe 16 N 2 film of the present embodiment and the γ of the conventional example.
A perpendicular magnetic recording medium provided with a soft magnetic layer 2 made of a —Fe 4 N film was combined with a single magnetic pole type perpendicular magnetic head, respectively, and there was no external magnetic field to those medium surfaces during reproduction, and several Gauss. Comparing the reproduction output waveforms in the presence of an external magnetic field, as shown in FIG. 5 (a), when there is no external magnetic field for the conventional perpendicular magnetic recording medium, the waveform of the reproduction output signal is at a constant level. However, when an external magnetic field of several Gauss is applied, the reproduction output of a part of the waveform of the reproduction output signal decreases as shown in FIG. 5 (b). This is because the magnetization information recorded in the perpendicular recording layer 3 is partially demagnetized or demagnetized by the external magnetic field.
【0020】このような従来例に対して、図4(a) に示
すように前記本実施例の垂直磁気記録媒体に外部磁界を
印加しない場合の再生出力信号の波形は一定のレベルで
あり、前記と同様な外部磁界を印加しても図4(b) に示
すように再生出力信号の波形には再生出力の低下は見ら
れず、外部磁界により垂直記録層3に記録された磁化情
報が部分的に減磁、或いは消磁されることはない。In contrast to such a conventional example, as shown in FIG. 4 (a), the waveform of the reproduction output signal when the external magnetic field is not applied to the perpendicular magnetic recording medium of the present embodiment has a constant level, Even if an external magnetic field similar to the above is applied, the reproduction output signal waveform shows no decrease in reproduction output as shown in FIG. 4 (b), and the magnetization information recorded in the perpendicular recording layer 3 by the external magnetic field is It is not partially demagnetized or demagnetized.
【0021】更に、図2は本発明に係る垂直磁気記録媒
体の他の実施例を示す要部断面図であり、同図中におい
て図1に示す構成部分と対応する部分には同一符号を付
している。Further, FIG. 2 is a cross-sectional view of an essential part showing another embodiment of the perpendicular magnetic recording medium according to the present invention. In FIG. 2, parts corresponding to the parts shown in FIG. is doing.
【0022】この図で示す実施例が図1による実施例と
異なる点は、NiP表面処理等を施したアルミニウム円板
等からなる非磁性基板1上に配設した、例えば 0.4μm
の膜厚のγ−Fe4 N膜からなる軟磁性層22上に、 0.1μ
mの膜厚のα−Fe膜に前記実施例と同様なイオン注入法
により窒素をイオン注入して形成したα-Fe16 N2 膜23
を介して 0.1μmの膜厚の Co-Cr膜からなる垂直記録層
3を積層した構成としたことである。The embodiment shown in this figure is different from the embodiment shown in FIG. 1 in that, for example, 0.4 μm is provided on a non-magnetic substrate 1 made of an aluminum disk or the like which has been subjected to NiP surface treatment or the like.
On the soft magnetic layer 22 made of γ-Fe 4 N film of
Nitrogen was formed by ion implantation by m the same ion implantation with the examples alpha-Fe film having a thickness of α-Fe 16 N 2 film 23
That is, the perpendicular recording layer 3 made of a Co—Cr film having a film thickness of 0.1 μm is laminated through the layer.
【0023】このような実施例構成によっても、垂直磁
気ヘッドの主磁極に集中した浮遊磁界が当該垂直磁気記
録媒体における前記垂直記録層3を通してα-Fe16 N2
膜23に流れても、前記浮遊磁界の強度が該α-Fe16 N2
膜23の保磁力Hc (10数Oeから数100 Oe) 以下であるた
め、その層での部分的な磁壁の不規則な移動が抑制され
る。According to the structure of this embodiment as well, the stray magnetic field concentrated in the main magnetic pole of the perpendicular magnetic head passes through the perpendicular recording layer 3 in the perpendicular magnetic recording medium and passes through α-Fe 16 N 2.
Even if it flows into the film 23, the strength of the stray magnetic field is increased by the α-Fe 16 N 2
Since the coercive force of the film 23 is Hc (10 Oe to several 100 Oe) or less, partial irregular movement of the domain wall in the layer is suppressed.
【0024】従って、透磁率が一時的に異常に高くなっ
たり、それに起因して部分的に多くの浮遊磁界が流れ込
むことが阻止されると共に、その直下のγ−Fe4 N膜か
らなる軟磁性層22にも流れ込むことが阻止されるので、
前記垂直記録層3に記録された磁化情報の減磁及び消磁
を防止することができ、前記図1による実施例と同様な
目的と効果を達成することができる。Therefore, the magnetic permeability is temporarily increased abnormally, and a large amount of stray magnetic field is partially prevented from flowing due to the magnetic permeability, and the soft magnetic field formed by the γ-Fe 4 N film immediately below is prevented. Since it is prevented from flowing into the layer 22,
It is possible to prevent demagnetization and demagnetization of the magnetization information recorded in the perpendicular recording layer 3, and it is possible to achieve the same purpose and effect as the embodiment according to FIG.
【0025】なお、前記他の実施例ではγ−Fe4 N膜か
らなる軟磁性層22上のα-Fe16 N2膜23を、該軟磁性層2
2上に被着したα−Fe膜にイオン注入法により窒素をイ
オン注入してα-Fe16 N2 膜23を形成した場合の例につ
いて説明したが、この例とは別に、例えば窒素含有濃度
がα-Fe16 N2 膜よりも低い窒化鉄膜からなる軟磁性層
の表面から0.1 μmの深さ部分のみに窒素をイオン注入
法によりその注入エネルギーを制御して注入することに
よっても、前記軟磁性層の表面部にα-Fe16 N 2 膜を形
成することができる。In the other embodiment, γ-Fe is used.FourN film
Α-Fe on the soft magnetic layer 22 consisting of16N2The film 23 is formed on the soft magnetic layer 2
2 Nitrogen was implanted into the α-Fe film deposited on the surface by ion implantation.
On-injected and α-Fe16N2An example of when the film 23 is formed
However, apart from this example, for example, the nitrogen content concentration
Is α-Fe16N2Soft magnetic layer consisting of iron nitride film lower than the film
Ion implantation of nitrogen only to the depth of 0.1 μm from the surface of
By controlling the injection energy by the method
Therefore, α-Fe is formed on the surface of the soft magnetic layer.16N 2Shape the membrane
Can be made.
【0026】[0026]
【発明の効果】以上の説明から明らかなように、本発明
に係る垂直磁気記録媒体によれば、垂直磁気ヘッドの主
磁極に集中した装置内の浮遊磁界の作用による垂直記録
層の磁化情報の減磁、或いは消磁を防止することがで
き、情報記録維持上の信頼性が著しく向上する等、実用
上優れた効果を奏する。As is apparent from the above description, according to the perpendicular magnetic recording medium of the present invention, the magnetization information of the perpendicular recording layer due to the action of the stray magnetic field in the device concentrated on the main magnetic pole of the perpendicular magnetic head can be obtained. Demagnetization or demagnetization can be prevented, and the practically excellent effects such as the remarkably improved reliability in maintaining information recording are achieved.
【図1】 本発明の垂直磁気記録媒体の一実施例を示す
要部断面図である。FIG. 1 is a cross-sectional view of essential parts showing an embodiment of a perpendicular magnetic recording medium of the present invention.
【図2】 本発明の垂直磁気記録媒体の他の実施例を示
す要部断面図である。FIG. 2 is a cross-sectional view of essential parts showing another embodiment of the perpendicular magnetic recording medium of the present invention.
【図3】 本発明のα-Fe16 N2 軟磁性層と従来のγ−
Fe4 N軟磁性層の磁化特性の一例を示すM−H曲線図で
ある。FIG. 3 shows an α-Fe 16 N 2 soft magnetic layer of the present invention and a conventional γ-.
Is a M-H curve chart showing an example of magnetization properties of Fe 4 N soft magnetic layer.
【図4】 本発明の垂直磁気記録媒体への外部磁界の印
加の有・無による再生出力信号の波形を示す図である。FIG. 4 is a diagram showing a waveform of a reproduction output signal with / without applying an external magnetic field to the perpendicular magnetic recording medium of the present invention.
【図5】 従来の垂直磁気記録媒体への外部磁界の印加
の有・無による再生出力信号の波形を示す図である。FIG. 5 is a diagram showing a waveform of a reproduction output signal with and without application of an external magnetic field to a conventional perpendicular magnetic recording medium.
【図6】 従来の垂直磁気記録媒体を説明するための要
部断面図である。FIG. 6 is a cross-sectional view of a main part for explaining a conventional perpendicular magnetic recording medium.
1 非磁性基板 3 垂直記録層 12,22 軟磁性層 23 α-Fe16 N2 膜1 non-magnetic substrate 3 perpendicular recording layer 12, 22 soft magnetic layer 23 α-Fe 16 N 2 film
Claims (2)
層(12)と垂直異方性を有する磁気記録層(3) とを順に積
層した二層膜構造の垂直磁気記録媒体において、 前記軟磁性層(12)がα-Fe16 N2 膜からなることを特徴
とする垂直磁気記録媒体。1. A perpendicular magnetic recording having a double-layer structure in which a soft magnetic layer (12) having a high magnetic permeability and a magnetic recording layer (3) having perpendicular anisotropy are sequentially laminated on a non-magnetic substrate (1). In the medium, the perpendicular magnetic recording medium characterized in that the soft magnetic layer (12) is composed of an α-Fe 16 N 2 film.
からなる高透磁率な軟磁性層(22)と垂直異方性を有する
磁気記録層(3) とを順に積層した二層膜構造の垂直磁気
記録媒体において、 前記軟磁性層(22)と磁気記録層(3) との間にα-Fe16 N
2 層(23)を介在したことを特徴とする垂直磁気記録媒
体。2. Iron nitride (Fe 4 N) on a non-magnetic substrate (1)
In a perpendicular magnetic recording medium having a two-layer film structure in which a high-permeability soft magnetic layer (22) and a magnetic recording layer (3) having perpendicular anisotropy are sequentially laminated, the soft magnetic layer (22) and the magnetic layer Α-Fe 16 N between recording layer (3)
A perpendicular magnetic recording medium having two layers (23) interposed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4544992A JPH05250651A (en) | 1992-03-03 | 1992-03-03 | Perpendicular magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4544992A JPH05250651A (en) | 1992-03-03 | 1992-03-03 | Perpendicular magnetic recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05250651A true JPH05250651A (en) | 1993-09-28 |
Family
ID=12719653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4544992A Withdrawn JPH05250651A (en) | 1992-03-03 | 1992-03-03 | Perpendicular magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05250651A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6204995B1 (en) | 1998-02-19 | 2001-03-20 | Nec Corporation | Magnetic disc apparatus |
US6270885B1 (en) | 1997-11-17 | 2001-08-07 | Nec Corporation | Perpendicular magnetic recording medium |
US8231987B2 (en) | 2007-01-02 | 2012-07-31 | Samsung Electronics Co., Ltd. | Magnetic domain data storage devices and methods of manufacturing the same |
JP2020087497A (en) * | 2018-11-30 | 2020-06-04 | キヤノン株式会社 | Magnetic recording medium and manufacturing method thereof |
-
1992
- 1992-03-03 JP JP4544992A patent/JPH05250651A/en not_active Withdrawn
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6270885B1 (en) | 1997-11-17 | 2001-08-07 | Nec Corporation | Perpendicular magnetic recording medium |
US6204995B1 (en) | 1998-02-19 | 2001-03-20 | Nec Corporation | Magnetic disc apparatus |
US8231987B2 (en) | 2007-01-02 | 2012-07-31 | Samsung Electronics Co., Ltd. | Magnetic domain data storage devices and methods of manufacturing the same |
JP2020087497A (en) * | 2018-11-30 | 2020-06-04 | キヤノン株式会社 | Magnetic recording medium and manufacturing method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Iwasaki et al. | Perpendicular magnetic recording with a composite anisotropy film | |
US5995339A (en) | Magnetoresistive head with a front flux guide and an embedded MR element | |
JPH05250651A (en) | Perpendicular magnetic recording medium | |
JP2002216333A (en) | Magnetic recording medium and magnetic recording machine | |
JPH06139542A (en) | Perpendicular magnetic recording medium | |
JPS62145527A (en) | Compound type thin film magnetic head | |
JP3019140B2 (en) | Perpendicular magnetic recording media | |
JP2949761B2 (en) | Method for manufacturing perpendicular magnetic recording medium | |
JPH0327963B2 (en) | ||
JP2724014B2 (en) | Magnetic head and method of manufacturing the same | |
JPS5839544Y2 (en) | Magnetic head for erasing | |
JPH0256713A (en) | Magneto-resistance effect type reproducing head | |
JPH026487Y2 (en) | ||
JPS58102321A (en) | Magnetic head | |
JP2810457B2 (en) | Perpendicular magnetic recording medium and its recording device | |
JPS5839545Y2 (en) | Magnetic head for erasing | |
JPH069083B2 (en) | Vertical magnetic head | |
JPS6132202A (en) | Vertical magnetic recording and reproducing system | |
JPS5839546Y2 (en) | Magnetic head for erasing | |
JPS5839542Y2 (en) | Magnetic head for erasing | |
JPS5839543Y2 (en) | Magnetic head for erasing | |
JPH06223310A (en) | Magnetic head for vertical recording | |
KR0166760B1 (en) | Vertical recording magnetic head | |
JPS5839541Y2 (en) | Magnetic head for erasing | |
JPH0490101A (en) | Vertical magnetic recorder |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990518 |