JPH06137845A - Device for inspecting uneven streak on surface of steel plate - Google Patents

Device for inspecting uneven streak on surface of steel plate

Info

Publication number
JPH06137845A
JPH06137845A JP4309821A JP30982192A JPH06137845A JP H06137845 A JPH06137845 A JP H06137845A JP 4309821 A JP4309821 A JP 4309821A JP 30982192 A JP30982192 A JP 30982192A JP H06137845 A JPH06137845 A JP H06137845A
Authority
JP
Japan
Prior art keywords
steel plate
light
screen
reflected
projected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4309821A
Other languages
Japanese (ja)
Inventor
Nobuo Yamada
信夫 山田
Kiyoshi Matsui
清 松井
Akitaka Fujiyama
晶敬 藤山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP4309821A priority Critical patent/JPH06137845A/en
Publication of JPH06137845A publication Critical patent/JPH06137845A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To provide a surface uneven streak-inspection device for inspecting chatter mark (lateral streak) which is produced on the surface of a steel plate due to vibration of rolls. CONSTITUTION:A device for inspecting uneven streak on the surface of a steel plate is provided with an illuminating means having a light source 1 and an optical system 2 capable of collecting light from the light source 1 to obtain a roughly parallel light, a light receiving means comprising a semi-transparent screen 3 on which a reflected light reflected on the surface of a steel plate 10 is projected and an image sensing means to sense a projected image on the semi-transparent screen 3 by a camera 4 to obtain an image signal, and an inspection means to inspect unevenness on the surface of the steel plate from the image signal from the image sensing means. In the light receiving means, the semi-transparent screen 3 is used as a screen on which a reflected light reflected on the surface of the steel plate is projected, and the camera 4 is positioned at the rear of the semi-transparent screen 3.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、表面処理鋼板・ステン
レス鋼板等のシート状物体の表面の微小な凹凸を高感度
・高速に検査するシート状物体の表面凹凸縞検査装置に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet-like object surface unevenness inspection apparatus for inspecting minute unevenness on the surface of a sheet-like object such as a surface-treated steel plate or a stainless steel plate with high sensitivity and high speed.

【0002】[0002]

【従来の技術】表面処理鋼板・ステンレス鋼板・プラス
ティック等の比較的反射率の高いシート状物体の表面凹
凸を、走行中に検査する手段として、特開昭62−62
205号がある。図4は従来の反射方式を用いたシート
状物体の表面凹凸縞検査装置の構成図である。図4にお
いて、スリット状光源20からの光は、検査対象物であ
る鋼板10に照射される。鋼板10で反射された光は反
射型のスクリーン13に投射され、鋼板10の表面凹凸
に応じた反射光の強度分布ムラが発生し、これをカメラ
4で撮像し、画像処理部に入力し、検査対象の良否が判
定される。
2. Description of the Related Art As a means for inspecting the surface irregularities of a sheet-like object having a relatively high reflectance such as surface-treated steel plate, stainless steel plate, plastic, etc. during traveling, Japanese Patent Laid-Open No. 62-62.
There is No. 205. FIG. 4 is a block diagram of a conventional surface unevenness fringe inspection apparatus for a sheet-like object using a reflection method. In FIG. 4, the light from the slit-shaped light source 20 is applied to the steel plate 10 as the inspection object. The light reflected by the steel plate 10 is projected on the reflection type screen 13, and unevenness in the intensity distribution of the reflected light is generated according to the surface unevenness of the steel plate 10. This is imaged by the camera 4 and input to the image processing unit, The quality of the inspection target is determined.

【0003】[0003]

【発明が解決しようとする課題】上記のような従来の表
面凹凸縞検査装置では、スクリーン上に投射された(シ
ート状の被検査物の表面凹凸に応じた反射光の)強度分
布ムラによって生じる最も強い散乱光が検出できる位置
にカメラを設置すべきであるが、スクリーン表面側を観
測する方式ではスクリーン正面にカメラを配置すると、
視野をふさぐことになりそれが困難であるという問題が
ある。その上、スクリーンとカメラの対向角によって画
像が歪むので、その補正を行うために画像処理が複雑に
なるという問題もある。
In the conventional surface unevenness fringe inspection apparatus as described above, it is caused by the unevenness of the intensity distribution (of the reflected light corresponding to the surface unevenness of the sheet-like object to be inspected) projected on the screen. The camera should be installed at a position where the strongest scattered light can be detected, but in the method of observing the screen surface side, if the camera is placed in front of the screen,
There is a problem that it obstructs the field of view and makes it difficult. In addition, since the image is distorted due to the opposing angle between the screen and the camera, there is a problem that the image processing becomes complicated to correct the distortion.

【0004】本発明はかかる課題を解決するためになさ
れたもので、被検査物からの反射光によってスクリーン
上に生じる散乱光の分布が最も強く検出でき、かつ外来
光の影響の少ない表面凹凸縞検査装置を提供とすること
を目的とする。
The present invention has been made to solve the above problems, and the distribution of scattered light generated on the screen by the reflected light from the object to be inspected can be detected most strongly, and the surface uneven fringes are less affected by external light. The purpose is to provide an inspection device.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明は請求項1において光源と前記光源からの光
を集光しほぼ平行な光を得る光学系を有する照明手段
と、前記照明手段からシート状の鋼板に照射され鋼板表
面で反射された反射光が投影されるスクリーン及び前記
スクリーン上の投影像を撮像し画像信号を得る撮像手段
からなる受光手段と、前記撮像手段からの画像信号から
鋼板表面の凹凸を検査する検査手段とを備え、前記受光
手段は鋼板表面で反射された反射光が投影されるスクリ
ーンを半透明スクリーンとし、かつこのスクリーン後方
にスクリーン上の投影像を撮像する撮像手段を設けたも
のであり、また請求項2においては受光手段は鋼板表面
で反射された反射光が投影されるスクリーン周辺の外光
を遮断するフードで覆った構成にしたものであり、さら
にフードの内面に反射防止のための黒色塗膜を形成する
ことにより、その利点はより大きい。
In order to achieve the above object, the present invention according to claim 1 comprises a light source and an illuminating means having an optical system for condensing light from the light source to obtain substantially parallel light. A screen on which the reflected light reflected by the surface of the steel sheet, which is irradiated from the illumination means to the sheet-shaped steel sheet, is projected; and a light-receiving means comprising an imaging means for capturing a projected image on the screen to obtain an image signal; And a means for inspecting the unevenness of the steel sheet surface from the image signal, wherein the light receiving means is a screen on which the reflected light reflected by the steel sheet surface is projected, and a projected image on the screen behind the screen. An image pickup means for picking up an image is provided, and in the second aspect, the light receiving means is a hood that blocks outside light around the screen onto which the reflected light reflected by the steel plate surface is projected. It is obtained by the configuration Tsu, by further forming a black coating film for anti-reflection on the inner surface of the hood, greater than its advantages.

【0006】[0006]

【作用】本発明の構成により、カメラはスクリーンに対
してその背面から投影像を撮像することができるので、
画像の歪みもなく、外来光の影響を受けることもなく、
最も強い散乱光を検出することができる。
With the structure of the present invention, the camera can capture a projected image from the back of the screen,
No image distortion, no influence of extraneous light,
The strongest scattered light can be detected.

【0007】[0007]

【実施例】図1に、本発明のシート状物体の表面凹凸縞
検査装置の一実施例の構成を示す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the configuration of an embodiment of the surface unevenness fringe inspection apparatus for sheet-like objects of the present invention.

【0008】本実施例の表面凹凸縞検査装置は光源1、
平行光を得るレンズ2、鋼板10からの反射光が投影さ
れる半透明スクリーン3、この半透明スクリーン3上の
画像を撮像する2次元CCDカメラ4、このカメラ4の
前面を覆う遮蔽部材であるフード5、画像処理部6、演
算部7、画像信号を一時保管するメモリ8と表示部9か
らなる。画像処理部6は二値化やノイズ除去、濃度変
換、モーメント検索等を行う。演算部7は高速フーリエ
変換(FFT)や、アフイン変換等の処理を高速に行う
ための装置である。また、半透明スクリーン3はスリガ
ラス、拡散板等の半透明板からなり、鋼板10で反射さ
れた光の投影像を形成させ、さらに、フード5は外来光
を遮断すると共に、反射防止のために内側を黒色に塗っ
ている。光源1とレンズ2からなる照明装置は鋼板10
の搬送方向の上流に配置され、半透明スクリーン3と2
次元CCDカメラ4からなる受光部は下流に配置されて
いる。照明装置と受光部の配置は逆であっても良い。
The surface unevenness fringe inspection apparatus of this embodiment comprises a light source 1,
A lens 2 for obtaining parallel light, a semitransparent screen 3 onto which reflected light from the steel plate 10 is projected, a two-dimensional CCD camera 4 for picking up an image on the semitransparent screen 3, and a shielding member for covering the front surface of the camera 4. It includes a hood 5, an image processing unit 6, a calculation unit 7, a memory 8 for temporarily storing image signals, and a display unit 9. The image processing unit 6 performs binarization, noise removal, density conversion, moment search, and the like. The calculation unit 7 is a device for performing processing such as fast Fourier transform (FFT) and affine transform at high speed. Further, the semi-transparent screen 3 is made of a semi-transparent plate such as a frosted glass and a diffusion plate to form a projected image of the light reflected by the steel plate 10. Further, the hood 5 blocks external light and prevents reflection. The inside is painted black. The illumination device including the light source 1 and the lens 2 is a steel plate 10
Of the translucent screens 3 and 2 which are arranged upstream in the transport direction of
The light-receiving portion including the dimensional CCD camera 4 is arranged downstream. The arrangement of the lighting device and the light receiving portion may be reversed.

【0009】光源1からの光はレンズ2によって平行光
に変換された後検査対象物たる鋼板10に照射される。
この時、光源1として点光源を用いた場合は、レンズ2
の照射スポットの大きさはチャタマークのピッチよりも
十分大きくなるように鋼板とレンズ2の距離は選択され
ている。鋼板の幅を1メートルとした場合にレンズスポ
ット径は500mm×500mmの正方形が内接するに
十分な大きさとし、鋼板幅方向に2つの隣接した光源1
を設けた。2次元のCCDカメラ4は512×512画
素のCCDを有し500mm×500mmの正方形を撮
像範囲とする。光源1として棒状光源を用いた場合は、
レンズ2にシリンドリカルレンズを用い500mm×1
000mmのスポット範囲を実現する位置にシリンドリ
カルレンズを配置した。この場合にも2次元のCCDカ
メラ4は鋼板幅方向に2つ隣接して配置した。
The light from the light source 1 is converted into parallel light by the lens 2 and then radiated to the steel plate 10 as an inspection object.
At this time, when a point light source is used as the light source 1, the lens 2
The distance between the steel plate and the lens 2 is selected so that the size of the irradiation spot of 1 is sufficiently larger than the pitch of the chatter mark. When the width of the steel plate is 1 meter, the lens spot diameter is set to be large enough to inscribe a square of 500 mm × 500 mm, and two adjacent light sources 1 in the width direction of the steel plate 1
Was set up. The two-dimensional CCD camera 4 has a CCD of 512 × 512 pixels, and a 500 mm × 500 mm square is set as an imaging range. When a rod-shaped light source is used as the light source 1,
Cylindrical lens is used for lens 2, 500 mm x 1
A cylindrical lens was arranged at a position that realized a spot range of 000 mm. Also in this case, two two-dimensional CCD cameras 4 are arranged adjacent to each other in the steel plate width direction.

【0010】鋼板10で反射された光はフード5前面の
半透明スクリーン3に投射され半透明スクリーン3上に
は図3に示すように鋼板10の表面凹凸に応じた反射光
の強度分布ムラが発生する。鋼板10のへこんだ箇所
は、凹面鏡として作用し、入射光を集光するので、半透
明スクリーン3上では明るくなる。逆に凸部分は凸面鏡
として作用し、入射光を分散するので、半透明スクリー
ン3上では暗くなる。これを、2次元のCCDカメラ4
で撮像し、512×512画素のデジタルデータとし画
像処理部6に入力する。
The light reflected by the steel plate 10 is projected on the semi-transparent screen 3 on the front surface of the hood 5, and on the semi-transparent screen 3, there is unevenness in the intensity distribution of the reflected light according to the surface irregularities of the steel plate 10, as shown in FIG. Occur. The recessed portion of the steel plate 10 acts as a concave mirror and collects incident light, so that it becomes bright on the semitransparent screen 3. On the contrary, the convex portion acts as a convex mirror and disperses the incident light, so that it becomes dark on the semitransparent screen 3. This is a two-dimensional CCD camera 4
Then, the image is picked up and is input to the image processing unit 6 as digital data of 512 × 512 pixels.

【0011】画像処理部6では二値化等の処理が行わ
れ、二値化後のデータを演算部7を用いてフーリエ変換
する。フーリエ変換の結果からパワースペクトルを求
め、そのピークパワーを求める。また特定の周波数成分
だけを残して逆フーリエ変換を行いその波形の、長さ・
面積を求める。パワースペクトルのピークパワー,時系
列データの長さ・面積が凹凸縞の強度となる。凹凸縞の
強度の大小に応じて検査対象の良否が判定され、その結
果は表示部9で表示される。
The image processing unit 6 performs a process such as binarization, and the binarized data is Fourier-transformed using the arithmetic unit 7. A power spectrum is obtained from the result of the Fourier transform and its peak power is obtained. In addition, the inverse Fourier transform is performed leaving only specific frequency components, and the length and
Find the area. The peak power of the power spectrum and the length and area of the time series data are the strength of the uneven stripes. The quality of the inspection target is determined according to the strength of the uneven stripes, and the result is displayed on the display unit 9.

【0012】また、ここまでの解析を実施せず画像デー
タを全体の輝度平均値を基準として、そのA%増レベル
以上の明るい箇所(凹部分)の有無・及び、逆にB%減
以下の暗い箇所(凸部分)の有無のみを判定することも
可能である。ここでA及びBは検査対象によって予め定
められる定数である。
Further, without performing the analysis up to this point, the presence or absence of a bright portion (recessed portion) above the A% increase level of the image data with reference to the overall brightness average value, and conversely below the B% decrease It is also possible to determine only the presence or absence of a dark part (convex part). Here, A and B are constants predetermined according to the inspection target.

【0013】[0013]

【発明の効果】以上のように、本発明によれば、半透明
スクリーンがフードによって遮光されているので外来光
の影響を受けることなく、かつ、鋼板表面の最も強い散
乱光が検出できるので、従来より微細な凹凸縞の検出が
可能であり、得られた画像信号のS/N比も向上する。
As described above, according to the present invention, since the semi-transparent screen is shielded by the hood, the strongest scattered light on the steel plate surface can be detected without being affected by external light. It is possible to detect finer uneven fringes than before, and the S / N ratio of the obtained image signal is also improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of the present invention.

【図2】鋼板のうねり状態を示す説明図である。FIG. 2 is an explanatory view showing a waviness state of a steel plate.

【図3】チャタマークの発生状態を示す説明図である。FIG. 3 is an explanatory diagram showing a generation state of chatter marks.

【図4】従来の反射スクリーン方式による検査装置の構
成図である。
FIG. 4 is a configuration diagram of a conventional inspection device using a reflection screen method.

【符号の説明】[Explanation of symbols]

1 光源 2 レンズ 3 半透明スクリーン 4 2次元のCCDカメラ 5 フード 6 画像処理部 7 演算部 9 表示部 10 鋼板 13 スクリーン 1 light source 2 lens 3 semi-transparent screen 4 two-dimensional CCD camera 5 hood 6 image processing unit 7 computing unit 9 display unit 10 steel plate 13 screen

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 光源と前記光源からの光を集光しほぼ平
行な光を得る光学系を有する照明手段と、前記照明手段
からシート状の鋼板に照射され鋼板表面で反射された反
射光が投影されるスクリーン及び前記スクリーン上の投
影像を撮像し画像信号を得る撮像手段からなる受光手段
と、前記撮像手段からの画像信号から鋼板表面の凹凸を
検査する検査手段とを備え、前記受光手段は鋼板表面で
反射された反射光が投影されるスクリーンを半透明スク
リーンとし、かつこのスクリーン後方にスクリーン上の
投影像を撮像する撮像手段を設けたことを特徴とする鋼
板の表面凹凸縞検査装置。
1. A lighting unit having a light source and an optical system that collects light from the light source to obtain substantially parallel light, and reflected light that is irradiated from the lighting unit onto a sheet-shaped steel plate and reflected on the surface of the steel plate. The light receiving means includes a light receiving means including a projected screen and an image pickup means for picking up a projected image on the screen to obtain an image signal, and an inspection means for inspecting the unevenness of the steel plate surface from the image signal from the image pickup means. Is a semi-transparent screen on which the reflected light reflected by the surface of the steel plate is projected, and an image pickup means for picking up a projected image on the screen is provided behind the screen, and a device for inspecting unevenness in the surface of a steel plate. .
【請求項2】 請求項1記載の鋼板の表面凹凸縞検査装
置において、受光手段は鋼板表面で反射された反射光が
投影されるスクリーン周辺の外光を遮断するフードで覆
った構成にしたことを特徴とする鋼板の表面凹凸縞検査
装置。
2. The steel sheet surface irregularity stripe inspection apparatus according to claim 1, wherein the light receiving means is covered with a hood that blocks outside light around the screen onto which the reflected light reflected by the steel plate surface is projected. An apparatus for inspecting surface unevenness of steel plates, which is characterized by
【請求項3】 請求項2記載の受光手段を有する鋼板の
表面凹凸縞検査装置において、フードの内面に反射防止
のための黒色塗膜を形成したことを特徴とする鋼板の表
面凹凸縞検査装置。
3. The surface unevenness fringe inspection device for a steel sheet having the light receiving means according to claim 2, wherein a black coating film for preventing reflection is formed on the inner surface of the hood. .
【請求項4】 請求項1記載の鋼板の表面凹凸縞検査装
置において、前記照明手段の前にスリットを設けたこと
を特徴とする鋼板の表面凹凸縞検査装置。
4. The steel sheet surface unevenness fringe inspection device according to claim 1, wherein a slit is provided in front of the illumination means.
JP4309821A 1992-10-26 1992-10-26 Device for inspecting uneven streak on surface of steel plate Pending JPH06137845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4309821A JPH06137845A (en) 1992-10-26 1992-10-26 Device for inspecting uneven streak on surface of steel plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4309821A JPH06137845A (en) 1992-10-26 1992-10-26 Device for inspecting uneven streak on surface of steel plate

Publications (1)

Publication Number Publication Date
JPH06137845A true JPH06137845A (en) 1994-05-20

Family

ID=17997666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4309821A Pending JPH06137845A (en) 1992-10-26 1992-10-26 Device for inspecting uneven streak on surface of steel plate

Country Status (1)

Country Link
JP (1) JPH06137845A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345724B1 (en) * 1999-12-28 2002-07-27 주식회사 포스코 Apparatus for detecting surface defect of strip using multi wavelength light source and color ccd camera
KR101458796B1 (en) * 2008-06-04 2014-11-10 엘지디스플레이 주식회사 Uneri Measurement Device and Measurement Method
WO2017134958A1 (en) * 2016-02-05 2017-08-10 東レ株式会社 Inspection device for sheet-like objects, and inspection method for sheet-like objects
JP2018036162A (en) * 2016-08-31 2018-03-08 株式会社リコー Inspection device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345724B1 (en) * 1999-12-28 2002-07-27 주식회사 포스코 Apparatus for detecting surface defect of strip using multi wavelength light source and color ccd camera
KR101458796B1 (en) * 2008-06-04 2014-11-10 엘지디스플레이 주식회사 Uneri Measurement Device and Measurement Method
WO2017134958A1 (en) * 2016-02-05 2017-08-10 東レ株式会社 Inspection device for sheet-like objects, and inspection method for sheet-like objects
JP2018036162A (en) * 2016-08-31 2018-03-08 株式会社リコー Inspection device
CN107796829A (en) * 2016-08-31 2018-03-13 株式会社理光 Check device
CN107796829B (en) * 2016-08-31 2020-11-06 株式会社理光 Inspection apparatus

Similar Documents

Publication Publication Date Title
JP2795595B2 (en) Defect detection method for transparent plate
KR100399507B1 (en) How to recognize and evaluate defects in reflective surface coatings
US5128550A (en) Method of and an apparatus for testing large area panes for optical quality
WO2008079208A1 (en) Method of automated quantitative analysis of distortion shaped vehicle glass by reflected optical imaging
KR20010081930A (en) Wheel measuring apparatus
CA2251323A1 (en) Surface defect inspection system and method
JP3514107B2 (en) Painting defect inspection equipment
JP2000146554A (en) Method and apparatus for inspecting surface unevenness of transparent board
JP3189588B2 (en) Surface defect inspection equipment
JPH11311510A (en) Method and apparatus for inspection of very small uneven part
JPH06137845A (en) Device for inspecting uneven streak on surface of steel plate
JPH11316195A (en) Surface defect detecting device of transparent plate
JP3025946B2 (en) Method and apparatus for measuring surface roughness of object
JP2873450B2 (en) Defect inspection device using light
JPH05256630A (en) Surface irregular stripe inspecting device for steel plate
JPH11281588A (en) Surface inspecting apparatus
JPH04178545A (en) Method and apparatus for inspecting transparent band-like body
JPH0599639A (en) Inspection device for small unevenness of planar object
JPS61217708A (en) Method and apparatus for measuring surface properties
JP2801916B2 (en) Defect inspection equipment
JPH05256629A (en) Surface irregular stripe inspecting device for sheet-like object
JP2000121574A (en) Flaw inspection apparatus for steel plate
JPH07318499A (en) Surface defect detecting device
Asundi et al. Automated visual inspection of moving objects
JPH0821711A (en) Waviness detector for surface of sheet board

Legal Events

Date Code Title Description
A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20010321