JPH0613479Y2 - Particle measuring device - Google Patents

Description

[Detailed Description of the Invention] <Industrial field of application> The present invention is intended to measure the number and size of fine particulate impurities such as fine dust and bacteria suspended in ultrapure water, and to measure in blood. Regarding the fine particle measuring device for measuring the number of blood cells, etc., more specifically, the electric resistance change when the fine particles pass through the pores of the detector installed in the sample container is measured as a voltage pulse. The present invention relates to a particle measuring device using a pulse method.

<Prior Art> Explaining the principle of a particle measuring apparatus by the electric pulse method, a negative electrode and a detector having a pore are installed in a sample container, and a positive electrode and a standard solution (electrolyte solution) are placed inside the detector. ), The sample solution mixed with the electrolyte solution is placed in the sample container, and an electric current is allowed to flow between the electrodes through the electrolyte solution in the sample container and the standard solution (electrolyte solution) in the detector, When the inside of the detector is in a negative pressure state, the liquid (electrolyte solution + sample liquid) in the sample container is passed through the pores, and when the fine particles in the sample liquid pass through the pores of the detector, the space between the electrodes is Since the electric resistance changes, this change is taken out as a voltage pulse and measured.

In this type of conventional fine particle measuring apparatus, physiological saline (concentration: 15 to 20%) is used as an electrolytic solution to be mixed with a standard solution (electrolytic solution) to be placed in the detector and a sample solution.

However, when using saline as the electrolyte,
If the concentration is low, the conductivity will decrease and a stable measured value cannot be obtained, so if the concentration is increased to increase the conductivity,
With the drawback that sodium chloride will be deposited in the container or piping through which the electrolytic solution passes, or that the container or piping will easily be corroded,
When this kind of measuring device is incorporated into a semiconductor manufacturing process, there is a problem that sodium ions in an electrolytic solution (physiological saline) adversely affect the semiconductor.

<Problems to be Solved by the Invention> The present invention has been made in view of such a conventional problem, and there is a possibility that the electrolytic solution may be deposited on a container or a pipe, or may corrode the container or the pipe. In addition, there is no such problem, and even if it is incorporated into a semiconductor manufacturing process, there is no risk of adversely affecting the semiconductor, and the conductivity of the electrolyte solution used is good, and a low-concentration particle measurement device is required.

<Means for Solving Problems> A particulate matter measuring device of the present invention which achieves the above object has a detector in which a standard solution (electrolytic solution) is placed in a sample container in which the sample solution is placed. In a fine particle measuring device designed to measure and measure the change in electrical resistance as a voltage pulse when the fine particles in the sample solution pass through the pores, ammonium chloride is added to the electrolyte solution and standard solution (electrolyte solution) mixed with the sample solution. It is characterized by using it.

<Embodiment> An embodiment of the present invention will be described below with reference to the drawings.

The constituent members of the particle measuring device of the present invention are the same as those of the conventional device. That is, the sample container 1 for containing the sample liquid a, the detector 2 and the external electrode (minus electrode) 3 installed in the sample container 1, and the sample liquid supply pipe 4 for supplying the sample liquid a into the sample container 1 And an internal electrode (plus electrode) 5 installed in the detector 2 and a standard solution supply pipe 6 for supplying a standard solution (electrolytic solution) b to the inside.
And a vacuum device 7 for bringing the inside of the detector 2 into a negative pressure state, and a detection device 8 electrically connected to the external electrode 3 and the internal electrode 5. In the figure, 2a is a pore through which fine particles pass.

Thus, the present invention uses ammonium chloride having a required concentration (usually 4 to 15%) as the electrolytic solution to be mixed with the sample solution a and the standard solution (electrolytic solution) b to be put inside the detector 2. . That is, normal ammonium chloride is dissolved in water (pure water) to form 4 to 15% ammonium chloride water, and the electrolyte solution is mixed with the sample solution a and the standard solution (electrolyte solution) to be put inside the detector 2. ) B is used. These electrolytic solutions may be put in the sample container 1 or the detector 2 in a batch manner, or may be supplied in an online manner. In the illustrated embodiment, the sample solution supply pipe 4 is connected to a point of use or a tank 11 via a dialyzer 9 and a deaerator 10, and a sample solution is introduced into the dialyzer 9 from the point of use or tank 11. By passing the electrolytic solution c from the liquid tank 12 containing the electrolytic solution c having an appropriate concentration (for example, 15% ammonium chloride), the electrolytic solution c permeates and diffuses in the sample solution passing through the dialysis device 9 according to the principle of dialysis. The liquid a becomes an electrolytic solution having a required concentration, and the sample liquid a is further degassed through the degassing device 10 and directly supplied into the sample container 1 through the sample liquid supply pipe 4 as it is. is there. The dialysis device 9 is a known device having a module in which a large number of polyvinyl alcohol-based hollow fiber membranes (semipermeable membranes) are bundled and housed in a container as a main part. , And an electrolytic solution c of an appropriate concentration outside the
The electrolyte solution c is permeated and diffused into the sample solution a by the dialysis action of the hollow fiber membrane to obtain an electrolyte solution having a required concentration.

In the figure, 13 is an electrolytic solution water supply bottle for supplying the standard solution (electrolytic solution) b into the detector 2, 14 is a drain pipe for sucking out the standard solution c in the detector 2, and 15 is the inside of the sample container 1. Sample liquid a
It is a drainage pipe that overflows and discharges.

<Effects of the Invention> Since the particle measuring apparatus of the present invention uses ammonium chloride as the electrolytic solution and the standard solution (electrolytic solution) to be mixed with the sample solution, the containers and pipes through which the electrolytic solution passes can be corroded. Even if it is incorporated into the semiconductor manufacturing process, there is no fear of adversely affecting the semiconductor.

Moreover, since ammonium chloride has better conductivity than conventionally used physiological saline, a stable and stable measurement value can be obtained even when its concentration is low when it is used as an electrolytic solution (usually 15 Stable measured values cannot be obtained unless the concentration is about 20%, and ammonium chloride is 4-15%.
Stable measurement values can be obtained at moderate concentrations. ). Therefore,
It is possible to reduce the material cost and the amount of electricity used, as well as the possibility that ammonium chloride will be deposited in a container or a pipe through which the electrolytic solution passes.

Therefore, the intended purpose can be achieved.

[Brief description of drawings]

The drawing is a schematic view showing an example of the present invention, in which 1 is a sample container, 2 is a detector, 2a is a pore, a is a sample solution (sample solution + electrolytic solution), and b is a standard solution (electrolytic solution). ),

Claims (1)

[Scope of utility model registration request] 1. A detector containing a standard solution (electrolyte solution) is installed in a sample container containing a sample solution, and a change in electrical resistance is observed when fine particles in the sample solution pass through the pores of the detector. A fine particle measuring apparatus which is configured to extract and measure as a voltage pulse, wherein ammonium chloride is used as an electrolyte solution and a standard solution (electrolyte solution) to be mixed with the sample solution.