JPH06128046A - Joined material of nonoxide ceramic and method for joining the same ceramic - Google Patents

Abstract

PURPOSE:To readily and inexpensively join ceramics so as to provide defection- free ceramic having high strength and good sealing property by interposing a metallic material between plural nonoxide ceramic members and heating these components under nonoxidative atmosphere. CONSTITUTION:A metallic member is interposed between plural nonoxide ceramics for constituting a joined material and these members are heated under nonoxidative atmosphere. The above-ceramics contain excess element which participates in joining among these component elements. For example, when these ceramics are Si-SiC, these ceramics contain 2-40wt.% of the element Si which participates in joining and 60-98wt.% SiC. The metallic material consists preferably of one or more kinds of Si, Mo, Ti or W. Thereby, a compound consisting of the element which participates in joining and the metallic element is produced in the joined part to provide the objective joined material having complicate shape, hardly causing joining defect and excellent in joining strength and sealing properties.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramics joined body formed by joining ceramics members and a joining method, and more particularly to a non-oxide ceramics joined body and a non-oxide ceramics joining method.

[0002]

2. Description of the Related Art Ceramics have a high degree of heat resistance and heat insulation, regardless of whether they are oxides or non-oxides, and have electrical and electronic properties such as insulation, conductivity, magnetic and dielectric properties. Function, and also has excellent mechanical properties such as wear resistance,
It has already been used as a material for various structures and has been researched and developed. When ceramics are used as mechanical part materials and structural materials, mechanical parts and structural materials of various shapes are required, and combinations of individual parts and members are also required. As a result, it becomes necessary to bond and fix the ceramics.

Conventionally, as a method for joining such ceramics, boron oxide (B ₂ O ₃ ) known as Pyrex glass, which is a trade name of heat-resistant glass.
A method has been known in which powder or slurry of borosilicate glass containing components is applied to a joint portion of a ceramic member and the joint is performed by heating in the air or in a vacuum.

[0004]

However, in the above-mentioned joining of ceramics using borosilicate glass, there are problems that joining defects such as pores and cracks are likely to occur in the joining portion and the joining strength and sealing property are poor. In particular, in the case of an article that requires a complicated shape or the like, there are problems such as not only being impossible to manufacture, but also a problem in yield and inferior durability of the article. The present invention has been made in view of the problems of the above-described conventional techniques, and an object thereof is to easily generate a bonding defect, excellent bonding strength and sealability, and to easily and inexpensively manufacture an article having a complicated shape. It is an object of the present invention to provide a non-oxide ceramics joined body and a joining method which can be provided by

[0005]

As a result of intensive studies to solve the above-mentioned problems, the present inventor has found that a specific constituent element excessively contained in a non-oxide ceramic and a metal material used for a joint are formed. The inventors have found that the above problems can be solved by producing a compound, and have completed the present invention.

Therefore, the bonded body of the present invention is a bonded body formed by bonding non-oxide ceramics, and the non-oxide ceramics contains an excess of elements involved in bonding among the constituent elements thereof. It is characterized in that the joint part of the joined body is composed of a compound of the above-mentioned joining-related element and a metal material. Further, the bonding method of the present invention is a method of bonding, among the constituent elements, a non-oxide ceramic containing an excessive amount of an element involved in bonding, and between a plurality of ceramic members to form the bonded body, Intervening a metal material,
Next, these constituent members are heated in a non-oxidizing atmosphere to generate a compound of the above-mentioned joining-related element and a metal element in the joining portion, thereby obtaining a joined body.

[0007]

In the present invention, the non-oxide ceramics joined body is obtained by joining the members by forming a compound of the joining-related element and the metal material at the joining portion between the members. . Therefore, in the present invention, compared with the conventional joining method in which only the borosilicate glass contributes to the joining without melting the ceramic member itself,
The uniformity of the joint, the joint strength, etc. are improved, joint defects such as cracks are less likely to occur, and the sealability and joint strength are improved.

The bonded body of the present invention will be described in detail below. The non-oxide ceramics used in the bonded body of the present invention is not particularly limited, and for example, SiC, Si
₃ N _4, WC, TiC, and AlN and the like. In this case, the joining-related elements are Si, W, Ti,
Al or the like. Accordingly, the non-oxide ceramics containing excess bonding involved elements, Si-SiC, but Si ₃ N _4, or the like can be exemplified, Si-SiC is preferable in that it contains Si in the form of metal. When the non-oxide ceramics is Si-SiC, 2 to 40% by weight of metal S is added.
It preferably contains i. If the amount of metallic Si is less than 2% by weight, the bonding force is insufficient, and if it exceeds 40% by weight, the amount of metallic Si is excessive and deformation is likely to occur during joining, which is not preferable.

Examples of the metal material that forms a compound with a joining-related element include Mo, Ti and W. In the present specification, the term "metal material" includes Si and B in addition to the above elements. Shall be included. The form of the metal material is not particularly limited, and may be powdery, granular, plate-like, or the like. In the case of a plate, its thickness is 5 μm
It is preferably about 500 μm. If it is less than 5 μm, the plate is likely to be damaged during handling, and if it exceeds 300 μm, it is difficult to perform processing, which is not preferable.

Next, the joining method of the present invention will be described in detail. In the joining method of the present invention, first, the above-mentioned metal material is intervened in a portion where each ceramic member is to be joined. For example, the metal material may be held between the ceramic members. Then, the ceramic member and the metal material can be joined by heating them to a predetermined temperature in a vacuum or a non-oxidizing atmosphere.

The non-oxidizing atmosphere is not particularly limited, and examples thereof include argon, nitrogen and helium. Further, the heating temperature can be appropriately changed depending on the properties of the non-oxide ceramics and metal material to be bonded, but when Si-SiC and Si are used, the heating temperature is 140
The temperature is preferably 0 to 1600 ° C. If it is less than 1400 ° C, melting of the metal material is insufficient, and if it exceeds 1600 ° C, the material is deformed, which is not preferable. In addition, Si-S
When iC and Ti are used, 1250 to 1650 ° C
Is preferred, and when using Si-SiC and Mo,
1200-1650 degreeC is preferable.

The heating time is not particularly limited as long as it is a time sufficient for the bonding-related element and the metal material to form a compound. For example, Si-SiC and S
i takes several seconds to 30 minutes.

[0013]

The present invention will be described below with reference to the drawings, but the present invention is not limited to these embodiments. (Example 1) Si-SiC plate-shaped sintered bodies 1 and 1'containing 90% by weight of SiC and 10% by weight of Si were assembled as shown in FIG. At this time, 100 μm thick Ti
The foil 2 was inserted between the plate-shaped sintered bodies 1 and 1 ′. The obtained assembly 5 was heated to 1500 ° C. in an Ar atmosphere and left as it was for 0.1 hour. Then, the mixture was gradually cooled to room temperature to obtain a non-oxide ceramics joined body 10 as shown in FIG.

(Examples 2 and 3) Instead of Ti foil, M
The same operation as in Example 1 was performed except that the o foil (Example 2) and the W foil (Example 3) were used to obtain non-oxide ceramic bonded bodies. (Example 4) Except that Si powder was applied between the plate-shaped sintered bodies 1 and 1'instead of the Ti foil and heated to 1500 ° C.
The same operation as in Example 1 was performed to obtain a non-oxide ceramics joined body. (Examples 5 to 7) The same operation as in Example 4 except that Mo powder (Example 5), Ti powder (Example 6) and W powder (Example 7) were applied instead of the Si powder, respectively. Then, a non-oxide ceramics joined body was obtained. (Comparative Example 1) The same operation as in Example 1 was carried out except that Al ₂ O ₃ was used as the ceramic material and Ti powder was used as the metal material, and the mixture was heated to 1420 ° C. in the air atmosphere and left for 4 hours, and the oxide was used. A ceramic bonded body was obtained. (Comparative Example 2) An oxide-ceramic bonded article was obtained by performing the same operations as in Comparative Example 1 except that ZrO ₂ and Si powder were used, heated to 1600 ° C. in an argon atmosphere and left for 0.5 hour. .

(Performance Evaluation) (Bending Strength) As shown in FIG. 2, 3 mm from each non-oxide or oxide-ceramic bonding body 10 thus obtained.
Cut out the test piece 3 of × 4mm × 40mm, and
Four-point bending strength was measured according to SR1601. The results obtained are shown in Table 1.

[0016]

[Table 1]

As shown in Table 1, it can be seen that the non-oxide ceramics joined body of the present invention has excellent performance. In addition, Si and TiS generated at the joint of each joint
The melting points of i ₂ , MoSi ₂ and WSi ₂ are 14 respectively.
10 ° C, 1540 ° C, 2030 ° C and 2150 ° C. On the other hand, since the Si-SiC base material can be used up to about 1400 ° C, the non-oxide ceramic bonded body of the present invention can be applied to all fields in which Si-SiC is used as a refractory material. .

[0018]

As described above, according to the present invention,
Since a compound is generated between a specific constituent element excessively contained in the non-oxide ceramics and a metal element used for the joint, it is difficult to cause a joint defect, excellent in joint strength and sealing property, and complicated in shape. It is possible to provide a non-oxide ceramics bonded body and a bonding method that can easily and inexpensively provide an article.

[Brief description of drawings]

FIG. 1 is a perspective explanatory view showing an example of a joining method of the present invention.

FIG. 2 is a perspective explanatory view showing a method of cutting out a test piece for a bending strength test.

[Explanation of symbols]

 1, 1'Non-oxide ceramics plate-like sintered body 2 Ti foil 5 assembly 10 Ceramics bonded body

Claims (9)

[Claims] 1. A joined body formed by joining non-oxide ceramics, wherein the non-oxide ceramics excessively contains an element involved in joining among the constituent elements, and the joined portion of the joined body is A non-oxide ceramics joined body comprising a compound of the joining-related element and a metal material. 2. The bonded body according to claim 1, wherein the non-oxide ceramics is a Si-based ceramics and the joining-related element is Si. 3. The joined body according to claim 2, wherein the non-oxide ceramics is Si—SiC and the joining-related element is Si. 4. The bonded body according to claim 3, wherein the non-oxide ceramics contains 2 to 40% by weight of Si and 60 to 98% by weight of SiC. 5. The metal material is one or more materials selected from the group consisting of Si, Mo, Ti and W, and any one of claims 1 to 4 is characterized. The joined body according to. 6. A method for joining non-oxide ceramics, among constituent elements, which excessively contains an element involved in joining, wherein a metallic material is interposed between a plurality of ceramic members to form the joined body. Then, these constituent members are heated in a non-oxidizing atmosphere to generate a compound of the joining-related element and the metal element in the joining portion, thereby obtaining a joined body. How to join. 7. The joining method according to claim 6, wherein the non-oxide ceramics is Si—SiC and the joining-related element is Si. 8. The joining method according to claim 7, wherein the non-oxide ceramic contains 2 to 40% by weight of Si and 60 to 98% by weight of SiC. 9. The method according to claim 6, wherein the metal material is one or more materials selected from the group consisting of Si, Mo, Ti and W. The joining method described in.