JPS6351994B2 - - Google Patents
Info
- Publication number
- JPS6351994B2 JPS6351994B2 JP58169348A JP16934883A JPS6351994B2 JP S6351994 B2 JPS6351994 B2 JP S6351994B2 JP 58169348 A JP58169348 A JP 58169348A JP 16934883 A JP16934883 A JP 16934883A JP S6351994 B2 JPS6351994 B2 JP S6351994B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- nitride
- bonded
- ceramics
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- 229910052751 metal Inorganic materials 0.000 claims description 67
- 239000002184 metal Substances 0.000 claims description 67
- 239000000919 ceramic Substances 0.000 claims description 65
- 150000004767 nitrides Chemical class 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 26
- 239000010935 stainless steel Substances 0.000 claims description 17
- 229910001220 stainless steel Inorganic materials 0.000 claims description 17
- 239000011888 foil Substances 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 12
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 12
- 239000010936 titanium Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 238000007733 ion plating Methods 0.000 claims description 9
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 239000012298 atmosphere Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000000992 sputter etching Methods 0.000 claims description 5
- 230000003213 activating effect Effects 0.000 claims description 3
- 239000012300 argon atmosphere Substances 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 6
- 238000005422 blasting Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 description 2
- 239000011224 oxide ceramic Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- DEXFNLNNUZKHNO-UHFFFAOYSA-N 6-[3-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperidin-1-yl]-3-oxopropyl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1CCN(CC1)C(CCC1=CC2=C(NC(O2)=O)C=C1)=O DEXFNLNNUZKHNO-UHFFFAOYSA-N 0.000 description 1
- 239000005995 Aluminium silicate Substances 0.000 description 1
- 239000005749 Copper compound Substances 0.000 description 1
- 238000012369 In process control Methods 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001880 copper compounds Chemical class 0.000 description 1
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000010965 in-process control Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
- 210000002105 tongue Anatomy 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はメタライズ化された窒化物系セラミツ
クスと金属とを接合した金属製品並びにその製造
方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a metal product in which metallized nitride ceramics and metal are bonded together, and a method for manufacturing the same.
セラミツクスは耐摩耗性、耐熱性並びに硬度等
において優れたものであるが、一定の複雑な形状
でしかも正確な寸法のものを製造するのは困難で
あり、且つ、加工性もよくないだかりでなく、強
度の点においても問題がある。従つて、セラミツ
クスを機械用部品等として使用する為には、金属
に接合して使用する必要があるが、この場合十分
な接着強度が要求される。
Ceramics have excellent wear resistance, heat resistance, hardness, etc., but it is difficult to manufacture ceramics with a certain complex shape and accurate dimensions, and the processability is also poor. However, there are also problems in terms of strength. Therefore, in order to use ceramics as mechanical parts, it is necessary to bond them to metal, and in this case, sufficient adhesive strength is required.
セラミツクスの中で、アルミナ或いはジルコニ
ヤの如き酸化物系セラミツクスと銅・鉄等の金属
との接合法は可成以前から研究・開発が行われ、
多くの分野で実用化されているが、炭化物系或い
は窒化物系セラミツクス材料は金属との接着が難
かしく、特に相手金属がステンレス鋼、チタン又
はチタン合金の場合は接着が困難で今までに実用
化された例はない。 Among ceramics, research and development has been carried out on bonding methods between oxide ceramics such as alumina or zirconia and metals such as copper and iron since before their creation.
Although they have been put into practical use in many fields, carbide-based or nitride-based ceramic materials are difficult to adhere to metals, especially when the mating metal is stainless steel, titanium, or titanium alloys. There are no examples of this being done.
即ち、アルミナ、ジルコニヤ等の酸化物系セラ
ミツクスについては、その表面に硫化銅の如き銅
化合物とカオリンを粘結剤（スクリーンオイル）
と一緒にねり合わせたペースト状物を塗りつけ
1100℃位の温度に加熱して焼き付けた後、その表
面をアルコールで還元処理して金属銅に還元し、
目的とする金属（銅や鉄）と高融点ハンダで接合
する方法が確立されており、この方法を窒化けい
素セラミツクスにも応用しようとする試みがある
が、窒化けい素と金属との接合は未だ実用化され
ていない。又この方法は、前記ペースト状物の塗
布、焼き付け或いはアルコールによる還元処理
等、工業的生産においては工程管理上の問題があ
る。 In other words, for oxide ceramics such as alumina and zirconia, a copper compound such as copper sulfide and kaolin are added to the surface as a binder (screen oil).
Apply a paste made by mixing together with
After heating and baking to a temperature of about 1100℃, the surface is reduced with alcohol to reduce it to metallic copper.
A method of bonding the target metal (copper or iron) with high melting point solder has been established, and there are attempts to apply this method to silicon nitride ceramics, but the bonding between silicon nitride and metal is difficult. It has not been put into practical use yet. Furthermore, this method has problems in process control in industrial production, such as application of the paste, baking, or reduction treatment with alcohol.
本発明の目的は、金属特にステンレス鋼、チタ
ン又はチタン合金とメタライズされた窒化物系セ
ラミツクスとを接合した金属製品並びにその製造
方法を提供することである。
An object of the present invention is to provide a metal product in which a metal, particularly stainless steel, titanium or a titanium alloy, and a metallized nitride ceramic are bonded together, and a method for manufacturing the same.
本発明は、活性化した窒化物系セラミツクスの
表面に金属をイオンプレーテイングしたメタライ
ズされた窒化物系セラミツクスと、接合すべき金
属とを、窒化物系セラミツクス微粉末を分散した
金属箔により接合してなる、窒化物系セラミツク
スを接合した金属製品、及び窒化物系セラミツク
スの表面を希ガスのイオンエツチング法又はシヨ
ツトブラスト法により活性化した後金属をイオン
プレーテイングしてメタライズされた窒化物系セ
ラミツクスと接合すべき金属との間に、窒化物系
セラミツクス微粉末を分散した金属箔を介在させ
て不活性雰囲気中で加熱することにより、窒化物
系セラミツクスを接合した金属製品を製造する方
法である。
In the present invention, metallized nitride ceramics, in which metal is ion-plated on the surface of activated nitride ceramics, and the metal to be bonded are bonded using metal foil in which fine nitride ceramic powder is dispersed. metal products bonded with nitride-based ceramics, and nitride-based products that are metallized by ion-plating metal after activating the surface of nitride-based ceramics by rare gas ion etching or shot blasting. A method for manufacturing metal products with nitride ceramics bonded by interposing a metal foil containing fine nitride ceramic powder dispersed between the ceramic and the metal to be bonded and heating in an inert atmosphere. be.
本発明者（等）は、硬度、耐摩耗性等機械的性
質が最も優れているが、金属特にステンレス鋼、
チタン又はチタン合金との接着性の悪い窒化物系
セラミツクスを金属と接合する方法について鋭意
研究を重ねた結果本発明をなすに至つた。 The present inventors (and others) believe that metals, especially stainless steel, have the best mechanical properties such as hardness and wear resistance.
The present invention was developed as a result of extensive research into methods for bonding nitride ceramics, which have poor adhesion to titanium or titanium alloys, to metals.
本発明を詳しく説明すると、セラミツクス類は
硬度、耐摩耗性、耐熱性の点で優れている為、軸
スリーブ、軸受あるいは耐熱性を必要とする機械
部品としては優れているが、強度の面で問題があ
る為、これらの部品として使用する場合には、金
属に接合した形で使用するのが好ましい。しか
し、セラミツクスの中でも特に優れた性質を有し
ている窒化物系セラミツクス特に窒化けい素は金
属との接着性が悪く、機械部品として実用化され
ているものは殆んどないのが現状である。 To explain the present invention in detail, ceramics are excellent in terms of hardness, wear resistance, and heat resistance, so they are excellent for shaft sleeves, bearings, and other mechanical parts that require heat resistance. Due to this problem, when used in these parts, it is preferable to use it in a form bonded to metal. However, nitride-based ceramics, especially silicon nitride, which have particularly excellent properties among ceramics, have poor adhesion to metals, and currently very few of them have been put into practical use as mechanical parts. .
そこで色々検討した結果、窒化けい素の表面を
例えばアルゴンでイオンエツチングするか、又は
シヨツトブラストにより表面を活性化した後、チ
タン又はニツケルでイオンプレーテイングするこ
とにより、該金属の被膜を形成することができ、
即ちメタライズすることができ、このようにして
得られた、メタライズされた窒化けい素は、次に
述べる方により容易に鋼、ステンレス鋼、チタン
又はチタン合金等へ接合しうることを見出した。 As a result of various studies, we decided to form a film of the metal by ion-etching the surface of silicon nitride with argon, for example, or activating the surface with shot blasting, and then ion-plating it with titanium or nickel. It is possible,
That is, it has been found that the metallized silicon nitride thus obtained can be easily joined to steel, stainless steel, titanium, titanium alloy, etc. by the method described below.
即ち、このメタライズしたセラミツクスと接す
べき金属例えばステンレス鋼との間に、窒化物系
セラミツクス微粉末を分散させた相互に拡散し易
い合属の箔、例えばその金属成分としてはニツケ
ル又はアルミニウム等からなる薄板を介在させ、
アルゴンガス、ヘリウムガス等の不活性ガス雰囲
気中で加熱接合することにより、接合強度が大き
く、加熱・冷却の繰り返し熱サイクルや熱シヨツ
クにも十分に耐えうる製品を得ることができる。 That is, between this metallized ceramic and the metal to be in contact with it, such as stainless steel, a composite foil in which fine nitride ceramic powder is dispersed and which can easily diffuse into each other, for example, the metal component thereof is made of nickel or aluminum, etc. is used. By interposing a thin plate,
By heating and bonding in an inert gas atmosphere such as argon gas or helium gas, it is possible to obtain a product that has high bonding strength and can sufficiently withstand repeated thermal cycles of heating and cooling and thermal shock.
アルゴン等によるイオンエツチングやシヨツト
ブラストよる窒化物系セラミツクスの表面処理は
通常のイオンエツチング法又はシヨツトプラスト
法により処理を行えばよく、また金属によるイオ
ンプレーテイングも通常行われている方法で行え
ばよい。 Surface treatment of nitride ceramics by ion etching with argon, etc. or shot blasting can be carried out by the usual ion etching method or shot blasting method, and ion plating with metal can be carried out by the usual methods. .
イオンプレーテイングにより形成される金属被
膜の厚さには別段の制限はないが、この被膜は、
例えばシヨツトブラスト法により活性化した表面
を保持すると共に、金属との接合性を良くする為
のものであるので、セラミツクス表面の滑らかさ
にもよるが、0.1μｍ程度以上好ましくは0.5μｍ以
上の厚さであればよい。 There is no particular limit to the thickness of the metal film formed by ion plating, but this film is
For example, this is to maintain the surface activated by shot blasting and to improve bonding with metal, so it depends on the smoothness of the ceramic surface, but it is about 0.1 μm or more, preferably 0.5 μm or more. Any thickness is sufficient.
また、本発明の金属製品及びその製造方法で用
いられる微細な窒化物系セラミツクス微粉末を分
散した金属箔の金属としてアルミニウム又はニツ
ケルを用いる場合には、金属箔成分が加熱拡散し
た後接合域に、無数の微細なセラミツクス微粉末
粒子が分散された状態で存在し、これが冷却時の
割れの発生を有効に防止し、且つ熱シヨツクに耐
える働きをする。 In addition, when aluminum or nickel is used as the metal of the metal foil in which fine nitride ceramic fine powder is dispersed, which is used in the metal product and the manufacturing method thereof of the present invention, the metal foil components are heated and diffused into the bonding area. Countless fine ceramic powder particles are present in a dispersed state, which effectively prevents cracking during cooling and serves to withstand thermal shock.
金属箔の厚さは20〜200μｍ程度の厚さのもの
を用いればよいがこれ以外の厚さのものを用いて
もよい。 The thickness of the metal foil may be approximately 20 to 200 μm, but other thicknesses may also be used.
又、接合時の加熱は不活性雰囲気例えばアルゴ
ン中で行うが、加熱の間金属箔は、接合すべき金
属側及びセラミツクス側の両方へ相互拡散現象を
起してセラミツクスと金属を接合するので、加熱
時に加圧の必要はなく、又、金属箔の種類を適当
に選ぶことにより低温で短時間で接合することが
可能である。即ちアルミニウム箔を接合材として
使用する場合には約665℃に、ニツケル箔を使用
する場合には約900℃に加熱すればよい。又窒化
物系セラミツクス微粉末の混合割合は、20vol％
位までのものを使用しうるが接合強度等の面から
5vol％程度混合したものが好ましい。 Also, heating during bonding is performed in an inert atmosphere, such as argon, but during heating the metal foil causes a mutual diffusion phenomenon to both the metal side and the ceramic side to be bonded, so that the ceramic and metal are bonded. There is no need to apply pressure during heating, and by appropriately selecting the type of metal foil, it is possible to bond at low temperatures and in a short time. That is, if aluminum foil is used as the bonding material, it may be heated to approximately 665°C, and if nickel foil is used, it may be heated to approximately 900°C. The mixing ratio of nitride ceramic fine powder is 20vol%.
Although it is possible to use materials up to
A mixture of about 5 vol% is preferable.
本発明においては、機械的性質の優れた窒化物
系セラミツクスをステンレス鋼等に強固に接合で
きるので、ポンプ、ブロワーなどの軸受等の産業
機械部品として使用することができ、また耐食性
の接合部材を用いることによつて、海水等を取扱
うポンプ部品にも適用可能である。 In the present invention, nitride-based ceramics with excellent mechanical properties can be firmly bonded to stainless steel, etc., so it can be used as industrial machine parts such as bearings for pumps and blowers. By using it, it can also be applied to pump parts that handle seawater, etc.
次にセラミツクスを接着しにくい金属の一であ
るステンレス鋼に、窒化物系セラミツクスの代表
的なものである窒化けい素セラミツクスを接合す
る場合についての実施例を示す。 Next, an example will be shown in which silicon nitride ceramics, which is a typical nitride ceramic, is bonded to stainless steel, which is one of the metals to which ceramics are difficult to bond.
実施例 １
常圧焼結したSi3N4の表面を４×10-4torrArガ
スで10分間イオンエツチングを行つた後、10分間
Tiのイオンプレーテイング処理した。のときの
Tiのプレーテイング厚みは4μｍであつた。Example 1 The surface of Si 3 N 4 sintered under normal pressure was ion-etched for 10 minutes with 4×10 -4 torrAr gas, and then etched for 10 minutes.
Ti ion plating treatment was performed. at the time of
The plating thickness of Ti was 4 μm.
インサート材に0.3μｍのSi3N4粒子を5vol％分
散した150μｍのAl箔を用いた。接合すべき金属
にはSUS304ステンレス鋼を用い、これらを接合
すべき面で合わせ、カンタル線で固定した１気圧
のAr雰囲気中で665℃の温度で、加熱保持時間を
かえて試験を行つた。接合したセラミツクスをイ
ンストロン型試験機で引張試験し、接合力を測定
した。この結果を第１図に示す。 A 150 μm Al foil in which 5 vol% of 0.3 μm Si 3 N 4 particles were dispersed was used as the insert material. SUS304 stainless steel was used as the metal to be joined, and the surfaces to be joined were joined together, and tests were conducted at a temperature of 665°C in an Ar atmosphere of 1 atm, fixed with a Kanthal wire, while changing the heating holding time. The bonded ceramics were subjected to a tensile test using an Instron type testing machine, and the bonding force was measured. The results are shown in FIG.
第１図は、セラミツクスをステンレス鋼に接合
する場合の加熱処理時間と接合力の関係を示すも
ので、線１は上記実施例により接合する場合を示
し、２の斜線部は従来の接着法による場合を示
す。第１図からわかるように、本願発明によると
きは、短時間の加熱で従来法による場合よりも遥
かに強力な接合力を得ることができる。又、アル
ミ箔を用いる場合には、加熱保持時間が長くなる
と接合力が小さくなるので、２〜10分の如き短時
間の加熱が好ましい。 Figure 1 shows the relationship between heat treatment time and bonding force when ceramics are bonded to stainless steel. Line 1 indicates bonding according to the above example, and the shaded area 2 indicates bonding using the conventional bonding method. Indicate the case. As can be seen from FIG. 1, when using the present invention, a much stronger bonding force can be obtained with short heating time than when using the conventional method. Furthermore, when aluminum foil is used, heating for a short time such as 2 to 10 minutes is preferable, since the longer the heating and holding time is, the lower the bonding force will be.
実施例 ２
接合剤として0.3μｍの窒化けい素微粒子5vol％
を分散した厚さ50μｍのニツケル箔を用い、960
℃で５分間加熱した以外は実施例１と同様にして
窒化けい素セラミツクスをステンレス鋼
（SUS304）に接合した。接合力は800Kgｆ／cm2で
あつた。Example 2 5 vol% of 0.3 μm silicon nitride fine particles as a bonding agent
Using nickel foil with a thickness of 50 μm dispersed with 960
Silicon nitride ceramics were joined to stainless steel (SUS304) in the same manner as in Example 1, except that heating was performed at .degree. C. for 5 minutes. The bonding force was 800Kgf/cm 2 .
第２図に本発明の接合方法を用いて軸受を製造
した例を示す。図中１２はステンレス鋼製軸受部
材を、１１は窒化物系セラミツクス片を、１３は
該セラミツクス片とステンレス鋼の接合部（接着
部）を、１４は摺動面を示す。 FIG. 2 shows an example of a bearing manufactured using the joining method of the present invention. In the figure, 12 is a stainless steel bearing member, 11 is a nitride ceramic piece, 13 is a joint (adhesive part) between the ceramic piece and stainless steel, and 14 is a sliding surface.
なお、比較試験としてアルミニウム箔又はニツ
ケル箔を用いて、上記各実施例と同様に窒化けい
素セラミツクスをステンレス鋼に接合した所、実
施例１及び２と同様な接合強度が得られたが、繰
り返し、長時間にわたつて使用している中に、一
部のものに小さなクラツクの発生がみられた。 As a comparative test, silicon nitride ceramics were bonded to stainless steel using aluminum foil or nickel foil in the same manner as in each of the above examples, and the same bonding strength as in Examples 1 and 2 was obtained. After using it for a long time, some of them developed small cracks.
又、ステンレス鋼の代りにチタン及びチタン合
金を用いた場合にも、実施例１及び２と同様な結
果が得られた。 Further, similar results to Examples 1 and 2 were obtained when titanium and titanium alloy were used instead of stainless steel.
本発明によるときは、セラミツクスの小片を金
属に接合した場合でも接合力が大きいので、十分
な耐久性が得られる。 According to the present invention, even when a small piece of ceramic is bonded to metal, the bonding force is large, so sufficient durability can be obtained.
軸受の外、ケーシングの舌部、ポンプのインペ
ラの吐出部など苛酷な使用環境下におかれる産業
機械部品に、本発明方法を適用したセラミツクス
を接合する際にも十分な耐久性が得られることが
わかつた。 Sufficient durability can be obtained even when ceramics to which the method of the present invention is applied are bonded to industrial machine parts that are used in harsh environments such as bearings, tongues of casings, and discharge parts of pump impellers. I understood.
第１図は実施例１の方法で窒化けい素をステン
レス鋼に接合する場合の加熱保持時間と接合力の
関係を示し、第２図は本発明を軸受に適用した場
合の図を示す。
１……実施例１における加熱保持時間と接合力
の関係を示す線、１１……窒化物系セラミツクス
片、１２……軸受部材、１４……摺動面。
FIG. 1 shows the relationship between heating holding time and bonding force when silicon nitride is bonded to stainless steel by the method of Example 1, and FIG. 2 shows a diagram when the present invention is applied to a bearing. DESCRIPTION OF SYMBOLS 1...A line showing the relationship between heating holding time and bonding force in Example 1, 11...Nitride ceramic piece, 12...Bearing member, 14...Sliding surface.
Claims (1)
属をイオンプレーテイングしたメタライズされた
窒化物系セラミツクスと、接合すべき金属とを、
窒化物系セラミツクス微粉末を分散した金属箔に
より接合してなる、窒化物系セラミツクスを接合
した金属製品。 ２ イオンプレーテイング用金属がチタン又はニ
ツケルである特許請求の範囲第１項記載の窒化物
系セラミツクスを接合した金属製品。 ３ 接合すべき金属がステンレス鋼である特許請
求の範囲第１項、又は第２項記載の窒化物系セラ
ミツクスを接合した金属製品。 ４ 接合すべき金属がチタン又はチタン合金であ
る特許請求の範囲第１項又は第３項記載の窒化物
系セラミツクスを接合した金属製品。 ５ 窒化物系セラミツクスが窒化けい素である特
許請求の範囲第１項乃至４項の何れかに記載の窒
化物系セラミツクスを接合した金属製品。 ６ 窒化物系セラミツクスの表面を希ガスのイオ
ンエツチング法或いはシヨツト・プラスト法によ
り活性化した後、金属をイオンプレーテイングし
て得られたメタライズされた窒化物系セラミツク
スと、接合すべき金属との間に、窒化物系セラミ
ツクスの微粉末を分散した金属箔を介在させ、不
活性雰囲気中で加熱することを特徴とする窒化物
系セラミツクスを接合した金属製品の製造方法。 ７ 金属を0.5μｍ以上の厚さにイオンプレーテイ
ングする特許請求の範囲第６項記載の窒化物系セ
ラミツクスを接合した金属製品の製造方法。 ８ イオンプレーテイング用金属がニツケル又は
チタンである特許請求の範囲第６項又は第７項記
載の窒化物系セラミツクスを接合した金属製品の
製造方法。 ９ 窒化物系セラミツクス微粉末を分散した金属
箔が、窒化物系セラミツクス微粉末を分散したア
ルミニウム箔又はニツケル箔である特許請求の範
囲第６項、第７項又は第８項記載の窒化物系セラ
ミツクスを接合した金属製品の製造方法。 １０ 接合すべき金属がステンレス鋼である特許
請求の範囲第６項、第７項、第８項、又は第９項
記載の窒化物系セラミツクスを接合した金属製品
の製造方法。 １１ 接合すべき金属がチタン又はチタン合金で
ある特許請求の範囲第６項、第７項、第８項又は
第９項記載の窒化物系セラミツクスを接合した金
属製品の製造方法。 １２ 不活性雰囲気がアルゴンの雰囲気である特
許請求の範囲第６項乃至第１１項の何れかに記載
の窒化物系セラミツクスを接合した金属製品の製
造方法。 １３ 窒化物系セラミツクスが窒化けい素である
特許請求の範囲第６項乃至第１２項の何れかに記
載の窒化物系セラミツクスを接合した金属製品の
製造方法。[Claims] 1. A metallized nitride ceramic in which a metal is ion-plated on the surface of an activated nitride ceramic and a metal to be joined,
Metal products bonded with nitride ceramics, which are bonded using metal foil in which fine nitride ceramic powder is dispersed. 2. A metal product bonded with nitride ceramics according to claim 1, wherein the ion plating metal is titanium or nickel. 3. A metal product bonded with nitride ceramics according to claim 1 or 2, wherein the metal to be bonded is stainless steel. 4. A metal product bonded with nitride ceramics according to claim 1 or 3, wherein the metal to be bonded is titanium or a titanium alloy. 5. A metal product bonded with nitride ceramics according to any one of claims 1 to 4, wherein the nitride ceramics are silicon nitride. 6 After activating the surface of the nitride-based ceramics by rare gas ion etching method or shot-plast method, the metallized nitride-based ceramics obtained by ion plating the metal and the metal to be bonded are bonded. A method for manufacturing a metal product bonded with nitride-based ceramics, characterized by interposing a metal foil in which fine powder of nitride-based ceramics is dispersed between the products and heating in an inert atmosphere. 7. A method for manufacturing a metal product bonded with nitride ceramics according to claim 6, which comprises ion plating the metal to a thickness of 0.5 μm or more. 8. A method for manufacturing a metal product bonded with nitride ceramics according to claim 6 or 7, wherein the metal for ion plating is nickel or titanium. 9. The nitride-based ceramic according to claim 6, 7, or 8, wherein the metal foil in which the nitride-based ceramic fine powder is dispersed is an aluminum foil or nickel foil in which the nitride-based ceramic fine powder is dispersed. A method for manufacturing metal products bonded with ceramics. 10. A method for manufacturing a metal product bonded with nitride ceramics according to claim 6, 7, 8, or 9, wherein the metal to be bonded is stainless steel. 11. A method for manufacturing a metal product bonded with nitride ceramics according to claim 6, 7, 8, or 9, wherein the metal to be bonded is titanium or a titanium alloy. 12. A method for manufacturing a metal product bonded with nitride ceramics according to any one of claims 6 to 11, wherein the inert atmosphere is an argon atmosphere. 13. A method for manufacturing a metal product bonded with nitride ceramics according to any one of claims 6 to 12, wherein the nitride ceramics are silicon nitride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16934883A JPS6065773A (en) | 1983-09-16 | 1983-09-16 | Metal products bonded with nitride ceramics and manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16934883A JPS6065773A (en) | 1983-09-16 | 1983-09-16 | Metal products bonded with nitride ceramics and manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6065773A JPS6065773A (en) | 1985-04-15 |
| JPS6351994B2 true JPS6351994B2 (en) | 1988-10-17 |
Family
ID=15884895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16934883A Granted JPS6065773A (en) | 1983-09-16 | 1983-09-16 | Metal products bonded with nitride ceramics and manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6065773A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6077178A (en) * | 1983-09-30 | 1985-05-01 | 株式会社東芝 | Ceramic bonded body and manufacture |
| JPS6197175A (en) * | 1984-10-17 | 1986-05-15 | 住友電気工業株式会社 | Bonded body of non-oxide ceramic and metal and manufacture |
| JPS61279651A (en) * | 1985-06-04 | 1986-12-10 | Daido Steel Co Ltd | Joining material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918184A (en) * | 1982-07-19 | 1984-01-30 | 住友電気工業株式会社 | Ceramic metallization |
-
1983
- 1983-09-16 JP JP16934883A patent/JPS6065773A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918184A (en) * | 1982-07-19 | 1984-01-30 | 住友電気工業株式会社 | Ceramic metallization |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6065773A (en) | 1985-04-15 |
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