JPH06124428A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPH06124428A JPH06124428A JP27155392A JP27155392A JPH06124428A JP H06124428 A JPH06124428 A JP H06124428A JP 27155392 A JP27155392 A JP 27155392A JP 27155392 A JP27155392 A JP 27155392A JP H06124428 A JPH06124428 A JP H06124428A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- medium
- recording medium
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Thin Magnetic Films (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は磁気記録媒体に関し、特
にハード磁気デイスク用の長手薄膜媒体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording medium, and more particularly to a longitudinal thin film medium for hard magnetic disks.
【0002】[0002]
【従来の技術】ハード磁気デイスク用の高密度記録媒体
として、塗布媒体に代わりスパッタ法による金属薄膜媒
体が現在主流となってきている。2. Description of the Related Art As a high density recording medium for a hard magnetic disk, a metal thin film medium by a sputtering method is now predominant instead of a coating medium.
【0003】この薄膜媒体は高密度記録を実現しるた
め、高出力、高記録密度特性等が要求されている。これ
らの特性を向上させるには媒体の磁気特性で保持力、角
形比が大きく、さらにデイスクの円周方向への異方性も
大きい必要がある。In order to realize high density recording, this thin film medium is required to have high output and high recording density characteristics. In order to improve these characteristics, it is necessary that the coercive force and the squareness of the medium are large and the disk anisotropy in the circumferential direction is large.
【0004】そこで上記のような良好な特性を得るた
め、デイスク円周方向にテクスチャ溝をつけたNiP/
Al基板を用い、下地膜としてCr膜を形成し、次に磁
性膜としてCoNiCr膜またはCoCrTa膜を形成
する磁気記録媒体が提案されている(電子情報通信学会
技術研究報告、CPM88−91およびCPM88−9
2、1988年)。Therefore, in order to obtain the above-mentioned good characteristics, NiP / having a texture groove in the disk circumferential direction is used.
A magnetic recording medium in which a Cr film is formed as an underlayer and then a CoNiCr film or CoCrTa film is formed as a magnetic film using an Al substrate has been proposed (Technical Research Report of the Institute of Electronics, Information and Communication Engineers, CPM88-91 and CPM88-). 9
2, 1988).
【0005】[0005]
【発明が解決しようとする課題】上述した従来の磁気記
録媒体は、スパッタ法による薄膜媒体作製技術において
媒体の保磁力、角形比、円周方向への異方性は良好なレ
ベルにあるが、更に超高記録密度の実現のためにそれら
を改善する必要がある。The above-described conventional magnetic recording medium has a good level of coercive force, squareness ratio, and anisotropy in the circumferential direction in the thin film medium manufacturing technique by the sputtering method. Further, it is necessary to improve them in order to realize ultra-high recording density.
【0006】本発明の目的は、更に超高記録密度実現の
ため特に媒体の保磁力を改善した磁気記録媒体を提供す
ることにある。Another object of the present invention is to provide a magnetic recording medium in which the coercive force of the medium is particularly improved in order to realize an ultrahigh recording density.
【0007】[0007]
【課題を解決するための手段】第1の発明の磁気記録媒
体は、基板上にCrの下地膜とCo系合金膜の磁性膜と
からなる長手薄膜媒体を有する磁気記録媒体において、
前記磁性膜がCoCrTa合金膜に第4元素としてPd
を添加したことを特徴としている。A magnetic recording medium according to a first aspect of the present invention is a magnetic recording medium having a longitudinal thin film medium consisting of a Cr undercoat film and a Co-based alloy film magnetic film on a substrate,
The magnetic film is a CoCrTa alloy film containing Pd as a fourth element.
Is added.
【0008】また、第2の発明の磁気記録媒体は、第1
の発明においてPdの添加量が1at%以上8at%以
下であることを特徴としている。The magnetic recording medium of the second invention is the first
The invention is characterized in that the added amount of Pd is 1 at% or more and 8 at% or less.
【0009】[0009]
【実施例】次に、本発明の実施例について図面を参照し
て説明する。Embodiments of the present invention will now be described with reference to the drawings.
【0010】本実施例の磁気記録媒体の成膜は、RFマ
グネトロン方式のスパッタ装置にて行なった。Film formation on the magnetic recording medium of this example was carried out by an RF magnetron type sputtering device.
【0011】ターゲットは下地膜用として99.9%の
Crターゲット、磁性膜用としてCoCrTa(12a
t%Cr,2at%Ta)合金ターゲット上にPdペレ
ットを置く複合ターゲットを用いた。The target is a 99.9% Cr target for the base film and CoCrTa (12a) for the magnetic film.
A composite target in which Pd pellets were placed on a (t% Cr, 2at% Ta) alloy target was used.
【0012】また、基板はテクスチャ溝つき(表面粗さ
Rmax=400オングストローム)NiP/Al基板
を用いた。The substrate used was a NiP / Al substrate with textured grooves (surface roughness Rmax = 400 angstrom).
【0013】まず、本実施例のスパッタ条件を表1に示
す。First, Table 1 shows the sputtering conditions of this embodiment.
【0014】[0014]
【表1】 [Table 1]
【0015】ここで、磁性膜でPdの添加量はCoCr
Ta合金ターゲット上に置くPdペレットの個数により
変化させた。Here, the amount of Pd added in the magnetic film is CoCr.
It was changed depending on the number of Pd pellets placed on the Ta alloy target.
【0016】このようにして作製した種々のPd組成の
CoCrTaPd/Cr媒体についてVSMにより磁気
特性を測定した。その結果を図1に示す。なお、組成は
EPMAにより分析を行なった。The magnetic characteristics of the CoCrTaPd / Cr media having various Pd compositions thus produced were measured by VSM. The result is shown in FIG. The composition was analyzed by EPMA.
【0017】図1に示すように、本実施例のPd添加媒
体(但し、Pdの添加量が1at%以上8at%以下)
は、Pd添加なしの従来媒体と比較して保磁力が改善さ
れていることがわかる。As shown in FIG. 1, the Pd-added medium of the present embodiment (however, the amount of Pd added is 1 at% or more and 8 at% or less).
Indicates that the coercive force is improved as compared with the conventional medium in which Pd is not added.
【0018】次に、本実施例の記録再生特性について述
べる。Next, the recording / reproducing characteristics of this embodiment will be described.
【0019】サンプルとした媒体はPd添加量は4at
%とし、比較のためPd添加なしの従来媒体も作製し
た。なお、これら記録再生用の媒体は、CoCrTaP
d成膜後に保護膜として300オングストローム厚のカ
ーボンを成膜した。The medium used as a sample had a Pd addition amount of 4 at
%, A conventional medium without Pd addition was also prepared for comparison. These recording / reproducing media are CoCrTaP.
d After forming the film, a carbon film having a thickness of 300 Å was formed as a protective film.
【0020】表2に磁気特性の評価結果を、図2に記録
再生特性の評価結果を示す。Table 2 shows the evaluation results of the magnetic characteristics, and FIG. 2 shows the evaluation results of the recording / reproducing characteristics.
【0021】[0021]
【表2】 [Table 2]
【0022】表2において、Hc1 は磁気デイスクの円
周方向の保磁力成分を、Hc2 は磁気デイスクの半径方
向の保磁力成分を示し、Sは角形比を示す。In Table 2, Hc 1 represents the coercive force component in the circumferential direction of the magnetic disk, Hc 2 represents the coercive force component in the radial direction of the magnetic disk, and S represents the squareness ratio.
【0023】図2は再生出力(V)の記録密度(D)依
存性を示している。FIG. 2 shows the dependence of the reproduction output (V) on the recording density (D).
【0024】これらより、本実施例の媒体は従来媒体と
比較して既に述べた通り磁気特性で保磁力が高められ、
それにより記録再生特性で再生電圧および記録密度が改
善されていることがわかる。From the above, the medium of the present embodiment has a higher coercive force due to the magnetic characteristics as described above in comparison with the conventional medium.
As a result, it can be seen that the reproducing voltage and recording density are improved in the recording / reproducing characteristics.
【0025】[0025]
【発明の効果】以上説明したように、本発明の磁気記録
媒体は、CoCrTa膜に1〜8at%のPdを添加す
ることにより、従来媒体と比較して保磁力が改善され、
再生出力、記録密度を大幅に改善できるという効果を有
する。As described above, in the magnetic recording medium of the present invention, the coercive force is improved as compared with the conventional medium by adding 1 to 8 at% of Pd to the CoCrTa film.
This has the effect of significantly improving the reproduction output and recording density.
【図1】本発明の磁気記録媒体の一実施例の保磁力のP
d添加量依存性を示す特性図である。FIG. 1 is a graph showing a coercive force P of an embodiment of a magnetic recording medium of the present invention.
It is a characteristic view which shows d addition amount dependence.
【図2】本発明の磁気記録媒体の一実施例と従来媒体と
の再生出力と記録密度依存性を示す特性図である。FIG. 2 is a characteristic diagram showing the reproduction output and recording density dependency of an example of the magnetic recording medium of the present invention and a conventional medium.
1 本実施例の媒体 2 従来媒体 1 Medium of this embodiment 2 Conventional medium
Claims (2)
磁性膜とからなる長手薄膜媒体を有する磁気記録媒体に
おいて、前記磁性膜がCoCrTa合金膜に第4元素と
してPdを添加したことを特徴とする磁気記録媒体。1. A magnetic recording medium having a longitudinal thin film medium composed of an underlayer of Cr and a magnetic film of a Co-based alloy film on a substrate, wherein the magnetic film is a CoCrTa alloy film to which Pd is added as a fourth element. A magnetic recording medium characterized by:
下であることを特徴とする請求項1記載の磁気記録媒
体。2. The magnetic recording medium according to claim 1, wherein the added amount of Pd is 1 at% or more and 8 at% or less.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4271553A JP2990975B2 (en) | 1992-10-09 | 1992-10-09 | Magnetic recording media |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4271553A JP2990975B2 (en) | 1992-10-09 | 1992-10-09 | Magnetic recording media |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH06124428A true JPH06124428A (en) | 1994-05-06 |
JP2990975B2 JP2990975B2 (en) | 1999-12-13 |
Family
ID=17501678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4271553A Expired - Fee Related JP2990975B2 (en) | 1992-10-09 | 1992-10-09 | Magnetic recording media |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2990975B2 (en) |
-
1992
- 1992-10-09 JP JP4271553A patent/JP2990975B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2990975B2 (en) | 1999-12-13 |
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