JPH0612361Y2 - レジスト処理装置用気液分離型熱交換器 - Google Patents
レジスト処理装置用気液分離型熱交換器Info
- Publication number
- JPH0612361Y2 JPH0612361Y2 JP1987044243U JP4424387U JPH0612361Y2 JP H0612361 Y2 JPH0612361 Y2 JP H0612361Y2 JP 1987044243 U JP1987044243 U JP 1987044243U JP 4424387 U JP4424387 U JP 4424387U JP H0612361 Y2 JPH0612361 Y2 JP H0612361Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- liquid
- mixed fluid
- heat exchanger
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title claims description 67
- 238000012545 processing Methods 0.000 title claims description 41
- 238000000926 separation method Methods 0.000 title claims description 10
- 239000012530 fluid Substances 0.000 claims description 29
- 238000007599 discharging Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003449 preventive effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 24
- 238000001816 cooling Methods 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 8
- 239000000110 cooling liquid Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005587 bubbling Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Landscapes
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987044243U JPH0612361Y2 (ja) | 1987-03-27 | 1987-03-27 | レジスト処理装置用気液分離型熱交換器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987044243U JPH0612361Y2 (ja) | 1987-03-27 | 1987-03-27 | レジスト処理装置用気液分離型熱交換器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63154964U JPS63154964U (enrdf_load_stackoverflow) | 1988-10-12 |
| JPH0612361Y2 true JPH0612361Y2 (ja) | 1994-03-30 |
Family
ID=30861865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987044243U Expired - Lifetime JPH0612361Y2 (ja) | 1987-03-27 | 1987-03-27 | レジスト処理装置用気液分離型熱交換器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612361Y2 (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60132588U (ja) * | 1984-02-10 | 1985-09-04 | オリオン機械株式会社 | 循環式液体冷却機の熱交換器のエア−抜き装置 |
-
1987
- 1987-03-27 JP JP1987044243U patent/JPH0612361Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63154964U (enrdf_load_stackoverflow) | 1988-10-12 |
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