JPH06100985A - Fe-ni-co low thermal expansion alloy - Google Patents
Fe-ni-co low thermal expansion alloyInfo
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- JPH06100985A JPH06100985A JP27820692A JP27820692A JPH06100985A JP H06100985 A JPH06100985 A JP H06100985A JP 27820692 A JP27820692 A JP 27820692A JP 27820692 A JP27820692 A JP 27820692A JP H06100985 A JPH06100985 A JP H06100985A
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、精密機器用構造材料
等に使用されるＦｅ−Ｎｉ−Ｃｏ系合金材料に係り、Ｎ
ｉとＣｏとの含有量を極めて狭い特定範囲とすることに
より、その３０℃〜１００℃の熱膨張係数を従来の所謂
スーパーインバー合金の熱膨張係数と同等となし、かつ
３０℃〜３００℃の熱膨張係数を該従来合金に比べて著
しく小さくしたＦｅ−Ｎｉ−Ｃｏ系低熱膨張合金に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe-Ni-Co alloy material used as a structural material for precision equipment and the like.
By setting the contents of i and Co to a very narrow specific range, the coefficient of thermal expansion of 30 ° C to 100 ° C is made equal to that of the conventional so-called super Invar alloy, and the coefficient of thermal expansion of 30 ° C to 300 ° C. The present invention relates to a Fe—Ni—Co-based low thermal expansion alloy having a coefficient of thermal expansion significantly smaller than that of the conventional alloy.
【０００２】[0002]
【従来の技術】従来、精密機器用構造材料等、温度変化
に対する寸法変化を嫌う使用条件下で用いられる金属材
料としては、所謂スーパーインバー合金と呼ばれる公称
組成３１ｗｔ％Ｎｉ−５ｗｔ％Ｃｏ−Ｆｅ合金が使用さ
れている。この３１ｗｔ％Ｎｉ−５ｗｔ％Ｃｏ−Ｆｅ合
金の平均熱膨張係数（３０〜１００℃）は、１×１０-6
／℃以下と極めて小さい。2. Description of the Related Art Conventionally, as a metal material used under a use condition in which a dimensional change due to a temperature change is disliked such as a structural material for precision equipment, a so-called Super Invar alloy having a nominal composition of 31 wt% Ni-5 wt% Co-Fe alloy is used. Is used. The average thermal expansion coefficient (30 to 100 ° C.) of this 31 wt% Ni-5 wt% Co-Fe alloy is 1 × 10 −6.
/ ° C or less, which is extremely small.
【０００３】[0003]
【発明が解決しようとする課題】しかし、３１ｗｔ％Ｎ
ｉ−５ｗｔ％Ｃｏ−Ｆｅ合金は、図２のＮｏ．１０の曲
線に示す如く、約１５０℃を超えた高温側では熱膨張曲
線が急激に立ち上がり、その３０〜２００℃における平
均熱膨張係数は約２．５×１０-6℃であり、３０〜３０
０℃における平均熱膨張係数が約５．７×１０-6℃と非
常に大きな熱膨張特性を示すため、かかる高温下での使
用は不可能であった。[Problems to be Solved by the Invention] However, 31 wt% N
The i-5 wt% Co-Fe alloy is No. 1 in FIG. As shown by the curve 10, the thermal expansion curve rises sharply on the high temperature side above about 150 ° C., and the average coefficient of thermal expansion at 30 to 200 ° C. is about 2.5 × 10 −6 ° C.
Since the average coefficient of thermal expansion at 0 ° C. is about 5.7 × 10 −6 ° C., which is a very large coefficient of thermal expansion, it cannot be used at such a high temperature.
【０００４】近年、種々産業での自動制御化が進み、精
密機器を１５０℃を超えた高温域で使用する要請が強く
なっているが、所謂スーパーインバー合金では高温域で
の熱膨張が大きく使用できないため、これに代わる低熱
膨張金属材料が求められている。In recent years, automatic control has progressed in various industries, and there is a strong demand for precision equipment to be used in a high temperature range exceeding 150 ° C. However, a so-called Super Invar alloy has a large thermal expansion in a high temperature range. Therefore, there is a demand for an alternative low thermal expansion metal material.
【０００５】この発明は、高温域で精密機器用構造材料
に使用されるＦｅ−Ｎｉ−Ｃｏ系合金材料の上述の問題
点に鑑み、所謂スーパーインバー合金と同等の扱いが可
能で、かつ１５０℃以上の使用環境温度によっても熱膨
張係数が変化せず、極めて小さな熱膨張係数を有するＦ
ｅ−Ｎｉ−Ｃｏ系低熱膨張合金の提供を目的としてい
る。In view of the above-mentioned problems of the Fe-Ni-Co type alloy material used as a structural material for precision equipment in a high temperature range, the present invention can be handled in the same manner as a so-called Super Invar alloy and is 150 ° C. The thermal expansion coefficient does not change even with the above operating environment temperature, and has an extremely small thermal expansion coefficient.
It is intended to provide an e-Ni-Co-based low thermal expansion alloy.
【０００６】[0006]
【課題を解決するための手段】発明者は、Ｆｅ−Ｎｉ−
Ｃｏ系合金の低熱膨張化と同時に高温域での熱膨張係数
が変化しない組成、特にＮｉ及びＣｏの含有量を種々検
討の結果、極めて限られた成分範囲でＮｉとＣｏの総量
を特定範囲内とすることにより、３０℃〜１００℃の熱
膨張係数が従来の所謂スーパーインバー合金の熱膨張係
数と同等であり、かつ３０℃〜３００℃の熱膨張係数を
該従来合金に比べて著しく小さくできること知見し、こ
の発明を完成した。The inventor has found that Fe-Ni-
As a result of various studies on the composition that does not change the thermal expansion coefficient in the high temperature region at the same time as the low thermal expansion of the Co-based alloy, especially the contents of Ni and Co, the total amount of Ni and Co is within the specified range in an extremely limited composition range. By this, the coefficient of thermal expansion of 30 ° C. to 100 ° C. is equivalent to the coefficient of thermal expansion of the conventional so-called Super Invar alloy, and the coefficient of thermal expansion of 30 ° C. to 300 ° C. can be made significantly smaller than that of the conventional alloy. They found out and completed this invention.
【０００７】すなわち、この発明は、Ｎｉ ３１．５〜
３４ｗｔ％、Ｃｏ ６〜８．５ｗｔ％、かつ３８．５≦
Ｎｉ＋Ｃｏ≦４０．５ｗｔ％を満足し、残部Ｆｅ及び不
可避的不純物元素からなり、３０〜３００℃の平均熱膨
張係数が２×１０-6／℃以下で熱膨張の変移点が２５０
℃以上であり、かつγ→α′変態温度が−５０℃以下で
あることを特徴とするＦｅ−Ｎｉ−Ｃｏ系低熱膨張合金
である。That is, the present invention relates to Ni 31.5-
34 wt%, Co 6 to 8.5 wt%, and 38.5 ≦
Ni + Co ≦ 40.5 wt% is satisfied, the balance is Fe and unavoidable impurity elements, the average thermal expansion coefficient at 30 to 300 ° C. is 2 × 10 −6 / ° C. or less, and the thermal expansion transition point is 250.
The Fe-Ni-Co-based low thermal expansion alloy is characterized in that the temperature is ℃ or higher and the γ → α 'transformation temperature is -50 ° C or lower.
【０００８】組成の限定理由 Ｎｉは、本系組成基本成分であり、３１．５ｗｔ％未満
ではγ→α′変態温度が−５０℃以上となり、γ→α′
変態を起こすと熱膨張が急激に増大し好ましくなく、ま
た３４ｗｔ％を超えると熱膨張が大きくなるため、３
１．５〜３４ｗｔ％の範囲とする。Reason for limiting composition Ni is a basic component of the present composition, and if it is less than 31.5 wt%, the γ → α 'transformation temperature becomes -50 ° C or higher, and γ → α'.
When transformation occurs, the thermal expansion rapidly increases, which is not preferable, and when it exceeds 34 wt%, the thermal expansion increases, so 3
The range is 1.5 to 34 wt%.
【０００９】Ｃｏは、本系組成基本成分であり、６ｗｔ
％未満では熱膨張の変移点が２５０℃未満となると同時
に変移点を超える温度での熱膨張が大きくなり、また、
８．５ｗｔ％を超えると熱膨張が大きくなるため、６〜
８．５ｗｔ％の範囲とする。Co is a basic component of the present composition and is 6 wt.
If it is less than%, the thermal expansion transition point becomes less than 250 ° C., and at the same time the thermal expansion at a temperature exceeding the transition point becomes large.
If it exceeds 8.5 wt%, the thermal expansion becomes large, so 6-
The range is 8.5 wt%.
【００１０】この発明の特徴であるＮｉとＣｏの総量規
制は、図１に示す如く、Ｎｉ＋Ｃｏが３８．５ｗｔ％未
満では熱膨張の変移点が２５０℃未満となるとともに変
移点を超える温度での熱膨張が大きくなり、さらに４
０．５ｗｔ％を超えると熱膨張が大きくなるため、Ｎｉ
＋Ｃｏは３８．５〜４０．５ｗｔ％の範囲とする。As shown in FIG. 1, the regulation of the total amount of Ni and Co, which is a feature of the present invention, is such that when Ni + Co is less than 38.5 wt%, the transition point of thermal expansion becomes less than 250 ° C. and the temperature exceeds the transition point. The thermal expansion increases, and 4
If it exceeds 0.5 wt%, the thermal expansion becomes large, so Ni
+ Co is in the range of 38.5 to 40.5 wt%.
【００１１】添加元素は特に限定しないが、Ｃは、０，
０２ｗｔ％を越えると酸洗処理時にスマットが発生し易
く、またガラス封着時に発泡しやすくなるため、０．０
２ｗｔ％以下が望ましい。Ｓｉは、０．２５ｗｔ％を越
えると酸化処理を行う場合、内部粒界酸化が激しくな
り、また非金属介在物が多くなり、材料の折曲げ性が低
下するため、０．２５ｗｔ％以下が望ましい。Ｍｎは、
０．５ｗｔ％を越えると非金属介在物が多くなり、材料
の折曲げ性が低下するため、０．５ｗｔ％以下が望まし
い。さらに、Ｆｅは、本系組成基本成分であり、Ｎｉや
Ｃｏ等の含有残余を占める、The additive element is not particularly limited, but C is 0,
If it exceeds 02 wt%, smut is likely to occur during pickling treatment and foaming is likely to occur during glass sealing, so 0.0
2 wt% or less is desirable. When Si is more than 0.25 wt%, internal grain boundary oxidation becomes severe, non-metallic inclusions increase, and the bending property of the material decreases, so 0.25 wt% or less is desirable. . Mn is
If it exceeds 0.5 wt%, the amount of non-metallic inclusions increases and the bendability of the material decreases, so 0.5 wt% or less is desirable. Further, Fe is a basic component of this system composition, and accounts for the remaining content of Ni, Co, etc.,
【００１２】この発明によるＦｅ−Ｎｉ−Ｃｏ系低熱膨
張合金は、３０〜３００℃の平均熱膨張係数が２×１０
-6／℃以下であることを特徴とするが、１５０℃を超え
た高温域で精密機器などを使用可能にするため３０〜３
５０℃の平均熱膨張係数を特定する必要があり、平均熱
膨張係数が２×１０-6／℃を越えると熱膨張による寸法
変化が精密機器用構造材料として許容される寸法変化よ
り大きくなりすぎるため、３０〜３００℃の平均熱膨張
係数を２×１０-6／℃以下に限定する。The Fe-Ni-Co low thermal expansion alloy according to the present invention has an average thermal expansion coefficient of 2 x 10 at 30 to 300 ° C.
It is characterized in that it is -6 / ° C or less, but in order to enable precision equipment to be used in a high temperature range of over 150 ° C, it is 30 to 3
It is necessary to specify the average coefficient of thermal expansion at 50 ° C, and if the average coefficient of thermal expansion exceeds 2 × 10 -6 / ° C, the dimensional change due to thermal expansion becomes too large than the dimensional change allowed as a structural material for precision equipment. Therefore, the average coefficient of thermal expansion at 30 to 300 ° C. is limited to 2 × 10 −6 / ° C. or less.
【００１３】この発明において、変移点が２５０℃未満
では高温雰囲気での使用時に熱膨張の直線性が確保し難
いため、変移点を２５０℃以上とする。In the present invention, if the transition point is less than 250 ° C., it is difficult to ensure the linearity of thermal expansion when used in a high temperature atmosphere, so the transition point is set to 250 ° C. or higher.
【００１４】この発明において、γ→α′変態温度が−
５０℃より高温にあれば、極寒冷地での使用や輸送中に
γ→α′変態し、熱膨張が大きくなる可能性があるた
め、α′変態温度を−５０℃以下に限定する。In the present invention, the γ → α ′ transformation temperature is −
If the temperature is higher than 50 ° C., the γ → α ′ transformation may occur during use or transportation in an extremely cold region and the thermal expansion may increase, so the α ′ transformation temperature is limited to −50 ° C. or lower.
【００１５】[0015]
【作用】この発明によるＦｅ−Ｎｉ−Ｃｏ系合金は、そ
れぞれ極狭い含有範囲に規制されたＮｉとＣｏの総量を
特定範囲内とすることにより、３０℃〜１００℃の熱膨
張係数を従来の所謂スーパーインバー合金の熱膨張係数
と同等にすることができ、さらに３０〜３００℃にわた
って熱膨張が２×１０-6／℃以下と極めて小さく、さら
に、変移点が２５０℃以上、変態温度が−５０℃以下と
なり、低温から高温域の高範囲の使用環境温度によって
も熱膨張係数が極めて小さく変化しない特性を発揮す
る。The Fe-Ni-Co alloy according to the present invention has a coefficient of thermal expansion of 30 ° C to 100 ° C, which is the same as that of the conventional alloy, by keeping the total amount of Ni and Co regulated in the extremely narrow content ranges within the specific ranges. It can be made equivalent to the coefficient of thermal expansion of so-called Super Invar alloy, the thermal expansion is extremely small at 2 × 10 −6 / ° C. or less over 30 to 300 ° C., the transition point is 250 ° C. or more, and the transformation temperature is − It has a temperature of 50 ° C. or less, and exhibits a characteristic that the coefficient of thermal expansion does not change extremely small even with use environment temperature in a high range of low temperature to high temperature.
【００１６】[0016]
【実施例】表１に示す如く、Ｎｉ及びＣｏ量を変化させ
た種々組成のＦｅ−Ｎｉ−Ｃｏ系合金試料を高周波真空
溶解炉にて溶製した。鋳塊を熱間圧延後、冷間粗圧延、
中間焼鈍を経て、冷間圧延にて板厚０．５ｍｍに仕上げ
た。最終仕上げ焼鈍を９００℃で行なった後、熱膨張特
性を測定した。また、仕上がった板より１５ｍｍ×１５
ｍｍの試験片を切出し、−５０℃で３時間保持後、γ→
α′変態の有無を確認した。各測定結果を表１に示す。EXAMPLES As shown in Table 1, Fe-Ni-Co alloy samples of various compositions with different amounts of Ni and Co were melted in a high frequency vacuum melting furnace. After hot rolling the ingot, cold rough rolling,
After intermediate annealing, it was cold-rolled to a plate thickness of 0.5 mm. After the final finish annealing was performed at 900 ° C., the thermal expansion characteristics were measured. Also, 15mm x 15 from the finished plate
mm test piece was cut out and kept at −50 ° C. for 3 hours, then γ →
The presence or absence of α'transformation was confirmed. Table 1 shows each measurement result.
【００１７】また、この発明合金Ｎｏ．１および比較例
合金Ｎｏ．８、さらに、公知の３１．８ｗｔ％Ｎｉ−
４．８５ｗｔ％Ｃｏ−Ｆｅ合金（Ｎｏ．１０）のそれぞ
れの熱膨張曲線を図２に示す。なお、図２において、実
線は実施例におけるこの発明合金Ｎｏ．１の場合、破線
は実施例における比較例合金Ｎｏ．８の場合、一点鎖線
は３１．８ｗｔ％Ｎｉ−４．８５ｗｔ％Ｃｏ−Ｆｅ合金
（Ｎｏ．１０）の場合を示す。Further, according to the invention alloy No. 1 and Comparative Example Alloy No. 8. Furthermore, known 31.8 wt% Ni-
The respective thermal expansion curves of the 4.85 wt% Co-Fe alloy (No. 10) are shown in FIG. In FIG. 2, the solid line indicates the alloy No. of the present invention in the example. In the case of No. 1, the broken line indicates the comparative alloy No. In the case of No. 8, the dashed-dotted line shows the case of 31.8 wt% Ni-4.85 wt% Co-Fe alloy (No. 10).
【００１８】[0018]
【表１】 [Table 1]
【００１９】[0019]
【発明の効果】この発明によるＦｅ−Ｎｉ−Ｃｏ系合金
は、それぞれ極狭い含有範囲に規制されたＮｉとＣｏの
総量を特定範囲内とすることにより、図２に明らかなよ
うに３０℃〜１００℃の熱膨張係数を従来の所謂スーパ
ーインバー合金の熱膨張係数と同等にすることができ、
さらに３０〜３００℃にわたって熱膨張が２×１０-6／
℃以下と極めて小さく、さらに、変移点が２５０℃以
上、変態温度が−５０℃以下となり、低温から高温域の
高範囲の使用環境温度によっても熱膨張係数が極めて小
さく変化せず、精密機器用構造材料等の用途に最適のＦ
ｅ−Ｎｉ−Ｃｏ系低熱膨張合金である。The Fe-Ni-Co alloy according to the present invention has a total content of Ni and Co regulated within an extremely narrow content range within a specific range, and as shown in FIG. The coefficient of thermal expansion at 100 ° C. can be made equal to the coefficient of thermal expansion of the conventional so-called Super Invar alloy,
Further, the thermal expansion is 2 × 10 −6 / over 30 to 300 ° C.
It is extremely small as ℃ or less, and has a transition point of 250 ℃ or more and a transformation temperature of -50 ℃ or less, and its thermal expansion coefficient does not change extremely small even with the use environment temperature in the high temperature range from low temperature to high temperature. Optimal for applications such as structural materials
It is an e-Ni-Co low thermal expansion alloy.
【図１】この発明の特徴であるＮｉとＣｏの総量規制を
示す、Ｎｉ量とＣｏ量との関係を示すグラフである。FIG. 1 is a graph showing the relationship between the amount of Ni and the amount of Co, showing the regulation of the total amount of Ni and Co, which is a feature of the present invention.
【図２】温度と熱膨張率との関係を示すグラフである。
実線は実施例におけるこの発明合金Ｎｏ．１の場合、破
線は実施例における比較例合金Ｎｏ．８の場合、一点鎖
線は３１．８ｗｔ％Ｎｉ−４．８５ｗｔ％Ｃｏ−Ｆｅ合
金（Ｎｏ．１０）の場合を示す。FIG. 2 is a graph showing the relationship between temperature and coefficient of thermal expansion.
The solid line indicates the alloy No. of the present invention in the examples. In the case of No. 1, the broken line indicates the comparative alloy No. In the case of No. 8, the dashed-dotted line shows the case of 31.8 wt% Ni-4.85 wt% Co-Fe alloy (No. 10).
【手続補正書】[Procedure amendment]
【提出日】平成５年１月２０日[Submission date] January 20, 1993
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１２[Correction target item name] 0012
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１２】この発明によるＦｅ−Ｎｉ−Ｃｏ系低熱膨
張合金は、３０〜３００℃の平均熱膨張係数が２×１０
-6／℃以下であることを特徴とするが、１５０℃を超え
た高温域で精密機器などを使用可能にするため３０〜３
００℃の平均熱膨張係数を特定する必要があり、平均熱
膨張係数が２×１０-6／℃を越えると熱膨張による寸法
変化が精密機器用構造材料として許容される寸法変化よ
り大きくなりすぎるため、３０〜３００℃の平均熱膨張
係数を２×１０-6／℃以下に限定する。The Fe-Ni-Co low thermal expansion alloy according to the present invention has an average thermal expansion coefficient of 2 x 10 at 30 to 300 ° C.
It is characterized in that it is -6 / ° C or less, but in order to enable precision equipment to be used in a high temperature range over 150 ° C, it is 30 to 3
It is necessary to specify the average coefficient of thermal expansion at 00 ℃, and when the average coefficient of thermal expansion exceeds 2 × 10 -6 / ℃, the dimensional change due to thermal expansion becomes too large than the dimensional change allowed as a structural material for precision equipment. Therefore, the average coefficient of thermal expansion at 30 to 300 ° C. is limited to 2 × 10 −6 / ° C. or less.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１８[Correction target item name] 0018
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１８】[0018]
【表１】 [Table 1]
Claims (1)
〜８．５ｗｔ％、かつ３８．５≦Ｎｉ＋Ｃｏ≦４０．５
ｗｔ％を満足し、残部Ｆｅ及び不可避的不純物元素から
なり、３０〜３００℃の平均熱膨張係数が２×１０-6／
℃以下で熱膨張の変移点が２５０℃以上であり、かつγ
→α′変態温度が−５０℃以下であることを特徴とする
Ｆｅ−Ｎｉ−Ｃｏ系低熱膨張合金。1. Ni 31.5 to 34 wt%, Co 6
Up to 8.5 wt% and 38.5 ≦ Ni + Co ≦ 40.5
Wt% is satisfied, the balance is Fe and unavoidable impurity elements, and the average thermal expansion coefficient at 30 to 300 ° C. is 2 × 10 −6 /
The transition point of thermal expansion is 250 ° C or higher at ℃ or lower, and γ
→ Fe'Ni-Co based low thermal expansion alloy having an α'transformation temperature of -50 ° C or lower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27820692A JP3510278B2 (en) | 1992-09-22 | 1992-09-22 | Fe-Ni-Co low thermal expansion alloy |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27820692A JP3510278B2 (en) | 1992-09-22 | 1992-09-22 | Fe-Ni-Co low thermal expansion alloy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06100985A true JPH06100985A (en) | 1994-04-12 |
| JP3510278B2 JP3510278B2 (en) | 2004-03-22 |
Family
ID=17594078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27820692A Expired - Lifetime JP3510278B2 (en) | 1992-09-22 | 1992-09-22 | Fe-Ni-Co low thermal expansion alloy |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3510278B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001059169A1 (en) * | 2000-02-09 | 2001-08-16 | Nippon Mining & Metals Co.,Ltd. | Fe-Ni-Co ALLOY FOR COMPLETELY FLAT MASK OF PRESS-FORMED TYPE, AND COMPLETELY FLAT MASK AND COLOR CATHODE-RAY TUBE USING THE SAME |
| JP2011082361A (en) * | 2009-10-07 | 2011-04-21 | Fujitsu Ltd | Circuit board and method of manufacturing the same |
| JP2011162820A (en) * | 2010-02-08 | 2011-08-25 | Res Inst Electric Magnetic Alloys | High-strength low-thermal-expansion alloy, method for producing the same, and precision instrument |
| JP2016027188A (en) * | 2014-07-02 | 2016-02-18 | 新報国製鉄株式会社 | Low-thermal expansion cast steel product and method for producing the same |
-
1992
- 1992-09-22 JP JP27820692A patent/JP3510278B2/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001059169A1 (en) * | 2000-02-09 | 2001-08-16 | Nippon Mining & Metals Co.,Ltd. | Fe-Ni-Co ALLOY FOR COMPLETELY FLAT MASK OF PRESS-FORMED TYPE, AND COMPLETELY FLAT MASK AND COLOR CATHODE-RAY TUBE USING THE SAME |
| JP2011082361A (en) * | 2009-10-07 | 2011-04-21 | Fujitsu Ltd | Circuit board and method of manufacturing the same |
| JP2011162820A (en) * | 2010-02-08 | 2011-08-25 | Res Inst Electric Magnetic Alloys | High-strength low-thermal-expansion alloy, method for producing the same, and precision instrument |
| JP2016027188A (en) * | 2014-07-02 | 2016-02-18 | 新報国製鉄株式会社 | Low-thermal expansion cast steel product and method for producing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3510278B2 (en) | 2004-03-22 |
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