JPH059641Y2 - - Google Patents
Info
- Publication number
- JPH059641Y2 JPH059641Y2 JP4333486U JP4333486U JPH059641Y2 JP H059641 Y2 JPH059641 Y2 JP H059641Y2 JP 4333486 U JP4333486 U JP 4333486U JP 4333486 U JP4333486 U JP 4333486U JP H059641 Y2 JPH059641 Y2 JP H059641Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum
- cart
- vacuum chamber
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012546 transfer Methods 0.000 claims description 27
- 238000005070 sampling Methods 0.000 claims description 15
- 230000003028 elevating effect Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 description 27
- 230000015572 biosynthetic process Effects 0.000 description 19
- 238000000034 method Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 239000012495 reaction gas Substances 0.000 description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4333486U JPH059641Y2 (enrdf_load_stackoverflow) | 1986-03-24 | 1986-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4333486U JPH059641Y2 (enrdf_load_stackoverflow) | 1986-03-24 | 1986-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153556U JPS62153556U (enrdf_load_stackoverflow) | 1987-09-29 |
| JPH059641Y2 true JPH059641Y2 (enrdf_load_stackoverflow) | 1993-03-10 |
Family
ID=30860090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4333486U Expired - Lifetime JPH059641Y2 (enrdf_load_stackoverflow) | 1986-03-24 | 1986-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059641Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-03-24 JP JP4333486U patent/JPH059641Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153556U (enrdf_load_stackoverflow) | 1987-09-29 |
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