JPH059628Y2 - - Google Patents
Info
- Publication number
- JPH059628Y2 JPH059628Y2 JP15479187U JP15479187U JPH059628Y2 JP H059628 Y2 JPH059628 Y2 JP H059628Y2 JP 15479187 U JP15479187 U JP 15479187U JP 15479187 U JP15479187 U JP 15479187U JP H059628 Y2 JPH059628 Y2 JP H059628Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- measuring device
- substrate
- cover
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009529 body temperature measurement Methods 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 34
- 238000005259 measurement Methods 0.000 description 17
- 238000007740 vapor deposition Methods 0.000 description 13
- 238000001704 evaporation Methods 0.000 description 12
- 230000008020 evaporation Effects 0.000 description 11
- 239000000126 substance Substances 0.000 description 9
- 238000007733 ion plating Methods 0.000 description 7
- 239000004020 conductor Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15479187U JPH059628Y2 (OSRAM) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15479187U JPH059628Y2 (OSRAM) | 1987-10-09 | 1987-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0159836U JPH0159836U (OSRAM) | 1989-04-14 |
| JPH059628Y2 true JPH059628Y2 (OSRAM) | 1993-03-10 |
Family
ID=31431840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15479187U Expired - Lifetime JPH059628Y2 (OSRAM) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059628Y2 (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2641606B2 (ja) * | 1990-08-15 | 1997-08-20 | 株式会社日立製作所 | 温度検出装置 |
-
1987
- 1987-10-09 JP JP15479187U patent/JPH059628Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0159836U (OSRAM) | 1989-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Chupka et al. | Direct determination of the heat of sublimation of carbon with the mass spectrometer | |
| US4013913A (en) | Ion detection electrode arrangement | |
| US12033836B2 (en) | Nitriding apparatus and nitriding method | |
| JPH059628Y2 (OSRAM) | ||
| GB2173635A (en) | Photoemissive electron source | |
| US20040108066A1 (en) | Temperature measuring method and plasma processing apparatus | |
| JP2001093882A (ja) | 温度測定装置、及びその温度測定装置が設けられた真空処理装置 | |
| JPH11354526A (ja) | 板体加熱装置 | |
| JPH11335820A (ja) | 蒸着方法及び蒸着装置 | |
| US4308008A (en) | Method for differential thermal analysis | |
| US2562770A (en) | Thermal receiver and method for producing same | |
| SU418572A1 (ru) | Испаритель металлов | |
| US3773964A (en) | Furnace assembly for thermal analysis use | |
| JPH05281073A (ja) | ピラニ真空計 | |
| JPH0527484Y2 (OSRAM) | ||
| JP2628533B2 (ja) | 質量分析型残留ガス分析計 | |
| KR20010039530A (ko) | 쿠킹 히터장치 | |
| CN223373209U (zh) | 衬底处理装置及衬底测温组件 | |
| US3634591A (en) | Furnace assembly for thermal analysis use | |
| JP4919709B2 (ja) | 背面電子衝撃加熱装置 | |
| Van Voorhis | Heats of Condensation of Electrons and Positive Ions on Molybdenum in Gas Discharges | |
| JPH0312582A (ja) | Ｘ線分光検出器の窓部結露防止装置 | |
| US3073163A (en) | Radiation bolometer | |
| JP2719528B2 (ja) | イオン注入装置 | |
| KR920007275Y1 (ko) | 방열형 전자총의 온도 측정용 모조 캐소오드 |