JPH0592991U - Cartridge heater group - Google Patents

Abstract

(57) [Abstract] [Purpose] A cartridge heater group unit that can make the hot plate surface temperature uniform without separately detecting the hot plate surface temperature or adjusting the heat quantity of the internal heater. Offer. [Structure] The electric heating value distribution rate of the cartridge heater itself is 100 from the opening to the bottom of the metal case.
To 70, and the bottom portions of the two cartridge heaters are serially opposed to each other to form one pair, and the multiple pairs are arranged in parallel to sequentially divide the heat generation distribution ratio from the outer row to the central row. Cartridge heater group set to 100-35.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a cartridge heater group, and more particularly to a cartridge heater group capable of uniformly heating the surface of a resin molding die such as an integrated circuit substrate and other members that are easily affected by heat.

[0002]

[Prior Art]

 In conventional general resin molding, a method has been taken in which a mold is placed on a heating plate and the heat of the heating plate is transferred to the mold by heat exchange. A plurality of thin cartridge heaters are fitted in parallel to the heating plate to heat the heating plate. The general structure of the cartridge heater used for the heating plate is such that a resistance coil is wound around a cylindrical magnesia sintered rod and is fitted into a metal case via an insulating material. Although omitted in some cases, the winding density of the resistance coil is uniform. A heater with a uniform winding density of the resistance coil does not hinder the molding of products that are not sensitive to heat effects, but it is sensitive to heat effects in integrated circuit boards, etc., where precision is required. It causes troubles on the above. For example, in a heater with a uniform winding density, both ends in the longitudinal direction of the heater are likely to have a lower temperature than the central part due to the influence of resistance resistance. High and low will occur and poor quality products will be produced. In order to solve this problem, for example, in Japanese Utility Model Publication No. 54-101539 and Japanese Utility Model Publication No. 57-76394, the winding density of the resistance coil at both longitudinal ends of the heater is increased at both end portions rather than at the central portion, and the entire heater area is increased. There is disclosed a technique for making the heat generation temperature of the uniform. Further, Japanese Patent Laid-Open No. 53-11328 discloses a technique in which a plurality of independent heating elements are housed in a heater and the independent heating elements are individually switched from the outside to control the temperature. ing.

[0003]

[Problems to be solved by the device]

 The heater having a uniform peripheral surface can be used alone to obtain a uniform heating temperature just above (immediately below) the heater, but when using a plurality of heaters, the heating plate There is a drawback that the central part becomes hotter than the peripheral part. In the case of a heater in which a plurality of independent heating elements are housed in the above-mentioned heater, there is an advantage that the temperature of each heating element can be adjusted, but a plurality of heaters can be combined into one heating plate. When it is mounted on the heater, the temperature of the surface of the hot plate must be measured in sections and the temperature of each independent heating element in each heater must be controlled based on the measured value. For this reason, not only is it extremely complicated, but the heater itself has a complicated structure, resulting in high manufacturing costs and the need for extra members such as wiring switches and thermometers. The present invention was developed with the object of solving the above-mentioned problems in the prior art and providing a cartridge heater group suitable for a heating plate of a molded product such as an integrated circuit substrate which is easily affected by heat.

[0004]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the present invention has a winding density of an electric heating element that is densely wound, is spirally wound so as to have a rough portion, and is fitted into a cylindrical metal case. The density is formed in a series by partitioning into at least three sections or more so that the density gradually increases from the opening to the bottom of the metal case, and the power distribution ratio in the sections becomes rough from the dense section of the winding density of the electric heating element. Cartridge heaters are formed in such a manner that they are sequentially set to 100 to 70 as they reach the portion, and two cartridge heaters are arranged in series coaxially with each other with their outer bottom faces facing each other. The plurality of cartridge heaters are arranged in parallel in parallel, and are set so that the power distribution ratio in each row from the outer row to the central row of the cartridge heater row is 100 to 35. Cartridge heater group, characterized in that it is, took technical means of.

[0005]

[Action]

 The present invention configured as described above has the following operation.

The configuration of the heater is such that the winding density of the electric heating element is densely arranged in at least three sections or more in the longitudinal direction of the heater, such as slightly dense or coarse, and the power distribution ratio is from the dense section to the coarse section. Since it is set so that it gradually becomes 100 to 70 over time, the temperature of the peripheral surface as a heater is divided into 100, 85, and 70 from the one end to the other end of the lengthwise direction, for example, when the above-mentioned division is 3 sections. There is a difference. When the above-mentioned compartments are 5 compartments, there are compartmental differences in the ratio of 100, 92.5, 85, 77.5, 70. In this way, this single cartridge heater has a temperature difference in the lengthwise direction, and the maximum temperature difference reaches 30%. Therefore, when used alone, the surface temperature of the hot plate is remarkably high. Since it will change, bad products will be generated, but when used in multiple, it becomes a heater suitable for molded products that have a large thermal effect, and the surface of the hot plate can be heated to a uniform temperature. Its usage is as described above.

That is, two cartridge heaters having the same amount of heat are made into a pair, and their outer bottom portions are opposed to each other and are serially arranged on the axis to form a pair. The pairs of heaters having different heat amounts were arranged in parallel, and the difference in heat amount was sequentially changed from 100 to 35 from the outer row to the central row. As a result, if there are 5 pairs of parallel pairs, the maximum heat ratio between the 5 parallel pairs becomes 100, 68, 35, 68, 100. When this is attached to the hot plate, the peripheral portion of the surface of the hot plate is The heat quantity ratios of 100, 85, 70, 70, 85, 100, 68, 35, 68, 100, 85, 70, 70, 85, 100, 68, 35, 68 are different. In the pair in the central row, the heat quantity ratio is 35, 27, 25, 25, 27, 35 from one end in the longitudinal direction. Thus, in the case of only the cartridge heater group, there is a large difference in the heat quantity distribution, and the heat quantity ratio is 100: 25 at the maximum and the minimum, showing a marked difference, but when this unit is installed in the hot plate. The surface temperature of the hot plate is made uniform.

That is, in the cartridge heater group mounted on this hot plate, even if the pair of heater parts in the outer row have a heat quantity of 100, 85, 70, 70, 85, 100 in the vertical direction, The temperature of is made uniform by heat conduction. This is because the heat transfer moves from the high temperature part to the low temperature part as long as there is a temperature difference. In reality, the heating plate is partially heated with a temperature difference of 100 to 70, but it is partially heated. In the hot plate itself, which has been heated with a difference, the heat of the high temperature part conducts to the low temperature part and becomes uniform on the plane. In addition, since there is a difference of 100 to 35 between the heater pairs in the outer row and the central row, the high heat of the outer row portion also moves to the central portion, and the surface temperature on the plane of the entire hot plate is uniform. It becomes stable and becomes stable after it becomes uniform.

On the other hand, when a heater having a uniform peripheral surface temperature is used, the hot plate is heated at a uniform temperature by the heater, so that the flat surface of the hot plate is uniformly heated. .. For uniform heat supply, the heat is radiated toward the space or the mold in the plane of the hot plate, so the temperature of the peripheral edge of the hot plate, which has a small amount of heat supplied for heat radiation, decreases steadily. After all, the planar surface temperature of the hot plate is not uniformed.

As described above, according to the present invention, the heat generation distribution of the cartridge heater is made different in three or more sections in the longitudinal direction to form a difference of 30% in the longitudinal direction. It is possible to maintain a uniform temperature. In addition, multiple cartridge heater pairs with different heat generation amounts were arranged in parallel, and the difference between the outer row and the central row was set to 100: 35 to form a unit, so the maximum heat generation at the four corners of the heating plate was 100. On the other hand, the central portion of the hot plate has a distribution of only 25%, but even with this, the hot plate surface can be uniformly kept warm.

[0011]

【Example】

 An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a vertical sectional front view of the cartridge heater, and FIG. 2 is a vertical sectional side view. The cassette heater 10 is fitted into the metal case 1 in an insulating state with the electric heating element 5 wound around the sintering rod 2. The sintered rod 2 is formed by sintering a heat-resistant electrically insulating inorganic material, for example, magnesia powder into a rod shape. As shown in FIG. 2, the metal terminal rods 3, 3 ′ are long inside in the longitudinal direction. Two windings are installed, one of which is connected to the winding start end of the electric heating element 5, and the other of which is connected to the winding end end of the electric heating element 5.

The metal case 1 is an elongated cylindrical body having a bottom, and the outer bottom surface 14 of the metal case 1 is inserted into the fitting hole 13 of the heating plate 11 as shown in FIG.

The coil portion 4 of the electric heating element 5 is divided into at least three or more divisions in the order of coil winding density from the opening of the metal case 1 into a dense portion 6, a finely dense portion 7 and a rough portion 8. The winding density is changed, and the difference in the winding density is such that the power distribution ratio is divided into 100 to 70 in the descending order of the winding density. That is, since there are 3 sections in Fig. 1, the power distribution ratio is 100, 85, 70 sequentially from the right side. If the winding density is divided into 5 sections, the power distribution ratio is also 100, 93, 85, 78, 70.

With the above structure, when the cartridge heater 10 is energized to the metal terminal rods 3, 3 ′, the distribution of the peripheral surface temperature of the heater 10 is due to the difference 100, 85, 70 from the right side in the heater of FIG. This is a temperature distribution, and the heater of FIG. 1 is characterized in that a temperature difference of 30% occurs between the right end portion and the left end portion. Therefore, when such a cartridge heater 10 is used alone, or when a plurality of such heaters are mounted in parallel on the hot plate, the surface temperature of the hot plate is not uniform and the temperature difference is notable. Therefore, it cannot be used for molding dies.

Therefore, since it is desired to unitize the cartridge heater group 9 for the hot plate, the cartridge heater group 9 will be described with reference to FIGS. 3 to 4. In FIG. 3, two cartridge heaters 10, 10 of the same kind are used as a pair, and the outer bottom surfaces 14, 14 are made to face each other and are fitted in the fitting holes 12, 13 of the heating plate 11 in series on the coaxial line. There is. In the state shown in FIG. 3, since there are three winding density sections of the electric heating elements of the pair of cartridge heaters 10, 10, the power distribution ratio is 100, 85, 70, 70, 85, 100 from the end. ing. Therefore, when the metal terminal rods 3, 3 ′ of both cartridge heaters 10, 10 are energized, the heat generation amount of both cartridge heaters 10, 10 becomes 100, 85, 70, 70, 85, 100 in proportion. However, the surface temperature of the hot plate 11 is made uniform in the longitudinal direction. Therefore, in the case of the elongated heating plate 11, the surface temperature is made uniform by the pair of cartridge heaters 10, 10.

Next, FIG. 4 shows a case where a pair of heaters are arranged in a plurality of rows in the width direction of the heating plate 11. In this case, the cartridge heaters 10 in each row are not of the same type, and the heat generation amount ratio of the heaters is set to 100 to 35 sequentially from the outer row A, A to the central row C. That is, in each vertical pair in FIG. 4, the power distribution ratio of the dense portion 7 (8), the slightly dense portion 8 (8 '), and the rough portion 8' (8 ") is 100, 85, 70. However, in the comparison between the horizontal rows, since the ratio from the outer row A, A to the central row C is reduced to 100 to 35, the flat heat generation rate of the heater group 9 in Fig. 4 is shown. The following rates are shown.

Row A, 100, 85, 70, 70, 85, 100. Row B, 68, 57, 47, 47, 57, 68. Row C, 35, 28, 25, 25, 28, 35. Row B, 68, 57, 47, 47, 57, 68. Row A, 100, 85, 70, 70, 85, 100.

In the case of 6 columns, the rates are as follows.

Row A, 100, 85, 70, 70, 85, 100. Row B, 68, 57, 47, 47, 57, 68. Row C, 35, 28, 25, 25, 28, 35. Row C, 35, 28, 25, 25, 28, 35. Row B, 68, 57, 47, 47, 57, 68. Row A, 100, 85, 70, 70, 85, 100.

As described above, the surface temperature of the hot plate 11 due to the heating is uniform, although it shows a remarkable decrease of 25 in the central part while it is 100 in the four corners of the plane of the divided array. In this way, the cartridge heater group 9 combines the heaters having different total heat generation amounts as described above to heat the heating plate in a partially different manner, but as a result, The hot plate surface temperature can be kept uniform, and there is a particular effect that it is not necessary to adjust the temperature such as surface temperature detection and switch switching.

[0021]

[Effect of the device]

 This device has the following excellent effects.

(1) Since the cassette heater has a power distribution ratio of 100 to 70 in the longitudinal direction, the peripheral surface temperature of the heater is 100 to 70 from the opening to the bottom. However, when two cassette heaters are used as a pair and the outer bottom surfaces are faced to each other and they are coaxially fitted in series in a hot plate, the surface temperature of the hot plate is directly above and below the heater. The effect is that it can be made uniform.

(2) In the cassette heater group, two cassette heaters having an electric power distribution ratio of 100 to 70 are coaxially arranged in series so that their outer bottom surfaces face each other to form a pair, and the pair of heaters are connected to each other. Since a plurality of heaters in parallel are arranged in parallel so that the calorific value of the heaters in a plurality of rows arranged in parallel has a power distribution ratio of 100 to 35 from the outer row to the central row, this cassette heater group is planar. As you can see, there is a significant difference in the amount of heat generated from the outside to the center row in the parallel direction at each part, with a maximum difference in the plane of 100 to 25, but when mounted on the hot plate, the surface of the hot plate It has the effect of maintaining a uniform temperature, that is, it is suitable for heating molds such as integrated circuit boards that are easily affected by heat.

Therefore, the complexity of adjusting the temperature of the heater by measuring the temperature of the entire flat surface of the mold as in the prior art is eliminated. In addition, since the heater is simply made by changing the winding density of the coil and the structure is simple, there is no effect on the cost and there is an effect that the hot plate etc. can be used as it is.

[Brief description of drawings]

FIG. 1 is a vertical sectional front view of a cassette heater alone.

FIG. 2 is a vertical sectional side view of a single cassette heater.

FIG. 3 is a vertical cross-sectional front view showing a state in which a pair of cassette heaters is used.

FIG. 4 is a cross-sectional plan view showing a state in which a cassette heater group is mounted on a heating plate.

FIG. 5 is a perspective view of a heating plate.

[Explanation of symbols]

 1 Metal Case 2 Sintered Rod 3, 3'Metal Terminal Rod 4 Coil Part 5 Electric Heating Element 6, 6 ', 6 "Dense Part 7, 7', 7" Roughly Dense Part 8, 8 ', 8 "Rough Part 9 Cartridge heater group 10 Cartridge heater 11 Heat plate 12, 13 Fitting hole 14 Outer bottom surface.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H05B 3/20 398

Claims (1)

[Scope of utility model registration request] 1. An electric heating element is wound around a sintered rod in a spiral shape so as to have a high winding density and has a rough portion, and the electric heating element is fitted in a cylindrical metal case. The case is divided into at least three sections or more so as to become gradually rougher from the opening to the bottom of the case, and the power distribution ratio in the sections is 100 in sequence from the dense portion of the winding density of the electric heating element to the rough portion. Cartridge heaters are separately set to be about 70 to 70, and two cartridge heaters having the same heat quantity setting are coaxially arranged in series with the outer bottom surface of each case facing each other. A plurality of cartridge heaters are arranged in parallel in parallel, and the power distribution ratio in each row from the outer row to the central row of the cartridge heater row group is set to be 100 to 35 in sequence and one unit is set. A cartridge heater group characterized by being formed into a knit.