JPH0589946A - Electric heating body - Google Patents

Electric heating body

Info

Publication number
JPH0589946A
JPH0589946A JP24906691A JP24906691A JPH0589946A JP H0589946 A JPH0589946 A JP H0589946A JP 24906691 A JP24906691 A JP 24906691A JP 24906691 A JP24906691 A JP 24906691A JP H0589946 A JPH0589946 A JP H0589946A
Authority
JP
Japan
Prior art keywords
terminal portion
electric heating
heating element
protective layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24906691A
Other languages
Japanese (ja)
Other versions
JPH0785435B2 (en
Inventor
Riyouji Kawamura
瞭司 河村
Shigehiko Yoshida
茂彦 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chiyuugai Eng Kk
Original Assignee
Chiyuugai Eng Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyuugai Eng Kk filed Critical Chiyuugai Eng Kk
Priority to JP3249066A priority Critical patent/JPH0785435B2/en
Publication of JPH0589946A publication Critical patent/JPH0589946A/en
Publication of JPH0785435B2 publication Critical patent/JPH0785435B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To prevent a crack from being generated in terminal portions so as to prolong a lifetime by forming Si protecting layers on the terminal portions of an electric heat generator made of molybdenum disilicide. CONSTITUTION:Si protecting layers 4 are formed on terminal portions 3 formed integrally at both ends of a heat generating portion 2 of an electric heat generator 1 made of molybdenum disilicide by a plasma spraying method or a CVD method. The protecting layer 4 is made of the same material of Si as that included in the heat generator 1, thus obtaining excellent adhesiveness between the layer 4 and the terminal portion 3. A glass material (SiO2) is formed on the terminal portion 3 by the plasma spraying method; and a fine SiO2 layer, by the CVD method. Consequently, it is possible to prevent oxygen from intruding into the terminal portion 3 by the protecting layer 4 so as to restrain a crack from being generated in the terminal portion 3, thus prolonging a lifetime.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、熱処理炉等に使用され
る電気発熱体に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electric heating element used in a heat treatment furnace or the like.

【0002】[0002]

【従来の技術と発明が解決しようとする課題】従来、酸
素存在下で加熱する熱処理炉においては、一般に、加熱
体として、二珪化モリブデン(MoSi2)からなる電
気発熱体を使用している。そして、この発熱体は、一般
に、U字型あるいはW字型の発熱部と、この発熱部の両
端に一体的に設けた端子部とからなり、端子部を炉壁に
設けた開口に断熱材を介して取り付けるものである。
2. Description of the Related Art Conventionally, in a heat treatment furnace for heating in the presence of oxygen, an electric heating element made of molybdenum disilicide (MoSi 2 ) is generally used as a heating element. The heating element is generally composed of a U-shaped or W-shaped heating portion and terminal portions integrally provided at both ends of the heating portion. The terminal portion is provided with an insulating material in an opening provided in the furnace wall. It is attached via.

【0003】また、この電気発熱体は、主として二珪化
モリブデン粉末を、粉末冶金法で製作され、使用時の発
熱により発熱部が高温となると、その成分であるSiが
2と結合し、SiO2(石英ガラス)が発熱部の表面に
形成され、これが保護層となり、発熱体の劣化、損傷を
防止するものである。
This electric heating element is mainly made of molybdenum disilicide powder by the powder metallurgy method. When the heat-generating part becomes high temperature due to heat generation during use, Si as a component thereof is combined with O 2 to form SiO 2. 2 (quartz glass) is formed on the surface of the heat generating portion, and this serves as a protective layer to prevent deterioration and damage of the heat generating element.

【0004】しかしながら、10〜30日連続して使用
すると、端子部にクラックが生じ、やがて、クラック部
で破断するという事故が生じ、寿命が短いという課題を
有していた。
However, when it is continuously used for 10 to 30 days, a crack occurs in the terminal portion, and eventually an accident of breaking at the crack portion occurs, and there is a problem that the life is short.

【0005】そこで、本発明者らは、前記事故について
種々検討した結果、前記クラックは炉内温度(約140
0℃以上)より低温の約800℃〜900℃の端子部で
発生することが判明した。また、その原因については、
電気発熱体は前述のように粉末冶金法で製作されるた
め、気孔質であり、この気孔内に侵入したO2がSiと
結合するが、温度が低いためガラス化されず、気孔内で
成長し、やがてクラックを生じさせるものであると推測
される。したがって、本発明は、端子部に予め保護層を
形成して前記課題を解決することのできる電気発熱体を
提供することを目的とする。
Therefore, as a result of various studies on the accident, the present inventors found that the cracks were formed in the furnace temperature (about 140 ° C.).
It was found that it occurs in the terminal portion at a temperature of about 800 ° C to 900 ° C that is lower than 0 ° C). Also, regarding the cause,
Since the electric heating element is manufactured by the powder metallurgy method as described above, it has porosity, and O 2 that has penetrated into the pores combines with Si, but is not vitrified due to the low temperature and grows in the pores. However, it is speculated that it will eventually cause cracks. Therefore, it is an object of the present invention to provide an electric heating element that can solve the above problems by forming a protective layer on the terminal portion in advance.

【0006】[0006]

【課題を解決するための手段】本発明は、前記目的を達
成するために、二珪化モリブデンからなる電気発熱体の
端子部表面に、Si系保護層を予め形成したものであ
る。前記保護層はSiO2単体で構成しても良く、ま
た、高融点の他の酸化物と組み合わせて構成してもよ
い。後者の代表的なものとしては、3Al23・2Si
2、ZrO2・SiO4等Si系酸化物があげられる。
In order to achieve the above object, the present invention has a Si-based protective layer formed in advance on the surface of a terminal portion of an electric heating element made of molybdenum disilicide. The protective layer may be composed of a simple substance of SiO 2 or may be composed in combination with another oxide having a high melting point. A typical example of the latter is 3Al 2 O 3 .2Si.
Examples thereof include Si-based oxides such as O 2 and ZrO 2 · SiO 4 .

【0007】[0007]

【実施例】つぎに、本発明の実施例を図面にしたがって
説明する。図において、1は二珪化モリブデンからなる
電気発熱体で、U字形の発熱部2と、発熱部2の両端に
一体になった端子部3とからなる、従来公知のものであ
る。
Embodiments of the present invention will now be described with reference to the drawings. In the figure, reference numeral 1 denotes an electric heating element made of molybdenum disilicide, which is conventionally known and includes a U-shaped heating portion 2 and terminal portions 3 integrated at both ends of the heating portion 2.

【0008】本発明においては、前記端子部3の表面に
Si系保護層4を設けたものである。この保護層4の形
成方法としては、下記するプラズマ溶射法とCVD法と
が最適である。
In the present invention, the Si-based protective layer 4 is provided on the surface of the terminal portion 3. As a method of forming the protective layer 4, the plasma spraying method and the CVD method described below are most suitable.

【0009】ところで、プラズマ溶射においては、Si
2はガス化し溶射ができないため、昇華温度がより高
いAl23あるいはZrO2の介在のもとで溶射し、端
子部3の表面に、0.5〜100μの厚さの3Al23
・2SiO2あるいはZrSiO4等のSi系保護層4を
形成する。また、CVD法では、SiO2単体での緻密
な保護層の形成が可能であり、0.01〜50μ厚のS
iO2の保護層4を端子部3の表面に形成する。
By the way, in plasma spraying, Si
Since O 2 is gasified and cannot be sprayed, it is sprayed under the interposition of Al 2 O 3 or ZrO 2 having a higher sublimation temperature, and the surface of the terminal portion 3 is coated with 3Al 2 O having a thickness of 0.5 to 100 μ. 3
Form a Si-based protective layer 4 such as 2SiO 2 or ZrSiO 4 . Further, in the CVD method, it is possible to form a dense protective layer by using SiO 2 alone, and an S of 0.01 to 50 μm is formed.
The protective layer 4 of iO 2 is formed on the surface of the terminal portion 3.

【0010】そして、前記のようにして、端子部3に保
護層4を形成した電気発熱体1を、雰囲気を大気とした
焼成炉で使用したところ、いずれの方法で保護層4を形
成したものであっても、12ケ月連続して使用しても何
ら異常が認められなかった。
Then, when the electric heating element 1 having the protective layer 4 formed on the terminal portion 3 as described above is used in a firing furnace in which the atmosphere is the atmosphere, the protective layer 4 is formed by any method. However, no abnormality was observed even after continuous use for 12 months.

【0011】これは、保護層4が電気発熱体の一成分で
あるSiと同系のSi系であるため、端子部3との密着
性がよく、かつ、プラズマ溶射においては、ガラス質
(SiO2)が、CVD法によれば緻密なSiO2層が端
子部3の表面に形成され、これらの保護層4により、端
子部3内への酸素の侵入を防止し、端子部3の気孔内部
でガラス化されないSiO2が形成されないためである
と考えられる。
Since the protective layer 4 is made of Si, which is similar to Si, which is one component of the electric heating element, it has good adhesion to the terminal portion 3 and, in plasma spraying, is glassy (SiO 2 ), A dense SiO 2 layer is formed on the surface of the terminal portion 3 by the CVD method, and the protective layer 4 prevents oxygen from entering the terminal portion 3 and prevents the oxygen from entering the inside of the pores of the terminal portion 3. It is considered that this is because SiO 2 which is not vitrified is not formed.

【0012】[0012]

【発明の効果】以上の説明で明らかなように、本発明に
よれば、二珪化モリブデン(MoSi2)からなる電気
発熱体において、前記発熱体の端子部表面にSi系保護
層を形成するという簡単な手段を端子部に施すことによ
り、電気発熱体を長期に亙って使用することができ、生
産性を大巾に向上することができる。
As is apparent from the above description, according to the present invention, in the electric heating element made of molybdenum disilicide (MoSi 2 ), the Si-based protective layer is formed on the surface of the terminal portion of the heating element. By applying a simple means to the terminal portion, the electric heating element can be used for a long period of time, and the productivity can be greatly improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明にかかる電気発熱体の斜視図。FIG. 1 is a perspective view of an electric heating element according to the present invention.

【符号の説明】[Explanation of symbols]

1…電気発熱体、2…発熱部、3…端子部、4…保護
層。
DESCRIPTION OF SYMBOLS 1 ... Electric heating element, 2 ... Heating part, 3 ... Terminal part, 4 ... Protective layer.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 二珪化モリブデンからなる電気発熱体に
おいて、前記発熱体の端子部表面にSi系保護層を形成
したことを特徴とする電気発熱体。
1. An electric heating element made of molybdenum disilicide, wherein an Si-based protective layer is formed on a surface of a terminal portion of the heating element.
JP3249066A 1991-09-27 1991-09-27 Electric heating element Expired - Lifetime JPH0785435B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3249066A JPH0785435B2 (en) 1991-09-27 1991-09-27 Electric heating element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3249066A JPH0785435B2 (en) 1991-09-27 1991-09-27 Electric heating element

Publications (2)

Publication Number Publication Date
JPH0589946A true JPH0589946A (en) 1993-04-09
JPH0785435B2 JPH0785435B2 (en) 1995-09-13

Family

ID=17187502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3249066A Expired - Lifetime JPH0785435B2 (en) 1991-09-27 1991-09-27 Electric heating element

Country Status (1)

Country Link
JP (1) JPH0785435B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0886458A2 (en) * 1997-05-23 1998-12-23 Kabushiki Kaisha Riken Molybdenum disilicide heating element and its production method
WO2004045026A2 (en) 2002-11-07 2004-05-27 Advanced Lighting Technologies, Inc. Oxidation-protected metallic foil and methods
US7164103B2 (en) * 2002-04-05 2007-01-16 Sandvik Intellectual Property Aktiebolag Electrical heating resistance element
US8053710B2 (en) * 2002-04-05 2011-11-08 Sandvik Intellectual Property Aktiebolag Method of making a heating element of the molybdenum silicide type and a heating element
US8277274B2 (en) 2002-11-07 2012-10-02 Advanced Lighting Technologies, Inc. Apparatus and methods for use of refractory abhesives in protection of metallic foils and leads
JP2016115620A (en) * 2014-12-17 2016-06-23 日本電気硝子株式会社 Exothermic body and manufacturing method of the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748490A (en) * 1980-08-29 1982-03-19 Tokyo Electric Power Co Safety device for collision

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748490A (en) * 1980-08-29 1982-03-19 Tokyo Electric Power Co Safety device for collision

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0886458A2 (en) * 1997-05-23 1998-12-23 Kabushiki Kaisha Riken Molybdenum disilicide heating element and its production method
EP0886458A3 (en) * 1997-05-23 1999-10-20 Kabushiki Kaisha Riken Molybdenum disilicide heating element and its production method
US7164103B2 (en) * 2002-04-05 2007-01-16 Sandvik Intellectual Property Aktiebolag Electrical heating resistance element
US8053710B2 (en) * 2002-04-05 2011-11-08 Sandvik Intellectual Property Aktiebolag Method of making a heating element of the molybdenum silicide type and a heating element
WO2004045026A2 (en) 2002-11-07 2004-05-27 Advanced Lighting Technologies, Inc. Oxidation-protected metallic foil and methods
EP1563524A2 (en) * 2002-11-07 2005-08-17 Advanced Lighting Technologies, Inc. Oxidation-protected metallic foil in methods
EP1563524A4 (en) * 2002-11-07 2008-12-10 Advanced Lighting Tech Inc Oxidation-protected metallic foil in methods
US8264147B2 (en) 2002-11-07 2012-09-11 Advanced Lighting Technologies, Inc. Oxidation-protected metallic foil and methods
US8277274B2 (en) 2002-11-07 2012-10-02 Advanced Lighting Technologies, Inc. Apparatus and methods for use of refractory abhesives in protection of metallic foils and leads
JP2016115620A (en) * 2014-12-17 2016-06-23 日本電気硝子株式会社 Exothermic body and manufacturing method of the same

Also Published As

Publication number Publication date
JPH0785435B2 (en) 1995-09-13

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