JPH0587770B2 - - Google Patents

Info

Publication number
JPH0587770B2
JPH0587770B2 JP27419088A JP27419088A JPH0587770B2 JP H0587770 B2 JPH0587770 B2 JP H0587770B2 JP 27419088 A JP27419088 A JP 27419088A JP 27419088 A JP27419088 A JP 27419088A JP H0587770 B2 JPH0587770 B2 JP H0587770B2
Authority
JP
Japan
Prior art keywords
display
amount
detector
leakage
leak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27419088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02120635A (ja
Inventor
Kimiharu Arita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP27419088A priority Critical patent/JPH02120635A/ja
Publication of JPH02120635A publication Critical patent/JPH02120635A/ja
Publication of JPH0587770B2 publication Critical patent/JPH0587770B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP27419088A 1988-10-28 1988-10-28 リークデテクタ Granted JPH02120635A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27419088A JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27419088A JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Publications (2)

Publication Number Publication Date
JPH02120635A JPH02120635A (ja) 1990-05-08
JPH0587770B2 true JPH0587770B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-12-17

Family

ID=17538289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27419088A Granted JPH02120635A (ja) 1988-10-28 1988-10-28 リークデテクタ

Country Status (1)

Country Link
JP (1) JPH02120635A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004050762A1 (de) * 2004-10-16 2006-04-20 Inficon Gmbh Verfahren zur Lecksuche
JP4967785B2 (ja) * 2007-04-26 2012-07-04 富士電機株式会社 真空系統の空気漏れ検出方法
EP3391925B1 (en) 2010-07-30 2020-11-25 ResMed Pty Ltd Methods and devices with leak detection
JP6425206B2 (ja) * 2014-09-10 2018-11-21 島津エミット株式会社 ヘリウムリークディテクタ
FR3047074B1 (fr) 2016-01-21 2018-01-26 Pfeiffer Vacuum Dispositif d'aspersion et module de detection de fuites
DE102016205381B4 (de) * 2016-03-31 2023-11-30 Inficon Gmbh Gaslecksuche mit einer Testgassprühvorrichtung

Also Published As

Publication number Publication date
JPH02120635A (ja) 1990-05-08

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Legal Events

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