JPH0586476B2 - - Google Patents
Info
- Publication number
- JPH0586476B2 JPH0586476B2 JP62080963A JP8096387A JPH0586476B2 JP H0586476 B2 JPH0586476 B2 JP H0586476B2 JP 62080963 A JP62080963 A JP 62080963A JP 8096387 A JP8096387 A JP 8096387A JP H0586476 B2 JPH0586476 B2 JP H0586476B2
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- target
- substrate
- ion
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096387A JPS63247367A (ja) | 1987-04-03 | 1987-04-03 | イオンビ−ムスパツタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8096387A JPS63247367A (ja) | 1987-04-03 | 1987-04-03 | イオンビ−ムスパツタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63247367A JPS63247367A (ja) | 1988-10-14 |
| JPH0586476B2 true JPH0586476B2 (enrdf_load_stackoverflow) | 1993-12-13 |
Family
ID=13733168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8096387A Granted JPS63247367A (ja) | 1987-04-03 | 1987-04-03 | イオンビ−ムスパツタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63247367A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2745010B1 (fr) * | 1996-02-20 | 1998-06-12 | Serole Michelle Paparone | Cible de pulverisation cathodique de forme tubulaire ou derivee, faite de plusieurs plaques longitudinales et sa methode de fabrication |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57174459A (en) * | 1981-04-21 | 1982-10-27 | Namiki Precision Jewel Co Ltd | Formation of thin film |
| JPS6025212A (ja) * | 1983-07-21 | 1985-02-08 | Hitachi Ltd | 磁性合金膜の製造方法 |
-
1987
- 1987-04-03 JP JP8096387A patent/JPS63247367A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63247367A (ja) | 1988-10-14 |
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