JPH0585846U - Vacuum processing device - Google Patents

Abstract

(57) [Summary] [Purpose] To provide safety means with a simple structure, reliable operation, and high reliability. [Structure] In a vacuum processing apparatus including a member to which a high voltage is applied, such as a rotary table 11 for a base material 10 to which a high voltage bias power source 12 is connected, in a vacuum container 1 having an opening / closing door 5,
A grounding member 15 that contacts the rotary table 11 by the urging force of the coil spring 19 in an open state in the vacuum container 1 is provided, and the grounding member 15 is used to utilize the pressure difference between the inside and the outside of the container 1 in a vacuum state. The coil spring 19 is pulled away from the rotary table 11 against the urging force of the coil spring 19.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a vacuum processing apparatus used for vacuum processing such as an ion plating method and a sputtering method.

[0002]

[Prior Art]

 A high voltage power supply of 1 KV to 2 KV is used in a vacuum processing apparatus. For example, a negative bias voltage is applied to a substrate (object to be processed) in an ion plating apparatus and a target (film material) is negative in a DC sputtering apparatus. High voltage is applied. Since a human body will be fatally injured if such a member to which a high voltage is applied is touched, a safety device is provided so that the worker can safely access the object to be processed in the vacuum container.

As an example, conventionally, the arc ion plating apparatus is provided with safety means illustrated in FIG. In FIG. 10, an opening / closing door 42 is provided in the vacuum container 41, a coating evaporation source 43 (metal) is arranged in the upper part of the vacuum container 41, and is connected to the cathode side of an arc power source 44. A rotary table 45 is disposed in the lower portion of the container 41, a negative voltage is applied from a negative bias power source 46, and an anode of the bias power source 46 is connected to the vacuum container 41 and grounded.

A base material 47, which is an object to be coated, is placed on the rotary table 45, and a direct current arc discharge is generated between the evaporation source 43 and the anode 48 to evaporate the metal, A thin film of a metal or a metal compound is formed on the surface of the base material 47 which is at a potential. Further, a limit switch 49 operated by the opening / closing door 42 is attached to the outside of the opening of the vacuum container 41, and the contact signal of the limit switch 49 is used to open the opening / closing door 42 with a bias power supply 46, and An interlock circuit is provided to turn off the arc power supply 44 for safety. Further, as another method, a safety means is employed, as shown in FIG. 10, in which the auxiliary tool 50 is brought into contact with the cathode member such as the rotary table 45 or the substrate 47 and the vacuum container 41 by an operator's hand to ground. In some cases, it may be used in combination with the above-described method of automatically turning off the bias power supply 46.

[0005]

[Problems to be solved by the device]

 By the way, when instrumentation equipment such as limit switches is used as a safety measure, failures are likely to occur, and interlocks of switch circuits are often incorporated using programmable logic controllers, but malfunctions are difficult to avoid. There is a problem with reliability. In addition, when grounding with auxiliary equipment, it is indispensable to thoroughly adhere to the work standard and improve the morale of the worker. Especially, it is necessary to place the auxiliary equipment such as contacting the grounding side (vacuum container side) first. There are problems such as strict adherence.

The present invention has been made in view of the above situation, and an object thereof is to provide a vacuum processing apparatus having a simple structure, a reliable operation, an automatic operation, and a highly reliable safety means. To provide the equipment.

[0007]

[Means for Solving the Problems]

 In order to achieve the above object, the present invention takes the following technical means. That is, the present invention relates to a vacuum processing apparatus provided with a member to which a high voltage is applied in a vacuum container, wherein a grounding member which is in contact with the member by a mechanical urging means in the atmosphere open state is arranged in the vacuum container. The grounding member is pulled away from the member against the biasing means by utilizing the pressure difference between the inside and the outside of the vacuum container in a vacuum state.

The present invention also provides a vacuum processing apparatus comprising a member to which a high voltage is applied in a vacuum container, wherein the member is opened by a mechanical urging means in an open state in which the vacuum container can be accessed by a human. It is characterized in that a grounding member that comes into contact with the grounding member is disposed in the vacuum container, and the vacuum container is closed to separate the grounding member from the member against the biasing means.

[0009]

[Action]

 According to the present invention (Claim 1), during the vacuum processing, the ground member is separated from the member to which the high voltage is applied, and the high voltage is applied to the member. When the atmosphere is introduced into the vacuum container after the vacuum processing is completed, the pressure difference between the inside and the outside disappears, so that the grounding member comes into contact with the member by the biasing means, and the member is grounded. In this grounded state, the empty container can be opened to the atmosphere to safely take out the substrate that is the object to be processed, and the substrate can be carried in and placed on the member such as the rotary table.

Therefore, when vacuum processing is started, when the vacuum container is closed and the internal air is evacuated to a vacuum state, the high voltage due to the pressure difference between the inside and outside of the vacuum container causes the grounding member to move. The member is separated against the biasing means, a high voltage is applied to the member, and the vacuum processing is started. Further, according to the present invention (Claim 2), when the vacuum container is closed, the grounding member is automatically separated from the member to which a high voltage is applied, and the high voltage can be applied to the member, so that the vacuum container is closed. At the same time when the vacuum container is opened for human access, the grounding member comes into contact with the member at the same time, and the member is automatically grounded, so that the work can be performed safely.

[0011]

【Example】

 Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 show a first embodiment of the present invention, in which 1 is a metal vacuum container of an ion plating apparatus, on which an evaporation source (metal) 2 for coating and anode plates 3, 3 are arranged. , The cathode of the arc power source 4 is connected to the evaporation source 2, and a DC arc discharge is generated between the evaporation source 2 and the cathode plate 3 in the vacuum container 1, and the high-density energy at the cathode bright spot generated on the cathode side. Is used to evaporate the evaporation source 2 for coating.

An opening / closing door 5 is attached to one side of the vacuum container 1 so as to be openable / closable via a hinge 6, and a process gas supply port 7 and an exhaust port 8 are provided on the other side. Further, in the vacuum container 1, a rotary table 11 which is a mounting table for a substrate 10 which is an object to be processed is disposed in the center of the bottom plate 9, and the table 11 is a cathode member which is a member to which a high voltage is applied. The cathode of the bias power supply 12 is connected. The anode of the bias power supply 12 is connected to the vacuum container 1 and grounded.

Reference numeral 13 is a safety means, which is a key-shaped grounding member 15 made of a metal rod that penetrates a through hole 14 of the container bottom plate 9, and is fixed concentrically with the through hole 14 to the lower surface of the bottom plate 9 through a metal flange 16. A metal bellows 17, a metal bottom cover 18 that closes the lower end opening of the bellows 17, and a coil spring 19 that is a mechanical biasing means interposed between the bottom cover 18 and the bottom plate 9. The base end 15B of the grounding member 15 is fixed to the center of the upper surface of the bottom cover 18, and the pressure inside the bellows 17 is the same as that inside the vacuum container 1.

Then, the hook-shaped tip portion 15A of the grounding member 15 is set so as to come into contact with the upper surface of the end portion of the rotary table 11 when the inside of the vacuum container 1 is at atmospheric pressure, and the inside of the vacuum container 1 is placed in a vacuum state. Then, the coil spring 19 is compressed by the pressure difference between the inside and the outside of the container 1 which acts on the bottom lid 18, so that the tip portion 15A is separated from the rotary table 11, and a negative bias voltage is applied to the base material 10 through the rotary table 11. Can be applied.

In the first embodiment as well, metal deposition is performed on the substrate 10 by the same process as in the conventional example, and FIGS. 1 and 2 show the case where the container 1 is in a vacuum state, and the tip of the grounding member 15 is shown. Since the part 15A is separated from the rotary table 11 and the table 11 is floating from the ground potential, when the bias power supply 12 is turned on, a negative bias voltage can be applied to the base material 10.

When the vacuum processing is completed and the atmosphere is introduced into the vacuum container 1 and returned to atmospheric pressure, the pressure difference acting on the inner and outer (upper and lower) surfaces of the bottom lid 18 decreases, and the coil spring 19 is attached. The bellows 17 is stretched by the force, and the grounding member 15 moves downward so that the tip 15A of the grounding member 15 contacts the upper surface of the rotary table 11, and the rotary table 11 and the base material 10 (cathode member) are connected as shown in FIG. Ground. In this grounded state, even if the bias power supply 12 is accidentally turned on when the operator opens the open / close door 5 to take out the substrate 10, prepare for the next process, or perform maintenance on the inside of the vacuum container 1, No bias voltage is applied to the rotary table 11 and the base material 10, so you can work with peace of mind and is extremely safe.

When the opening / closing door 5 is closed again and the air inside the vacuum container 1 is discharged to increase the degree of vacuum, the pressure difference between the upper and lower surfaces of the bottom lid 18 causes the bottom lid 18 to resist the urging force of the coil spring 19. The grounding member 15 rises, the tip 15A of the grounding member 15 separates from the rotary table 11 and becomes the state shown in FIGS. 1 and 2, the rotary table 11 floats from the ground potential, and the bias power supply 12 is turned on to apply the bias voltage. be able to.

FIG. 4 shows an essential part of the second embodiment of the present invention, that is, the safety means 13. The difference from the first embodiment is that the grounding member 15 is an operating rod 20, a lever 21, and a lever support bracket. The upper end 20A of the operating rod 20 is connected to one end of the lever 21 by a pin 23, and the intermediate point of the lever 21 is attached to the bracket 22 by the pin 24 so as to be vertically swingable.

The lower end 20B of the actuating rod 20 is fixed to the upper surface of the bottom lid 18, and the tip 21A of the lever 21 is brought into contact with and separated from the rear surface of the end of the rotary table 11. When the atmosphere is opened, the solid line in FIG. As shown in the figure, the tip 21A comes into contact with the rotary table 11, and in the vacuum state, the tip 21A moves away from the rotary table 11 and floats from the ground potential as shown by the alternate long and short dash line in the figure. Can be expected.

FIG. 5 shows a safety means 13 which is an essential part of the third embodiment of the present invention. The difference from the first embodiment is that a metal cylinder 25 is integrally provided on the lower surface of the flange 16. The bottom lid 18 is enlarged to form a piston, a metal coil spring 19 is fitted in the space 26 between the bottom lid 18 and the cylinder bottom wall 25A, and a communication pipe 27 communicating with the inside of the vacuum container 1 is connected. The vent hole 29 for opening the outer space 28 of the bellows 17 to the atmosphere is provided on the peripheral wall of the cylinder 25.

In the third embodiment, FIG. 5 shows a state during vacuum processing. Since the space 28 is at atmospheric pressure and the space 26 is vacuum, the pressure difference that the coil spring 19 acts on the upper and lower surfaces of the bottom lid 18 is shown. The grounding member 15 descends by being compressed by the grounding member 15 and the tip 15A of the grounding member 15 separates from the rotary table 11 and floats from the ground potential, and a bias voltage can be applied to the rotary table 11.

When the vacuum processing is completed and the vacuum container 1 is opened to the atmosphere, the space 26, 28 and the inside of the bellows 17 become atmospheric pressure, so that the biasing force of the coil spring 19 raises the grounding member 15 and its tip 15A. Comes into contact with the lower surface of the end of the rotary table 11 and is in a grounded state. As described above, in all of the first to third embodiments, the member to which a high voltage is applied can be automatically grounded or ungrounded by utilizing the pressure difference between the inside and the outside of the vacuum container 1.

FIG. 6 and FIG. 7 show the essential parts of the fourth embodiment of the present invention, and only the safety means 13 are different from the above-mentioned respective embodiments. That is, the safety means 13 includes a swing lever 30 which is a ground member, a bracket 32 which attaches the intermediate point of the lever 30 to the bottom plate 9 of the vacuum container 1 via a pin 31, and a pin 33 at the rear end of the lever 30. The operating rod 34 includes a connected operating rod 34, a shaft support bracket 35 that supports the operating rod 34 so as to be horizontally movable, and a lever urging coil spring 36 and a spring bearing 37 that are externally fitted to the operating rod 34. In order to be able to drive 34 by the opening / closing operation of the opening / closing door 5, it is designed to protrude by a predetermined length L when the door is opened.

In the fourth embodiment, by opening the opening / closing door 5, as shown in FIG. 6, the tip 30A of the swing lever 30 is applied to the shaft of the rotary table 11 by the urging force of the coil spring 36. It is automatically abutted and comes into contact with the ground. Then, when the opening / closing door 5 is closed, as shown in FIG. 7, the operating rod 34 is pushed in the direction of arrow A against the biasing force of the coil spring 36, and the tip 30A of the swing lever 30 is moved in the direction of arrow R in the figure. By rotating in the direction, the rotary table 11 is separated from the shaft portion, floated from the ground potential, and a bias voltage is applied to the rotary table 11 so that vacuum processing can be performed.

FIG. 8 and FIG. 9 show a fifth embodiment of the present invention, which is different from the fourth embodiment in that the operating rod 34 is used as a grounding member and its tip end is extended to be substantially key-shaped. Since the tip 34A can be brought into contact with the shaft of the rotary table 11, the same operation as in the fourth embodiment can be expected, and the same effect can be expected. In each of the above embodiments, the grounding member 15 and the grounding members such as the rocking lever 21 and the operating rod 34 are made of a conductive material, and the members for fixing or mounting them to the vacuum container 1 are also made of a conductive material. However, the member that does not electrically connect the grounding member 15 and the like to the vacuum container 1 does not need to use a conductive material, and can be appropriately selected.

The present invention is not limited to the above-mentioned embodiment, but the design can be changed as appropriate, and the present invention can be applied to a sputtering apparatus or the like.

[0027]

[Effect of the device]

 As described above, the present invention provides a vacuum processing apparatus provided with a member to which a high voltage is applied in a vacuum container, in which a grounding member which is in contact with the member by a mechanical urging means in an atmosphere open state is provided in the vacuum container. However, the pressure difference between the inside and the outside of the vacuum container in the vacuum state is utilized to separate the grounding member from the member against the biasing means. A member to which a high voltage is applied mechanically and reliably can be grounded or ungrounded, which improves safety and reliability and prevents personal injury.

The present invention also provides a vacuum processing apparatus comprising a member to which a high voltage is applied in a vacuum container, wherein the member is opened by a mechanical urging means in an open state in which the vacuum container can be accessed by humans. Since the grounding member that comes into contact with the grounding member is arranged in the vacuum container and the vacuum container is closed, the grounding member is pulled away from the member against the biasing means. By opening and closing the vacuum container, it is possible to automatically and purely mechanically connect a member to which high voltage is applied to the grounded or non-grounded state, and the structure is simple and the operation is reliable, improving reliability and safety. be able to.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing a first embodiment of the present invention.

FIG. 2 is an enlarged view of part A in FIG.

FIG. 3 is an enlarged cross-sectional view showing an operating state of the safety means in FIG.

FIG. 4 is a sectional view showing an essential part of a second embodiment of the present invention.

FIG. 5 is a sectional view showing an essential part of a third embodiment of the present invention.

FIG. 6 is a sectional view showing an essential part of a fourth embodiment of the present invention.

FIG. 7 is an enlarged sectional view showing a non-grounded state of a fourth embodiment.

FIG. 8 is a vertical sectional view showing a fifth embodiment of the present invention.

9 is a cross-sectional view taken along the line BB of FIG.

FIG. 10 is a vertical sectional view of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum container 5 Opening / closing door 10 Base material 11 Member to which high voltage is applied (rotary table) 12 Bias power supply (high voltage power supply) 15 Grounding member 19 Coil spring (biasing means) 21 Lever (grounding member) 30 Swing lever (grounding) Member) 34 operating rod (grounding member) 36 coil spring (biasing means)

Claims (2)

[Scope of utility model registration request] 1. A vacuum processing apparatus comprising a member to which a high voltage is applied in a vacuum container, wherein a grounding member which is in contact with the member by mechanical urging means in the atmosphere open state is arranged in the vacuum container, and a vacuum state is provided. The vacuum processing apparatus is characterized in that the grounding member is separated from the member against the biasing means by utilizing the pressure difference between the inside and the outside of the vacuum container. 2. A vacuum processing apparatus comprising a member to which a high voltage is applied in a vacuum container, wherein a grounding member which contacts said member by a mechanical urging means in an open state accessible to a human being in the vacuum container. A vacuum processing apparatus, wherein the grounding member is disposed inside the vacuum container, and the grounding member is pulled away from the member against the biasing means by closing the vacuum container.