JPH058385Y2 - - Google Patents
Info
- Publication number
- JPH058385Y2 JPH058385Y2 JP1986117872U JP11787286U JPH058385Y2 JP H058385 Y2 JPH058385 Y2 JP H058385Y2 JP 1986117872 U JP1986117872 U JP 1986117872U JP 11787286 U JP11787286 U JP 11787286U JP H058385 Y2 JPH058385 Y2 JP H058385Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- damper
- negative pressure
- clean room
- indoor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002159 abnormal effect Effects 0.000 claims description 10
- 230000002265 prevention Effects 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000007257 malfunction Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986117872U JPH058385Y2 (zh) | 1986-07-31 | 1986-07-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986117872U JPH058385Y2 (zh) | 1986-07-31 | 1986-07-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6326045U JPS6326045U (zh) | 1988-02-20 |
JPH058385Y2 true JPH058385Y2 (zh) | 1993-03-02 |
Family
ID=31003793
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986117872U Expired - Lifetime JPH058385Y2 (zh) | 1986-07-31 | 1986-07-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH058385Y2 (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2534779B2 (ja) * | 1989-09-28 | 1996-09-18 | 山口日本電気株式会社 | 圧力差制御装置 |
CA2617587C (en) * | 2005-08-09 | 2012-06-05 | Camfil Farr, Inc. | Integrated containment system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5716451B2 (zh) * | 1977-07-14 | 1982-04-05 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217137Y2 (zh) * | 1971-12-23 | 1977-04-18 | ||
JPS5716451U (zh) * | 1980-06-23 | 1982-01-27 |
-
1986
- 1986-07-31 JP JP1986117872U patent/JPH058385Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5716451B2 (zh) * | 1977-07-14 | 1982-04-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS6326045U (zh) | 1988-02-20 |
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