JPH0583634B2 - - Google Patents
Info
- Publication number
- JPH0583634B2 JPH0583634B2 JP57202006A JP20200682A JPH0583634B2 JP H0583634 B2 JPH0583634 B2 JP H0583634B2 JP 57202006 A JP57202006 A JP 57202006A JP 20200682 A JP20200682 A JP 20200682A JP H0583634 B2 JPH0583634 B2 JP H0583634B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- phase
- base material
- hard
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010432 diamond Substances 0.000 claims description 26
- 229910003460 diamond Inorganic materials 0.000 claims description 22
- 239000012071 phase Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 150000002736 metal compounds Chemical class 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical group [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 claims 1
- 239000010408 film Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000007737 ion beam deposition Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- -1 SiC Chemical class 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910010060 TiBN Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 238000012733 comparative method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20200682A JPS5993869A (ja) | 1982-11-19 | 1982-11-19 | ダイヤモンドを含有する硬質層被覆構造物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20200682A JPS5993869A (ja) | 1982-11-19 | 1982-11-19 | ダイヤモンドを含有する硬質層被覆構造物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5993869A JPS5993869A (ja) | 1984-05-30 |
| JPH0583634B2 true JPH0583634B2 (ko) | 1993-11-26 |
Family
ID=16450360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20200682A Granted JPS5993869A (ja) | 1982-11-19 | 1982-11-19 | ダイヤモンドを含有する硬質層被覆構造物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5993869A (ko) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59166670A (ja) * | 1983-03-11 | 1984-09-20 | Mitsubishi Metal Corp | 耐摩耗性のすぐれた表面被覆工具部材 |
| JPS59166673A (ja) * | 1983-03-11 | 1984-09-20 | Mitsubishi Metal Corp | 耐摩耗性のすぐれた表面被覆工具部材 |
| JPS59170261A (ja) * | 1983-03-14 | 1984-09-26 | Mitsubishi Metal Corp | 耐摩耗性のすぐれた表面被覆工具部材 |
| JPS61106494A (ja) * | 1984-10-29 | 1986-05-24 | Kyocera Corp | ダイヤモンド被膜部材及びその製法 |
| JPS63140084A (ja) * | 1986-12-01 | 1988-06-11 | Sumitomo Electric Ind Ltd | 硬質炭素被覆部品 |
| JPH01103310A (ja) * | 1987-10-16 | 1989-04-20 | Sumitomo Electric Ind Ltd | 表面弾性波素子 |
| JPH01261570A (ja) * | 1988-04-08 | 1989-10-18 | Idemitsu Petrochem Co Ltd | メカニカルシール |
| US5260106A (en) * | 1990-08-03 | 1993-11-09 | Fujitsu Limited | Method for forming diamond films by plasma jet CVD |
| GB9224697D0 (en) * | 1992-11-25 | 1993-01-13 | Amaratunga Gehan A J | Doping of highly tetrahedral diamond-like amorphous carbon |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56166370A (en) * | 1980-05-27 | 1981-12-21 | Mitsubishi Metal Corp | Surface coated tool member of superior abrasion resistance and corrosion resistance |
| JPS5775744A (en) * | 1980-10-31 | 1982-05-12 | Toshiba Tungaloy Co Ltd | Tool containing and coated with dispersed material |
-
1982
- 1982-11-19 JP JP20200682A patent/JPS5993869A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56166370A (en) * | 1980-05-27 | 1981-12-21 | Mitsubishi Metal Corp | Surface coated tool member of superior abrasion resistance and corrosion resistance |
| JPS5775744A (en) * | 1980-10-31 | 1982-05-12 | Toshiba Tungaloy Co Ltd | Tool containing and coated with dispersed material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5993869A (ja) | 1984-05-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6436519B2 (en) | Cutting tool with multilayer, wear-resistant coating | |
| US6902764B2 (en) | Oxide coated cutting tool | |
| US8293359B2 (en) | Multilayer CVD-coating and tool with such a coating | |
| JP4028891B2 (ja) | 多成分系硬質物層の製造法および複合体 | |
| CN101305112B (zh) | 用于制备涂覆底材型体的方法、具有涂层的底材型体及此涂覆底材型体的用途 | |
| JPH06951B2 (ja) | 高密着性ダイヤモンド被覆部材 | |
| EP0379220A1 (en) | Diamond coated sintered body | |
| US6284366B1 (en) | Cutting tool and method of making same | |
| JPWO2008026700A1 (ja) | 切削工具及びその製造方法並びに切削方法 | |
| US20030143402A1 (en) | Superior toughness and adhesive strength ceramic coating of titanium aluminum carbon nitride-amorphous carbon nanocomposite | |
| Klages et al. | Diamond coatings and cBN coatings for tools | |
| JPH0583634B2 (ko) | ||
| CN103506640B (zh) | 一种具有涂层的切削工具及其制作方法 | |
| WO2021069492A1 (en) | A coated cutting tool | |
| JPS623234B2 (ko) | ||
| US6235416B1 (en) | Composite body and production process | |
| JP3353239B2 (ja) | ダイヤモンド類被覆部材の製造方法 | |
| JPS6155591B2 (ko) | ||
| EP0549801A1 (en) | Diamond-covered member and production thereof | |
| JPH09262705A (ja) | 硬質被覆層がすぐれた靭性を有する表面被覆炭化タングステン基超硬合金製切削工具 | |
| JPS6312940B2 (ko) | ||
| JPH0558067B2 (ko) | ||
| KR100991355B1 (ko) | 절삭공구 / 내마모성 공구용 표면 피복부재용 박막 | |
| JPH0433865B2 (ko) | ||
| KR930010199B1 (ko) | 다이어몬드 피복부재 및 그 제조방법 |