JPH0583634B2 - - Google Patents

Info

Publication number
JPH0583634B2
JPH0583634B2 JP57202006A JP20200682A JPH0583634B2 JP H0583634 B2 JPH0583634 B2 JP H0583634B2 JP 57202006 A JP57202006 A JP 57202006A JP 20200682 A JP20200682 A JP 20200682A JP H0583634 B2 JPH0583634 B2 JP H0583634B2
Authority
JP
Japan
Prior art keywords
diamond
phase
base material
hard
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57202006A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5993869A (ja
Inventor
Akira Doi
Naoharu Fujimori
Takeshi Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP20200682A priority Critical patent/JPS5993869A/ja
Publication of JPS5993869A publication Critical patent/JPS5993869A/ja
Publication of JPH0583634B2 publication Critical patent/JPH0583634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP20200682A 1982-11-19 1982-11-19 ダイヤモンドを含有する硬質層被覆構造物 Granted JPS5993869A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20200682A JPS5993869A (ja) 1982-11-19 1982-11-19 ダイヤモンドを含有する硬質層被覆構造物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20200682A JPS5993869A (ja) 1982-11-19 1982-11-19 ダイヤモンドを含有する硬質層被覆構造物

Publications (2)

Publication Number Publication Date
JPS5993869A JPS5993869A (ja) 1984-05-30
JPH0583634B2 true JPH0583634B2 (enrdf_load_stackoverflow) 1993-11-26

Family

ID=16450360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20200682A Granted JPS5993869A (ja) 1982-11-19 1982-11-19 ダイヤモンドを含有する硬質層被覆構造物

Country Status (1)

Country Link
JP (1) JPS5993869A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59166673A (ja) * 1983-03-11 1984-09-20 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
JPS59166670A (ja) * 1983-03-11 1984-09-20 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
JPS59170261A (ja) * 1983-03-14 1984-09-26 Mitsubishi Metal Corp 耐摩耗性のすぐれた表面被覆工具部材
JPS61106494A (ja) * 1984-10-29 1986-05-24 Kyocera Corp ダイヤモンド被膜部材及びその製法
JPS63140084A (ja) * 1986-12-01 1988-06-11 Sumitomo Electric Ind Ltd 硬質炭素被覆部品
JPH01103310A (ja) * 1987-10-16 1989-04-20 Sumitomo Electric Ind Ltd 表面弾性波素子
JPH01261570A (ja) * 1988-04-08 1989-10-18 Idemitsu Petrochem Co Ltd メカニカルシール
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
GB9224697D0 (en) * 1992-11-25 1993-01-13 Amaratunga Gehan A J Doping of highly tetrahedral diamond-like amorphous carbon

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56166370A (en) * 1980-05-27 1981-12-21 Mitsubishi Metal Corp Surface coated tool member of superior abrasion resistance and corrosion resistance
JPS5775744A (en) * 1980-10-31 1982-05-12 Toshiba Tungaloy Co Ltd Tool containing and coated with dispersed material

Also Published As

Publication number Publication date
JPS5993869A (ja) 1984-05-30

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