JPH0578680B2 - - Google Patents

Info

Publication number
JPH0578680B2
JPH0578680B2 JP60105090A JP10509085A JPH0578680B2 JP H0578680 B2 JPH0578680 B2 JP H0578680B2 JP 60105090 A JP60105090 A JP 60105090A JP 10509085 A JP10509085 A JP 10509085A JP H0578680 B2 JPH0578680 B2 JP H0578680B2
Authority
JP
Japan
Prior art keywords
drive
fluid
diaphragm
frequency
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60105090A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61265398A (ja
Inventor
Isao Inui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60105090A priority Critical patent/JPS61265398A/ja
Publication of JPS61265398A publication Critical patent/JPS61265398A/ja
Publication of JPH0578680B2 publication Critical patent/JPH0578680B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Reciprocating Pumps (AREA)
JP60105090A 1985-05-17 1985-05-17 流体駆動装置 Granted JPS61265398A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60105090A JPS61265398A (ja) 1985-05-17 1985-05-17 流体駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60105090A JPS61265398A (ja) 1985-05-17 1985-05-17 流体駆動装置

Publications (2)

Publication Number Publication Date
JPS61265398A JPS61265398A (ja) 1986-11-25
JPH0578680B2 true JPH0578680B2 (enrdf_load_html_response) 1993-10-29

Family

ID=14398215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60105090A Granted JPS61265398A (ja) 1985-05-17 1985-05-17 流体駆動装置

Country Status (1)

Country Link
JP (1) JPS61265398A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2945932B2 (ja) * 1989-07-31 1999-09-06 本多電子株式会社 超音波ポンプ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置

Also Published As

Publication number Publication date
JPS61265398A (ja) 1986-11-25

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