JPH0575828B2 - - Google Patents

Info

Publication number
JPH0575828B2
JPH0575828B2 JP1014693A JP1469389A JPH0575828B2 JP H0575828 B2 JPH0575828 B2 JP H0575828B2 JP 1014693 A JP1014693 A JP 1014693A JP 1469389 A JP1469389 A JP 1469389A JP H0575828 B2 JPH0575828 B2 JP H0575828B2
Authority
JP
Japan
Prior art keywords
electron beam
thin film
film formation
intensity
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1014693A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02197562A (ja
Inventor
Hiromasa Maruno
Makoto Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1469389A priority Critical patent/JPH02197562A/ja
Publication of JPH02197562A publication Critical patent/JPH02197562A/ja
Publication of JPH0575828B2 publication Critical patent/JPH0575828B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Physical Vapour Deposition (AREA)
JP1469389A 1989-01-24 1989-01-24 薄膜製造装置 Granted JPH02197562A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1469389A JPH02197562A (ja) 1989-01-24 1989-01-24 薄膜製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1469389A JPH02197562A (ja) 1989-01-24 1989-01-24 薄膜製造装置

Publications (2)

Publication Number Publication Date
JPH02197562A JPH02197562A (ja) 1990-08-06
JPH0575828B2 true JPH0575828B2 (enExample) 1993-10-21

Family

ID=11868270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1469389A Granted JPH02197562A (ja) 1989-01-24 1989-01-24 薄膜製造装置

Country Status (1)

Country Link
JP (1) JPH02197562A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8952930B2 (en) 2003-02-10 2015-02-10 N-Trig Ltd. Touch detection for a digitizer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5984144A (ja) * 1982-11-08 1984-05-15 Ulvac Corp 不均質光学膜形成装置における膜特性監視装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8952930B2 (en) 2003-02-10 2015-02-10 N-Trig Ltd. Touch detection for a digitizer

Also Published As

Publication number Publication date
JPH02197562A (ja) 1990-08-06

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