JPH0575280B2 - - Google Patents

Info

Publication number
JPH0575280B2
JPH0575280B2 JP61174037A JP17403786A JPH0575280B2 JP H0575280 B2 JPH0575280 B2 JP H0575280B2 JP 61174037 A JP61174037 A JP 61174037A JP 17403786 A JP17403786 A JP 17403786A JP H0575280 B2 JPH0575280 B2 JP H0575280B2
Authority
JP
Japan
Prior art keywords
optical axis
multipole
electrostatic field
ion beam
electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61174037A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330800A (ja
Inventor
Yoshihiro Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP17403786A priority Critical patent/JPS6330800A/ja
Publication of JPS6330800A publication Critical patent/JPS6330800A/ja
Publication of JPH0575280B2 publication Critical patent/JPH0575280B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP17403786A 1986-07-24 1986-07-24 Ｅｘｂ速度選別器 Granted JPS6330800A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17403786A JPS6330800A (ja) 1986-07-24 1986-07-24 Ｅｘｂ速度選別器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17403786A JPS6330800A (ja) 1986-07-24 1986-07-24 Ｅｘｂ速度選別器

Publications (2)

Publication Number Publication Date
JPS6330800A JPS6330800A (ja) 1988-02-09
JPH0575280B2 true JPH0575280B2 (enrdf_load_stackoverflow) 1993-10-20

Family

ID=15971523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17403786A Granted JPS6330800A (ja) 1986-07-24 1986-07-24 Ｅｘｂ速度選別器

Country Status (1)

Country Link
JP (1) JPS6330800A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62172650A (ja) * 1986-01-23 1987-07-29 Jeol Ltd 集束イオンビ−ム装置

Also Published As

Publication number Publication date
JPS6330800A (ja) 1988-02-09

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