JPH0575267A - Manufacture of multi-wire wiring board - Google Patents

Manufacture of multi-wire wiring board

Info

Publication number
JPH0575267A
JPH0575267A JP23194391A JP23194391A JPH0575267A JP H0575267 A JPH0575267 A JP H0575267A JP 23194391 A JP23194391 A JP 23194391A JP 23194391 A JP23194391 A JP 23194391A JP H0575267 A JPH0575267 A JP H0575267A
Authority
JP
Japan
Prior art keywords
plating
wire
copper
vanadium
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23194391A
Other languages
Japanese (ja)
Other versions
JP2586765B2 (en
Inventor
Kuniji Suzuki
邦司 鈴木
Kanji Murakami
敢次 村上
Akiyoshi Takagi
章嘉 高木
Koji Kamiyama
宏治 上山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP23194391A priority Critical patent/JP2586765B2/en
Publication of JPH0575267A publication Critical patent/JPH0575267A/en
Application granted granted Critical
Publication of JP2586765B2 publication Critical patent/JP2586765B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To enable plating void to be suppressed by using a plating bath where vanadium oxide or vanadium oxalate is added to an electroless copper plating liquid which contains at least copper ion and its complexing agent, a reducing agent, and a pH adjuster. CONSTITUTION:Plating is made by using a plating bath where vanadium oxide or vanadium oxalate is added to an electroless copper plating liquid which contains at least copper ion and its complexing agent, a reducing agent, and pH adjuster as a plating bath of electroless plating. When a multi-wire wiring board is plated in a bath where a vanadium pentoxide of 1.0X10<-5>mol/dm<3> is added, a through-hole wire-clad layer is completely coated with an electroless plating copper. On the other hand, in the case where no vanadium pentoxide is added, a plating void remains partially even if the plating thickness on a copper monitor is 15mum, thus enabling the plating void to be suppressed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、絶縁層で被覆された導
電性ワイヤーにより、電気的に接合されたマルチワイヤ
ー配線板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multi-wire wiring board electrically joined by a conductive wire covered with an insulating layer.

【0002】[0002]

【従来の技術】マルチワイヤー配線板は、特公昭45−
21434号公報に示されているように、ポリイミド樹
脂等の絶縁材料で被覆された銅線等の導電性ワイヤーに
より、必要箇所がスルーホール等を介して電気的に接合
された配線板である。このマルチワイヤー配線板は配線
パターンがワイヤーにより形成されるため、設計変更の
際フォトマスクを作り直す必要がなく、また斜め布線に
よるクロストークの低減、良好な電気特性その他多くの
優れた点を持っている。そしてマルチワイヤー配線板で
は、スルーホール間の接続がφ0.10mm程度の導電
性ワイヤーのみで行われるために、スルーホールワイヤ
ー部のめっきが接続信頼性上極めて重要である。従来
は、スルーホールワイヤー部を形成するめっき浴として
特公昭45−21434号公報に示されているように、
硫酸銅のような第二銅イオンの供給源とホルムアルデヒ
ドのような第二銅イオンの還元剤とテトラソジウムエチ
レンジアミン酢酸のような第二銅イオンの錯化剤と、ソ
ジウムヒドロキシドを含有する無電解銅めっき浴が提案
されていた。
2. Description of the Related Art A multi-wire wiring board is disclosed in Japanese Patent Publication No.
As disclosed in Japanese Patent No. 21434, it is a wiring board in which necessary portions are electrically joined through a through hole or the like by a conductive wire such as a copper wire covered with an insulating material such as a polyimide resin. Since the wiring pattern of this multi-wire wiring board is formed by wires, there is no need to remake the photomask when changing the design, and crosstalk is reduced due to diagonal wiring, good electrical characteristics, and many other advantages. ing. In the multi-wire wiring board, since the connection between the through holes is made only by the conductive wire having a diameter of about 0.10 mm, the plating of the through hole wire portion is extremely important in connection reliability. Conventionally, as disclosed in JP-B-45-21434 as a plating bath for forming a through-hole wire portion,
Contains a source of cupric ions such as copper sulfate and a reducing agent of cupric ions such as formaldehyde and a complexing agent of cupric ions such as tetrasodium ethylenediamine acetic acid, and sodium hydroxide Electroless copper plating baths have been proposed.

【0003】[0003]

【発明が解決しようとする課題】特公昭45−2143
4号公報に示されているめっき浴を用いて、マルチワイ
ヤー配線板を製造した場合、図2で示したように、スル
ーホール穴あけ後の穴品質が悪い部分では、アルカリ過
マンガン酸溶液によるホールクリーニングやその他のめ
っき前処理により、めっき析出を抑制する汚染物等がエ
ッチバックされたスルーホールワイヤー被覆層等にトラ
ップされ、めっきボイドが発生したり、部分的にめっき
厚が薄くなるという問題点があった。本発明は、めっき
ボイドのない優れた穴品質のマルチワイヤー配線板の製
造方法を提供するものである。
[Problems to be Solved by the Invention] Japanese Patent Publication No. 45-2143
When a multi-wire wiring board is manufactured using the plating bath disclosed in Japanese Patent Publication No. 4 publication, as shown in FIG. 2, in a portion where the hole quality after through-hole drilling is poor, a hole formed by an alkaline permanganate solution is used. Due to cleaning and other pre-plating treatment, contaminants that suppress plating deposition are trapped in the etched back through-hole wire coating layer, etc., resulting in plating voids and partial reduction in plating thickness. was there. The present invention provides a method of manufacturing a multi-wire wiring board having excellent hole quality without plating voids.

【0004】[0004]

【課題を解決するための手段】本発明は、内層回路板に
布線用接着剤をプレスし、その上に絶縁層で被覆された
導電性ワイヤーを布線し、その上にプリプレグ及び外層
銅箔をプレスした後、得られた基板に穴あけしてスルー
ホールを形成し、前記ワイヤーのスルーホール部を無電
解メッキして回路を電気的に接合するマルチワイヤー配
線板の製造方法において、無電解めっきのめっき浴とし
て、少なくとも銅イオンとその錯化剤、還元剤及びpH
調整剤を含有する無電解銅めっき液にバナジウム酸化物
又はバナジウムのオキソ酸塩を添加しためっき浴を用い
てめっきすることを特徴とするマルチワイヤー配線板の
製造方法を提供するものである。
According to the present invention, an adhesive for wiring is pressed on an inner layer circuit board, a conductive wire covered with an insulating layer is laid on the inner layer circuit board, and a prepreg and an outer layer copper are formed on the conductive wire. After pressing the foil, a through hole is formed in the obtained substrate to form a through hole, and the through hole portion of the wire is electrolessly plated to electrically join the circuit. As a plating bath for plating, at least copper ions and their complexing agents, reducing agents and pH
Disclosed is a method for producing a multi-wire wiring board, which comprises plating using a plating bath in which vanadium oxide or oxo acid salt of vanadium is added to an electroless copper plating solution containing a modifier.

【0005】本発明のマルチワイヤー配線板の製造方法
において、スルーホール部を無電解銅めっきする工程以
外は従来マルチワイヤー配線板の製造において用いられ
ていた方法が用いられる。また、めっき工程に用いられ
るめっき浴中の銅イオン源、錯化剤、還元剤及びpH調
整剤は従来用いられていたものが用いられる。また、め
っき浴中にはポリエチレングリコール、α,α′−ジピ
リジル等の添加剤が含まれていてもよい。
In the method for manufacturing a multi-wire wiring board of the present invention, the methods conventionally used in the manufacture of a multi-wire wiring board are used except for the step of electroless copper plating of the through holes. Further, as the copper ion source, the complexing agent, the reducing agent and the pH adjusting agent in the plating bath used in the plating step, those conventionally used can be used. Further, the plating bath may contain additives such as polyethylene glycol and α, α′-dipyridyl.

【0006】本発明においてはめっき液中にバナジウム
酸化物とバナジウムのオキソ酸塩を添加しためっき浴を
用いることを特徴とする。バナジウム酸化物としては五
酸化バナジウム(V25)が好適に用いられる。バナジ
ウムのオキソ酸塩としてはメタバナジン酸ナトリウム
(NaVO342O)が好適に用いられる。バナジウ
ム酸化物又はバナジウムのオキソ酸塩の添加量として
は、0.05×10-5〜30×10-5mol/dm3
好ましい。
The present invention is characterized by using a plating bath in which vanadium oxide and vanadium oxoacid salt are added to the plating solution. Vanadium pentoxide (V 2 O 5 ) is preferably used as the vanadium oxide. Sodium metavanadate as oxoacid salt of vanadium (NaVO 3 · 4 H 2 O ) is preferably used. The addition amount of vanadium oxide or vanadium oxoacid salt is preferably 0.05 × 10 −5 to 30 × 10 −5 mol / dm 3 .

【0007】[0007]

【作用】マルチワイヤー配線板の製造においては、スル
ーホールワイヤー露出部とスルーホールの無電解銅めっ
きとの接続信頼性を向上させるために、めっき前のホー
ルクリーニング工程のアルカリ過マンガン酸処理液中で
ワイヤー被覆層をエッチバックしてめっきグリップを作
製している。しかし、エッチバックされたワイヤー被覆
層の部分や、穴あけ後のスルーホール部の粗さが大きい
部分には、アルカリ過マンガン酸溶液や、その後のシー
ディングプロセス処理液がトラップされてしまい、容易
には除去できない。これらのトラップされた液は、無電
解銅めっき液中でめっき抑制汚染物として挙動するた
め、めっき液汚染物質に敏感なめっき浴では、めっき析
出が阻害されめっき析出開始が遅れてめっきが薄くなっ
たり、ひどい場合にはめっきボイドとなってしまう。と
ころがバナジウムの酸化物又はバナジウムのオキソ酸塩
を添加しためっき浴を用いると、スルーホールワイヤー
近傍に汚染物質が存在してもホルマリンの酸化反応、銅
イオンの還元反応共に抑制されずめっき被覆が迅速に行
われるため、めっきボイドを抑制することが可能であ
る。
[Operation] In the manufacture of multi-wire wiring boards, in order to improve the connection reliability between the exposed portion of the through-hole wire and the electroless copper plating of the through-hole, in the alkaline permanganate treatment solution in the hole cleaning step before plating. The wire coating layer is etched back to produce a plated grip. However, the alkali permanganate solution and the seeding process solution after that are easily trapped in the etched back wire coating layer and in the portion where the through-hole after the drilling has a large roughness. Cannot be removed. These trapped solutions behave as plating-suppressing contaminants in the electroless copper plating solution, so in plating baths that are sensitive to plating solution contaminants, plating deposition is inhibited and the start of plating deposition is delayed, resulting in thinner plating. Or, in severe cases, it will become a plating void. However, if a plating bath containing vanadium oxide or vanadium oxoacid salt is used, the formalin oxidation reaction and copper ion reduction reaction are not suppressed even if contaminants are present in the vicinity of the through-hole wire, and the plating coating is rapid. Therefore, the plating voids can be suppressed.

【0008】[0008]

【実施例】以下、本発明を実施例に基づいて詳細に説明
するが、本発明はこれに限定されるものではない。無電
解銅めっき反応の触媒になるパラジウム等の触媒を含有
するエポキシ積層板(日立化成工業(株)製、商品名M
CL−E168)の両面にパラジウム等の触媒を含有す
るエポキシ系の布線用接着剤(日立化成工業(株)製、
GEA−05N AS150)をプレスし、φ0.10
mm絶縁被覆層付銅ワイヤー(日立電線(株)製、HB
Hワイヤー)を両面に布線し、その上にプリプレグ(日
立化成工業(株)製GEA−168N)と銅箔をプレス
し、得られた基板に穴あけした後、アルカリ過マンガン
酸溶液でホールクリーニングし、パラジウム及びスズコ
ロイド溶液(日立化成工業(株)製HS−201B)で
触媒付与した基板を用いてめっき実験を行った。表1に
本実験で用いた無電解銅めっき浴の組成を示した。めっ
きした基板のマイクロセクションにより、スルーホール
ワイヤー部のめっき被覆率の測定及びボイド発生の有無
の観察を行った。スルーホールワイヤー部のめっき被覆
率は次式により算出した。結果を表2に示す。めっき被
覆率={(ワイヤーの両側がめっきで被覆されている箇
所×2+片側が被覆されている箇所×1)/(各サンプ
ル中のワイヤー接続部数×2)}×100
EXAMPLES The present invention will now be described in detail based on examples, but the present invention is not limited thereto. Epoxy laminated plate containing a catalyst such as palladium which becomes a catalyst for electroless copper plating reaction (manufactured by Hitachi Chemical Co., Ltd., trade name M)
CL-E168) an epoxy adhesive for wire wiring containing a catalyst such as palladium on both sides (manufactured by Hitachi Chemical Co., Ltd.,
GEA-05N AS150) is pressed and φ0.10
mm Copper wire with insulation coating layer (Hitachi Cable, HB
H wire) is laid on both sides, and prepreg (GEA-168N manufactured by Hitachi Chemical Co., Ltd.) and copper foil are pressed on the wire, and holes are drilled in the obtained substrate, and then hole cleaning is performed with an alkaline permanganate solution. Then, a plating experiment was performed using a substrate on which a catalyst was provided with a palladium and tin colloidal solution (HS-201B manufactured by Hitachi Chemical Co., Ltd.). Table 1 shows the composition of the electroless copper plating bath used in this experiment. The microsection of the plated substrate was used to measure the plating coverage of the through-hole wire portion and observe the presence or absence of voids. The plating coverage of the through-hole wire part was calculated by the following formula. The results are shown in Table 2. Plating coverage = {(location where both sides of the wire are coated with plating x 2 + location where one side is coated x 1) / (number of wire connections in each sample x 2)} x 100

【0009】[0009]

【表1】 [Table 1]

【0010】目標めっき厚は、銅箔析出速度モニター上
にめっきされた厚みを基準とした。
The target plating thickness was based on the thickness plated on the copper foil deposition rate monitor.

【0011】図1は本発明により得られたマルチワイヤ
ー配線板のスルーホール部の断面図であり、1は導電性
ワイヤー、2は導電性ワイヤーの絶縁層、3は布線用接
着剤、4はプリプレグ、5は外層銅箔、6は無電解めっ
き銅である.図2は従来のマルチワイヤー配線板のスル
ホールワイヤー部の断面図である。7はめっきボイド、
8はめっきの薄い部分である。図3は銅上への目標めっ
き厚とワイヤー部めっき被覆率との関係を示すグラフで
ある。
FIG. 1 is a cross-sectional view of a through hole portion of a multi-wire wiring board obtained by the present invention, in which 1 is a conductive wire, 2 is an insulating layer of the conductive wire, 3 is an adhesive for wiring, and 4 Is a prepreg, 5 is an outer layer copper foil, and 6 is electroless plated copper. FIG. 2 is a sectional view of a through-hole wire portion of a conventional multi-wire wiring board. 7 is a plating void,
8 is a thin portion of plating. FIG. 3 is a graph showing the relationship between the target plating thickness on copper and the wire portion plating coverage.

【0012】比較例 五酸化バナジウムを含まないめっき液でサンプル基板を
めっきした場合のスルーホールワイヤー部めっきボイド
の有無及びスルーホールワイヤー部めっき被覆率につい
て、それぞれ表2及び図3中に示す。図3は銅箔モニタ
ー上のめっき厚とスルーホールワイヤー部のめっき被覆
率の関係を示すグラフである。
Comparative Example The presence or absence of through-hole wire portion plating voids and through-hole wire portion plating coverage when a sample substrate was plated with a plating solution containing no vanadium pentoxide are shown in Table 2 and FIG. 3, respectively. FIG. 3 is a graph showing the relationship between the plating thickness on the copper foil monitor and the plating coverage of the through-hole wire portion.

【0013】図3に示したように、五酸化バナジウム
1.0×10-5mol/dm3を添加した浴でマルチワ
イヤー配線板をめっきした場合(実施例)、2.5μm
の銅箔モニター上めっき厚で、スルーホールワイヤー被
覆層が無電解めっき銅で完全に被覆されているのに対し
て、五酸化バナジウム無添加の場合(比較例)には、銅
箔モニター上のめっき厚が15μmでも一部めっきボイ
ドが残っており、このグラフは本発明の効果を顕著に示
している。また、表1に示した五酸化バナジウム添加濃
度とスルーホールのめっきボイド発生の有無の結果よ
り、バナジウム酸化物、あるいはバナジウムのオキソ酸
塩の添加量は0.05×10-5〜30×10-5mol/
dm3が望ましいことが分る。
As shown in FIG. 3, when a multi-wire wiring board was plated with a bath containing vanadium pentoxide 1.0 × 10 -5 mol / dm 3 (Example), 2.5 μm
On the copper foil monitor, the through-hole wire coating layer is completely covered with electroless plated copper, whereas when vanadium pentoxide is not added (comparative example), Even if the plating thickness is 15 μm, some plating voids remain, and this graph clearly shows the effect of the present invention. In addition, from the results of the vanadium pentoxide addition concentration shown in Table 1 and the presence or absence of the occurrence of plating voids in the through holes, the addition amount of vanadium oxide or vanadium oxoacid salt was 0.05 × 10 −5 to 30 × 10 -5 mol /
It turns out that dm 3 is desirable.

【0014】[0014]

【表2】 目標めっき厚=30μm[Table 2] Target plating thickness = 30 μm

【0015】[0015]

【発明の効果】本発明では、マルチワイヤー配線板の製
造方法において、穴あけ後のスルーホールに露出した導
電性ワイヤーを接続するためのスルーホールめっきに、
少なくとも銅イオンとその錯化剤、還元剤及びpH調整
剤を含有する無電解銅めっき液にバナジウム酸化物又は
バナジウムのオキソ酸塩を添加しためっき浴を用いてめ
っきすることにより、スルーホールワイヤー部に発生し
やすいめっきボイドをなくし、優れたワイヤー接続部を
有したマルチワイヤー配線板を製造できる。
According to the present invention, in the method for manufacturing a multi-wire wiring board, through-hole plating for connecting the conductive wire exposed in the through-hole after drilling,
Through-hole wire portion is obtained by plating using an electroless copper plating solution containing at least copper ions and their complexing agent, reducing agent and pH adjusting agent, with a vanadium oxide or vanadium oxoacid salt added thereto. It is possible to manufacture a multi-wire wiring board having excellent wire connection portions by eliminating plating voids that tend to occur in

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のスルーホールワイヤー部の断面図であ
る。
FIG. 1 is a sectional view of a through hole wire portion of the present invention.

【図2】従来のマルチワイヤー配線板のスルーホールワ
イヤー部の断面図である。
FIG. 2 is a sectional view of a through-hole wire portion of a conventional multi-wire wiring board.

【図3】銅箔モニター上のめっき厚とスルーホールワイ
ヤー部のめっき被覆率の関係を示すグラフである。
FIG. 3 is a graph showing the relationship between the plating thickness on the copper foil monitor and the plating coverage of the through-hole wire portion.

【符号の説明】[Explanation of symbols]

1 導電性ワイヤー 2 絶縁層 3 布線用接着剤 4 プリプレグ 5 外層銅箔 6 無電解めっき銅 7 めっきボイド 8 めっきの薄い部分 1 conductive wire 2 insulating layer 3 adhesive for wiring 4 prepreg 5 outer layer copper foil 6 electroless plating copper 7 plating void 8 thin plating part

───────────────────────────────────────────────────── フロントページの続き (72)発明者 上山 宏治 茨城県下館市大字小川1500番地 日立化成 工業株式会社電子部品事業部内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Koji Ueyama 1500 Ogawa, Shimodate City, Ibaraki Prefecture Hitachi Chemical Co., Ltd. Electronic Components Division

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 内層回路板に布線用接着剤をプレスし、
その上に絶縁層で被覆された導電性ワイヤーを布線し、
その上にプリプレグ及び外層銅箔をプレスした後、得ら
れた基板に穴あけしてスルーホールを形成し、前記ワイ
ヤーのスルーホール部を無電解メッキして回路を電気的
に接合するマルチワイヤー配線板の製造方法において、
無電解めっきのめっき浴として、少なくとも銅イオンと
その錯化剤、還元剤及びpH調整剤を含有する無電解銅
めっき液にバナジウム酸化物又はバナジウムのオキソ酸
塩を添加しためっき浴を用いてめっきすることを特徴と
するマルチワイヤー配線板の製造方法。
1. An inner layer circuit board is pressed with an adhesive for wiring,
Wiring a conductive wire covered with an insulating layer on it,
After pressing a prepreg and an outer layer copper foil on it, a hole is formed in the obtained substrate to form a through hole, and the through hole portion of the wire is electrolessly plated to electrically bond the circuit to a multi-wire wiring board. In the manufacturing method of
As a plating bath for electroless plating, plating is performed using a plating bath in which vanadium oxide or vanadium oxoacid salt is added to an electroless copper plating solution containing at least copper ions and their complexing agent, reducing agent and pH adjusting agent. A method for manufacturing a multi-wire wiring board, comprising:
【請求項2】 前記バナジウム酸化物又はバナジウムの
オキソ酸塩の添加濃度が、5.0×10-7〜3.0×1
-4mol/dm3の範囲であることを特徴とする請求
項1記載のマルチワイヤー配線板の製造方法。
2. The addition concentration of the vanadium oxide or the vanadium oxoacid salt is 5.0 × 10 −7 to 3.0 × 1.
The method for producing a multi-wire wiring board according to claim 1, wherein the range is 0 -4 mol / dm 3 .
JP23194391A 1991-09-11 1991-09-11 Manufacturing method of multi-wire wiring board Expired - Lifetime JP2586765B2 (en)

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JP23194391A JP2586765B2 (en) 1991-09-11 1991-09-11 Manufacturing method of multi-wire wiring board

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JPH0575267A true JPH0575267A (en) 1993-03-26
JP2586765B2 JP2586765B2 (en) 1997-03-05

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