Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Toshiba Electronic Device Solutions Corp
Original Assignee
Toshiba Corp
Toshiba Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Microelectronics CorpfiledCriticalToshiba Corp
Priority to JP7844887ApriorityCriticalpatent/JPS63245524A/ja
Publication of JPS63245524ApublicationCriticalpatent/JPS63245524A/ja
Publication of JPH0575130B2publicationCriticalpatent/JPH0575130B2/ja