JPH0574181B2 - - Google Patents

Info

Publication number
JPH0574181B2
JPH0574181B2 JP62103032A JP10303287A JPH0574181B2 JP H0574181 B2 JPH0574181 B2 JP H0574181B2 JP 62103032 A JP62103032 A JP 62103032A JP 10303287 A JP10303287 A JP 10303287A JP H0574181 B2 JPH0574181 B2 JP H0574181B2
Authority
JP
Japan
Prior art keywords
electron beam
electron
wafer
source
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62103032A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63269446A (ja
Inventor
Masahiko Okunuki
Isamu Shimoda
Mamoru Myawaki
Takeo Tsukamoto
Akira Suzuki
Tetsuya Kaneko
Toshihiko Takeda
Mitsuaki Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62103032A priority Critical patent/JPS63269446A/ja
Publication of JPS63269446A publication Critical patent/JPS63269446A/ja
Publication of JPH0574181B2 publication Critical patent/JPH0574181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP62103032A 1987-04-28 1987-04-28 電子ビーム装置 Granted JPS63269446A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62103032A JPS63269446A (ja) 1987-04-28 1987-04-28 電子ビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62103032A JPS63269446A (ja) 1987-04-28 1987-04-28 電子ビーム装置

Publications (2)

Publication Number Publication Date
JPS63269446A JPS63269446A (ja) 1988-11-07
JPH0574181B2 true JPH0574181B2 (enExample) 1993-10-15

Family

ID=14343317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62103032A Granted JPS63269446A (ja) 1987-04-28 1987-04-28 電子ビーム装置

Country Status (1)

Country Link
JP (1) JPS63269446A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5557105A (en) * 1991-06-10 1996-09-17 Fujitsu Limited Pattern inspection apparatus and electron beam apparatus
DE69223088T2 (de) * 1991-06-10 1998-03-05 Fujitsu Ltd Apparat zur Musterüberprüfung und Elektronenstrahlgerät

Also Published As

Publication number Publication date
JPS63269446A (ja) 1988-11-07

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