JPH0573973A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH0573973A
JPH0573973A JP23621491A JP23621491A JPH0573973A JP H0573973 A JPH0573973 A JP H0573973A JP 23621491 A JP23621491 A JP 23621491A JP 23621491 A JP23621491 A JP 23621491A JP H0573973 A JPH0573973 A JP H0573973A
Authority
JP
Japan
Prior art keywords
magneto
optical recording
recording medium
layer
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23621491A
Other languages
Japanese (ja)
Inventor
Hideki Matsuoka
秀樹 松岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIC Corp
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Dainippon Ink and Chemicals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd, Dainippon Ink and Chemicals Co Ltd filed Critical NKK Corp
Priority to JP23621491A priority Critical patent/JPH0573973A/en
Publication of JPH0573973A publication Critical patent/JPH0573973A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide the magneto-optical recording medium which has excellent repeating durability of erasing/recording/reproducing and has a recording sensitivity over an adequate range. CONSTITUTION:The Curie temp. of the magneto-optical recording layer in the magneto-optical recording medium constituted by laminating a 1st dielectric layer, a magneto-optical recording layer, a 2nd dielectric layer, and a reflection layer on a substrate is in a 160 to 220 deg.C range and the film thickness of the 2nd dielectric layer is in a 10 to 30nm range. The problem of the conventional media that the recording sensitivity deteriorates if the repeating durability of the erasing/recording/reproducing is attempted to be improved is solved. The magneto-optical recording medium with which the excellent repeating durability and the recording sensitivity of the adequate range are made compatible is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、光磁気記録媒体に関
し、特に消去/記録/再生の繰り返し耐久性に優れた光
磁気記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium, and more particularly to a magneto-optical recording medium having excellent durability against repeated erasing / recording / reproduction.

【0002】[0002]

【従来の技術】光ディスクは、大容量・高密度の外部記
憶装置であり、その重要性は年々増している。中でも、
光磁気記録は、書換え可能な不揮発性外部記憶方式とし
て、特に注目を集めている。光磁気記録方式は、外部磁
界によって記録を行なうものであり、光磁気記録膜のう
ちレーザ光で加熱された微小部分のみが加えられた外部
磁界の向きに磁化を向ける、という性質が、記録・消去
の原理である。従って、光磁気記録媒体にレーザ光を照
射したときの熱的挙動を検討することは、光磁気ディス
クを開発する上で不可欠である。
2. Description of the Related Art Optical disks are large-capacity / high-density external storage devices, and their importance is increasing year by year. Above all,
Magneto-optical recording has attracted particular attention as a rewritable nonvolatile external storage system. The magneto-optical recording method is one in which recording is performed by an external magnetic field, and the property that the magnetization is directed in the direction of the external magnetic field to which only a minute portion of the magneto-optical recording film heated by laser light is applied is It is the principle of erasure. Therefore, it is indispensable to study the thermal behavior when the magneto-optical recording medium is irradiated with laser light in order to develop a magneto-optical disk.

【0003】光磁気ディスクで、消去/記録/再生を繰
り返すと次第に再生信号強度が低下していくことが知ら
れている。
It is known that in a magneto-optical disk, the reproduction signal strength gradually decreases when erasing / recording / reproduction is repeated.

【0004】この劣化は、アモルファスである光磁気記
録層の構造緩和に起因するものと考えられている。通
常、アモルファス物質の構造緩和は熱活性化過程である
から、光磁気記録層に熱がとどまりにくい膜構成を実現
すれば、光磁気記録層の最高到達温度が低く抑えられ、
アモルファスの構造緩和も抑制できるものと考えられ
る。
This deterioration is considered to be due to structural relaxation of the amorphous magneto-optical recording layer. Usually, the structural relaxation of the amorphous material is a thermal activation process, so if the film structure in which heat is hard to stay in the magneto-optical recording layer is realized, the maximum temperature reached in the magneto-optical recording layer can be suppressed to a low level.
It is considered that the structural relaxation of the amorphous structure can be suppressed.

【0005】このような光磁気記録媒体の一例として、
ディスク基板上に、第1誘電体層、光磁気記録膜、第2
誘電体層及び反射層を順次積層して構成した、4層構造
の光磁気ディスクが、例えば、特開平2−152050
号などに開示されている。
As an example of such a magneto-optical recording medium,
A first dielectric layer, a magneto-optical recording film, and a second dielectric layer on the disk substrate.
A magneto-optical disk having a four-layer structure, which is formed by sequentially laminating a dielectric layer and a reflective layer, is disclosed in, for example, Japanese Patent Laid-Open No. 152520/1990.
No., etc.

【0006】しかしながら、光磁気記録層に熱がとどま
りにくいということは、光磁気記録層から熱が逃げやす
いことにほかならならない。これは記録/消去に際して
多大なレーザ光出力を要するということであるから、記
録感度が悪くなることを意味する。上記従来技術におい
ては、このような、繰り返し耐久性の向上に伴なう記録
感度の悪化に関しての考慮がなされていない。
However, the fact that heat is hard to stay in the magneto-optical recording layer means that the heat easily escapes from the magneto-optical recording layer. This means that a large laser light output is required for recording / erasing, which means that the recording sensitivity becomes poor. In the above-mentioned prior art, no consideration is given to such deterioration in recording sensitivity accompanying improvement in repeated durability.

【0007】[0007]

【発明が解決しようとする課題】本発明の目的は、消去
/記録/再生の繰り返しに対する耐久性に優れ、かつ、
適切な範囲の記録感度を有する光磁気記録媒体を提供す
ることである。
SUMMARY OF THE INVENTION An object of the present invention is to have excellent durability against repeated erasing / recording / reproduction, and
An object is to provide a magneto-optical recording medium having a recording sensitivity in an appropriate range.

【0008】[0008]

【課題を解決するための手段】本発明は上記課題を解決
するために、透明基板上に、第1誘電体層、光磁気記録
層、第2誘電体層及び反射層が積層されてなる光磁気記
録媒体において、光磁気記録層のキュリー温度が160
〜220℃の範囲内にあり、かつ、第2誘電体層の膜厚
が10〜30nmの範囲内にあることを特徴とする光磁気
記録媒体を提供する。
In order to solve the above problems, the present invention provides an optical system in which a first dielectric layer, a magneto-optical recording layer, a second dielectric layer and a reflective layer are laminated on a transparent substrate. In the magnetic recording medium, the Curie temperature of the magneto-optical recording layer is 160.
Provided is a magneto-optical recording medium characterized by being in the range of 220 ° C to 220 ° C and having a film thickness of the second dielectric layer in the range of 10 to 30 nm.

【0009】本発明で使用する基板としては、例えば、
ポリカーボネート、ポリメチルメタクリレート、アモル
ファスポリオレフィンのごとき樹脂又はガラスに直接案
内溝を形成した基板、ガラス又は樹脂の平板上にフォト
ポリマー法により案内溝を形成した基板などが挙げられ
る。
The substrate used in the present invention is, for example,
Examples thereof include substrates such as polycarbonate, polymethylmethacrylate, and amorphous polyolefin in which guide grooves are directly formed in resin or glass, substrates in which guide grooves are formed on a flat plate of glass or resin by a photopolymer method, and the like.

【0010】誘電体層には透明性の高い無機誘電体が用
いられる。その材質としては、例えば、SiNx、Si
x、AlSiON、AlSiN、AlN、AlTi
N、Ta25、ZnSなどが挙げられるが、なかでもS
iNx が好ましい。これら誘電体層の屈折率は1.8〜
2.5の範囲が好ましい。
An inorganic dielectric having a high transparency is used for the dielectric layer. Examples of the material include SiN x and Si
O x , AlSiON, AlSiN, AlN, AlTi
N, Ta 2 O 5 , ZnS and the like can be mentioned, but among them, S
iN x is preferred. The refractive index of these dielectric layers is 1.8 to
A range of 2.5 is preferred.

【0011】光磁気記録層を構成する材質としては、例
えば、TbFeCo、NdDyFeCoなどのごとき、
遷移金属と希土類金属の合金などが挙げられる。
Examples of the material forming the magneto-optical recording layer include TbFeCo and NdDyFeCo.
Examples include alloys of transition metals and rare earth metals.

【0012】本発明で使用する反射層の材質としては、
Al、Alと他の金属との合金などが挙げられるが、A
l、Al−Ti合金、Al−Cr合金が好ましい。
As the material of the reflective layer used in the present invention,
Examples include Al and alloys of Al with other metals.
1, Al-Ti alloy, and Al-Cr alloy are preferable.

【0013】誘電体層、光磁気記録層、及び反射層は、
スパッタリング、イオンプレーティングなどの物理蒸着
法(PVD)、プラズマCVDなどの化学蒸着法(CV
D)などによって形成する。
The dielectric layer, the magneto-optical recording layer, and the reflective layer are
Physical vapor deposition (PVD) such as sputtering and ion plating, chemical vapor deposition (CV) such as plasma CVD
D) or the like.

【0014】このようにして成膜した光磁気記録媒体
は、単体で使用してもよく、2枚を基板が外側にくるよ
うに貼り合わせて使用してもよい。
The magneto-optical recording medium thus formed may be used alone or may be used by adhering two so that the substrates are on the outside.

【0015】[0015]

【作用】本発明は、光磁気記録層から熱が逃げやすい膜
構成をとることにより消去/記録/再生の繰り返しに対
する耐久性を向上させ、同時に、その際に生じる記録感
度の悪化を、光磁気記録層のキュリー温度の調節により
防ぐことにより、優れた繰り返し耐久性と適切な記録感
度とを両立させることを可能にするものである。
The present invention improves durability against repeated erasing / recording / reproduction by adopting a film structure in which heat easily escapes from the magneto-optical recording layer, and at the same time, the deterioration of recording sensitivity caused at that time is prevented by the magneto-optical recording. By preventing it by adjusting the Curie temperature of the recording layer, it is possible to achieve both excellent repeat durability and appropriate recording sensitivity.

【0016】光磁気記録では、まず、レーザ光照射によ
り光磁気記録媒体に熱が加えられる。光磁気記録層を昇
温させた熱は、光磁気記録層内を伝導で伝わったり、又
は、第2誘電体層を通って反射層に伝わった後、反射層
内で伝導したり、あるいは大気中へ放射したりして、レ
ーザ光照射部以外へと逃げていく。この、第2誘電体層
を介して反射層に伝わる熱を考えた場合、誘電体層の熱
伝導度は他の層のそれよりも小さいため、第2誘電体層
の膜厚が薄いほど、反射層へ流れる熱は多くなり、光磁
気記録層から逃げる熱も大きくなることになる。しかし
ながら、第2誘電体層は、光磁気記録層の保護膜として
の役割をも果たしているため、その膜厚を小さくし過ぎ
ると、光磁気記録層が酸化しやすくなり、記録特性が劣
化してしまう。このため、第2誘電体層の膜厚には適正
範囲があり、10〜30nmが適正膜厚範囲である。
In magneto-optical recording, first, heat is applied to the magneto-optical recording medium by laser light irradiation. The heat generated by raising the temperature of the magneto-optical recording layer is conductively transmitted in the magneto-optical recording layer, or after being transmitted to the reflective layer through the second dielectric layer, it is conductive in the reflective layer or in the atmosphere. It radiates into the interior and escapes to the area other than the laser light irradiation area. Considering the heat transmitted to the reflective layer through the second dielectric layer, the thermal conductivity of the dielectric layer is smaller than that of the other layers, and thus the thinner the second dielectric layer, The heat flowing to the reflecting layer increases, and the heat escaping from the magneto-optical recording layer also increases. However, since the second dielectric layer also plays the role of a protective film for the magneto-optical recording layer, if the film thickness is made too small, the magneto-optical recording layer is easily oxidized and the recording characteristics deteriorate. I will end up. Therefore, there is an appropriate range for the film thickness of the second dielectric layer, and 10 to 30 nm is the appropriate film thickness range.

【0017】光磁気記録層のキュリー温度は低ければ低
いほど、小さなレーザ光出力で記録/消去が可能、すな
わち記録感度がよいわけである。しかしながら、キュリ
ー温度が低すぎると、室温におけるカー回転角が小さく
なり、再生信号強度の減少を招く。このため、キュリー
温度には適正範囲が存在し、それは160〜220℃で
ある。
As the Curie temperature of the magneto-optical recording layer is lower, recording / erasing can be performed with a smaller laser light output, that is, the recording sensitivity is better. However, if the Curie temperature is too low, the Kerr rotation angle at room temperature becomes small, and the reproduction signal strength is reduced. Therefore, there is an appropriate range for the Curie temperature, which is 160 to 220 ° C.

【0018】[0018]

【実施例】以下、実施例を示しながら、具体的説明を行
なう。
EXAMPLES A concrete description will be given below with reference to examples.

【0019】(実施例1)第1図は、本発明の光磁気記
録媒体の一例の断面図である。この構造の光磁気記録媒
体を、以下の手順で作製した。
(Embodiment 1) FIG. 1 is a sectional view of an example of the magneto-optical recording medium of the present invention. A magneto-optical recording medium having this structure was manufactured by the following procedure.

【0020】案内溝付きの直径5.25インチのポリカ
ーボネート製基板1に、まず、SiNx から成る膜厚1
00nmの第1誘電体層2をRFスパッタ法で成膜し、そ
の上にTb20Fe72Co8から成る膜厚25nmの光磁気
記録層3をDCスパッタ法で成膜し、さらにその上にS
iNx から成る膜厚20nmの第2誘電体層4をRFスパ
ッタ法で成膜し、さらにその上にAlTi合金から成る
膜厚75nmの反射層5をDCスパッタ法で成膜した。
A polycarbonate substrate 1 having a guide groove and a diameter of 5.25 inches is formed on a substrate 1 made of SiN x.
The first dielectric layer 2 having a thickness of 00 nm is formed by the RF sputtering method, and the magneto-optical recording layer 3 having a thickness of 25 nm made of Tb 20 Fe 72 Co 8 is formed on the first dielectric layer 2 by the DC sputtering method. S
A second dielectric layer 4 made of iN x and having a thickness of 20 nm was formed by RF sputtering, and a reflective layer 5 made of AlTi alloy and having a thickness of 75 nm was formed by DC sputtering on the second dielectric layer 4.

【0021】このようにして成膜した光磁気記録媒体の
磁気測定を行なった結果、キュリー温度は200℃であ
った。
As a result of magnetic measurement of the magneto-optical recording medium thus formed, the Curie temperature was 200 ° C.

【0022】(比較例1)比較例として、実施例1と同
様の構造を持つ光磁気記録媒体を、以下の手順で作製し
た。
(Comparative Example 1) As a comparative example, a magneto-optical recording medium having the same structure as that of Example 1 was manufactured by the following procedure.

【0023】案内溝付きの直径5.25インチのポリカ
ーボネート製基板1に、まず、SiNx から成る膜厚1
00nmの第1誘電体層2をRFスパッタ法で成膜し、そ
の上にTb20Fe69Co11から成る膜厚25nmの光磁気
記録層3をDCスパッタ法で成膜し、さらにその上にS
iNx から成る膜厚20nmの第2誘電体層4をRFスパ
ッタ法で成膜し、さらにその上にAlTi合金から成る
膜厚50nmの反射層5をDCスパッタ法で成膜した。
First, a polycarbonate substrate 1 having a guide groove and a diameter of 5.25 inches is formed on a substrate 1 made of SiN x.
The first dielectric layer 2 having a thickness of 00 nm is formed by the RF sputtering method, and the magneto-optical recording layer 3 having a thickness of 25 nm made of Tb 20 Fe 69 Co 11 is formed on the first dielectric layer 2 by the DC sputtering method. S
A second dielectric layer 4 made of iN x and having a thickness of 20 nm was formed by RF sputtering, and a reflective layer 5 made of AlTi alloy and having a thickness of 50 nm was formed thereon by DC sputtering.

【0024】このようにして成膜した光磁気記録媒体の
磁気測定を行なった結果、キュリー温度は230℃であ
った。
As a result of magnetic measurement of the magneto-optical recording medium thus formed, the Curie temperature was 230 ° C.

【0025】(評価)実施例及び比較例で得た光磁気記
録媒体について、回転数1,800rpm、 半径30mmに
おけるCNR(Carrier to noise ratio)のレーザ光出
力依存性を測定したところ、実施例1及び比較例1のい
ずれの光磁気記録媒体もレーザ光出力が5.5mWのとき
にCNR最大値(約49dB)を示した。この結果より、
両媒体の記録感度はほぼ同じであることがわかった。
(Evaluation) With respect to the magneto-optical recording media obtained in Examples and Comparative Examples, the dependence of CNR (Carrier to noise ratio) on laser light output at a rotation speed of 1,800 rpm and a radius of 30 mm was measured. Also, all the magneto-optical recording media of Comparative Example 1 showed the maximum CNR value (about 49 dB) when the laser light output was 5.5 mW. From this result,
It was found that the recording sensitivities of both media were almost the same.

【0026】次に、これらの光磁気記録媒体を光磁気デ
ィスクドライブに取り付け、回転数2400rpm で同一
トラックに対して消去/記録/再生の繰り返し耐久試験
を行なった。この試験における繰り返し回数とCNR低
下量との関係を第2図に示した。この結果より、本発明
による光磁気記録媒体は、優れた消去/記録/再生の繰
り返し耐久性を有することがわかる。
Next, these magneto-optical recording media were attached to a magneto-optical disk drive, and a repeated erasing / recording / reproducing durability test was performed on the same track at a rotation speed of 2400 rpm. The relationship between the number of repetitions and the CNR reduction amount in this test is shown in FIG. These results show that the magneto-optical recording medium according to the present invention has excellent erasing / recording / reproducing repetition durability.

【0027】なお、反射層としてAl−Ti合金以外に
Al、あるいはAl−Cr合金を用いても同様の効果が
得られた。
The same effect was obtained by using Al or Al-Cr alloy other than Al-Ti alloy for the reflective layer.

【0028】[0028]

【発明の効果】本発明による光磁気記録媒体は、記録感
度が適切な範囲にある。従って、本発明によれば、光デ
ィスクドライブなど装置側に新たな改良を要することな
く、光磁気ディスクの繰り返し耐久性を向上させること
ができる。
The magneto-optical recording medium according to the present invention has a suitable recording sensitivity. Therefore, according to the present invention, it is possible to improve the repeating durability of the magneto-optical disk without requiring new improvements on the device side such as an optical disk drive.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例及び比較例において例示した光
磁気記録媒体の断面構造を示した模式図である。
FIG. 1 is a schematic diagram showing a cross-sectional structure of a magneto-optical recording medium illustrated in Examples and Comparative Examples of the present invention.

【図2】本発明の実施例及び比較例において例示した光
磁気記録媒体を光磁気ディスクドライブに取り付け、回
転数2400rpm で同一トラックに対して消去/記録/
再生の繰り返し耐久試験における繰り返し回数とCNR
低下量との関係を示した図表である。
FIG. 2 shows the magneto-optical recording medium illustrated in Examples and Comparative Examples of the present invention, which is attached to a magneto-optical disk drive and erased / recorded / recorded on / from the same track at a rotation speed of 2400 rpm.
Number of repetitions and CNR in repeated durability test of regeneration
It is a chart showing the relationship with the amount of decrease.

【符号の説明】[Explanation of symbols]

1 基板 2 第1誘電体層 3 光磁気記録層 4 第2誘電体層 5 反射層 1 substrate 2 first dielectric layer 3 magneto-optical recording layer 4 second dielectric layer 5 reflective layer

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 透明基板上に、第1誘電体層、光磁気記
録層、第2誘電体層及び反射層が積層されてなる光磁気
記録媒体において、光磁気記録層のキュリー温度が16
0〜220℃の範囲内にあり、かつ、第2誘電体層の膜
厚が10〜30nmの範囲内にあることを特徴とする光磁
気記録媒体。
1. In a magneto-optical recording medium in which a first dielectric layer, a magneto-optical recording layer, a second dielectric layer and a reflective layer are laminated on a transparent substrate, the Curie temperature of the magneto-optical recording layer is 16.
A magneto-optical recording medium characterized in that it is in the range of 0 to 220 ° C. and the film thickness of the second dielectric layer is in the range of 10 to 30 nm.
【請求項2】 反射層が、Al、Al−Ti合金及びA
l−Cr合金から成る群から選ばれる物質から構成され
ることを特徴とする請求項1記載の光磁気記録媒体。
2. The reflective layer comprises Al, Al--Ti alloy and A.
The magneto-optical recording medium according to claim 1, wherein the magneto-optical recording medium comprises a substance selected from the group consisting of l-Cr alloys.
【請求項3】 第1誘電体層及び第2誘電体層がSiN
x から構成されることを特徴とする請求項2記載の光磁
気記録媒体。
3. The first dielectric layer and the second dielectric layer are SiN
The magneto-optical recording medium according to claim 2, wherein the magneto-optical recording medium comprises x .
JP23621491A 1991-09-17 1991-09-17 Magneto-optical recording medium Pending JPH0573973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23621491A JPH0573973A (en) 1991-09-17 1991-09-17 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23621491A JPH0573973A (en) 1991-09-17 1991-09-17 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH0573973A true JPH0573973A (en) 1993-03-26

Family

ID=16997472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23621491A Pending JPH0573973A (en) 1991-09-17 1991-09-17 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH0573973A (en)

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