JPH0573849A - Manufacture of thin film magnetic head - Google Patents

Abstract

PURPOSE:To reduce cost by cutting off in accordance with a mounting position to a slider the unnecessary electrode part of a read/write element, which is provided with a pair of take-out electrodes in each opposite direction of a coil on a wafer, arranging them on the slider and thereby making a common pattern. CONSTITUTION:A magnetic material, non-magnetic material, insulation material, conductor, etc., are laminated on the wafer 10, and a read/write element 12 having a magnetic yoke 14 with gap parts on the tips and a coil 15 is provided. The coil 15 is composed of a first and a second coil parts 16, 17, the end part 16b, 17b are branched to both directions by means of lead wires 21, 22, 23, and connected to each of take-out electrodes 20a, 20c and 20b, 20d. At the time of actually cutting out the element 12, in accordance with the mounting position of the element 12 depending on the type of a magnetic head to be made, the unnecessary electrode parts are cut off, and the element 12 is connected to the slider. Thus, the pattern is made common and the cost is reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a floating thin film magnetic head used in a magnetic recording device such as an HDD or a computer and having a thin film read / write element on the end face of a slider. Relates to improvement of the pattern of the read / write element.

[0002]

2. Description of the Related Art A floating thin-film magnetic head utilizes dynamic pressure generated by the viscosity of air generated when moving at a relatively high speed with respect to a recording medium such as a magnetic disk, so as to form a gap between the head and the magnetic disk surface. It is designed to generate a very small flying height and is used in read / write magnetic heads such as HDDs. As a general configuration of such a thin film magnetic head, two read / write elements are provided on one side surface of a slider having a substantially rectangular shape. More specifically, two levitation rails are formed in parallel on the bottom surface of the slider, and the above two read / write elements are arranged so as to be close to the ends of the two levitation rails. There is.

However, as the recording density has recently been increased, the magnetic head is also downsized, and the read / write element is required to be downsized accordingly, but there is a limit to the downsizing of the read / write element. Therefore, in the prior art, JP-A-2-263308
As shown in the publication, there is proposed a magnetic head in which only one read / write element is mounted on a slider. That is, as shown in FIG. 6 (A), two flying rails 2 are formed in parallel on the lower surface of the flat and substantially rectangular slider 1 at both longitudinal edges thereof. Then, one read / write element 3 is formed on one side surface in the lateral direction of the slider. With this configuration,
Even if the slider is small, a relatively large read / write element 3 can be used, so that the degree of freedom in pattern design is improved and the manufacturing work is simplified.

[0004]

However, when the magnetic head is actually mounted in the magnetic recording apparatus, it is not enough that the read / write element 3 is arranged on the right side in the figure as shown in FIG. 6 (A). However, there is a case where a thin film magnetic head in which the read / write element 3 is arranged on the left side as shown in FIG. Therefore, mask patterns of different shapes are formed according to both types,
Such a mask must be manufactured and stored, which complicates the work.

The present invention has been made in view of the above background, and an object of the present invention is to manufacture a thin film magnetic head having a structure in which one read / write element is mounted on a slider, from the same mask pattern. The present invention provides a method of manufacturing a thin film magnetic head that can be manufactured by using the read / write element, that is, the read / write element can be shared.

[0006]

In order to achieve the above object, in a method of manufacturing a thin film magnetic head according to the present invention, one of sliders having at least two flying rail portions on the surface side facing a magnetic recording medium is provided. In a method for manufacturing a thin film magnetic head in which a thin film read / write element is arranged in proximity to one of the flying rails on a side surface, first, on a wafer,
A read / write element consisting of a pattern having a pair of extraction electrodes arranged so as to extend in opposite directions is formed on the end side of the coil, and then, depending on the mounting position on the slider on which the read / write element is mounted. The read / write element is cut out from the wafer so that an unnecessary portion of the pair of extraction electrode portions is cut off, and the read / write element is arranged at a predetermined position of the slider.

[0007]

According to the present invention, the pattern shape of the read / write element formed on the wafer is such that the two extraction electrodes are connected to one end of the coil and the arrangement direction of the pair of extraction electrodes is different. ing. Then
In order to actually mount the read / write element on the slider, the unnecessary portion of the pair of extraction electrodes was cut off, so that one read / write element was mounted on the slider using the read / write element manufactured from the same mask pattern. The thin film magnetic head having the above-described structure can be manufactured. That is, it is possible to deal with the manufacture of a magnetic head of a type in which the mounting position of the read / write element with respect to the slider is different, only by changing the portion to be cut off.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the method of manufacturing a thin film magnetic head according to the present invention will be described below. First, as shown in FIG.
A large number of read / write elements 12 having a predetermined shape are formed by appropriately stacking magnetic materials, non-magnetic materials, insulating materials, conductors, etc. on the wafer 10. As shown in an enlarged view in FIG. 2, the read / write element 12 has a magnetic yoke 14 composed of core members which are stacked one above the other with a non-magnetic material sandwiched therebetween so as to have a gap at the tip (lower end in the figure), and Magnetic yoke 1
4 between the two core members, and a spiral coil 15 arranged so as to be interposed on the rear side (upper side in the drawing). In this example, the coil 15 is arranged in two layers. That is, the first coil portion 16 is located below
Is provided, and the second coil portion 17 is provided above the second coil portion 17 via an insulating layer.
To provide. The first and second coil portions 16 and 17 are electrically connected by arranging the center side end portions 16a and 17a at the same position in the vertical direction and connecting them.

Then, the extraction electrodes 20 are connected to both ends of the coil 15, that is, outer peripheral side ends 16b and 17b of the first coil portion 16 and the second coil portion 17, respectively. Here, in the present invention, when connecting the extraction electrode 20,
Conventionally, only one extraction electrode was connected to one end 16b, 17b, but instead of this, one end 16b is used.
Two extraction electrodes having different arrangement directions are provided on b and 17b.

That is, in the first coil portion 16, a substantially T-shaped first lead wire 21 is provided at the end portion 16b thereof, and the first and second ends of the first lead wire 21 extending in the opposite left and right directions are provided at the first and second ends. The second extraction electrodes 20a and 20b are connected in series. On the other hand, in the second coil portion 17, first, the second lead wire 22 is led out from the outer peripheral side end portion 17b in parallel with the first lead electrode 20a, and the third lead electrode 20c is provided at the tip thereof. .. Then, the third lead wire 23 is formed so as to be located on the extension line of the second lead wire 22 from the predetermined position of the outermost circumference of the coil of the second coil portion 17 to the outside, and the third lead wire 23 is formed. The fourth extraction electrode 20d is provided at the tip of the. As a result, the first
The line connecting the extraction electrode 20a and the second extraction electrode 20b is parallel to the line connecting the third extraction electrode 20c and the fourth extraction electrode 20d, and the read / write element 12 is symmetrical. It should be noted that the term “end portion side of the coil” as used in the present specification is a broad concept including the installation site of the third lead wire 23.

Next, each read / write element 12 is mounted on the wafer 1.
Cut out from 0. At the time of this cutting, the cutting position is adjusted depending on the type of magnetic head to be manufactured, that is, whether the read / write element is attached to the slider on the right side or the left side. Assuming now that the read / write element 12 is attached to the right side of the slider 24 as shown in FIG. 3, the read / write element 12 is cut out in a region surrounded by a broken line in FIG.
Remove a and 20c. Then, the read / write element 12 (having only the second and fourth extraction electrodes 20b and 20d) cut out is attached to a predetermined position of the slider 24. As a result, a thin film magnetic head is manufactured. In this way, in this example, the unnecessary take-out electrode can be excised at the same time as the step of cutting out the read / write element 12, so that the number of manufacturing steps does not increase. Although not shown, when the read / write element is mounted on the left side of the slider, the wafer 1 is formed by cutting off the second and fourth lead electrodes 20b and 20d.
The read / write element 12 may be cut out from 0.

In the above-described embodiment, the case where the coil is a two-layer type has been described as the structure of the read / write element, but the present invention is not limited to this, and as shown in FIG. It may be one. However,
As shown in the figure, in the case of the one-layer type, one coil end 30
Since a is located on the center side, the T-shaped lead wire 31 '
It is necessary to extend and arrange one end of the to the central portion.

Further, in the above-mentioned embodiment, an example having two sets of extraction electrodes 20 has been described, but the present invention is not limited to this, and for example, as shown in FIG. A pair of fifth and sixth extraction electrodes 20e, 20f may be connected to the coil connecting portion to have a shape having three sets of extraction electrodes, and the number of installed sets is arbitrary.
Incidentally, FIG. 3B shows an equivalent circuit thereof.

[0014]

As described above, in the method of manufacturing a thin film magnetic head according to the present invention, as a read / write element formed on a wafer, two extraction electrodes are connected to one end of the coil, and When the read / write element is actually mounted on the slider by changing the arrangement direction of the pair of extraction electrodes, unnecessary portions of the pair of extraction electrodes are cut off. A thin film magnetic head having a structure in which one read / write element is mounted on a slider can be manufactured by using the element. As a result, the wafer manufacturing process can be simplified and shortened, and the cost can be reduced.

[Brief description of drawings]

FIG. 1 is a plan view showing an example of a wafer having a large number of read / write elements used in an embodiment of a method of manufacturing a thin film magnetic head according to the present invention.

FIG. 2A is an enlarged plan view of the read / write element. (B) is an enlarged plan view showing the first coil portion. (C) is an enlarged plan view showing a second coil portion.

FIG. 3 is a front view showing an example of a thin film magnetic head manufactured by carrying out this embodiment.

FIG. 4 is a plan view showing another example of the read / write element used in the present invention.

FIG. 5A is a plan view showing still another example of the read / write element used in the present invention. (B) is a figure which shows the equivalent circuit.

FIG. 6 is a diagram showing a conventional magnetic head.

[Explanation of symbols]

 Reference Signs List 10 wafer 12 read / write element 15 coil 16b coil end 17b coil end 20a first extraction electrode 20b second extraction electrode 20c third extraction electrode 20d fourth extraction electrode 20e fifth extraction electrode 20f sixth Extraction electrode 24 Slider

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hideo Nawa 5-36-11 Shimbashi, Minato-ku, Tokyo Fuji Electric Chemical Co., Ltd. (72) Genichi Ishida 5-36-11 Shinbashi, Minato-ku, Tokyo Fuji Electric Chemical Co., Ltd.

Claims (1)

[Claims] 1. A thin film in which a thin film read / write element is arranged in proximity to one of the flying rails on one side surface of a slider having at least two flying rail portions on the side facing the magnetic recording medium. In the method of manufacturing a magnetic head, first, on a wafer, a read / write element consisting of a pattern having a pair of extraction electrodes arranged so as to extend in opposite directions on the coil end side is formed, and then read / write is performed. The read / write element is cut out from the wafer by cutting out an unnecessary portion of the pair of extraction electrode portions according to the mounting position on the slider where the element is mounted, and the read / write element is arranged at a predetermined position of the slider. A method of manufacturing a thin film magnetic head having the characteristics.