JPH0573841A - Magnetic head and production thereof - Google Patents

Abstract

PURPOSE:To provide the magnetic head of a laminated core type which obviates the generation of unequal wear on a surface for sliding contact with media and can be easily produced and the process for production thereof. CONSTITUTION:Laminated thin films 3, 3 formed on one surface of 1st crystallized glass substrates 17, 17 as nonmagnetic substrates and 2nd crystallized glass substrates 17', 17' are joined with the glassy material of regions 16, 16 including the glassy material formed on the surface side of the 2nd crystallized glass substrates 17', 17' in contact with the laminated thin films 3, 3, by which core half bodies 15a, 15b of the magnetic head are constituted.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head suitable for efficiently recording and reproducing high frequency signals.

[0002]

2. Description of the Related Art Conventionally, in a device for recording and reproducing a high frequency signal such as a VTR, a ferrite material having a small high frequency loss is used as a magnetic material for a video head. However, in recent years, development of a system for handling a wider band signal such as a high-definition VTR or a digital VTR has been actively made, and a recording medium has a high density for recording such a large amount of information. In the flow, the iron oxide type medium is shifting to a high coercive force medium such as an alloy powder medium or a metal vapor deposition medium.

[0003] In contrast a maximum magnetic flux density at most about 5000 Gauss ferrite heads, also in order to reproduce the short wavelength signal efficiently must be narrow gap, the coercivity H _C as described above There was saturated ferrite core gap tip above the high coercivity medium 1000O _e, it can not be sufficient recording. Therefore, magnetic heads using metal magnetic materials such as sendust and amorphous magnetic alloys, which have high maximum magnetic flux density, are being developed. Not suitable for.

Conventionally, in order to solve such a defect, for example, Japanese Patent Laid-Open No. 62-119709 (G11B 5 /
127) and the like have proposed a high frequency laminated magnetic head.

FIG. 11 is a perspective view showing the appearance of a high frequency laminated magnetic head, and FIG. 12 is a view showing the medium sliding surface of the magnetic head.

In the figure, 1a and 1b are non-magnetic substrates 2, 2 made of crystallized glass, non-magnetic ceramics, etc., respectively.
A first core half body and a second core half body sandwiching a main core half body composed of a laminated thin film 3 of a ferromagnetic metal film 4 such as sendust and an insulating thin film 5 such as SiO ₂ between the two. A winding groove 7 and a glass filling groove 8 are formed in the first core half 1a.

The first and second core halves 1a and 1b are joined together by the low melting point glass 9 filled in the upper ends of the glass filling groove 8 and the winding groove 7 in a state where the gap forming surfaces thereof are in contact with each other. A magnetic gap 10 formed by interposing SiO ₂ or the like is formed on the joint surface.

A method of manufacturing the above-mentioned laminated magnetic head is disclosed in, for example, Japanese Patent Laid-Open No. 58-70418 (G11B).
5/16).

In this manufacturing method, first, as shown in FIG. 13, a laminated thin film 3 is formed by alternately depositing a ferromagnetic metal film 4 and an insulating thin film 5 on a non-magnetic substrate 2.

Next, a plurality of non-magnetic substrates 2 shown in FIG. 13 are prepared, a plurality of the substrates 2 are stacked as shown in FIG. 14, and the non-magnetic substrate 2'is placed on the uppermost laminated thin film 3. Then
The laminated block 11 is formed by integrating with the sealing glass 14.

Next, the laminated block 11 is connected to the broken line d-
The laminated head piece 12 shown in FIG. 15 is formed by cutting at d ′ and ee ′.

Next, as shown in FIG. 16, after a pair of the laminated head pieces 12a and 12b are prepared, a winding groove 7 and a glass filling groove 8 are formed in one laminated head piece 12a as shown in FIG. After that, the pair of laminated head pieces 12a and 12b are joined by the low melting point glass 9 and 9 to form the laminated head block 13.

Finally, the laminated head block 1
After subjecting the end surface on the medium sliding contact surface side of 3 to R processing, the head block 13 is cut to complete the magnetic head shown in FIG.

However, in the above conventional magnetic head, the sealing glass 14 having a thickness of several μm for glass-bonding the laminated thin film 3 and the non-magnetic substrate 2 shown in FIG. 12 has a softening point of 400 to 600 ° C. Melting temperature during glass bonding is 500-
Although a glass having a temperature of 800 ° C. is mainly used, the sealing glass 14 of this kind is inferior in chemical and mechanical durability to the non-magnetic substrates 2 and 2, so that the magnetic medium slides at a high speed for a long time. Then, the sealing glass 14 is unevenly worn.

Further, in the glass bonding with the sealing glasses 14 and 14, air bubbles are easily generated due to dirt on the bonding surfaces, and the air bubbles form holes in the medium sliding contact surface, so that a good head tape running system is provided. There is also a problem that it cannot be obtained.

Although the above conventional manufacturing method is suitable for mass production, in order to form the laminated block 11 shown in FIG. 14, sealing glass is uniformly formed on the lower surface of the non-magnetic substrate 2 and laminated. It is necessary to bond the upper surface of the thin film 3 and the lower surface of the non-magnetic substrate 2 in a large area. Therefore, the laminated block 1
In No. 1, since the gas stays between the laminated thin film 3 and the non-magnetic substrate 2, the bonding strength is reduced, and as shown in FIG. Since the pitches TP ₂ and TP ₃ of the pair of laminated head pieces 12a, 1 in FIG.
When 2a is abutted against each other for gap junction, the track width varies and the manufacturing yield deteriorates.

The present inventor has proposed a magnetic head which eliminates the above-mentioned drawbacks in Japanese Patent Application No. 2-168806 (G11).
B 5/31).

This prior art magnetic head has a yield point of 5
A second non-magnetic substrate made of crystallized glass of 00 to 800 ° C. and a first non-magnetic substrate made of crystallized glass having a sag point near the sag point temperature of the non-magnetic substrate and higher than the sag point temperature.
The non-magnetic substrate has a structure in which the laminated thin films are sandwiched.
Since the second non-magnetic substrate is directly bonded on the laminated thin film by vitreous substance exuded from the crystallized glass constituting the substrate by heating at the yield point temperature, the second non-magnetic substrate is The soft bonding layer is not exposed between the first non-magnetic substrate and bubbles are not generated.

However, in the above magnetic head, since the mechanical characteristics of the first non-magnetic substrate and the second non-magnetic substrate are matched with each other, it is necessary to use substrates whose yield points are close to each other. It was difficult to control the heating temperature of. Further, since it is impossible to completely match the mechanical characteristics of the first and second non-magnetic substrates, the mechanical characteristics of the head are poor. Further, since the heating at the time of bonding needs to be near the sag point of the second non-magnetic substrate, the bonding strength was relatively weak. Further, since the heat resistance of the non-magnetic substrate is relatively low, the thermal process such as annealing is restricted.

[0020]

The present invention has been made in view of the above-mentioned drawbacks of the prior art. The glass exposed on the medium sliding contact surface has uneven wear and holes due to bubbles, which deteriorates the contact with the medium. The present invention provides a magnetic head that prevents the occurrence of the above and facilitates the manufacturing process.

[0021]

The magnetic head of the present invention comprises:
Forming a thin film of a magnetic material on the first non-magnetic substrate,
It has a pair of first and second core halves formed by bonding a second non-magnetic substrate on the thin film, and the end faces of the thin films of the first and second core halves form a magnetic gap. In a magnetic head formed by abutting via a magnetic material, a second non-magnetic substrate forms a region containing glass on the side in contact with the thin film, and the region is fusion-bonded to the thin film. Characterize.

According to the method of manufacturing a magnetic head of the present invention, a thin film made of a magnetic material is formed on a first non-magnetic substrate, and a second non-magnetic substrate is bonded onto the thin film. Second
A method for manufacturing a magnetic head, comprising a core half body, and abutting the end surfaces of the thin films of the first and second core half bodies with each other via a nonmagnetic material forming a magnetic gap, wherein A step of forming a laminated substrate by forming a thin film made of a magnetic material on the other surface by containing glass on the surface side,
A step of producing a laminated block by laminating a plurality of the laminated substrates and fixing them by fusion, a step of cutting the laminated block to produce a laminated head piece, and a pair of laminated head pieces abutting each other through an insulating film. Have steps.

In the method of manufacturing a magnetic head according to the present invention, a thin film made of a magnetic material is formed on the first non-magnetic substrate, and a second non-magnetic substrate is bonded onto the thin film. 1,
A method of manufacturing a magnetic head, comprising a second core half body, wherein the end faces of the thin films of the first and second core halves are butted against each other via a nonmagnetic material forming a magnetic gap. A step of containing glass on both surface sides of the substrate,
A step of forming a thin film made of a magnetic material on one surface of the second non-magnetic substrate, and a plurality of the first non-magnetic substrate and the second non-magnetic substrate are alternately laminated and fixed by fusion, and a laminated block. And a step of cutting the laminated block to produce a laminated head piece, and a step of abutting a pair of laminated head pieces through an insulating film.

[0024]

According to the above magnetic head, the second non-magnetic substrate is fused on the thin film by the vitreous substance contained in the non-magnetic substrate by heating. No soft bonding layer is formed between the substrate and bubbles, and no bubbles are generated. Further, since the temperature of the sag point of the vitreous substance having a temperature lower than the sag point of the non-magnetic substrate sets the joining temperature between the thin film and the non-magnetic substrate, the manufacturing process is facilitated.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS. FIG. 1 is a perspective view showing the external appearance of a magnetic head of this embodiment, and FIG. 2 is a view showing the medium sliding contact surface of the magnetic head. The same parts as in FIGS. Omit.

The first and second core halves 15a, 1 of this embodiment
5b is a second non-magnetic substrate 17 ', 17' made of crystallized glass or the like, in which laminated thin films 3, 3 are formed on the first non-magnetic substrate 17, 17 made of crystallized glass, respectively.
Is Na ₂ O-B ₂ O on the surface side that contacts the laminated thin films 3 and 3.
_3- SiO ₂ system (for example, yield point: 460 ° C.), ZnO-
B ₂ O ₃ —SiO ₂ system (for example, yield point: 510 ° C.) or Na ₂ O—Al ₂ O ₃ —SiO ₂ system (for example, yield point: 53)
0 ° C.) or the like containing a glassy material (amorphous) so that the concentration of the glassy material decreases from the surface toward the inside of the substrate.
The substrate 1 having the inclusion regions 16 and 16 having a thickness of 20 μm
7'and 17 'are configured to be bonded and fixed to the laminated thin films 3 and 3 by virtue of the glass contents of the containing regions 16 and 16.

Examples of the material of the first non-magnetic substrate 17 and the second non-magnetic substrate _{17 ', ZnO-Al 2 O} 3 -SiO 2
System (for example, yield point: 1000 ° C.), Li ₂ O—SiO ₂
System (for example, yield point: 850 ° C.) or Li ₂ O—ZnO
It is made of crystallized glass such as —SiO ₂ system (for example, yield point: 900 ° C.) and has sufficient heat resistance.

In the containing regions 16 and 16, the sag point temperature decreases as the concentration of the glassy substance having a low yielding point increases, so that the surface of the containing regions 16 and 16 is adjusted by adjusting the concentration of the vitreous substance. The temperature of the deformation point can be adjusted to an appropriate temperature, for example, 600 to 800 ° C., and therefore, the glass in the containing region 16 enables the bonding at 600 to 800 ° C.

The thickness of the containing regions 16 and 16 can be formed in the range of about 1 to 20 μm by appropriately changing the combination of the non-magnetic substrate 17 ′ and the vitreous material and the thermocompression bonding conditions. it can.

Next, a method of manufacturing the magnetic head of the above embodiment will be described.

First, as shown in FIG. 3, ZnO--Al ₂ O ₃
The bonded glass plate 6 made of, for example, Na ₂ O—B ₂ O ₃ —SiO ₂ system is placed on the upper surface of the non-magnetic substrate 17 made of —SiO ₂ system crystallized glass. Next, in this state, thermocompression bonding (for example, holding at ² kg / cm ² , 700 ° C. for 1 hour) is performed, so that the glass of the bonded glass plate 6 is bonded to the surface (interface) of the non-magnetic substrate 17 with which the bonded glass plate 6 is in contact. The quality causes a diffusion reaction, and as shown in FIG. 4, on the surface of the non-magnetic substrate 17,
A content region 16 having a thickness of 1 to 20 μm is formed in which the vitreous substance is contained so that the concentration of the vitreous substance continuously decreases from the surface toward the inside of the substrate. Next, as shown in FIG. Contained area 1 on 17
The unreacted bonded glass plate 6 is removed by polishing, grinding, etching or the like so that 6 remains.

Next, as shown in FIG. 6, a Fe--Al--Si alloy or Co is deposited on the surface of the non-magnetic substrate 17 opposite to the surface on which the containing region 16 is formed by a vacuum thin film forming technique such as a sputtering method. A ferromagnetic metal film 4 made of an amorphous alloy or the like as a main component and an insulating thin film 5 made of SiO ₂ or the like are alternately laminated to form a laminated thin film 3, and further, in order to improve the bonding strength described later, the laminated thin film is formed. The upper surface of 3 has SiO ₂ , Ti ₂ O, Z
A protective film 25 made of nO or the like and having a thickness of 0.1 to 0.5 μm is formed to produce the laminated substrate 18.

Next, as shown in FIG.
Are laminated, and the nonmagnetic substrate 17 having the containing region 16 on the uppermost surface thereof and the nonmagnetic substrate 17 having the laminated thin film 3 on the lowermost surface thereof are arranged.
Thermocompression bonding at ~ 800 ° C (preferably 2 kg / cm pressure)
² , the holding time is about 1 hour), and the laminated block 19 which is laminated and integrated is manufactured.

Next, the laminated block 19 is broken line d-
By cutting along d'and ee ', a pair of laminated head pieces 20a, 20b are formed as shown in FIG.

Next, as shown in FIG. 9, a winding groove 7 and a glass filling groove 8 are formed in one laminated head piece 20a,
After that, the pair of laminated head pieces 20a, 20b are joined by sealing glass 9 ', 9'having a low melting point whose melting temperature is lower than the sag point of the containing region 16 to form a laminated head block 21.

Finally, after rounding the end surface of the laminated head block 21 on the medium sliding contact side, the non-magnetic substrate 17 of the head block 21 is separated from the first non-magnetic substrate 17 and the second non-magnetic substrate 17. The magnetic head of the present embodiment shown in FIG. 1 in which the laminated thin film 3 is sandwiched between the first and second non-magnetic substrates 17 and 17 'is completed by cutting the magnetic head 17' into the magnetic substrate 17 '.

In the above-described magnetic head of this embodiment, the inclusion region 16 having a sag point at an arbitrary temperature lower than the sag point temperature of the nonmagnetic substrates 17 and 17 'can be formed.
From the temperature near the sag point on the surface of the non-magnetic substrate 17, 17 '
The non-magnetic substrate 17 'is directly fusion-bonded onto the laminated thin film 3 by virtue of the glass contained in the containing region 16 by heating at an appropriate temperature lower than the temperature of the sag point of.
Therefore, as shown in FIG. 2, a soft bonding layer is not formed between the laminated thin film 3 and the second non-magnetic substrate 17 '.
Further, since the bonding can be performed at a temperature lower than the yielding point temperature of the non-magnetic substrates 17 and 17 ', the degree of freedom in setting the joining temperature is high, and the joining can be performed even at a temperature higher than the yielding point of the containing region 16 to obtain a firm joining. .. Further, since the joining can be performed at a temperature considerably lower than the yield point of the non-magnetic substrates 17 and 17 ', the temperature control during the joining is easy and the production is easy.

Further, no bubbles are generated from the containing region 16, and no holes due to bubbles are generated on the medium sliding contact surface.

Further, since the content region 16 is formed of a crystallized glass material as a base, uneven wear does not occur, and the concentration of the vitreous material contained in the content region 16 continuously changes, so that the mechanical characteristics are improved. Good wear characteristics and the like.

Further, in the manufacturing method of the present embodiment, since the first and second non-magnetic substrates 17 and 17 'are heated at a temperature lower than the yield point temperature as described above, the outer shape does not change, and Since the outer shape of the containing region 16 does not change, the pitch of the laminated thin film 3 in the laminated block 19 shown in FIG. 18 can be set with high accuracy by the thickness of the nonmagnetic substrate 17.

The magnetic head and the manufacturing method thereof according to the present invention are
The present invention is not limited to the above embodiment, and can be changed as appropriate. For example, in the above head, the laminated thin film is used as the magnetic core, but the magnetic core may be formed of a single magnetic film. Further, in the above manufacturing method, the bonded glass plate is used to form the containing region, but a glass paste is applied by screen printing on a non-magnetic substrate made of crystallized glass, or a glass layer is formed by sputtering or the like. After that, heating may be performed to form the containing region.

Further, as shown in FIG.
The magnetic head of the present invention can be similarly completed by alternately laminating the non-magnetic substrate 17 having 16 formed on both sides thereof and the non-magnetic substrate 17 having the laminated thin film 3 formed thereon to form a laminated block.

Further, the containing region 16 has the same effect even if the vitreous concentration thereof does not change as described above.

[0044]

According to the present invention, uneven wear or the like does not occur on the medium sliding contact surface, it is possible to prevent the contact with the medium from deteriorating, and it is easy to control the temperature at the time of joining in the manufacturing process. A magnetic head and a manufacturing method thereof can be provided.

[Brief description of drawings]

FIG. 1 is a perspective view showing the external appearance of an embodiment of a magnetic head according to the present invention.

FIG. 2 is a diagram showing a medium sliding contact surface of the magnetic head.

FIG. 3 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 4 is a cross-sectional view of a main part showing a manufacturing process of the magnetic head.

FIG. 5 is a cross-sectional view of a main part showing a manufacturing process of the magnetic head.

FIG. 6 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 7 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 8 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 9 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 10 is a perspective view showing a manufacturing process of another embodiment of the magnetic head according to the present invention.

FIG. 11 is a perspective view showing an appearance of a magnetic head according to a conventional example.

FIG. 12 is a diagram showing a medium sliding contact surface of the magnetic head.

FIG. 13 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 14 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 15 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 16 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 17 is a perspective view showing a manufacturing process of the magnetic head.

FIG. 18 is a diagram showing a pitch of laminated thin films of the magnetic head.

[Explanation of symbols]

 3 laminated thin film 10 magnetic gap 15a 1st core half body 15b 2nd core half body 16 containing area 17 1st nonmagnetic substrate 17 '2nd nonmagnetic substrate 18 laminated substrate 19 laminated block 20 laminated head piece 21 laminated head block

[Procedure amendment]

[Submission date] October 1, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 3

[Correction method] Change

[Correction content]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be amended] Detailed explanation of the invention

[Correction method] Added

[Correction content]

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head suitable for efficiently recording and reproducing high frequency signals.

[0002]

2. Description of the Related Art Conventionally, in a device for recording and reproducing a high frequency signal such as a VTR, a ferrite material having a small high frequency loss is used as a magnetic material for a video head. However, in recent years, development of a system for handling a wider band signal such as a high-definition VTR or a digital VTR has been actively made, and a recording medium has a high density for recording such a large amount of information. In the flow, the iron oxide type medium is shifting to a high coercive force medium such as an alloy powder medium or a metal vapor deposition medium.

[0003] In contrast a maximum magnetic flux density at most about 5000 Gauss ferrite heads, also in order to reproduce the short wavelength signal efficiently must be narrow gap, the coercivity H _C as described above There was saturated ferrite core gap tip above the high coercivity medium 1000O _e, it can not be sufficient recording. Therefore, magnetic heads using metal magnetic materials such as sendust and amorphous magnetic alloys, which have high maximum magnetic flux density, are being developed. Not suitable for.

Conventionally, in order to solve such a defect, for example, Japanese Patent Laid-Open No. 62-119709 (G11B 5 /
127) and the like have proposed a high frequency laminated magnetic head.

FIG. 11 is a perspective view showing the appearance of a high frequency laminated magnetic head, and FIG. 12 is a view showing the medium sliding surface of the magnetic head.

In the figure, 1a and 1b are non-magnetic substrates 2, 2 made of crystallized glass, non-magnetic ceramics, etc., respectively.
A first core half body and a second core half body sandwiching a main core half body composed of a laminated thin film 3 of a ferromagnetic metal film 4 such as sendust and an insulating thin film 5 such as SiO ₂ between the two. A winding groove 7 and a glass filling groove 8 are formed in the first core half 1a.

The first and second core halves 1a and 1b are joined together by the low melting point glass 9 filled in the upper ends of the glass filling groove 8 and the winding groove 7 in a state where the gap forming surfaces thereof are in contact with each other. A magnetic gap 10 formed by interposing SiO ₂ or the like is formed on the joint surface.

A method of manufacturing the above-mentioned laminated magnetic head is disclosed in, for example, Japanese Patent Laid-Open No. 58-70418 (G11B).
5/16).

In this manufacturing method, first, as shown in FIG. 13, a laminated thin film 3 is formed by alternately depositing a ferromagnetic metal film 4 and an insulating thin film 5 on a non-magnetic substrate 2.

Next, a plurality of non-magnetic substrates 2 shown in FIG. 13 are prepared, a plurality of the substrates 2 are stacked as shown in FIG. 14, and the non-magnetic substrate 2'is placed on the uppermost laminated thin film 3. Then
The laminated block 11 is formed by integrating with the sealing glass 14.

Next, the laminated block 11 is connected to the broken line d-
The laminated head piece 12 shown in FIG. 15 is formed by cutting at d ′ and ee ′.

Next, as shown in FIG. 16, after a pair of the laminated head pieces 12a and 12b are prepared, a winding groove 7 and a glass filling groove 8 are formed in one laminated head piece 12a as shown in FIG. After that, the pair of laminated head pieces 12a and 12b are joined by the low melting point glass 9 and 9 to form the laminated head block 13.

Finally, the laminated head block 1
After subjecting the end surface on the medium sliding contact surface side of 3 to R processing, the head block 13 is cut to complete the magnetic head shown in FIG.

However, in the above conventional magnetic head, the sealing glass 14 having a thickness of several μm for glass-bonding the laminated thin film 3 and the non-magnetic substrate 2 shown in FIG. 12 has a softening point of 400 to 600 ° C. Melting temperature during glass bonding is 500-
Although a glass having a temperature of 800 ° C. is mainly used, the sealing glass 14 of this kind is inferior in chemical and mechanical durability to the non-magnetic substrates 2 and 2, so that the magnetic medium slides at a high speed for a long time. Then, the sealing glass 14 is unevenly worn.

Further, in the glass bonding with the sealing glasses 14 and 14, air bubbles are easily generated due to dirt on the bonding surfaces, and the air bubbles form holes in the medium sliding contact surface, so that a good head tape running system is provided. There is also a problem that it cannot be obtained.

Although the above conventional manufacturing method is suitable for mass production, in order to form the laminated block 11 shown in FIG. 14, sealing glass is uniformly formed on the lower surface of the non-magnetic substrate 2 and laminated. It is necessary to bond the upper surface of the thin film 3 and the lower surface of the non-magnetic substrate 2 in a large area. Therefore, the laminated block 1
In No. 1, since the gas stays between the laminated thin film 3 and the non-magnetic substrate 2, the bonding strength is reduced, and as shown in FIG. Since the pitches TP ₂ and TP ₃ of the pair of laminated head pieces 12a, 1 in FIG.
When 2a is abutted against each other for gap junction, the track width varies and the manufacturing yield deteriorates.

The present inventor has proposed a magnetic head which eliminates the above-mentioned drawbacks in Japanese Patent Application No. 2-168806 (G11).
B 5/31).

This prior art magnetic head has a yield point of 5
A second non-magnetic substrate made of crystallized glass of 00 to 800 ° C. and a first non-magnetic substrate made of crystallized glass having a sag point near the sag point temperature of the non-magnetic substrate and higher than the sag point temperature.
The non-magnetic substrate has a structure in which the laminated thin films are sandwiched.
Since the second non-magnetic substrate is directly bonded on the laminated thin film by vitreous substance exuded from the crystallized glass constituting the substrate by heating at the yield point temperature, the second non-magnetic substrate is The soft bonding layer is not exposed between the first non-magnetic substrate and bubbles are not generated.

However, in the above magnetic head, since the mechanical characteristics of the first non-magnetic substrate and the second non-magnetic substrate are matched with each other, it is necessary to use substrates whose yield points are close to each other. It was difficult to control the heating temperature of. Further, since it is impossible to completely match the mechanical characteristics of the first and second non-magnetic substrates, the mechanical characteristics of the head are poor. Further, since the heating at the time of bonding needs to be near the sag point of the second non-magnetic substrate, the bonding strength was relatively weak. Further, since the heat resistance of the non-magnetic substrate is relatively low, the thermal process such as annealing is restricted.

[0020]

The present invention has been made in view of the above-mentioned drawbacks of the prior art. The glass exposed on the medium sliding contact surface has uneven wear and holes due to bubbles, which deteriorates the contact with the medium. The present invention provides a magnetic head that prevents the occurrence of the above and facilitates the manufacturing process.

[0021]

The magnetic head of the present invention comprises:
Forming a thin film of a magnetic material on the first non-magnetic substrate,
It has a pair of first and second core halves formed by bonding a second non-magnetic substrate on the thin film, and the end faces of the thin films of the first and second core halves form a magnetic gap. In a magnetic head formed by abutting via a magnetic material, a second non-magnetic substrate forms a region containing glass on the side in contact with the thin film, and the region is fusion-bonded to the thin film. Characterize.

According to the method of manufacturing a magnetic head of the present invention, a thin film made of a magnetic material is formed on a first non-magnetic substrate, and a second non-magnetic substrate is bonded onto the thin film. Second
A method for manufacturing a magnetic head, comprising a core half body, and abutting the end surfaces of the thin films of the first and second core half bodies with each other via a nonmagnetic material forming a magnetic gap, wherein A step of forming a laminated substrate by forming a thin film made of a magnetic material on the other surface by containing glass on the surface side,
A step of producing a laminated block by laminating a plurality of the laminated substrates and fixing them by fusion, a step of cutting the laminated block to produce a laminated head piece, and a pair of laminated head pieces abutting each other through an insulating film. Have steps.

In the method of manufacturing a magnetic head according to the present invention, a thin film made of a magnetic material is formed on the first non-magnetic substrate, and a second non-magnetic substrate is bonded onto the thin film. 1,
A method of manufacturing a magnetic head, comprising a second core half body, wherein the end faces of the thin films of the first and second core halves are butted against each other via a nonmagnetic material forming a magnetic gap. A step of containing glass on both surface sides of the substrate,
A step of forming a thin film made of a magnetic material on one surface of the second non-magnetic substrate, and a plurality of the first non-magnetic substrate and the second non-magnetic substrate are alternately laminated and fixed by fusion, and a laminated block. And a step of cutting the laminated block to produce a laminated head piece, and a step of abutting a pair of laminated head pieces through an insulating film.

[0024]

According to the above magnetic head, the second non-magnetic substrate is fused on the thin film by the vitreous substance contained in the non-magnetic substrate by heating. No soft bonding layer is formed between the substrate and bubbles, and no bubbles are generated. Further, since the temperature of the sag point of the vitreous substance having a temperature lower than the sag point of the non-magnetic substrate sets the joining temperature between the thin film and the non-magnetic substrate, the manufacturing process is facilitated.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to FIGS. FIG. 1 is a perspective view showing the external appearance of a magnetic head of this embodiment, and FIG. 2 is a view showing the medium sliding contact surface of the magnetic head. The same parts as in FIGS. Omit.

The first and second core halves 15a, 1 of this embodiment
5b is a second non-magnetic substrate 17 ', 17' made of crystallized glass or the like, in which laminated thin films 3, 3 are formed on the first non-magnetic substrate 17, 17 made of crystallized glass, respectively.
Is Na ₂ O-B ₂ O on the surface side that contacts the laminated thin films 3 and 3.
_3- SiO ₂ system (for example, yield point: 460 ° C.), ZnO-
B ₂ O ₃ —SiO ₂ system (for example, yield point: 510 ° C.) or Na ₂ O—Al ₂ O ₃ —SiO ₂ system (for example, yield point: 53)
0 ° C.) or the like containing a glassy material (amorphous) so that the concentration of the glassy material decreases from the surface toward the inside of the substrate.
The substrate 1 having the inclusion regions 16 and 16 having a thickness of 20 μm
7'and 17 'are configured to be bonded and fixed to the laminated thin films 3 and 3 by virtue of the glass contents of the containing regions 16 and 16.

Examples of the material of the first non-magnetic substrate 17 and the second non-magnetic substrate _{17 ', ZnO-Al 2 O} 3 -SiO 2
System (for example, yield point: 1000 ° C.), Li ₂ O—SiO ₂
System (for example, yield point: 850 ° C.) or Li ₂ O—ZnO
It is made of crystallized glass such as —SiO ₂ system (for example, yield point: 900 ° C.) and has sufficient heat resistance.

In the containing regions 16 and 16, the sag point temperature decreases as the concentration of the glassy substance having a low yielding point increases, so that the surface of the containing regions 16 and 16 is adjusted by adjusting the concentration of the vitreous substance. The temperature of the deformation point can be adjusted to an appropriate temperature, for example, 600 to 800 ° C., and therefore, the glass in the containing region 16 enables the bonding at 600 to 800 ° C.

The thickness of the containing regions 16 and 16 can be formed in the range of about 1 to 20 μm by appropriately changing the combination of the non-magnetic substrate 17 ′ and the vitreous material and the thermocompression bonding conditions. it can.

Next, a method of manufacturing the magnetic head of the above embodiment will be described.

First, as shown in FIG. 3, ZnO--Al ₂ O ₃
The bonded glass plate 6 made of, for example, Na ₂ O—B ₂ O ₃ —SiO ₂ system is placed on the upper surface of the non-magnetic substrate 17 made of —SiO ₂ system crystallized glass. Next, in this state, thermocompression bonding (for example, holding at ² kg / cm ² , 700 ° C. for 1 hour) is performed, so that the glass of the bonded glass plate 6 is bonded to the surface (interface) of the non-magnetic substrate 17 with which the bonded glass plate 6 is in contact. The quality causes a diffusion reaction, and as shown in FIG. 4, on the surface of the non-magnetic substrate 17,
A content region 16 having a thickness of 1 to 20 μm is formed in which the vitreous substance is contained so that the concentration of the vitreous substance continuously decreases from the surface toward the inside of the substrate. Next, as shown in FIG. Contained area 1 on 17
The unreacted bonded glass plate 6 is removed by polishing, grinding, etching or the like so that 6 remains.

Next, as shown in FIG. 6, a Fe--Al--Si alloy or Co is deposited on the surface of the non-magnetic substrate 17 opposite to the surface on which the containing region 16 is formed by a vacuum thin film forming technique such as a sputtering method. A ferromagnetic metal film 4 made of an amorphous alloy or the like as a main component and an insulating thin film 5 made of SiO ₂ or the like are alternately laminated to form a laminated thin film 3, and further, in order to improve the bonding strength described later, the laminated thin film is formed. The upper surface of 3 has SiO ₂ , Ti ₂ O, Z
A protective film 25 made of nO or the like and having a thickness of 0.1 to 0.5 μm is formed to produce the laminated substrate 18.

Next, as shown in FIG.
Are laminated, and the nonmagnetic substrate 17 having the containing region 16 on the uppermost surface thereof and the nonmagnetic substrate 17 having the laminated thin film 3 on the lowermost surface thereof are arranged.
Thermocompression bonding at ~ 800 ° C (preferably 2 kg / cm pressure)
² , the holding time is about 1 hour), and the laminated block 19 which is laminated and integrated is manufactured.

Next, the laminated block 19 is broken line d-
By cutting along d'and ee ', a pair of laminated head pieces 20a, 20b are formed as shown in FIG.

Next, as shown in FIG. 9, a winding groove 7 and a glass filling groove 8 are formed in one laminated head piece 20a,
After that, the pair of laminated head pieces 20a, 20b are joined by sealing glass 9 ', 9'having a low melting point whose melting temperature is lower than the sag point of the containing region 16 to form a laminated head block 21.

Finally, after rounding the end surface of the laminated head block 21 on the medium sliding contact side, the non-magnetic substrate 17 of the head block 21 is separated from the first non-magnetic substrate 17 and the second non-magnetic substrate 17. The magnetic head of the present embodiment shown in FIG. 1 in which the laminated thin film 3 is sandwiched between the first and second non-magnetic substrates 17 and 17 'is completed by cutting the magnetic head 17' into the magnetic substrate 17 '.

In the above-described magnetic head of this embodiment, the inclusion region 16 having a sag point at an arbitrary temperature lower than the sag point temperature of the nonmagnetic substrates 17 and 17 'can be formed.
From the temperature near the sag point on the surface of the non-magnetic substrate 17, 17 '
The non-magnetic substrate 17 'is directly fusion-bonded onto the laminated thin film 3 by virtue of the vitreous substance contained in the containing region 16 by heating at an appropriate temperature lower than the temperature of the sag point of.
Therefore, as shown in FIG. 2, a soft bonding layer is not formed between the laminated thin film 3 and the second non-magnetic substrate 17 '.
Further, since the joining can be performed at a temperature lower than the yielding point temperature of the non-magnetic substrates 17 and 17 ′, the degree of freedom in setting the joining temperature is high, and the joining can be performed even at a temperature higher than the yielding point of the containing region 16 and a firm joining can be obtained. .. In addition, since the bonding can be performed at a temperature considerably lower than the yield point of the non-magnetic substrates 17 and 17 ', the temperature control during bonding is easy and the manufacturing is easy.

Further, no bubbles are generated from the containing region 16, and no holes due to bubbles are generated on the medium sliding contact surface.

Further, since the content region 16 is formed of a crystallized glass material as a base, uneven wear does not occur, and the concentration of the vitreous material contained in the content region 16 continuously changes, so that the mechanical characteristics are improved. Good wear characteristics and the like.

Further, in the manufacturing method of the present embodiment, since the first and second non-magnetic substrates 17 and 17 'are heated at a temperature lower than the yield point temperature as described above, the outer shape does not change, and Since the outer shape of the containing region 16 does not change, the pitch of the laminated thin film 3 in the laminated block 19 shown in FIG. 18 can be set with high accuracy by the thickness of the nonmagnetic substrate 17.

The magnetic head and the manufacturing method thereof according to the present invention are
The present invention is not limited to the above embodiment, and can be changed as appropriate. For example, in the above head, the laminated thin film is used as the magnetic core, but the magnetic core may be formed of a single magnetic film. Further, in the above manufacturing method, the bonded glass plate is used to form the containing region, but a glass paste is applied by screen printing on a non-magnetic substrate made of crystallized glass, or a glass layer is formed by sputtering or the like. After that, heating may be performed to form the containing region.

Further, as shown in FIG.
The magnetic head of the present invention can be similarly completed by alternately laminating the non-magnetic substrate 17 having 16 formed on both sides thereof and the non-magnetic substrate 17 having the laminated thin film 3 formed thereon to form a laminated block.

Further, the containing region 16 has the same effect even if the vitreous concentration thereof does not change as described above.

[0044]

According to the present invention, uneven wear or the like does not occur on the medium sliding contact surface, it is possible to prevent the contact with the medium from deteriorating, and it is easy to control the temperature at the time of joining in the manufacturing process. A magnetic head and a manufacturing method thereof can be provided.

Claims (3)

[Claims] 1. A pair of first and second core halves formed by forming a thin film made of a magnetic material on a first non-magnetic substrate and joining a second non-magnetic substrate on the thin film. A magnetic head formed by abutting the end faces of the thin films of the first and second core halves with a non-magnetic material forming a magnetic gap,
The second non-magnetic substrate is formed with a region containing glass on the side in contact with the thin film, and the region is fusion-bonded to the thin film. 2. A pair of first and second core halves formed by forming a thin film made of a magnetic material on a first non-magnetic substrate and joining a second non-magnetic substrate on the thin film. In a method of manufacturing a magnetic head, wherein the end surfaces of the thin films of the first and second core halves are butted against each other via a non-magnetic material that forms a magnetic gap, a glass material is provided on one surface side of the non-magnetic substrate. A step of forming a laminated substrate by including a thin film made of a magnetic material on the other surface, a step of laminating a plurality of the laminated substrates and fixing them by fusion to form a laminated block, and a cutting process of the laminated block A method of manufacturing a magnetic head, comprising: a step of producing a laminated head piece by performing a step of making a pair of laminated head pieces through an insulating film; 3. A pair of first and second core halves formed by forming a thin film made of a magnetic material on a first non-magnetic substrate and joining a second non-magnetic substrate on the thin film. In a method of manufacturing a magnetic head in which the end surfaces of the thin films of the first and second core halves are butted against each other via a non-magnetic material forming a magnetic gap, both surface sides of the first non-magnetic substrate are provided. A step of containing vitreous material; a step of forming a thin film made of a magnetic material on one surface of the second non-magnetic substrate to prepare;
A plurality of non-magnetic substrates and a second non-magnetic substrate are alternately laminated and fusion-fixed to produce a laminated block; a step of cutting the laminated block to produce a laminated head piece; A method of manufacturing a magnetic head, comprising a step of bringing head pieces into contact with each other via an insulating film.