JPH056925A - Tab tape for manufacture of semiconductor device - Google Patents

Tab tape for manufacture of semiconductor device

Info

Publication number
JPH056925A
JPH056925A JP22193591A JP22193591A JPH056925A JP H056925 A JPH056925 A JP H056925A JP 22193591 A JP22193591 A JP 22193591A JP 22193591 A JP22193591 A JP 22193591A JP H056925 A JPH056925 A JP H056925A
Authority
JP
Japan
Prior art keywords
tape
semiconductor chip
semiconductor device
opening
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22193591A
Other languages
Japanese (ja)
Inventor
Yukito Ikeda
幸仁 池田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP22193591A priority Critical patent/JPH056925A/en
Publication of JPH056925A publication Critical patent/JPH056925A/en
Pending legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To perform a coating operation by using a low-viscosity resin by a method wherein, when a semiconductor chip is mounted on a TAB tape and the surface of the chip is coated with a resin for protective use, a gap between a device hole and the peripheral edge of the semiconductor chip is narrowed. CONSTITUTION:The title tape is provided with the following structure: overhang faces 4 which are formed of a base tape material (or the same copper foil material as that of a lead pattern) are formed in corner parts inside a device hole as a square opening part formed in a base tape 6; and a gap between a semiconductor chip 3 and the device hole 1 is narrowed in order to prevent a resin from being dripped when an epoxy resin 8 used to protect the surface of the semiconductor chip 3 bonded to inner leads 2 is coated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は半導体装置製造用TAB
テープに関し、特にTABテープに形成されるデバイス
ホールの形状に関する。
BACKGROUND OF THE INVENTION The present invention relates to a TAB for manufacturing semiconductor devices.
The present invention relates to a tape, and particularly to the shape of a device hole formed in a TAB tape.

【0002】[0002]

【従来の技術】従来のTAB(Tape Automa
ted Bonding)に用いるテープは、図3の平
面図に示すようにベーステープ6となる樹脂テープに、
搭載する半導体チップ3よりも少し大きい長方形または
正方形の開口部を打ち抜いてデバイスホール1を形成
し、この樹脂テープに銅箔を貼り合わせ、この銅箔をエ
ッチングしてリードパターンを形成して製造する(特開
昭58−15252号公報参照)。上記リードパターン
のうちインナーリード2はデバイスホール1側に指状に
突出しており、これらインナーリード2の先端がデバイ
スホール1内に配置された半導体チップ3上のバンプと
ボンディングにより接続される。
2. Description of the Related Art Conventional TAB (Tape Automa)
The tape used for the ted bonding) is a resin tape to be the base tape 6 as shown in the plan view of FIG.
A rectangular or square opening slightly larger than the semiconductor chip 3 to be mounted is punched out to form a device hole 1, a copper foil is attached to this resin tape, and the copper foil is etched to form a lead pattern for manufacture. (See JP-A-58-15252). The inner leads 2 of the lead pattern project in a finger shape toward the device hole 1, and the tips of the inner leads 2 are connected to bumps on the semiconductor chip 3 arranged in the device hole 1 by bonding.

【0003】一般に、この種のTABテープの上記デバ
イスホール1は半導体チップ3をその中に配置した際に
0.5から1.5mmの間隙を備える大きさを有する。
このTABテープを用いて半導体装置を製造する場合
は、通常、信頼性を確保するために、上記ボンディング
工程ののち半導体チップ3およびインナーリード2のデ
バイスホール1への突出部にエポキシ系等の樹脂の膜を
形成しこれらのチップ3およびリード2の表面を保護し
ている(NIKKEI ELECTRONICS199
0.8.6,No.506,P113参照)。そして、
上記保護膜形成ののちTABテープをリールに巻き取
り、このリールをアウターリードボンディング装置にセ
ットし、アウターリード7の適当な点でベーステープ6
から切り離し、それらアウターリード7をパッケージ等
にボンディングすることによって半導体装置を組み立て
る。
Generally, the device hole 1 of this type of TAB tape has a size with a gap of 0.5 to 1.5 mm when the semiconductor chip 3 is placed therein.
When a semiconductor device is manufactured using this TAB tape, usually, in order to ensure reliability, a resin such as an epoxy resin is applied to the protruding portion of the semiconductor chip 3 and the inner lead 2 to the device hole 1 after the bonding step. To protect the surfaces of these chips 3 and leads 2 (NIKKEI ELECTRONICS 199).
0.8.6, No. 506, P113). And
After forming the protective film, the TAB tape is wound on a reel, and the reel is set in an outer lead bonding device.
Then, the outer leads 7 are bonded to a package or the like to assemble the semiconductor device.

【0004】[0004]

【発明が解決しようとする課題】この様なTABテープ
においては、上記樹脂コーティングを形成する際、デバ
イスホールと半導体チップとの間隙のうち特にコーナー
部における間隙が大きいので、樹脂がこのコーナー部の
間隙から下方に垂れ落ち、上記樹脂膜を一様に形成する
ことが困難である。このことは、粘度の低い樹脂をコー
ティング材に用いた時、特に大きな問題となる。
In such a TAB tape, when the resin coating is formed, the gap between the device hole and the semiconductor chip is particularly large at the corner portion. It is difficult to uniformly form the resin film by drooping downward from the gap. This is a particularly serious problem when a resin having a low viscosity is used as the coating material.

【0005】本発明の目的は、コーティング材の樹脂の
粘度が低い場合でも上記樹脂膜の均一性を確保できるT
ABテープを提供することである。
An object of the present invention is to ensure the uniformity of the above resin film even when the viscosity of the resin of the coating material is low.
To provide an AB tape.

【0006】[0006]

【課題を解決するための手段】本発明のTABテープ
は、搭載すべき半導体チップよりも若干大きいデバイス
ホールのコーナー部において、ベーステープ材またはそ
の上に貼り合わせた銅箔材により張り出し部を設けそれ
らコーナー部がデバイスホールの内側に突出する張り出
し面を形成するようにして構成される。本発明によれ
ば、デバイスホールの各コーナー部の上記張り出し面
が、搭載された半導体チップの角部と重なり合って上記
間隙を狭めるので、樹脂コーティング工程においてコー
ティング材の垂れ落ちの問題が解決できる。
According to the TAB tape of the present invention, a projecting portion is provided by a base tape material or a copper foil material laminated on the base tape material at a corner portion of a device hole which is slightly larger than a semiconductor chip to be mounted. The corners are formed so as to form a projecting surface projecting inside the device hole. According to the present invention, since the projecting surface of each corner of the device hole overlaps with the corner of the mounted semiconductor chip to narrow the gap, the problem of dripping of the coating material in the resin coating step can be solved.

【0007】[0007]

【実施例】図1(a),(b)を参照すると、本実施例
のTABテープは、デバイスホール1の4個所のコーナ
ー部の各々に、ポリイミド樹脂からなるベーステープ6
による張り出し面4を備える。これらの張り出し面4
は、ベーステープ6を打ち抜いてデバイスホール1を形
成する際に同時に設ける。その後、ベーステープ6に銅
箔を貼り合わせ、この銅箔をエッチングして、デバイス
ホール1の内側に向けてそれぞれ突出する複数の指状の
インナーリード2を形成する。次に、図(b)のように
半導体チップ3(図1(a)に鎖線で示す)に形成した
金バンプ(図示せず)とインナーリード2の先端とをボ
ンディングする。次に、インナーリード2のデバイスホ
ール1への突出部分およびチップ1の表面をエポキシ樹
脂8でコーティングする。次に、アウターリード7を外
周アパーチャ9の部分で切断し、インナーリードボンデ
ィングずみの半導体チップ3をテープ6から切り離す。
さらにこのアウターリードを基板にボンディングしてパ
ッケージを構成する。
EXAMPLE Referring to FIGS. 1A and 1B, a TAB tape of this example has a base tape 6 made of a polyimide resin at each of four corners of a device hole 1.
Is provided with the overhanging surface 4. These overhanging surfaces 4
Are provided at the same time when the base tape 6 is punched out to form the device hole 1. After that, a copper foil is attached to the base tape 6, and the copper foil is etched to form a plurality of finger-shaped inner leads 2 that respectively project toward the inside of the device hole 1. Next, as shown in FIG. 1B, gold bumps (not shown) formed on the semiconductor chip 3 (shown by a chain line in FIG. 1A) and the tips of the inner leads 2 are bonded. Next, the protruding portion of the inner lead 2 into the device hole 1 and the surface of the chip 1 are coated with an epoxy resin 8. Next, the outer lead 7 is cut at the outer peripheral aperture 9 portion, and the semiconductor chip 3 which has been subjected to inner lead bonding is separated from the tape 6.
Further, the outer leads are bonded to a substrate to form a package.

【0008】図2に示す本発明の第2の実施例において
は、デバイスホール1の4個所のコーナー部の各々に、
ベーステープ6上の銅箔材による張り出し面5が設けら
れている。この張り出し面5はインナーリード2のエッ
チングによる形成の際に同時に形成する。この点を除い
て他の工程は上記第1の実施例と共通であるので、工程
についてはこれ以上述べない。本実施例によれば、張り
出し面5が半導体チップ3の角部と重なり合う位置まで
張り出すのでコーナー部の間隙を塞ぐ形となり、上記コ
ーティング材のコーナー部における垂れ落ちを防ぐ。ま
た、本実施例によれば、張り出し面5がエッチングで形
成されるので、張り出し面の寸法の選択が容易となり、
同一寸法のデバイスホールにいろいろの寸法の半導体チ
ップを搭載する際に柔軟に対応できる利点を有する。
In the second embodiment of the present invention shown in FIG. 2, at each of the four corners of the device hole 1,
An overhang surface 5 made of a copper foil material on the base tape 6 is provided. The projecting surface 5 is formed at the same time when the inner lead 2 is formed by etching. Except for this point, the other steps are the same as those in the first embodiment, so the steps will not be described further. According to the present embodiment, since the projecting surface 5 projects to the position where it overlaps with the corner of the semiconductor chip 3, the gap between the corners is closed and the coating material is prevented from dripping at the corner. Further, according to the present embodiment, since the projecting surface 5 is formed by etching, it becomes easy to select the size of the projecting surface,
This has the advantage of being able to flexibly deal with mounting semiconductor chips of various sizes in the device holes of the same size.

【0009】[0009]

【発明の効果】本発明によるテープ自動ボンディング
(TAB)用テープは、方形の開口部の各々のコーナー
部を従来のように単純な直角にする代りにそれらコーナ
ー部の各々から開口部の内側に向って延びる張り出し部
を形成している。この張り出し部はベーステープに上記
開口部をつくる際に同時につくることもできるし、この
ベーステープに密着配置された金属箔の選択エッチング
のときに同時にエッチング工程で形成することもでき
る。本発明によれば、前記開口部のコーナー部とその開
口部に配置した半導体チップの角部との間の間隙を上記
張り出し部により狭めることができるので、半導体チッ
プとこの半導体チップにボンディングされるインナーリ
ードとを樹脂コートする際に、前記コーナー部からその
樹脂が垂れ落ちるのを防止できる。
According to the tape automatic bonding (TAB) tape of the present invention, instead of making the corners of each rectangular opening into a simple right angle as in the prior art, each of the corners goes inside the opening. It forms an overhanging portion that extends toward. The overhanging portion can be formed at the same time when the opening is formed in the base tape, or can be formed at the same time as the selective etching of the metal foil closely attached to the base tape by the etching process. According to the present invention, since the gap between the corner of the opening and the corner of the semiconductor chip arranged in the opening can be narrowed by the protrusion, the semiconductor chip is bonded to the semiconductor chip. It is possible to prevent the resin from dripping from the corner portions when the inner leads are coated with the resin.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例を示す図で、同図(a)
は部分平面図、同図(b)はそのA−A断面図である。
FIG. 1 is a diagram showing a first embodiment of the present invention, in which FIG.
Is a partial plan view, and FIG. 6B is a sectional view taken along line AA.

【図2】本発明の第2の実施例の部分平面図である。FIG. 2 is a partial plan view of the second embodiment of the present invention.

【図3】従来のTABテープの部分平面図である。FIG. 3 is a partial plan view of a conventional TAB tape.

【符号の説明】[Explanation of symbols]

1 デバイスホール 2 インナーリード 3 半導体チップ 4 張り出し面 5 張り出し面 6 ベーステープ 7 アウターリード 8 エポキシ樹脂 9 外周アパーチャ 1 device hole 2 inner lead 3 semiconductor chips 4 Overhanging surface 5 Overhanging surface 6 base tape 7 Outer leads 8 Epoxy resin 9 Peripheral aperture

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 薄い帯状の絶縁材料から成り搭載すべき
方形の半導体チップよりも大きい寸法の方形の開口部を
一定間隔で備えるベーステープと、このベーステープの
表面に密着して設けられ前記開口部の各々の内側に向っ
て突出した複数のインナーリードを有する金属箔とを備
え、前記方形の半導体チップをその縁部が前記開口部と
の間で一様の間隔を保った状態で前記インナーリードの
先端近傍に電気的に接続するとともに機械的に固定する
半導体装置製造用TABテープにおいて、前記開口部の
各々の4つの角部に前記ベーステープおよび前記金属箔
の少なくともいずれか一方の一部からなり前記半導体チ
ップの角部との間の前記間隙を狭めるように前記開口部
の内側へ延びた張り出し部分をもつことを特徴とする半
導体装置製造用TABテープ。
1. A base tape having rectangular openings, which are made of a thin band-shaped insulating material and have a size larger than that of a rectangular semiconductor chip to be mounted, at regular intervals; and the opening provided in close contact with the surface of the base tape. A metal foil having a plurality of inner leads projecting toward the inner side of each of the inner parts of the rectangular semiconductor chip, and the inner edge of the rectangular semiconductor chip being kept at a uniform distance from the opening. In a TAB tape for manufacturing a semiconductor device, which is electrically connected to the vicinity of the tip of a lead and mechanically fixed, a part of at least one of the base tape and the metal foil is provided at each of four corners of the opening. And a TA for manufacturing a semiconductor device, which has an overhanging portion extending inside the opening so as to narrow the gap between the corner of the semiconductor chip and B tape.
【請求項2】 前記張り出し部が前記開口部と同時に前
記ベーステープ材に形成された請求項1記載の半導体装
置製造用TABテープ。
2. The TAB tape for manufacturing a semiconductor device according to claim 1, wherein the projecting portion is formed on the base tape material at the same time as the opening portion.
【請求項3】 前記張り出し部が前記銅箔材で形成され
た請求項1記載の半導体装置製造用TABテープ。
3. The TAB tape for manufacturing a semiconductor device according to claim 1, wherein the projecting portion is formed of the copper foil material.
JP22193591A 1990-09-07 1991-09-03 Tab tape for manufacture of semiconductor device Pending JPH056925A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22193591A JPH056925A (en) 1990-09-07 1991-09-03 Tab tape for manufacture of semiconductor device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9440390 1990-09-07
JP2-94403 1990-09-07
JP22193591A JPH056925A (en) 1990-09-07 1991-09-03 Tab tape for manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPH056925A true JPH056925A (en) 1993-01-14

Family

ID=26435676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22193591A Pending JPH056925A (en) 1990-09-07 1991-09-03 Tab tape for manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPH056925A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945868A (en) * 1989-06-21 1990-08-07 General Motors Corporation Two cycle exhaust recycling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945868A (en) * 1989-06-21 1990-08-07 General Motors Corporation Two cycle exhaust recycling

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