JPH0568540B2 - - Google Patents
Info
- Publication number
- JPH0568540B2 JPH0568540B2 JP24366585A JP24366585A JPH0568540B2 JP H0568540 B2 JPH0568540 B2 JP H0568540B2 JP 24366585 A JP24366585 A JP 24366585A JP 24366585 A JP24366585 A JP 24366585A JP H0568540 B2 JPH0568540 B2 JP H0568540B2
- Authority
- JP
- Japan
- Prior art keywords
- shroud
- aluminum
- cylinder
- ion implantation
- cooling fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24366585A JPS62102519A (ja) | 1985-10-29 | 1985-10-29 | 半導体製造装置用シユラウドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24366585A JPS62102519A (ja) | 1985-10-29 | 1985-10-29 | 半導体製造装置用シユラウドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62102519A JPS62102519A (ja) | 1987-05-13 |
| JPH0568540B2 true JPH0568540B2 (show.php) | 1993-09-29 |
Family
ID=17107178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24366585A Granted JPS62102519A (ja) | 1985-10-29 | 1985-10-29 | 半導体製造装置用シユラウドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62102519A (show.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01261816A (ja) * | 1988-04-12 | 1989-10-18 | Showa Alum Corp | 真空チャンバにおける真空用冷却装置 |
| US20080169183A1 (en) * | 2007-01-16 | 2008-07-17 | Varian Semiconductor Equipment Associates, Inc. | Plasma Source with Liner for Reducing Metal Contamination |
-
1985
- 1985-10-29 JP JP24366585A patent/JPS62102519A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62102519A (ja) | 1987-05-13 |
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