JPH0566352B2 - - Google Patents

Info

Publication number
JPH0566352B2
JPH0566352B2 JP60146791A JP14679185A JPH0566352B2 JP H0566352 B2 JPH0566352 B2 JP H0566352B2 JP 60146791 A JP60146791 A JP 60146791A JP 14679185 A JP14679185 A JP 14679185A JP H0566352 B2 JPH0566352 B2 JP H0566352B2
Authority
JP
Japan
Prior art keywords
solution
growth
temperature
distribution
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60146791A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627697A (ja
Inventor
Tsunehiro Unno
Mineo Wajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP14679185A priority Critical patent/JPS627697A/ja
Publication of JPS627697A publication Critical patent/JPS627697A/ja
Publication of JPH0566352B2 publication Critical patent/JPH0566352B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14679185A 1985-07-05 1985-07-05 液相エピタキシヤル成長法 Granted JPS627697A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14679185A JPS627697A (ja) 1985-07-05 1985-07-05 液相エピタキシヤル成長法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14679185A JPS627697A (ja) 1985-07-05 1985-07-05 液相エピタキシヤル成長法

Publications (2)

Publication Number Publication Date
JPS627697A JPS627697A (ja) 1987-01-14
JPH0566352B2 true JPH0566352B2 (enrdf_load_html_response) 1993-09-21

Family

ID=15415616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14679185A Granted JPS627697A (ja) 1985-07-05 1985-07-05 液相エピタキシヤル成長法

Country Status (1)

Country Link
JP (1) JPS627697A (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589794B2 (ja) * 1979-05-16 1983-02-22 富士通株式会社 半導体の液相多層薄膜成長法および成長装置

Also Published As

Publication number Publication date
JPS627697A (ja) 1987-01-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees